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System-Level Applications of
Two-Dimensional Materials:
Challenges and Opportunities
System-Level Applications of
Two-Dimensional Materials:
Challenges and Opportunities
Redefining Electronics:
System-Level Applications of 2D Materials
Tomás Palacios
Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology
Fundación Ramón Areces
Why do we need a new
kind of electronics?
Why do we need a new
kind of electronics?
Why do we need a new
kind of electronics?
95% of the objects in our life don’t have any electronics
Transparent displays embedded
in windows
Photoluminescent ceilings
Large area distributed speakers
Ubiquitous sensors
Ubiquitous energy harvesting
Electronic wall-paper and desks
to charge objects wirelessly
….
Opportunity:
100x more electronics?
Is electronics ready for the required
100-fold increase in throughput?
It will be very difficult to use today’s manufacturing model to provide the large
area devices needed by future generations of electronic opportunities
New 2D materials
Hexagonal Boron
Nitride (hBN)
Graphene (G)
Molybdenum Disulphide (MoS2) and
many other related materials
Outline
• Material synthesis
• Graphene-based applications
• Today’s graphene products
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
Outline
• Material synthesis
• Graphene-based applications
• Today’s graphene products
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
tpalacios@mit.edu
How to get graphene?
tpalacios@mit.edu
Graphene discovery
(The Scotch tape trick!)
+ =
2.5x 50x
Monolayer
Bilayer
Few Layers
Bulk Graphite
200x
Cu
1.)
CH4
2.) T = 1000 °C – H2/Ar
Graphene
3.)
4.)
X.Li “Large Area Synthesis of High Quality and Uniform Graphene Films on Copper Foils” Science 2009.
Graphene Domains
Copper Domains
100 um
Wrinkles
Bilayers
5 μm
CVD Graphene Synthesis
Poly(methyl methacrylate) (PMMA)
1.)
Cu Etchant
2.)
DiH2O3.)
Substrate
4.)
5.) Acetone/H2 annealing
6.)
~1 inch
Graphene Floating on Water
CVD Graphene Synthesis
Graphene Automatic Transfer Robot
Slide courtesy of Prof. Fernando Calle’s group (UPM)
tpalacios@mit.edu
Large-Scale CVD Growth
(Samsung Electronics)
Bae et al, Nature Nanotechnology, 5, 574-578 (2009)
Today’s Graphene Products…
http://head.com/g/eu/graphene/
$99.95
Applications in the
not-too-distant future…
(i.e. ~ 5 years)
Semitransparent electrode
(solar cells, LEDs, displays, touch screens…)
Data from USGS Mineral
Commodity Summaries
Semitransparent electrode
(solar cells, LEDs, displays, touch screens…)
Reina et al, Nano Letters, 9, 30
1 kg of graphite: $1.5
Rs ~ 100 W/sq
Nano-interconnections
VREF
VREF
SA
SA
Graphene
SA
VREF
VREF
SASA
SASA
Graphene
SASA
1.) Scaling of width of interconnect vs Cu
– GNR Issues – Impurity Scattering, Line
Edge roughness (LER)
2.) Low Noise – Reduce Capacitance
between interconnects
3.) Next Steps – Doping, Multilayer, High
Mobility, Substrate Choice – screening to
lower scattering
4.) Resistivity Quenching due to higher T
– Increase carrier concentration
Intel
Passivation and anti-corrosion layers
http://www.me.utexas.edu/news/2010/0110_graphene_carbon_citation.php
http://www.dpaonthenet.net/article/53719/Potential-role-for-graphene-membranes-in-natural-gas-production.aspx
http://www.buffalo.edu/news/releases/2012/05/13401.html
• Graphene is a perfect membrane.
• It doesn’t even allow He to go through.
• It is also very inert and reduces corrosion
Many opportunities in new ultra-thin passivation
layers, that reduce parasitics and increase
reliability
Outline
• Material synthesis
• Graphene-based applications
• Initial applications
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
Mid- and long-IR Detection
Night Vision
• Military
Medical Imaging
• Thermography
Spectroscopy
• Chemistry
Challenges with incumbent
technology:
- Photodetectors: low
temperature operation
- Bolometers: expensive
processing, slow response,
opaque, form factor, non-
zero-volt operation
M1 M2
CVD Graphene
G2G1
M1 M2
CVD Graphene
p++ Si
SiO2
Al2O3 G1 G2
Graphene IR Detector
h
e
Thermal Gradient (ΔT)
IPC ~ (S1-S2)ΔT
S1 S2
S – Seebeck Coefficient
Lock-in-Amp
R
θ
DUT
OAP1
DAQ
Input
Output
VPC
GateVoltage
ref
OAP2
Chopper
30-32 ˚C = 303 – 305 K
Graphene mid-IR Detector
Mid-IR Imager System
One chip integration
Single-chip Mid-IR Imager System
Imager Fixture Test Fixture
Shared Pins
10 SAR ADCs
Reserved
Pins
80 x 60 Pixels
Readout Circuit Schematics
Issues on G-PD
- Variable (Low to High) output
impedance.
Design requirements
- Pixel amplifiers with low and
adjustable input impedance.
- Fast settling time.
- Parallel ADCs.
Graphene-PD
AMP
Select
Responsivity
λ = 10.6 μm
Ohmic
Graphene
IR Imager Chip Testing
50#μm##
VO#
IDS#
1"kΩ"
1"kΩ"
10"kΩ"
1.5V" 1.5V"3.3V" 3.3V"
300#μm##
A B C D
E F G
Row$1$
Row$2$
Row$3$
Row$N$
Col$1$ Col$2$ Col$3$ Col$N$
FET$ FET$ FET$ FET$
FET$ FET$ FET$ FET$
FET$ FET$ FET$ FET$
FET$ FET$ FET$ FET$
Amplifier)Bank)
Amplifier)Bank)
VDS)Mux)Output)Mux)
PC) μC)
EGFET)
Array)
c
o
n
n
e
c
t
o
r
PCB)
USB
Microcontroller
Custom PCB Sensor Array
Advantages of graphene sensors:
• Higher gm (lower noise) than silicon
• Back-end-of-the-line fabrication
• Transparency
Selective Ca2+ Sensing
Graphene Chemical Sensors
Graphene Chemical Sensors
Food monitoring
Environmental safety
Biosensors Industrial processes
Explosive detection
Challenges with incumbent
technology:
- Si ISFETs: Poor stability due
to ion diffusion into SiO2,
low gm (i.e. high noise),
opaque
Outline
• Material synthesis
• Graphene-based applications
• Initial applications
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
Opportunity: 100x more area?
Transparent displays embedded
in windows
Photoluminescent ceilings
Large area distributed speakers
Ubiquitous sensors
Ubiquitous energy harvesting
Electronic wall-paper and desks
to charge objects wirelessly
….
Electronic wall-paper and desks
to charge objects wirelessly
Transparent displays embedded
in windows
Photoluminescent ceilings
Internet in everything
Ubiquitous sensors
Large area distributed speakers
Ubiquitous energy harvesting
….
Opportunity… 100x more area?
Tracking Anti-Counterfeit tagsBlood/Wet detection
Basic building blocks
of ubiquitous electronics systems
MoS2 Transistor Technology
MoS2 FET Compact Model
Symbols  Expt. Data
Solid lines  Model fits
FET Device
Performances
Compact
Model
Verilog-A Code
Circuit simulation
Inverter
0V
3V
0.2V
2.8V
NOR
0V
3V
3V
0V
2.9V
0.2V
NAND
0V
3V
3V
0V
2.96V
0.48V OUT
IN2
IN1
AND
OR
XNOR
48
EM Wave
Antenna
AC current
Diode
DC current
Regulator
Graphene RF Harvesting
DC current
Load
Simulation
Measurements
49
EM Wave
Antenna
AC current
Diode
DC current
Regulator
Graphene RF Harvesting
DC current
Load
Simulation
Measurements
source Drain
Glass
Gate
MoS2
Isolation
OLED
Anode
Cathode
Cap
ALD
Cap
Gate metal
ALD+annealing
Via hole etch
S/D patterning
SD deposition
MoS2 transfer
MoS2 mesa
Isolation deposition
2nd Via hole
ITO patterning
OLED deposition
Cathode deposition
Flexible and Transparent Displays
Gate metal
ALD+annealing
Via hole etch
S/D patterning
SD deposition
MoS2 transfer
MoS2 mesa
Isolation deposition
2nd Via hole
ITO patterning
OLED deposition
Cathode deposition
Flexible and Transparent Displays
A new form factor for electronics…
A new form factor for electronics…
Large scale 2D circuits
3D printing of 2D electronics
Printed Strain Sensor
Printed Pressure Sensor
Outline
• Material synthesis
• Graphene-based applications
• Initial applications
• Applications in the next ~5 years
• Heterogeneous integration:
• Mid-IR detectors
• Chemical sensors
• Beyond graphene…
• MoS2 electronics
• A few additional thoughts on future applications
One more application…
Synthetic Cells (SynCells)
Opportunity: Performance density
<10 mm3
0.000001 mm2/bit
First Generation of SynCells
10/19/2016 61
3 chemFETs conduct after
exposure to chemical
Readout circuit detects
current in selected
transistor
ROM memory
by selectively destroying some
 Creates unique 6-bit ID
Second generation of SynCells
Origami of 2D circuits = 3D nanosystems
A New Era for Electronics…
•We are the beginning of a new era for electronics
How to bring electronics to ALL objects?
•A multidimensional approach is needed to
demonstrate the full potential of 2D materials:
•High quality material
•Advanced processing technology
•New device ideas
•Many applications are quickly becoming competitive:
•Mid-IR detectors
•Chemical sensors
•Large area / distributed electronics
From Novel 2D Science to
Devices and Systems
From Novel 2D Science to
Devices and Systems
Acknowledgements
• Palacios’ Group:
– Allen Hsu
– Lili Yu
– Alberto Bosca
– Han Wang
– Benjamin Mailly
– Xu Zhang
– Sunghae Ha
– Justin Wu
– Rachel Luo
– Ahmad Zubair
• M. Dresselhaus’ group
• J. Kong’s group
• P. Jarillo-Herrero’s group
• T. Swager’s group
• M. Strano’s group
• V. Bulovic’s group
• A. Chandrakasan’s group
• F. Calle’s group at UPM
• J. M. Garrido’s group at WSI/ICN2
• Dawn Nida and Lu Wang
From Novel 2D Science to
Devices and Systems

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Redefining Electronics: System-Level Applications of 2D Materials

  • 1. System-Level Applications of Two-Dimensional Materials: Challenges and Opportunities System-Level Applications of Two-Dimensional Materials: Challenges and Opportunities Redefining Electronics: System-Level Applications of 2D Materials Tomás Palacios Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology Fundación Ramón Areces
  • 2. Why do we need a new kind of electronics?
  • 3. Why do we need a new kind of electronics?
  • 4. Why do we need a new kind of electronics? 95% of the objects in our life don’t have any electronics
  • 5. Transparent displays embedded in windows Photoluminescent ceilings Large area distributed speakers Ubiquitous sensors Ubiquitous energy harvesting Electronic wall-paper and desks to charge objects wirelessly …. Opportunity: 100x more electronics?
  • 6. Is electronics ready for the required 100-fold increase in throughput? It will be very difficult to use today’s manufacturing model to provide the large area devices needed by future generations of electronic opportunities
  • 7. New 2D materials Hexagonal Boron Nitride (hBN) Graphene (G) Molybdenum Disulphide (MoS2) and many other related materials
  • 8. Outline • Material synthesis • Graphene-based applications • Today’s graphene products • Applications in the next ~5 years • Heterogeneous integration: • Mid-IR detectors • Chemical sensors • Beyond graphene… • MoS2 electronics • A few additional thoughts on future applications
  • 9. Outline • Material synthesis • Graphene-based applications • Today’s graphene products • Applications in the next ~5 years • Heterogeneous integration: • Mid-IR detectors • Chemical sensors • Beyond graphene… • MoS2 electronics • A few additional thoughts on future applications
  • 11. tpalacios@mit.edu Graphene discovery (The Scotch tape trick!) + = 2.5x 50x Monolayer Bilayer Few Layers Bulk Graphite 200x
  • 12. Cu 1.) CH4 2.) T = 1000 °C – H2/Ar Graphene 3.) 4.) X.Li “Large Area Synthesis of High Quality and Uniform Graphene Films on Copper Foils” Science 2009. Graphene Domains Copper Domains 100 um Wrinkles Bilayers 5 μm CVD Graphene Synthesis
  • 13. Poly(methyl methacrylate) (PMMA) 1.) Cu Etchant 2.) DiH2O3.) Substrate 4.) 5.) Acetone/H2 annealing 6.) ~1 inch Graphene Floating on Water CVD Graphene Synthesis
  • 14. Graphene Automatic Transfer Robot Slide courtesy of Prof. Fernando Calle’s group (UPM)
  • 15. tpalacios@mit.edu Large-Scale CVD Growth (Samsung Electronics) Bae et al, Nature Nanotechnology, 5, 574-578 (2009)
  • 17.
  • 19.
  • 20. Applications in the not-too-distant future… (i.e. ~ 5 years)
  • 21. Semitransparent electrode (solar cells, LEDs, displays, touch screens…) Data from USGS Mineral Commodity Summaries
  • 22. Semitransparent electrode (solar cells, LEDs, displays, touch screens…) Reina et al, Nano Letters, 9, 30 1 kg of graphite: $1.5 Rs ~ 100 W/sq
  • 23. Nano-interconnections VREF VREF SA SA Graphene SA VREF VREF SASA SASA Graphene SASA 1.) Scaling of width of interconnect vs Cu – GNR Issues – Impurity Scattering, Line Edge roughness (LER) 2.) Low Noise – Reduce Capacitance between interconnects 3.) Next Steps – Doping, Multilayer, High Mobility, Substrate Choice – screening to lower scattering 4.) Resistivity Quenching due to higher T – Increase carrier concentration Intel
  • 24. Passivation and anti-corrosion layers http://www.me.utexas.edu/news/2010/0110_graphene_carbon_citation.php http://www.dpaonthenet.net/article/53719/Potential-role-for-graphene-membranes-in-natural-gas-production.aspx http://www.buffalo.edu/news/releases/2012/05/13401.html • Graphene is a perfect membrane. • It doesn’t even allow He to go through. • It is also very inert and reduces corrosion Many opportunities in new ultra-thin passivation layers, that reduce parasitics and increase reliability
  • 25. Outline • Material synthesis • Graphene-based applications • Initial applications • Applications in the next ~5 years • Heterogeneous integration: • Mid-IR detectors • Chemical sensors • Beyond graphene… • MoS2 electronics • A few additional thoughts on future applications
  • 26. Mid- and long-IR Detection Night Vision • Military Medical Imaging • Thermography Spectroscopy • Chemistry Challenges with incumbent technology: - Photodetectors: low temperature operation - Bolometers: expensive processing, slow response, opaque, form factor, non- zero-volt operation
  • 27. M1 M2 CVD Graphene G2G1 M1 M2 CVD Graphene p++ Si SiO2 Al2O3 G1 G2 Graphene IR Detector h e Thermal Gradient (ΔT) IPC ~ (S1-S2)ΔT S1 S2 S – Seebeck Coefficient
  • 29. Mid-IR Imager System One chip integration
  • 31. Imager Fixture Test Fixture Shared Pins 10 SAR ADCs Reserved Pins 80 x 60 Pixels Readout Circuit Schematics Issues on G-PD - Variable (Low to High) output impedance. Design requirements - Pixel amplifiers with low and adjustable input impedance. - Fast settling time. - Parallel ADCs. Graphene-PD AMP Select
  • 32. Responsivity λ = 10.6 μm Ohmic Graphene IR Imager Chip Testing
  • 33. 50#μm## VO# IDS# 1"kΩ" 1"kΩ" 10"kΩ" 1.5V" 1.5V"3.3V" 3.3V" 300#μm## A B C D E F G Row$1$ Row$2$ Row$3$ Row$N$ Col$1$ Col$2$ Col$3$ Col$N$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ FET$ Amplifier)Bank) Amplifier)Bank) VDS)Mux)Output)Mux) PC) μC) EGFET) Array) c o n n e c t o r PCB) USB Microcontroller Custom PCB Sensor Array Advantages of graphene sensors: • Higher gm (lower noise) than silicon • Back-end-of-the-line fabrication • Transparency Selective Ca2+ Sensing Graphene Chemical Sensors
  • 34. Graphene Chemical Sensors Food monitoring Environmental safety Biosensors Industrial processes Explosive detection Challenges with incumbent technology: - Si ISFETs: Poor stability due to ion diffusion into SiO2, low gm (i.e. high noise), opaque
  • 35. Outline • Material synthesis • Graphene-based applications • Initial applications • Applications in the next ~5 years • Heterogeneous integration: • Mid-IR detectors • Chemical sensors • Beyond graphene… • MoS2 electronics • A few additional thoughts on future applications
  • 36. Opportunity: 100x more area? Transparent displays embedded in windows Photoluminescent ceilings Large area distributed speakers Ubiquitous sensors Ubiquitous energy harvesting Electronic wall-paper and desks to charge objects wirelessly …. Electronic wall-paper and desks to charge objects wirelessly Transparent displays embedded in windows Photoluminescent ceilings Internet in everything Ubiquitous sensors Large area distributed speakers Ubiquitous energy harvesting …. Opportunity… 100x more area?
  • 37. Tracking Anti-Counterfeit tagsBlood/Wet detection Basic building blocks of ubiquitous electronics systems
  • 39. MoS2 FET Compact Model Symbols  Expt. Data Solid lines  Model fits FET Device Performances Compact Model Verilog-A Code Circuit simulation
  • 43. AND
  • 44. OR
  • 45. XNOR
  • 46. 48 EM Wave Antenna AC current Diode DC current Regulator Graphene RF Harvesting DC current Load Simulation Measurements
  • 47. 49 EM Wave Antenna AC current Diode DC current Regulator Graphene RF Harvesting DC current Load Simulation Measurements
  • 48. source Drain Glass Gate MoS2 Isolation OLED Anode Cathode Cap ALD Cap Gate metal ALD+annealing Via hole etch S/D patterning SD deposition MoS2 transfer MoS2 mesa Isolation deposition 2nd Via hole ITO patterning OLED deposition Cathode deposition Flexible and Transparent Displays
  • 49. Gate metal ALD+annealing Via hole etch S/D patterning SD deposition MoS2 transfer MoS2 mesa Isolation deposition 2nd Via hole ITO patterning OLED deposition Cathode deposition Flexible and Transparent Displays
  • 50. A new form factor for electronics…
  • 51. A new form factor for electronics…
  • 52. Large scale 2D circuits
  • 53. 3D printing of 2D electronics
  • 56. Outline • Material synthesis • Graphene-based applications • Initial applications • Applications in the next ~5 years • Heterogeneous integration: • Mid-IR detectors • Chemical sensors • Beyond graphene… • MoS2 electronics • A few additional thoughts on future applications
  • 58. Opportunity: Performance density <10 mm3 0.000001 mm2/bit
  • 59. First Generation of SynCells 10/19/2016 61 3 chemFETs conduct after exposure to chemical Readout circuit detects current in selected transistor ROM memory by selectively destroying some  Creates unique 6-bit ID
  • 60. Second generation of SynCells Origami of 2D circuits = 3D nanosystems
  • 61. A New Era for Electronics…
  • 62. •We are the beginning of a new era for electronics How to bring electronics to ALL objects? •A multidimensional approach is needed to demonstrate the full potential of 2D materials: •High quality material •Advanced processing technology •New device ideas •Many applications are quickly becoming competitive: •Mid-IR detectors •Chemical sensors •Large area / distributed electronics From Novel 2D Science to Devices and Systems
  • 63. From Novel 2D Science to Devices and Systems
  • 64. Acknowledgements • Palacios’ Group: – Allen Hsu – Lili Yu – Alberto Bosca – Han Wang – Benjamin Mailly – Xu Zhang – Sunghae Ha – Justin Wu – Rachel Luo – Ahmad Zubair • M. Dresselhaus’ group • J. Kong’s group • P. Jarillo-Herrero’s group • T. Swager’s group • M. Strano’s group • V. Bulovic’s group • A. Chandrakasan’s group • F. Calle’s group at UPM • J. M. Garrido’s group at WSI/ICN2 • Dawn Nida and Lu Wang
  • 65. From Novel 2D Science to Devices and Systems