Power Device Analyzer/Curve Tracer

New Power Device Analyzer / Curve Tracer Solves
C S
High Power Device Testing Challenges

New Power Device Analyzer / Curve Tracer
Agilent Technologies 2009 ©
Page 1 October 22, 2009

Agenda for Today

• Challenges Facing Power Device Measurement
• Overview of the B1505A and EasyEXPERT Software
• Curve Tracer Mode: Features & Benefits
• Packaged Part Test & Wafer Probing Solutions
• Solar Cell Test with the B1505A
• Summary & Conclusions


Challenges Facing Power Device
g g
Measurement


Key Power Device Measurement Challenges – 1

Insufficient Measurement Capability
No single measurement solution available that can
perform both high current and high voltage IV and CV
high-current high-voltage
measurements.

Novel Device (SiC, GaN, etc.) Characterization
(SiC GaN etc )
The high breakdown voltages and fast switching speeds
of these devices require wide measurement dynamic
ranges for proper characterization.
characterization

Curve Tracer Obsolescence and Support
Support and repair of obsolete curve tracers is
becoming increasingly difficult. Also, getting curve
tracer data into PC compatible formats is inconvenient.


Key Power Device Measurement Challenges – 2

Safe & Efficient Packaged Device Testing
The lack of a standardized test fixture for power devices
has forced many users to jury rig their own solution
solution,
which often compromises both safety and performance.

Power Device Development Costs
The ability to probe power devices on-wafer saves both
time and money by eliminating the need to package the
devices beforehand However until now on-wafer test
beforehand. However, on wafer
of power devices has not been easy to do.


The New Agilent B1505A Meets
these Measurement Challenges
• Voltage force/measure capability up to 3000 V
• Accurate sub picoamp level current measurement at high
sub-picoamp
voltage bias
• Current force/measure capability up to 40 A
• 50 μs current pulse width at high current
• Switch between high current and high voltage measurement
without needing to recable
• Capacitance measurement at up to 3000 V of DC bias
p p
• True curve tracer functionality with knob sweep capability
• MS Windows based EasyEXPERT software facilitates data
management and simplifies data analysis
• Standard test fixture with interlock for safe packaged power
device testing
• Supported and secure on-wafer high power testing


Overview of the B1505A &
EasyEXPERT Software


The EasyEXPERT Parametric Test Environment
True
Tr e knob s eep c r e
sweep curve
tracer functionality IV & CV all in one box Easy data analysis &
parameter extraction

High power wafer
prober control
b t l

Offline test
development and
p
data analysis


Agilent EasyEXPERT 4.0 Software
Over 50 high power Innovative task-based Measure, append and
Microsoft Windows-based
Windows based approach to parametric test repeat functions
EasyEXPERT software application tests

Built-in semi-auto
wafer prober drivers

Supported Functions:
1. Sweep
2. Multi-channel sweep Standby mode for
3. List sweep circuit debug
4. Time sampling
5.
5 1 kHz to 5 MHz CV
6. Quasi-static CV
7. Direct control “My Favorite Setup”
feature allows users to
customize application
“Tracer Mode supports
Tracer Mode” tests
knob-sweep curve tracer
functionality
Intuitive GUI-based
application test
setup windows

Can automatically export
Data and setup information can be measurement data to
“Quick Test” utility
automatically saved or selectively external drives
supports test sequencing
without programming saved after each measurement


EasyEXPERT and Desktop EasyEXPERT Software
form a Complete Measurement Environment
Desktop EasyEXPERT Desktop Desktop EasyEXPERT
Online Mode EasyEXPERT
y Offline Mode
is free!

Measurement data & test setups
M td t t t t

• Data analysis
• Full functionality & control • Test development
from a separate PC

EasyEXPERT
on the B1505A


The B1505A Supports a Variety of Source/Monitor
Units (SMUs) for High Power Test

High Voltage SMU
(HVSMU)

High current SMU
(HCSMU)

Multi-frequency
capacitance measurement
unit (MFCMU)

High power SMU
(HPSMU)

4.2 Amp ground
unit (GNDU)
Ten l t
T slot modular mainframe
d l i f


The High-Current SMU (HCSMU) Can Output a 20 A
Current Pulse with a 50 Microsecond Width

The HCSMU’s pulsing
p g
capability minimizes
20 A device heating effects
to insure proper device
characterization.
characterization

50 μs

200 nV voltage measurement resolution!


You Can Combine Two HCSMUs in Parallel to
Supply up to 40 A
A 40 A current pulse applied to
a 100 mΩ resistor using two
HCSMU modules in parallel

V drop at 100 mΩ Resistor
= (20 + 20) x 0.1
= 4.0 (V)

Power at 100 mΩ Resistor
= 40 x 4.0
= 160 (W)


Bipolar Transistor Emitter Resistance Measurement
Using the HCSMU

The B1505A can also
automatically draw a
regression line and calculate
the emitter resistance.
resistance

The HCSMU can function as a
precision voltmeter to measure
the emitter resistance of a
bipolar transistor.


The High Voltage SMU (HVSMU) Can Sweep from
Microvolts to 3000 Volts in Milliseconds
A breakdown voltage of more than
1800 V accurately characterized
y
on a Schottky diode fabricated on
a diamond substrate
3000 V

~7 8 ms
7.8
10 fA current measurement
resolution!


High DC Bias Capacitance Measurements

Output capacitance (Coss)
measured at 1500 V


Curve Tracer Mode: Features & Benefits


Using the B1505A Curve Tracer Function
1.
1 Click or press
the repeat button.

2. Select the
parameter to be
controlled with the
knob sweep.

3. Move the knob
and observe the
curve as it changes.

Note: The default colors have been changed for easier viewing on these slides.


The Curve Tracer Mode in Action

Functionality exactly the
same as a traditional
analog curve tracer!

Pre-Defined Curve Tracer Setups are Included

Clicking on the
“utility” icon in the
setup window opens
up a menu of pre-
defined curve tracer
setups for the most
common teststests.


Curve Tracer Issue #1 –
Difficult to Manage Trace Data

It is VERY difficult to export curve tracer data into PC
compatible formats.
Many curve tracers have no or limited trace overlay
capabilities.


Trace Management Feature - 1

Clicking on the
camera icon
saves trace data
into memory.


Trace Management Feature - 2

Clicking on the
adjacent icon
j
opens up the
trace manager
window.
window


Using the Trace Management Feature

Pulsed Non-Pulsed
Measurement Measurement

Using the trace
management feature,
it is easy to show the
effects of device self-
heating by comparing
the results of pulsed
and non-pulsed
measurements.
measurements


Trace Manager Feature Detail

Show/Hide Invert Selected Delete Selected Open (Import) Save Selected
Selected Trace Trace Trace a Trace Trace Data

Simply Click on a
Trace to Select It


You Can Easily Save Data into XML (Spreadsheet)
or CSV Formats


Difficult to Define “No Go Regions
No Go”

Many times it is useful to set up “stop” limits to prevent
your power device from being damaged.
Conventional curve tracers do not have this type of
capability.


Forbidden Region (Stoplight) Feature - 1

Clicking on the stoplight icon
allows you to set up a “forbidden”
forbidden
region using the mouse. Note
that this region can be both
voltage and current sensitive.


Forbidden Region (Stoplight) Feature - 2

As soon as the curve enters
the forbidden region, the
measurement stops.


Easy to Destroy Devices & Lose Data

Especially with power devices, it is easy to inadvertently
apply too much voltage/current and destroy the DUT.
When using conventional curve tracers, once the device
is destroyed there is no means to recover the data.


Auto Record Feature Detail

Toggle Auto Record Open a Trace Save a Trace
Feature On/Off Record Record

Replay Controls

Record Settings


Auto Record Feature Example - 1

Notice that the
instrument is “off”
(i.e. not making an
active measurement)



The data “snapshot”
can be saved anywhere
as you move th slider
the lid
bar along.


The B1505A is More Than Just a Digital Curve Tracer

+ =

The B1505A improves upon curve tracer functionality by:
• Supporting the easy export of numerical and g p
pp g y p graphical data into PC-
based formats
• Making it easy to overlay and compare trace data
• Providing a graphical means to limit current/voltage and prevent device
damage
• Automatically recording trace data so that information is not lost even if
the DUT is damaged or destroyed


Packaged Part Test and
g
Wafer Probing Solutions


The N1259A Test Fixture Supports Convenient and
Safe Testing of Packaged Devices
Universal Socket
Module
3-Pin In-line
Socket Module

Blank Teflon
Board


You Can Create Your Own Customer Socket
Modules with the Universal Socket Module

For more information please
refer to the product note
B1505A-1, “Creating Custom
Socket Modules for Packaged
Power Devices.”


The Module Selector Unit Facilitates Device Test

D Module Selector
G Unit

S
PSMU
HP

MU

MU
MU
DU

HCSM

HVSM
HPSM
GND


The High Voltage Bias-T Supports CV
Measurements with up to 3000 V of DC Bias


The N1259A Test Fixture Shown with the Module
Selector and High Voltage Bias-T Options
Bias T

N1259A-020 N1259A-300
p
HV bias-T option Module selector option
p


The B1505A Supports All Popular High-Power
Analytical Wafer Probers

Quick Test

Quick Test allows you to perform test sequencing
Q f
without any programming. You can also use Quick Test
with the built-in semiautomatic wafer prober drivers to
automate testing across an entire wafer. The test data
can b saved to any available storage d i
be d il bl device.


Setting Up to Auto Probe Across a Wafer


High Voltage Wafer Probing Connection Example -1


High Current Wafer Probing Connection Example - 2


Module Selector Wafer Probing Example


The N1260A High Voltage Bias-T
(Wafer Prober Version)

3 SHV Outputs
164 mm

53 mm
AC Guard
Low
High

125 mm

High-voltage
triaxial connector 4 BNC C-meter
connections
ti Note: The d t face h screw h l
N t Th adapter f has holes
so that it can be mounted on a plate.


Cgd Measurement Example (Lateral Device)


Gate-to-Drain Capacitance (Cgd) Measured at 500 V


Solar Cell Test with the B1505A


Basic Solar Cell Parameters

IV measurement Capacitance measurement
Symbol Parameter Name Unit Symbol Parameter Name Unit
Isc Short circuit current A Cp Parallel capacitance F
Jsc Short circuit current density A/cm2 Nc Carrier density cm-3
3

Voc Open circuit voltage V Ndl Drive-level density cm-3
Pmax Maximum power point W
Imax Current at maximum power point A
Vmax Voltage at maximum power point V Time domain measurement
FF Fill factor --- Symbol Parameter Name Unit
η Conversion efficiency
y % τ Minority carrier lifetime
y s
Rsh Shunt resistance Ω S Surface recombination velocity cm/s
Rs series resistance Ω Ld Minority carrier diffusion length m


Solar Cell DC and AC Equivalent Circuits

Solar Cell Rs Solar Cell rs
+ +
Rsh Load Cp rp Load
- -

DC Equivalent Circuit AC Equivalent Circuit


EasyEXPERT Solar Cell Application Tests

A suite of E
i f EasyEXPERT
EXPERT
solar cell application
tests is available from
the B1505A web page.


Sample Application Test List

Application Test Name Type of Measurement Parameters & Plots
Solar Cell IV IV measurement
Isc, Jsc, Voc, Pmax, Imax, Vmax,
Solar Cell Fwd IV measurement
FF, η, Rsh, Rs
Solar Cell Rev IV measurement Rsh
Solar Cell Cp-V C-Vdc measurement Mott-Schottky Plot, Nc
Solar Cell Nc W
Nc-W C-V
C Vdc measurement Nc
Solar Cell Cp-Freq Log C-f measurement
Solar Cell Nyquist Plot
y C-f measurement Nyquist Plot
y
Solar Cell Cp-ACLevel C-Vac measurement Ndl
Solar Cell DLCP C-Vac measurement Ndl


Typical Solar Cell IV Forward Characteristics
ΔVsc
Isc ΔVsc Rsh = −
ΔIsc
ΔIsc
ΔVoc
Rs = −
ΔIoc
Imax
Pmax
ΔVoc
C ent
Curre

ΔIoc

Voltage Vmax Voc

Solar Cell Test Example (IV Fwd)

Note that EasyEXPERT
automatically extracts
all important device
parameters.


C-AC Voltage Plot and DLCP Measurement

C-AC Voltage Plot

Drive-level Capacitance
Profile (DLCP)


Cp-f and Nyquist Plots

Cp-Frequency Plot

Nyquist Plot
Cole-Cole Plot
Complex Impedance Plot


Summary & Reference Information
y


The Agilent B1505A Power Device Analyzer / Curve
Tracer is the only Single Box Solution That Can…

• Measure and source current and voltage
at up to 3000 V and 40 A
• Measure capacitance at up to 3000 V of
DC bias
• Provide true curve tracer functionality
with easy data export into PC based work
environments
• Safely support both packaged part and
wafer prober testing environments


How Do I Get More Information?

For more information please go to:
www.agilent.com/find/b1505a
www agilent com/find/b1505a

On this web page you can find:
• Data Sheet
• Manuals
• Drivers & Software
• Application Notes
• Trade-In Information


How Can I Get a Live Demonstration?

Our staff at the North American technical contact
center (TCC) can give you a live demonstration of
the B1505A at your desk using Webex Please
Webex.
call one of the following numbers to arrange for a
B1505A demo.
United States: 800-829-4444
Canada: 877-894-4414
Latin America: 305-269-7500
If a live demonstration at your site is necessary,
then th
th the TCC engineers can put you in t
i t i touch with
h ith
an application engineer local to your area.


Trade In Program

Trade-in Credit
Trade-in Model
Towards B1505A1,2

Tek 370A, 370B,
$5,000
371A or 371B

Program to be
Tek 575, 576 or 577 $1,000 extended into
2010!

Agilent 4142B $3,900

1. These credits are valid for US only. Due to currency fluctuations the discount amount will vary for
other regions.
2. Trade-ins can only be made on a 1:1 basis (i.e. only one trade-in per B1505A purchased).


Questions?


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