Los días 22 y 23 de junio de 2016 organizamos en la Fundación Ramón Areces un simposio internacional sobre 'Materiales bidimensionales: explorando los límites de la física y la ingeniería'. En colaboración con el Massachusetts Institute of Technology (MIT), científicos de este prestigioso centro de investigación mostraron las propiedades únicas de materiales como el grafeno, de solo un átomo de espesor, y al mismo tiempo más resistente que el acero y mucho más ligero.
What's New in Teams Calling, Meetings and Devices March 2024
Redefining Electronics: System-Level Applications of 2D Materials
1. System-Level Applications of
Two-Dimensional Materials:
Challenges and Opportunities
System-Level Applications of
Two-Dimensional Materials:
Challenges and Opportunities
Redefining Electronics:
System-Level Applications of 2D Materials
Tomás Palacios
Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology
Fundación Ramón Areces
4. Why do we need a new
kind of electronics?
95% of the objects in our life don’t have any electronics
5. Transparent displays embedded
in windows
Photoluminescent ceilings
Large area distributed speakers
Ubiquitous sensors
Ubiquitous energy harvesting
Electronic wall-paper and desks
to charge objects wirelessly
….
Opportunity:
100x more electronics?
6. Is electronics ready for the required
100-fold increase in throughput?
It will be very difficult to use today’s manufacturing model to provide the large
area devices needed by future generations of electronic opportunities
7. New 2D materials
Hexagonal Boron
Nitride (hBN)
Graphene (G)
Molybdenum Disulphide (MoS2) and
many other related materials
8. Outline
• Material synthesis
• Graphene-based applications
• Today’s graphene products
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
9. Outline
• Material synthesis
• Graphene-based applications
• Today’s graphene products
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
12. Cu
1.)
CH4
2.) T = 1000 °C – H2/Ar
Graphene
3.)
4.)
X.Li “Large Area Synthesis of High Quality and Uniform Graphene Films on Copper Foils” Science 2009.
Graphene Domains
Copper Domains
100 um
Wrinkles
Bilayers
5 μm
CVD Graphene Synthesis
13. Poly(methyl methacrylate) (PMMA)
1.)
Cu Etchant
2.)
DiH2O3.)
Substrate
4.)
5.) Acetone/H2 annealing
6.)
~1 inch
Graphene Floating on Water
CVD Graphene Synthesis
23. Nano-interconnections
VREF
VREF
SA
SA
Graphene
SA
VREF
VREF
SASA
SASA
Graphene
SASA
1.) Scaling of width of interconnect vs Cu
– GNR Issues – Impurity Scattering, Line
Edge roughness (LER)
2.) Low Noise – Reduce Capacitance
between interconnects
3.) Next Steps – Doping, Multilayer, High
Mobility, Substrate Choice – screening to
lower scattering
4.) Resistivity Quenching due to higher T
– Increase carrier concentration
Intel
24. Passivation and anti-corrosion layers
http://www.me.utexas.edu/news/2010/0110_graphene_carbon_citation.php
http://www.dpaonthenet.net/article/53719/Potential-role-for-graphene-membranes-in-natural-gas-production.aspx
http://www.buffalo.edu/news/releases/2012/05/13401.html
• Graphene is a perfect membrane.
• It doesn’t even allow He to go through.
• It is also very inert and reduces corrosion
Many opportunities in new ultra-thin passivation
layers, that reduce parasitics and increase
reliability
25. Outline
• Material synthesis
• Graphene-based applications
• Initial applications
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
26. Mid- and long-IR Detection
Night Vision
• Military
Medical Imaging
• Thermography
Spectroscopy
• Chemistry
Challenges with incumbent
technology:
- Photodetectors: low
temperature operation
- Bolometers: expensive
processing, slow response,
opaque, form factor, non-
zero-volt operation
27. M1 M2
CVD Graphene
G2G1
M1 M2
CVD Graphene
p++ Si
SiO2
Al2O3 G1 G2
Graphene IR Detector
h
e
Thermal Gradient (ΔT)
IPC ~ (S1-S2)ΔT
S1 S2
S – Seebeck Coefficient
33. 50#μm##
VO#
IDS#
1"kΩ"
1"kΩ"
10"kΩ"
1.5V" 1.5V"3.3V" 3.3V"
300#μm##
A B C D
E F G
Row$1$
Row$2$
Row$3$
Row$N$
Col$1$ Col$2$ Col$3$ Col$N$
FET$ FET$ FET$ FET$
FET$ FET$ FET$ FET$
FET$ FET$ FET$ FET$
FET$ FET$ FET$ FET$
Amplifier)Bank)
Amplifier)Bank)
VDS)Mux)Output)Mux)
PC) μC)
EGFET)
Array)
c
o
n
n
e
c
t
o
r
PCB)
USB
Microcontroller
Custom PCB Sensor Array
Advantages of graphene sensors:
• Higher gm (lower noise) than silicon
• Back-end-of-the-line fabrication
• Transparency
Selective Ca2+ Sensing
Graphene Chemical Sensors
34. Graphene Chemical Sensors
Food monitoring
Environmental safety
Biosensors Industrial processes
Explosive detection
Challenges with incumbent
technology:
- Si ISFETs: Poor stability due
to ion diffusion into SiO2,
low gm (i.e. high noise),
opaque
35. Outline
• Material synthesis
• Graphene-based applications
• Initial applications
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
36. Opportunity: 100x more area?
Transparent displays embedded
in windows
Photoluminescent ceilings
Large area distributed speakers
Ubiquitous sensors
Ubiquitous energy harvesting
Electronic wall-paper and desks
to charge objects wirelessly
….
Electronic wall-paper and desks
to charge objects wirelessly
Transparent displays embedded
in windows
Photoluminescent ceilings
Internet in everything
Ubiquitous sensors
Large area distributed speakers
Ubiquitous energy harvesting
….
Opportunity… 100x more area?
49. Gate metal
ALD+annealing
Via hole etch
S/D patterning
SD deposition
MoS2 transfer
MoS2 mesa
Isolation deposition
2nd Via hole
ITO patterning
OLED deposition
Cathode deposition
Flexible and Transparent Displays
56. Outline
• Material synthesis
• Graphene-based applications
• Initial applications
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
59. First Generation of SynCells
10/19/2016 61
3 chemFETs conduct after
exposure to chemical
Readout circuit detects
current in selected
transistor
ROM memory
by selectively destroying some
Creates unique 6-bit ID
62. •We are the beginning of a new era for electronics
How to bring electronics to ALL objects?
•A multidimensional approach is needed to
demonstrate the full potential of 2D materials:
•High quality material
•Advanced processing technology
•New device ideas
•Many applications are quickly becoming competitive:
•Mid-IR detectors
•Chemical sensors
•Large area / distributed electronics
From Novel 2D Science to
Devices and Systems
64. Acknowledgements
• Palacios’ Group:
– Allen Hsu
– Lili Yu
– Alberto Bosca
– Han Wang
– Benjamin Mailly
– Xu Zhang
– Sunghae Ha
– Justin Wu
– Rachel Luo
– Ahmad Zubair
• M. Dresselhaus’ group
• J. Kong’s group
• P. Jarillo-Herrero’s group
• T. Swager’s group
• M. Strano’s group
• V. Bulovic’s group
• A. Chandrakasan’s group
• F. Calle’s group at UPM
• J. M. Garrido’s group at WSI/ICN2
• Dawn Nida and Lu Wang