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Introduction to
CMOS VLSI
Design
CMOS Transistor Theory
Eutectics.blogspot.in
CMOS VLSI DesignEutectics.blogspot.in
Outline
 Introduction
 MOS Capacitor
 nMOS I-V Characteristics
 pMOS I-V Characteristics
 Gate and Diffusion Capacitance
 Pass Transistors
 RC Delay Models
CMOS VLSI DesignEutectics.blogspot.in
Introduction
 So far, we have treated transistors as ideal switches
 An ON transistor passes a finite amount of current
– Depends on terminal voltages
– Derive current-voltage (I-V) relationships
 Transistor gate, source, drain all have capacitance
– I = C (∆V/∆t) -> ∆t = (C/I) ∆V
– Capacitance and current determine speed
 Also explore what a “degraded level” really means
CMOS VLSI DesignEutectics.blogspot.in
MOS Capacitor
 Gate and body form MOS capacitor
 Operating modes
– Accumulation
– Depletion
– Inversion
polysilicon gate
(a)
silicon dioxide insulator
p-type body
+
-
Vg
< 0
(b)
+
-
0 < Vg < Vt
depletion region
(c)
+
-
Vg > Vt
depletion region
inversion region
CMOS VLSI DesignEutectics.blogspot.in
Terminal Voltages
 Mode of operation depends on Vg, Vd, Vs
– Vgs = Vg – Vs
– Vgd = Vg – Vd
– Vds = Vd – Vs = Vgs - Vgd
 Source and drain are symmetric diffusion terminals
– By convention, source is terminal at lower voltage
– Hence Vds ≥ 0
 nMOS body is grounded. First assume source is 0 too.
 Three regions of operation
– Cutoff
– Linear
– Saturation
Vg
Vs
Vd
Vgd
Vgs
Vds
+-
+
-
+
-
CMOS VLSI DesignEutectics.blogspot.in
nMOS Cutoff
 No channel
 Ids = 0
+
-
Vgs
= 0
n+ n+
+
-
Vgd
p-type body
b
g
s d
CMOS VLSI DesignEutectics.blogspot.in
nMOS Linear
 Channel forms
 Current flows from d to s
– e-
from s to d
 Ids increases with Vds
 Similar to linear resistor
+
-
Vgs
> Vt
n+ n+
+
-
Vgd
= Vgs
+
-
Vgs > Vt
n+ n+
+
-
Vgs > Vgd > Vt
Vds
= 0
0 < Vds
< Vgs
-Vt
p-type body
p-type body
b
g
s d
b
g
s d
Ids
CMOS VLSI DesignEutectics.blogspot.in
nMOS Saturation
 Channel pinches off
 Ids independent of Vds
 We say current saturates
 Similar to current source
+
-
Vgs
> Vt
n+ n+
+
-
Vgd
< Vt
Vds
> Vgs
-Vt
p-type body
b
g
s d Ids
CMOS VLSI DesignEutectics.blogspot.in
I-V Characteristics
 In Linear region, Ids depends on
– How much charge is in the channel?
– How fast is the charge moving?
CMOS VLSI DesignEutectics.blogspot.in
Channel Charge
 MOS structure looks like parallel plate capacitor
while operating in inversion
– Gate – oxide – channel
 Qchannel = CV
 C = Cg = εoxWL/tox = CoxWL
 V = Vgc – Vt = (Vgs – Vds/2) – Vt
n+ n+
p-type body
+
Vgd
gate
+ +
source
-
Vgs
-
drain
Vds
channel
-
Vg
Vs
Vd
Cg
n+ n+
p-type body
W
L
tox
SiO2
gate oxide
(good insulator, εox = 3.9)
polysilicon
gate
Cox = εox / tox
CMOS VLSI DesignEutectics.blogspot.in
Carrier velocity
 Charge is carried by e-
 Carrier velocity v proportional to lateral E-field
between source and drain
 v = µE µ called mobility
 E = Vds/L
 Time for carrier to cross channel:
– t = L / v
CMOS VLSI DesignEutectics.blogspot.in
nMOS Linear I-V
 Now we know
– How much charge Qchannel is in the channel
– How much time t each carrier takes to cross
channel
ox 2
2
ds
ds
gs t ds
ds
gs t ds
Q
I
t
W V
C V V V
L
V
V V V
µ
β
=
 = − − ÷
 
 = − − ÷
 
ox=
W
C
L
β µ
CMOS VLSI DesignEutectics.blogspot.in
nMOS Saturation I-V
 If Vgd < Vt, channel pinches off near drain
– When Vds > Vdsat = Vgs – Vt
 Now drain voltage no longer increases current
( )
2
2
2
dsat
ds gs t dsat
gs t
V
I V V V
V V
β
β
 = − − ÷
 
= −
CMOS VLSI DesignEutectics.blogspot.in
nMOS I-V Summary
( )
2
cutoff
linear
saturatio
0
2
2
n
gs t
ds
ds gs t ds ds dsat
gs t ds dsat
V V
V
I V V V V V
V V V V
β
β

 <

  = − − < ÷
 

− >
 Shockley 1st
order transistor models
CMOS VLSI DesignEutectics.blogspot.in
Example
 Example: a 0.6 µm process from AMI semiconductor
– tox = 100 Å
– µ = 350 cm2
/V*s
– Vt = 0.7 V
 Plot Ids vs. Vds
– Vgs = 0, 1, 2, 3, 4, 5
– Use W/L = 4/2 λ
( )
14
2
8
3.9 8.85 10
350 120 /
100 10
ox
W W W
C A V
L L L
β µ µ
−
−
 • ×  
= = = ÷ ÷
×   
0 1 2 3 4 5
0
0.5
1
1.5
2
2.5
Vds
Ids(mA)
Vgs
= 5
Vgs
= 4
Vgs
= 3
Vgs = 2
Vgs
= 1
CMOS VLSI DesignEutectics.blogspot.in
pMOS I-V
 All dopings and voltages are inverted for pMOS
 Mobility µp is determined by holes
– Typically 2-3x lower than that of electrons µn
– 120 cm2
/V*s in AMI 0.6 µm process
 Thus pMOS must be wider to provide same current
– In this class, assume µn / µp = 2
CMOS VLSI DesignEutectics.blogspot.in
Capacitance
 Any two conductors separated by an insulator have
capacitance
 Gate to channel capacitor is very important
– Creates channel charge necessary for operation
 Source and drain have capacitance to body
– Across reverse-biased diodes
– Called diffusion capacitance because it is
associated with source/drain diffusion
CMOS VLSI DesignEutectics.blogspot.in
Gate Capacitance
 Approximate channel as connected to source
 Cgs = εoxWL/tox = CoxWL = CpermicronW
 Cpermicron is typically about 2 fF/µm
n+ n+
p-type body
W
L
tox
SiO2
gate oxide
(good insulator, εox
= 3.9ε0
)
polysilicon
gate
CMOS VLSI DesignEutectics.blogspot.in
Diffusion Capacitance
 Csb, Cdb
 Undesirable, called parasitic capacitance
 Capacitance depends on area and perimeter
– Use small diffusion nodes
– Comparable to Cg
for contacted diff
– ½ Cg for uncontacted
– Varies with process
CMOS VLSI DesignEutectics.blogspot.in
Pass Transistors
 We have assumed source is grounded
 What if source > 0?
– e.g. pass transistor passing VDD
 Vg = VDD
– If Vs > VDD-Vt, Vgs < Vt
– Hence transistor would turn itself off
 nMOS pass transistors pull no higher than VDD-Vtn
– Called a degraded “1”
– Approach degraded value slowly (low Ids)
 pMOS pass transistors pull no lower than Vtp
VDD
VDD
CMOS VLSI DesignEutectics.blogspot.in
Pass Transistor Ckts
VDD
VDD
Vs = VDD-Vtn
VSS
Vs = |Vtp|
VDD
VDD
-Vtn VDD
-Vtn
VDD
-Vtn
VDD
VDD
VDD
VDD
VDD
VDD-Vtn
VDD-2Vtn
CMOS VLSI DesignEutectics.blogspot.in
Effective Resistance
 Shockley models have limited value
– Not accurate enough for modern transistors
– Too complicated for much hand analysis
 Simplification: treat transistor as resistor
– Replace Ids(Vds, Vgs) with effective resistance R
• Ids = Vds/R
– R averaged across switching of digital gate
 Too inaccurate to predict current at any given time
– But good enough to predict RC delay
CMOS VLSI DesignEutectics.blogspot.in
RC Delay Model
 Use equivalent circuits for MOS transistors
– Ideal switch + capacitance and ON resistance
– Unit nMOS has resistance R, capacitance C
– Unit pMOS has resistance 2R, capacitance C
 Capacitance proportional to width
 Resistance inversely proportional to width
kg
s
d
g
s
d
kC
kC
kC
R/k
kg
s
d
g
s
d
kC
kC
kC
2R/k
CMOS VLSI DesignEutectics.blogspot.in
RC Values
 Capacitance
– C = Cg = Cs = Cd = 2 fF/µm of gate width
– Values similar across many processes
 Resistance
– R ≈ 6 KΩ*µm in 0.6um process
– Improves with shorter channel lengths
 Unit transistors
– May refer to minimum contacted device (4/2 λ)
– Or maybe 1 µm wide device
– Doesn’t matter as long as you are consistent
CMOS VLSI DesignEutectics.blogspot.in
Inverter Delay Estimate
 Estimate the delay of a fanout-of-1 inverter
C
C
R
2C
2C
R
2
1
A
Y
C
2C
C
2C
C
2C
R
Y
2
1
d = 6RC

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Introduction to COMS VLSI Design

  • 1. Introduction to CMOS VLSI Design CMOS Transistor Theory Eutectics.blogspot.in
  • 2. CMOS VLSI DesignEutectics.blogspot.in Outline  Introduction  MOS Capacitor  nMOS I-V Characteristics  pMOS I-V Characteristics  Gate and Diffusion Capacitance  Pass Transistors  RC Delay Models
  • 3. CMOS VLSI DesignEutectics.blogspot.in Introduction  So far, we have treated transistors as ideal switches  An ON transistor passes a finite amount of current – Depends on terminal voltages – Derive current-voltage (I-V) relationships  Transistor gate, source, drain all have capacitance – I = C (∆V/∆t) -> ∆t = (C/I) ∆V – Capacitance and current determine speed  Also explore what a “degraded level” really means
  • 4. CMOS VLSI DesignEutectics.blogspot.in MOS Capacitor  Gate and body form MOS capacitor  Operating modes – Accumulation – Depletion – Inversion polysilicon gate (a) silicon dioxide insulator p-type body + - Vg < 0 (b) + - 0 < Vg < Vt depletion region (c) + - Vg > Vt depletion region inversion region
  • 5. CMOS VLSI DesignEutectics.blogspot.in Terminal Voltages  Mode of operation depends on Vg, Vd, Vs – Vgs = Vg – Vs – Vgd = Vg – Vd – Vds = Vd – Vs = Vgs - Vgd  Source and drain are symmetric diffusion terminals – By convention, source is terminal at lower voltage – Hence Vds ≥ 0  nMOS body is grounded. First assume source is 0 too.  Three regions of operation – Cutoff – Linear – Saturation Vg Vs Vd Vgd Vgs Vds +- + - + -
  • 6. CMOS VLSI DesignEutectics.blogspot.in nMOS Cutoff  No channel  Ids = 0 + - Vgs = 0 n+ n+ + - Vgd p-type body b g s d
  • 7. CMOS VLSI DesignEutectics.blogspot.in nMOS Linear  Channel forms  Current flows from d to s – e- from s to d  Ids increases with Vds  Similar to linear resistor + - Vgs > Vt n+ n+ + - Vgd = Vgs + - Vgs > Vt n+ n+ + - Vgs > Vgd > Vt Vds = 0 0 < Vds < Vgs -Vt p-type body p-type body b g s d b g s d Ids
  • 8. CMOS VLSI DesignEutectics.blogspot.in nMOS Saturation  Channel pinches off  Ids independent of Vds  We say current saturates  Similar to current source + - Vgs > Vt n+ n+ + - Vgd < Vt Vds > Vgs -Vt p-type body b g s d Ids
  • 9. CMOS VLSI DesignEutectics.blogspot.in I-V Characteristics  In Linear region, Ids depends on – How much charge is in the channel? – How fast is the charge moving?
  • 10. CMOS VLSI DesignEutectics.blogspot.in Channel Charge  MOS structure looks like parallel plate capacitor while operating in inversion – Gate – oxide – channel  Qchannel = CV  C = Cg = εoxWL/tox = CoxWL  V = Vgc – Vt = (Vgs – Vds/2) – Vt n+ n+ p-type body + Vgd gate + + source - Vgs - drain Vds channel - Vg Vs Vd Cg n+ n+ p-type body W L tox SiO2 gate oxide (good insulator, εox = 3.9) polysilicon gate Cox = εox / tox
  • 11. CMOS VLSI DesignEutectics.blogspot.in Carrier velocity  Charge is carried by e-  Carrier velocity v proportional to lateral E-field between source and drain  v = µE µ called mobility  E = Vds/L  Time for carrier to cross channel: – t = L / v
  • 12. CMOS VLSI DesignEutectics.blogspot.in nMOS Linear I-V  Now we know – How much charge Qchannel is in the channel – How much time t each carrier takes to cross channel ox 2 2 ds ds gs t ds ds gs t ds Q I t W V C V V V L V V V V µ β =  = − − ÷    = − − ÷   ox= W C L β µ
  • 13. CMOS VLSI DesignEutectics.blogspot.in nMOS Saturation I-V  If Vgd < Vt, channel pinches off near drain – When Vds > Vdsat = Vgs – Vt  Now drain voltage no longer increases current ( ) 2 2 2 dsat ds gs t dsat gs t V I V V V V V β β  = − − ÷   = −
  • 14. CMOS VLSI DesignEutectics.blogspot.in nMOS I-V Summary ( ) 2 cutoff linear saturatio 0 2 2 n gs t ds ds gs t ds ds dsat gs t ds dsat V V V I V V V V V V V V V β β   <    = − − < ÷    − >  Shockley 1st order transistor models
  • 15. CMOS VLSI DesignEutectics.blogspot.in Example  Example: a 0.6 µm process from AMI semiconductor – tox = 100 Å – µ = 350 cm2 /V*s – Vt = 0.7 V  Plot Ids vs. Vds – Vgs = 0, 1, 2, 3, 4, 5 – Use W/L = 4/2 λ ( ) 14 2 8 3.9 8.85 10 350 120 / 100 10 ox W W W C A V L L L β µ µ − −  • ×   = = = ÷ ÷ ×    0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 Vds Ids(mA) Vgs = 5 Vgs = 4 Vgs = 3 Vgs = 2 Vgs = 1
  • 16. CMOS VLSI DesignEutectics.blogspot.in pMOS I-V  All dopings and voltages are inverted for pMOS  Mobility µp is determined by holes – Typically 2-3x lower than that of electrons µn – 120 cm2 /V*s in AMI 0.6 µm process  Thus pMOS must be wider to provide same current – In this class, assume µn / µp = 2
  • 17. CMOS VLSI DesignEutectics.blogspot.in Capacitance  Any two conductors separated by an insulator have capacitance  Gate to channel capacitor is very important – Creates channel charge necessary for operation  Source and drain have capacitance to body – Across reverse-biased diodes – Called diffusion capacitance because it is associated with source/drain diffusion
  • 18. CMOS VLSI DesignEutectics.blogspot.in Gate Capacitance  Approximate channel as connected to source  Cgs = εoxWL/tox = CoxWL = CpermicronW  Cpermicron is typically about 2 fF/µm n+ n+ p-type body W L tox SiO2 gate oxide (good insulator, εox = 3.9ε0 ) polysilicon gate
  • 19. CMOS VLSI DesignEutectics.blogspot.in Diffusion Capacitance  Csb, Cdb  Undesirable, called parasitic capacitance  Capacitance depends on area and perimeter – Use small diffusion nodes – Comparable to Cg for contacted diff – ½ Cg for uncontacted – Varies with process
  • 20. CMOS VLSI DesignEutectics.blogspot.in Pass Transistors  We have assumed source is grounded  What if source > 0? – e.g. pass transistor passing VDD  Vg = VDD – If Vs > VDD-Vt, Vgs < Vt – Hence transistor would turn itself off  nMOS pass transistors pull no higher than VDD-Vtn – Called a degraded “1” – Approach degraded value slowly (low Ids)  pMOS pass transistors pull no lower than Vtp VDD VDD
  • 21. CMOS VLSI DesignEutectics.blogspot.in Pass Transistor Ckts VDD VDD Vs = VDD-Vtn VSS Vs = |Vtp| VDD VDD -Vtn VDD -Vtn VDD -Vtn VDD VDD VDD VDD VDD VDD-Vtn VDD-2Vtn
  • 22. CMOS VLSI DesignEutectics.blogspot.in Effective Resistance  Shockley models have limited value – Not accurate enough for modern transistors – Too complicated for much hand analysis  Simplification: treat transistor as resistor – Replace Ids(Vds, Vgs) with effective resistance R • Ids = Vds/R – R averaged across switching of digital gate  Too inaccurate to predict current at any given time – But good enough to predict RC delay
  • 23. CMOS VLSI DesignEutectics.blogspot.in RC Delay Model  Use equivalent circuits for MOS transistors – Ideal switch + capacitance and ON resistance – Unit nMOS has resistance R, capacitance C – Unit pMOS has resistance 2R, capacitance C  Capacitance proportional to width  Resistance inversely proportional to width kg s d g s d kC kC kC R/k kg s d g s d kC kC kC 2R/k
  • 24. CMOS VLSI DesignEutectics.blogspot.in RC Values  Capacitance – C = Cg = Cs = Cd = 2 fF/µm of gate width – Values similar across many processes  Resistance – R ≈ 6 KΩ*µm in 0.6um process – Improves with shorter channel lengths  Unit transistors – May refer to minimum contacted device (4/2 λ) – Or maybe 1 µm wide device – Doesn’t matter as long as you are consistent
  • 25. CMOS VLSI DesignEutectics.blogspot.in Inverter Delay Estimate  Estimate the delay of a fanout-of-1 inverter C C R 2C 2C R 2 1 A Y C 2C C 2C C 2C R Y 2 1 d = 6RC