Le nanotecnologie sono tecnologie trasversali e abilitanti che costituiscono un modo radicalmente nuovo di realizzare materiali, prodotti e dispositivi con caratteristiche estremamente migliorate o del tutto nuove. Nella breve presentazione saranno illustrate le potenzialità del laboratorio in termini di supporto allo sviluppo di prodotti e di processi anche mediante alcuni casi reali di collaborazione con aziende.
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Meccanica: Nanotecnologie e caratterizzazione avanzata al servizio dell’ingegneria by Edoardo Bemporad
1. Scienza e Tecnologia dei Materiali
(dipartimento di Ingegneria, Roma TRE)
Nanotecnologie e
caratterizzazione avanzata al
servizio dell’ingegneria
2013-03
Edoardo Bemporad
2. Edoardo Bemporad
www.stm.uniroma3.it
Career Day Roma TRE – 22-03-2013
STM Roma TRE channel on YouTube:
http://www.youtube.com/user/STMRomaTRE
Image Gallery on flickr
http://www.flickr.com/photos/stmdimiuniroma3/
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3. Edoardo Bemporad
OUTLINE
Research Group presentation
Mission
Vision
Research strategy
People and research Partners
Facilities
Examples from recent work
Spatially resolved residual stress measurement at the
Career Day Roma TRE – 22-03-2013
micron scale (x,y and z)
Development of novel thin film materials for advanced
mechanical application
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4. Edoardo Bemporad
MISSION
Study of surface properties of systems for advanced
mechanical engineering and micro-devices applications, through
numerical and analytical modeling, advanced characterization
methods, technological, mechanical, tribological and chemical
tests.
Development of advanced multi-scale methodology related
with morphological, micro-structural and micro-analytical
characterization of materials through optical, ionic, electronic
and contact probes.
Career Day Roma TRE – 22-03-2013
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5. Edoardo Bemporad
VISION
Coupling nano-mechanical testing with high resolution
microscopy
High-resolution depth-resolved nano-scale mechanical
characterization of engineered surfaces and multiphase
materials;
(Sub)microscale analysis of residual stress and stress
gradients in thin coatings and complex structures
FIB-SEM-TEM-AFM investigation of nano-scale deformation
mechanisms and influence of microstructures on mechanical
and functional behavior;
Roughness and inducing roughness methods Vs surface
Career Day Roma TRE – 22-03-2013
energy: measurement and dependence with surface
chemistry
In-house deposition plant
MS-PVD: effect of deposition parameters on performances
(adhesion, wear, bio, others..)
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6. Edoardo Bemporad
STM GROUP: VISION
Increasing
Product/process output quality
innovation
(companies)
Improving of
characterization
understanding
methods: fine
capabilities
tuning or new
applications (academic)
Career Day Roma TRE – 22-03-2013
new materials
Development
and new devices Advanced use
Routine use
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7. Edoardo Bemporad
STM GROUP: RESEARCH STRATEGY
Development of methodologies for materials
processing optimisation by the use of the paradigm:
Optimization and failure analysis
nanostructure-microstructure–properties-performances
Material system Design
Multiscale and multidisciplinary
Career Day Roma TRE – 22-03-2013
approach
Modelling and simulating in
service behaviour, reliability
and degradation modes (materials oriented)
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8. Edoardo Bemporad
WE KEEP ATTENTION TO:
Workflow concerns
Privacy
Timing
Cost control
Reporting
Data and samples handling concerns
Redoundancy
Affordability
Accessibility
Career Day Roma TRE – 22-03-2013
Privacy
Report standardization (Corporate Identity)
Everything is managed inside our intranet using
Microsoft Sharepoint™ CMS
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9. Edoardo Bemporad
STM PEOPLE
five staff unities
two full tenured professors
three researchers
one tenured technician
A team, financed mainly through research
projects:
Four fellowship researchers
three doctoral students
Career Day Roma TRE – 22-03-2013
one person with technical-administrative role
Manpower comprises also other master graduate in mechanical
engineering involved in training activities concerned with research
projects supported by industrial enterprises and undergraduate
students in mechanical engineering which are carrying out their
final master thesis work.
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10. Edoardo Bemporad
PRINCIPAL RESEARCH PARTNERS (CUSTOMERS)
Italy Worldwide
INFN – Laboratori Nazionali di Legnaro Oak Ridge National Laboratory
(Pd) (ORNL, TN, USA)
ENEA Casaccia dipartimento Materiali University of Tennessee (TN, USA)
(RM)
University of Oxford, Department of
Centro Sviluppo Materiali (RM) Engineering Science (UK)
Karlsruhe Institute of Technology
Italian University Consortium on materials (KIT, Germany)
science and technology - INSTM
SIOMEC (Saxonian Institute of
National Research Council (CNR) Surface Mechanics) and Technische
Department of Molecular Design
Universität Chemnitz, (Germany)
Career Day Roma TRE – 22-03-2013
Universities Lille University, Laboratoire de
Mécanique (France)
Milano, Torino, Napoli, Modena, Roma 1,
Roma 2, Brescia, Cagliari, Firenze
Central University of Venezuela,
School of Metallurgy and Materials
Science (Venezuela)
University of Rosario (Argentina)
Several Private Firms
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11. Edoardo Bemporad
STM FACILITIES: 4 LABORATORIES (500m2 tot)
1. LIME, Electron Microscopy lab
Ion / Electronic / Stylus / Optical
2. MatEDP, Materials Modeling lab
15 PC stations, Thermocalc, ANSYS, ABAQUS, Elastica,
EFS,…
3. MaTec, Materials Technology lab
Mechanical characterization (Hardness, Micro-hardness,
Career Day Roma TRE – 22-03-2013
Nano-hardness, Abrasive Wear, Scratch), Salt Spray
4. MaDep, Coating technologies Lab
Magnetron Sputtering for residual stress investigation
(duty cycle, bias, thicknesses, chemistry, process
gases…)
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12. Edoardo Bemporad
Coating
Deposition: Lab scale
Magnetron Sputtering – Physical
Vapour Deposition system
Career Day Roma TRE – 22-03-2013
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13. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
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EQUIPMENT
MADEP, MS PVD
14. Edoardo Bemporad
Surface
modification: Flame
treatment system (home made)
Career Day Roma TRE – 22-03-2013
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15. Edoardo Bemporad
IMPROVEMENT AND OPTIMIZATION OF THE SURFACE FREE
ENERGY OF POLYMERIC SUBSTRATES BY FLAME TREATMENT
Process parameters observed:
1. Total flow rate;
2. Oxygen/propane ratio;
3. Distance sample-tip nozzle;
4. Frequency of sample pass on
flame;
5. Total time treatment.
Some results obtained through
Career Day Roma TRE – 22-03-2013
DOE Technique
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16. Edoardo Bemporad
2DImaging and nanofabrication: Optical
microscopes, Scanning electron
microscope, Transmission electron
microscope and Ion Beam / dual Beam
Career Day Roma TRE – 22-03-2013
microscope
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17. Edoardo Bemporad
LIME LAB: SEM (FEI)
30 Kv LaB6 filament
Secondary electrons
Backscattered electrons
EDS to B, line & maps
Cathode luminescence
Specimen Current
Career Day Roma TRE – 22-03-2013
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18. Edoardo Bemporad
LIME LAB: TEM (FEI)
120kV LaB6 filament
Double tilt
EDS to B, point & line
nanoprobe
Career Day Roma TRE – 22-03-2013
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19. Edoardo Bemporad
LIME LAB: DUALBEAM (FEI) HELIOS 600 NANOLAB
early 2008
- Omnprobe
- GIS (4 gases)
- STEM
- EDS (Oxford)
Career Day Roma TRE – 22-03-2013
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20. Edoardo Bemporad
3DImaging, contact and non
contact probes: AFM, Confocal and
Interferometric optical
microscopes
Career Day Roma TRE – 22-03-2013
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21. Edoardo Bemporad
LIME LAB: AFMS (1 NT-MDT + 1 DI)
50x50x5 microns range
All modes (contact, non
contact, lateral force,…)
Career Day Roma TRE – 22-03-2013
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22. Edoardo Bemporad
PROFILOMETER (NON CONTACT, BOTH CONFOCAL
AND INTERFEROMETRIC)
Confocal head:
Career Day Roma TRE – 22-03-2013
analysis of
complex shapes
Interferometric with high z-range
head: Alpha = 45° Beta = 30° µm
4
3.5
(sub)nanometer
3
2.5
2
1.5
resolution in
1
9.32 µm
0.5
0
roughness analysis
-0.5
-1
-1.5
-2
-2.5
-3
-3.5
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-4
0.715 mm 0.7 mm -4.5
-5
23. Edoardo Bemporad
Composition and microstructure:
Energy Dispersive Spectroscopy
(on all electron microscopes) and
Xray Diffraction
Career Day Roma TRE – 22-03-2013
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24. Edoardo Bemporad
LIME LAB: DRX
Career Day Roma TRE – 22-03-2013
… COMING SOON..! (2013, THIRD QUARTER)
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26. Edoardo Bemporad
MATEC LAB: CONTACT ANGLE AND WETTABILITY
Career Day Roma TRE – 22-03-2013
Uni en 828 and ASTM D5725 - 99
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27. Edoardo Bemporad
SEMI-AUTOMATED INSTRUMENT FOR CONTACT ANGLE MEASUREMENT AND
SURFACE FREE ENERGY MODELS
SFE models:
1. Zisman
2. Neumann
3. Girifalco
4. Fowkes
5. Owens-Wendt
6. Van Oss-Chaudhury-Good Sample holder(three
Light source, axes movement) Digital Camera to
polarized filter, acquire images on a
12X objectives PC
Career Day Roma TRE – 22-03-2013
screen diffuser
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28. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
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HOME MADE TRIBOMETER
MATEC LAB:
29. Edoardo Bemporad
002 003 005
004
001
MATEC LAB: WEAR TEST
Wear test device (prototype)
Dynamic measurement of wear and friction coefficient at
the micron scale Campione 004
-502 60
50
-502,5
Affondamento [um]
40
-503
R2=0,98
Carico [g]
30
-503,5
20
-504
Affondamento 10
Carico
-504,5
0
-505 -10
0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Tempo [s]
Career Day Roma TRE – 22-03-2013
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30. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
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MATEC LAB: SALT SPRAY 1M3 CHAMBER
32. Edoardo Bemporad
MATEC LAB: SCRATCH TESTER
Career Day Roma TRE – 22-03-2013
Depth profiling
Applied force feedback controlled
Acoustic emission sensor
Friction force measurement
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33. Edoardo Bemporad
MACRO-SCALE INSTRUMENTED SPHERICAL
INDENTATION
Career Day Roma TRE – 22-03-2013
The stress-strain curve is obtained by
Prototipal instrument for macro- least-square fitting of exp data with a
scale spherical indentation FEM-modelled database of L-h curves
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34. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
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Vickers
Knoop
MATEC LAB: HARDNESS TESTERS
35. Edoardo Bemporad
ROMA TRE NANOHARDNESS TESTER. AGILENT G200.
XP AND DCM-II HEADS. ULTRA-FAST MAPPING
Career Day Roma TRE – 22-03-2013
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36. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
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Berkovich tip
NANOHARDNESS TESTER
ROMA TRE
37. Edoardo Bemporad
OUTLINE
Research Group presentation
Mission
Vision
Research strategy
People and research Partners
Facilities
Examples from recent work
Career Day Roma TRE – 22-03-2013
Few short case studies on industry focused research
activates
Extended case study: Spatially resolved residual stress
measurement at the micron scale (x,y and z)
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38. Edoardo Bemporad
MICRO AND NANO-SCALE SENSOR NETWORKS
256 micronodes network
Starting Grant
Micronodes hosting
sensors/actuators, MEMS or
NEMS
Expanded network and folded in 3D
Career Day Roma TRE – 22-03-2013
Polyimide highly extendible
microwires coated with thin
metal films
G.Lanzara et al, Advanced Materials, 22, 41,
4643-4648, 2010 45
39. Edoardo Bemporad
MATERIALS FOR ELECTRODES OF LI-BATTERIES
Electrode:
Particles + Matrix
Career Day Roma TRE – 22-03-2013
Use of 2D dynamic nanoindentation mapping and
focused ion beam (FIB) observations for the
analysis of ithe nano-scale degradation
mechanisms of innovative Li-batteries electrodes
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40. Edoardo Bemporad
ENGINEEREED MICRO-CAPSULES FOR NEW DETERGENTS
Career Day Roma TRE – 22-03-2013
Focused ion beam section analysis of microcapsules for process
optimization;
Nano-mechanical testing on single-capsule for the mechanical
characterization and local surface free energy measurement
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41. Edoardo Bemporad
NEW NANO-MATERIALS FOR THE SEMICONDUCTOR INDUSTRY
Career Day Roma TRE – 22-03-2013
Compression testing on single octapod-shaped colloidal nano-crystals;
Analysis of single-particle deformation mechanisms and design of new
nano-porous film made by particle assembly
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42. Edoardo Bemporad
INNOVATION IN ECOGRAPHY SENSORS
In-line
introduction
of plasma
treatment
Career Day Roma TRE – 22-03-2013
to improve
adhesion
Extensive use of nanoindentation and scratch testing,
supported by 3D microscopy and SEM-FIB
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44. FIB-BASED FAILURE ANALYSIS AND NANO-MECHANICAL
CHARACTERIZATION OF MEMS STRUCTURES
calculation of the stiffness of MEMS membrane by the use of a wedge
indenter – spring stiffness taken into account 51
46. Edoardo Bemporad
e.bemporad@stm.uniroma3.it
Acknowledgements:
Career Day Roma TRE – 22-03-2013
Fabio Carassiti
Marco Sebastiani
Giulia Lanzara
Daniele De Felicis
Vincenzo Mangione
Mattia Piccoli
Marco Renzelli and
Dragana Nikolic 53