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www.CMMXYZ.comwww.CMMXYZ.com
SP25M
The world’s most
compact and versatile
scanning probe system
www.CMMXYZ.comwww.CMMXYZ.com
SP25M – the world’s most compact and
versatile scanning probe system
SP25M brings exciting newSP25M brings exciting new
end-user benefitsend-user benefits
SP25M encompassesSP25M encompasses
™technology
SystemSystem
components - a highlycomponents - a highly
modular conceptmodular concept
Design characteristics,Design characteristics,
performance & specificationperformance & specification
www.CMMXYZ.comwww.CMMXYZ.com
SP25M – two sensors in one!
Dual capabilityDual capability
– aa SCANNINGSCANNING probe for form measurementprobe for form measurement
and reverse engineering applications,and reverse engineering applications,
capable of high-accuracy scanning across acapable of high-accuracy scanning across a
stylus length range of 20 mm to 400 mmstylus length range of 20 mm to 400 mm
(0.70 in to 15.75 in)(0.70 in to 15.75 in)
– aa TOUCH TRIGGER probe, using theTOUCH TRIGGER probe, using the
versatile TP20 range of stylus modulesversatile TP20 range of stylus modules
Flexibility
through
modular design
Scanning with SP25M is
fast, accurate and
flexible
www.CMMXYZ.comwww.CMMXYZ.com
Unmatched flexibilityUnmatched flexibility
– highly modular designhighly modular design permits the perfectpermits the perfect
measurement solution to suit the applicationmeasurement solution to suit the application
Cost effectivenessCost effectiveness
– low priced entry-level scanning kitslow priced entry-level scanning kits with easywith easy
upgrade to include other system elementsupgrade to include other system elements
SP25M – unmatched flexibility and
cost-effectiveness
Flexible module and
stylus changing
www.CMMXYZ.comwww.CMMXYZ.com
SP25M brings exciting new
end-user benefits
Feature accessFeature access
-ultra-compact at Ø25 mm (Ø98 in)-ultra-compact at Ø25 mm (Ø98 in) forfor
superior part accessibility (smallsuperior part accessibility (small
enough to be inserted into manyenough to be inserted into many
features)features) Probe small
enough to enter
the part
Compact size enhances
feature access
www.CMMXYZ.comwww.CMMXYZ.com
SP25M brings exciting new
end-user benefits
Feature accessFeature access
-total-total reach of nearlyreach of nearly
400 mm400 mm (15.7 in) is(15.7 in) is
possible by using apossible by using a
probe extension barprobe extension bar
--five scanningfive scanning
modulesmodules eacheach
optimised for aoptimised for a
specific range ofspecific range of
stylus lengthsstylus lengths
-stiff-stiff carbon fibrecarbon fibre
stylus extensionsstylus extensions forfor
excellent effectiveexcellent effective
working lengthworking length
-uses-uses M3 styliM3 styli up toup to
400 mm400 mm (15.7 in)(15.7 in)
100 mm
extension
www.CMMXYZ.comwww.CMMXYZ.com
SP25M - the world’s most compact and
versatile scanning probe system
SP25M brings exciting newSP25M brings exciting new
end-user benefitsend-user benefits
System components - aSystem components - a
highly modular concepthighly modular concept
SP25M encompassesSP25M encompasses
™technology
Design characteristics,Design characteristics,
performance & specificationperformance & specification
www.CMMXYZ.comwww.CMMXYZ.com
SP25M encompasses
RENSCAN™ technology
Speed and accuracy
– sensors with high dynamic response to provide
high accuracy data at high speed
– accuracy through sophisticated probe calibration
– match styli materials to applications for best results
Flexibility
– probe changing, stylus changing, articulation
Cost effectiveness
– innovative hardware and scanning techniques
reduce complexity
– robust designs and responsive service for lower
lifetime costs
www.CMMXYZ.comwww.CMMXYZ.com
SP25M encompasses
RENSCAN™ technology
SP25M’s specific design provides...
-the most compact scanning and
touch trigger probe available
-innovative pivoting sensor design
optimised for high accuracy across
20mm to 400 mm stylus range
-system modularity to provide
unmatched user flexibility
-passive design to avoid
unnecessary system complexity
-isolated optical metrology to
avoid stacked axis errors
-compact and light, with excellent
dynamic response
www.CMMXYZ.comwww.CMMXYZ.com
SP25M - the world’s most compact
and versatile scanning probe system
SP25M brings exciting newSP25M brings exciting new
end-user benefitsend-user benefits
System components - aSystem components - a
highly modular concepthighly modular concept
SP25M encompassesSP25M encompasses
™technology
Design characteristics,Design characteristics,
performance & specificationperformance & specification
www.CMMXYZ.comwww.CMMXYZ.com
System components - a highly m
concept
SP25M - product familySP25M - product family
SH25-SH25-
1/2/3/4/51/2/3/4/5
SM25-
1/2/3/4/5
SP25M Probe
Body
TM25-20
TP20
module
PA25-20 PA25-SH
FCR25
www.CMMXYZ.comwww.CMMXYZ.com
• thethe probe bodyprobe body has Autojoint mountinghas Autojoint mounting
for compatibility with PH10M/Q, PM6Mfor compatibility with PH10M/Q, PM6M
and PHS1 heads, extensions bars andand PHS1 heads, extensions bars and
ACR1/2 sensor changersACR1/2 sensor changers
• there are fivethere are five scanning modules (SM25-scanning modules (SM25-
1/2/3/4/5)1/2/3/4/5), which have matching, which have matching stylusstylus
holders (SH25-1/2/3/4/5)holders (SH25-1/2/3/4/5)
– each has been design optimised toeach has been design optimised to
maintain high accuracymaintain high accuracy andand low contactlow contact
forcesforces over the following dedicatedover the following dedicated
range of stylus lengths:range of stylus lengths:
SM25-1 + SH25-1SM25-1 + SH25-1 ( 20mm - 50mm)( 20mm - 50mm)
SM25-2 + SH25-2SM25-2 + SH25-2 ( 50mm - 105mm)( 50mm - 105mm)
SM25-3 + SH25-3SM25-3 + SH25-3 (120mm - 200mm)(120mm - 200mm)
SM25-4 + SH25-2SM25-4 + SH25-2 (220mm - 400mm)(220mm - 400mm)
SM25-3 + SH25-3SM25-3 + SH25-3 ( 50mm - 150mm)( 50mm - 150mm)
System components – SP25M
as a scanning probe
www.CMMXYZ.comwww.CMMXYZ.com
System components –
SP25M as a scanning probe
thethe probe bodyprobe body - would have the SM25-- would have the SM25-
# scanning module replaced by the...# scanning module replaced by the...
TTP module adaptor (TM25-20)TTP module adaptor (TM25-20) whichwhich
directly carries any of Renishaw’sdirectly carries any of Renishaw’s
TP20 range of stylus modules:TP20 range of stylus modules:
– TP20 LF/SF/MF/EFTP20 LF/SF/MF/EF
– TP20 EM1/EM2TP20 EM1/EM2
– TP20-6WTP20-6W
www.CMMXYZ.comwww.CMMXYZ.com
System components – FCR25
change rack
FCR25 - the most flexible change rack ever
from Renishaw
-rapidly change between scanning and
touch trigger mode to match the ideal
solution to the application
-FCR25 is a triple-port unit, each port is
easily configured to carry any system
element of the system:
SM25-1/2/3/4/5 SH25-1/2/3/4/5
TM25-20 TP20 modules
-FCR25’s are mounted to the MRS to thus
provide 3, 6, 9, 12, 15 etc port systems
-provides unmatched versatility
MRS
PA25-20/SH
FCR25
www.CMMXYZ.comwww.CMMXYZ.com
FCR25 - will also be used with an integral
leg to provide compact 3/6 port
standalone racks…
FCR25-L6 - the 6 port version
FCR25-L3 - the 3 port version
-ideally suited to vision CMM’s and smaller
traditional CMM’s where working volume is
restricted
-lowest possible height
-can hold SM25-2 + SH25-2 (with 100 mm
stylus length)
-overtravel protection (as for MCR20)
-provides unmatched versatility
System components – a highly
modular concept
FCR25-L6
FCR25-L3
www.CMMXYZ.comwww.CMMXYZ.com
System components - a highly
modular concept
Interfacing options - SP25M can be
integrated by different methods...
OEM’s controller
– AC3 interface card (ISA Bus) is
provided
www.CMMXYZ.comwww.CMMXYZ.com
SP25M brings exciting newSP25M brings exciting new
end-user benefitsend-user benefits
System components - aSystem components - a
highly modular concepthighly modular concept
SP25M encompassesSP25M encompasses
™technology
Design characteristics,Design characteristics,
performance & specificationperformance & specification
SP25M - the world’s most compact
and versatile scanning probe system
www.CMMXYZ.comwww.CMMXYZ.com
Design characteristics and
performance
SP25M probe body houses the optical
transducer ...
-isolated optical transducer uses
proven IRED beams and PSD sensor
technology (see later slide)
-Autojoint provides compatibility with
all Renishaw’s multiwired heads and
extension bars
-The SM25-1/2/3/4/5 scanning
modules and TM25-20 touch trigger
adaptor mount directly to the body via
repeatable kinematic joint
-ultra-compact mechanism - fits
inside Ø25 mm (Ø1 in) probe
Autojoint
Optical
transducer
system
Kinematic mount for
SM25-# or TM25-20
www.CMMXYZ.comwww.CMMXYZ.com
SM25-1/2/3/4/5 scanning modules house
the motion system ...
-patented, pivoting mechanism featuring
two diaphragm springs
-optimised to give very low inertia, low
spring rates of < 0.6 N/mm and high
accuracy over dedicated stylus range
-high natural frequency (rigid member)
when in contact with the component
-ultra-compact mechanism - fits inside
Ø25 mm (Ø1 in) probe
-0.5 mm spherical radius measuring
range
Design characteristics and
performance
‘Isle of Man’
spring
creates XY
pivot point
Second spring
allows translation in
all directions
www.CMMXYZ.comwww.CMMXYZ.com
SP25M designed for “isolated
optical metrology”
• IREDs in probe body reflect
light off mirrors in scanning
module back onto PSDs
• high integrity performance –
motion is faithfully translated
to PSD’s
• non-linear outputs are
compensated by sophisticated
3rd order polynomial
algorithms
• no moving wires
Design characteristics and
performance
2 PSDs (in body)
detect stylus
deflection
2 Mirrors (in scan
module) reflect
beams back to
PSD’s
Kinematic joint line
between probe body
and scanning module
2 IRED
sources
(in body)
IRED
beams
Body
Module
www.CMMXYZ.comwww.CMMXYZ.com
Why are there 5 scan modules to cover the
stylus range? Traditionally, increasing stylus length
leads to reducing accuracy SP25M addresses this
characteristic …
• scan modules designed for optimum output from PSD
sensors when using shortest stylus at max operating
deflection (resulting in largest pivot motion/swept area
over PSD’s by IRED beams - so giving best gain,
resolution and highest accuracy metrology) whilst
restricting loss of performance as longer stylus is used
(by ensuring sufficient coverage of sensor is maintained
resulting in low degradation of accuracy performance)
• if excessive stylus length is used, the pivot motion angle
rapidly reduces (resulting in less swept area over PSD’s
and non optimised transducer performance giving
reduced accuracy)
1. Design optimised
such that max
operating deflection
results in highest
performance of
optical transducer
2. Swept area
across PSD is
optimised over
specified
stylus range
3. Reduced performance of
sensor if longer stylus is used
Specified
stylus
range
Module lengths
increase as spring
gap changes to
achieve desired
pivot motion
Design characteristics and
performance
www.CMMXYZ.comwww.CMMXYZ.com
Design characteristics and
performance
• the dedicated range for each stylus module
also means that contact forces at the tip can
be closely maintained (if we were to use
excessive stylus lengths the force would
reduce, reducing stability and accuracy)
• the fixed extension design of SH25-2/3
prevents use of illegally short stylus
• high accuracy data maintained as stylus
length increases (see next slide)
• unique design of SP25M can result in 2-3
times better accuracy than SP600
Module lengths
increase as
spring gap
changes to
achieve desired
pivot motion
Specified
stylus
range
4. Design optimised to
maintain a nominal
deflection force of 60
g/mm across all three
modules
5. Possible unsatisfactory
contact force if longer stylus
is used
www.CMMXYZ.comwww.CMMXYZ.com
• accurate form measurement, even with long styli
• excellent reach capability
Superior scanning
performance
www.CMMXYZ.comwww.CMMXYZ.com
Design characteristics,Design characteristics,
performance andperformance and
specificationspecificationNoise comparison - SP600M typical plot
www.CMMXYZ.comwww.CMMXYZ.com
Design characteristics,Design characteristics,
performance andperformance and
specificationspecificationNoise comparison - SP25M has lower noise and better gain
www.CMMXYZ.comwww.CMMXYZ.com
SP25M
The world’s most
compact and versatile
scanning probe system
ANY QUESTIONS?ANY QUESTIONS?

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The SP25M: The World's Most Compact & Versatile Scanning Probe System

  • 2. www.CMMXYZ.comwww.CMMXYZ.com SP25M – the world’s most compact and versatile scanning probe system SP25M brings exciting newSP25M brings exciting new end-user benefitsend-user benefits SP25M encompassesSP25M encompasses ™technology SystemSystem components - a highlycomponents - a highly modular conceptmodular concept Design characteristics,Design characteristics, performance & specificationperformance & specification
  • 3. www.CMMXYZ.comwww.CMMXYZ.com SP25M – two sensors in one! Dual capabilityDual capability – aa SCANNINGSCANNING probe for form measurementprobe for form measurement and reverse engineering applications,and reverse engineering applications, capable of high-accuracy scanning across acapable of high-accuracy scanning across a stylus length range of 20 mm to 400 mmstylus length range of 20 mm to 400 mm (0.70 in to 15.75 in)(0.70 in to 15.75 in) – aa TOUCH TRIGGER probe, using theTOUCH TRIGGER probe, using the versatile TP20 range of stylus modulesversatile TP20 range of stylus modules Flexibility through modular design Scanning with SP25M is fast, accurate and flexible
  • 4. www.CMMXYZ.comwww.CMMXYZ.com Unmatched flexibilityUnmatched flexibility – highly modular designhighly modular design permits the perfectpermits the perfect measurement solution to suit the applicationmeasurement solution to suit the application Cost effectivenessCost effectiveness – low priced entry-level scanning kitslow priced entry-level scanning kits with easywith easy upgrade to include other system elementsupgrade to include other system elements SP25M – unmatched flexibility and cost-effectiveness Flexible module and stylus changing
  • 5. www.CMMXYZ.comwww.CMMXYZ.com SP25M brings exciting new end-user benefits Feature accessFeature access -ultra-compact at Ø25 mm (Ø98 in)-ultra-compact at Ø25 mm (Ø98 in) forfor superior part accessibility (smallsuperior part accessibility (small enough to be inserted into manyenough to be inserted into many features)features) Probe small enough to enter the part Compact size enhances feature access
  • 6. www.CMMXYZ.comwww.CMMXYZ.com SP25M brings exciting new end-user benefits Feature accessFeature access -total-total reach of nearlyreach of nearly 400 mm400 mm (15.7 in) is(15.7 in) is possible by using apossible by using a probe extension barprobe extension bar --five scanningfive scanning modulesmodules eacheach optimised for aoptimised for a specific range ofspecific range of stylus lengthsstylus lengths -stiff-stiff carbon fibrecarbon fibre stylus extensionsstylus extensions forfor excellent effectiveexcellent effective working lengthworking length -uses-uses M3 styliM3 styli up toup to 400 mm400 mm (15.7 in)(15.7 in) 100 mm extension
  • 7. www.CMMXYZ.comwww.CMMXYZ.com SP25M - the world’s most compact and versatile scanning probe system SP25M brings exciting newSP25M brings exciting new end-user benefitsend-user benefits System components - aSystem components - a highly modular concepthighly modular concept SP25M encompassesSP25M encompasses ™technology Design characteristics,Design characteristics, performance & specificationperformance & specification
  • 8. www.CMMXYZ.comwww.CMMXYZ.com SP25M encompasses RENSCAN™ technology Speed and accuracy – sensors with high dynamic response to provide high accuracy data at high speed – accuracy through sophisticated probe calibration – match styli materials to applications for best results Flexibility – probe changing, stylus changing, articulation Cost effectiveness – innovative hardware and scanning techniques reduce complexity – robust designs and responsive service for lower lifetime costs
  • 9. www.CMMXYZ.comwww.CMMXYZ.com SP25M encompasses RENSCAN™ technology SP25M’s specific design provides... -the most compact scanning and touch trigger probe available -innovative pivoting sensor design optimised for high accuracy across 20mm to 400 mm stylus range -system modularity to provide unmatched user flexibility -passive design to avoid unnecessary system complexity -isolated optical metrology to avoid stacked axis errors -compact and light, with excellent dynamic response
  • 10. www.CMMXYZ.comwww.CMMXYZ.com SP25M - the world’s most compact and versatile scanning probe system SP25M brings exciting newSP25M brings exciting new end-user benefitsend-user benefits System components - aSystem components - a highly modular concepthighly modular concept SP25M encompassesSP25M encompasses ™technology Design characteristics,Design characteristics, performance & specificationperformance & specification
  • 11. www.CMMXYZ.comwww.CMMXYZ.com System components - a highly m concept SP25M - product familySP25M - product family SH25-SH25- 1/2/3/4/51/2/3/4/5 SM25- 1/2/3/4/5 SP25M Probe Body TM25-20 TP20 module PA25-20 PA25-SH FCR25
  • 12. www.CMMXYZ.comwww.CMMXYZ.com • thethe probe bodyprobe body has Autojoint mountinghas Autojoint mounting for compatibility with PH10M/Q, PM6Mfor compatibility with PH10M/Q, PM6M and PHS1 heads, extensions bars andand PHS1 heads, extensions bars and ACR1/2 sensor changersACR1/2 sensor changers • there are fivethere are five scanning modules (SM25-scanning modules (SM25- 1/2/3/4/5)1/2/3/4/5), which have matching, which have matching stylusstylus holders (SH25-1/2/3/4/5)holders (SH25-1/2/3/4/5) – each has been design optimised toeach has been design optimised to maintain high accuracymaintain high accuracy andand low contactlow contact forcesforces over the following dedicatedover the following dedicated range of stylus lengths:range of stylus lengths: SM25-1 + SH25-1SM25-1 + SH25-1 ( 20mm - 50mm)( 20mm - 50mm) SM25-2 + SH25-2SM25-2 + SH25-2 ( 50mm - 105mm)( 50mm - 105mm) SM25-3 + SH25-3SM25-3 + SH25-3 (120mm - 200mm)(120mm - 200mm) SM25-4 + SH25-2SM25-4 + SH25-2 (220mm - 400mm)(220mm - 400mm) SM25-3 + SH25-3SM25-3 + SH25-3 ( 50mm - 150mm)( 50mm - 150mm) System components – SP25M as a scanning probe
  • 13. www.CMMXYZ.comwww.CMMXYZ.com System components – SP25M as a scanning probe thethe probe bodyprobe body - would have the SM25-- would have the SM25- # scanning module replaced by the...# scanning module replaced by the... TTP module adaptor (TM25-20)TTP module adaptor (TM25-20) whichwhich directly carries any of Renishaw’sdirectly carries any of Renishaw’s TP20 range of stylus modules:TP20 range of stylus modules: – TP20 LF/SF/MF/EFTP20 LF/SF/MF/EF – TP20 EM1/EM2TP20 EM1/EM2 – TP20-6WTP20-6W
  • 14. www.CMMXYZ.comwww.CMMXYZ.com System components – FCR25 change rack FCR25 - the most flexible change rack ever from Renishaw -rapidly change between scanning and touch trigger mode to match the ideal solution to the application -FCR25 is a triple-port unit, each port is easily configured to carry any system element of the system: SM25-1/2/3/4/5 SH25-1/2/3/4/5 TM25-20 TP20 modules -FCR25’s are mounted to the MRS to thus provide 3, 6, 9, 12, 15 etc port systems -provides unmatched versatility MRS PA25-20/SH FCR25
  • 15. www.CMMXYZ.comwww.CMMXYZ.com FCR25 - will also be used with an integral leg to provide compact 3/6 port standalone racks… FCR25-L6 - the 6 port version FCR25-L3 - the 3 port version -ideally suited to vision CMM’s and smaller traditional CMM’s where working volume is restricted -lowest possible height -can hold SM25-2 + SH25-2 (with 100 mm stylus length) -overtravel protection (as for MCR20) -provides unmatched versatility System components – a highly modular concept FCR25-L6 FCR25-L3
  • 16. www.CMMXYZ.comwww.CMMXYZ.com System components - a highly modular concept Interfacing options - SP25M can be integrated by different methods... OEM’s controller – AC3 interface card (ISA Bus) is provided
  • 17. www.CMMXYZ.comwww.CMMXYZ.com SP25M brings exciting newSP25M brings exciting new end-user benefitsend-user benefits System components - aSystem components - a highly modular concepthighly modular concept SP25M encompassesSP25M encompasses ™technology Design characteristics,Design characteristics, performance & specificationperformance & specification SP25M - the world’s most compact and versatile scanning probe system
  • 18. www.CMMXYZ.comwww.CMMXYZ.com Design characteristics and performance SP25M probe body houses the optical transducer ... -isolated optical transducer uses proven IRED beams and PSD sensor technology (see later slide) -Autojoint provides compatibility with all Renishaw’s multiwired heads and extension bars -The SM25-1/2/3/4/5 scanning modules and TM25-20 touch trigger adaptor mount directly to the body via repeatable kinematic joint -ultra-compact mechanism - fits inside Ø25 mm (Ø1 in) probe Autojoint Optical transducer system Kinematic mount for SM25-# or TM25-20
  • 19. www.CMMXYZ.comwww.CMMXYZ.com SM25-1/2/3/4/5 scanning modules house the motion system ... -patented, pivoting mechanism featuring two diaphragm springs -optimised to give very low inertia, low spring rates of < 0.6 N/mm and high accuracy over dedicated stylus range -high natural frequency (rigid member) when in contact with the component -ultra-compact mechanism - fits inside Ø25 mm (Ø1 in) probe -0.5 mm spherical radius measuring range Design characteristics and performance ‘Isle of Man’ spring creates XY pivot point Second spring allows translation in all directions
  • 20. www.CMMXYZ.comwww.CMMXYZ.com SP25M designed for “isolated optical metrology” • IREDs in probe body reflect light off mirrors in scanning module back onto PSDs • high integrity performance – motion is faithfully translated to PSD’s • non-linear outputs are compensated by sophisticated 3rd order polynomial algorithms • no moving wires Design characteristics and performance 2 PSDs (in body) detect stylus deflection 2 Mirrors (in scan module) reflect beams back to PSD’s Kinematic joint line between probe body and scanning module 2 IRED sources (in body) IRED beams Body Module
  • 21. www.CMMXYZ.comwww.CMMXYZ.com Why are there 5 scan modules to cover the stylus range? Traditionally, increasing stylus length leads to reducing accuracy SP25M addresses this characteristic … • scan modules designed for optimum output from PSD sensors when using shortest stylus at max operating deflection (resulting in largest pivot motion/swept area over PSD’s by IRED beams - so giving best gain, resolution and highest accuracy metrology) whilst restricting loss of performance as longer stylus is used (by ensuring sufficient coverage of sensor is maintained resulting in low degradation of accuracy performance) • if excessive stylus length is used, the pivot motion angle rapidly reduces (resulting in less swept area over PSD’s and non optimised transducer performance giving reduced accuracy) 1. Design optimised such that max operating deflection results in highest performance of optical transducer 2. Swept area across PSD is optimised over specified stylus range 3. Reduced performance of sensor if longer stylus is used Specified stylus range Module lengths increase as spring gap changes to achieve desired pivot motion Design characteristics and performance
  • 22. www.CMMXYZ.comwww.CMMXYZ.com Design characteristics and performance • the dedicated range for each stylus module also means that contact forces at the tip can be closely maintained (if we were to use excessive stylus lengths the force would reduce, reducing stability and accuracy) • the fixed extension design of SH25-2/3 prevents use of illegally short stylus • high accuracy data maintained as stylus length increases (see next slide) • unique design of SP25M can result in 2-3 times better accuracy than SP600 Module lengths increase as spring gap changes to achieve desired pivot motion Specified stylus range 4. Design optimised to maintain a nominal deflection force of 60 g/mm across all three modules 5. Possible unsatisfactory contact force if longer stylus is used
  • 23. www.CMMXYZ.comwww.CMMXYZ.com • accurate form measurement, even with long styli • excellent reach capability Superior scanning performance
  • 24. www.CMMXYZ.comwww.CMMXYZ.com Design characteristics,Design characteristics, performance andperformance and specificationspecificationNoise comparison - SP600M typical plot
  • 25. www.CMMXYZ.comwww.CMMXYZ.com Design characteristics,Design characteristics, performance andperformance and specificationspecificationNoise comparison - SP25M has lower noise and better gain
  • 26. www.CMMXYZ.comwww.CMMXYZ.com SP25M The world’s most compact and versatile scanning probe system ANY QUESTIONS?ANY QUESTIONS?