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ASML 2010 Second Quarter Results
Sales set for new high amid increasing semiconductor fab spend

July 14, 2010



     / Slide 1
Safe Harbor

"Safe Harbor" Statement under the US Private Securities Litigation Reform Act of
1995: the matters discussed in this document may include forward-looking
statements, including statements made about our outlook, realization of backlog, IC
unit demand, financial results, average selling price, gross margin and expenses.

These forward looking statements are subject to risks and uncertainties including,
but not limited to: economic conditions, product demand and semiconductor
equipment industry capacity, worldwide demand and manufacturing capacity
utilization for semiconductors (the principal product of our customer base),
including the impact of general economic conditions on consumer confidence and
demand for our customers’ products, competitive products and pricing, the impact
of manufacturing efficiencies and capacity constraints, the pace of new product
development and customer acceptance of new products, our ability to enforce
patents and protect intellectual property rights, the risk of intellectual property
litigation, availability of raw materials and critical manufacturing equipment, trade
environment, changes in exchange rates and other risks indicated in the risk factors
included in ASML’s Annual Report on Form 20-F and other filings with the US
Securities and Exchange Commission.



       / Slide 2
Agenda

 Business summary
 Market
 ASML business update
 Outlook and summary




    / Slide 3
Business summary




/ Slide 4
Q2 results - highlights

Net sales of € 1,069 million, 43 systems shipped valued at
€ 923 million, service revenue at € 146 million
Gross margin of 43.0% (record)
Operating margin of 27.4% (record)
Shipped 25 immersion systems
Booked 59 systems, valued at € 1,179 million
Backlog increased to € 2,401 million (record), 101 systems with
ASP of € 26.7 million for new tools, including 58 immersion tools
Generated € 193 million cash from operations




    / Slide 5
Total net sales M€                                                              Guidance:
                                                                                            2010 sales
                                                                                           to grow 10 -
            4500
                                                                                            15% above
            4000                                                                             historical
                                                           3,768
                                           3,582                                              peak of
            3500                                                                           € 3.8 billion
                                                            955
                                           1,053                   2,954
            3000                                                                   2369
                          2,529                                    494                       Q4
Net sales




            2500                                                                             Q3
                                                            934
                           548
                                                                   697
            2000                            958                                              Q2
                           533                                             1,596
            1500                                                                             Q1
                                                            930    844     581     1,069
                           763              942
            1000
                                                                           555
             500                                            949    919
                           685              629                            277     742
                                                                           183
                 0
                          2005            2006             2007    2008    2009    2010

            Numbers have been rounded for readers’ convenience.



                       / Slide 6
Net system sales breakdown in value: Q2 2010

                   Technology                                                Sales in Units

                       ArF
                    immersion                                       25
                       83%
                      ArF                      KrF 11%                                 12
                   Immersion                                                   2                4
                      85%                     ArF dry 3%            ArF      ArF dry   KrF    I-Line
                                                                 immersion
                                             I-Line 1%

     Region
                                                             End-use
                 USA                                            Foundry
                 16%                                       NAND 25%
 Korea                           Europe 10%
  33%                                                       20%       IDM
                                                                       12%
                                 Japan 8%                     DRAM
                                                               43%
    Taiwan                     Singapore 5%
     24%                                                                     Assuming hybrid memory
                           China 4%                                          fabs to produce DRAM

     Numbers have been rounded for readers’ convenience.

     / Slide 7
Consolidated statements of operations M€

                                                           Q1 10   Q2 10

                                               Net sales     742   1,069
                                       Gross profit          298     459
                                    Gross margin %         40.3%   43.0%
                                             R&D costs       120     125
                                          SG&A costs          41      42
                         Income from operations              137     292
                            Operating income %             18.5%   27.4%

                                 Net income                  107     239
              Net income as a % of net sales               14.5%   22.4%




Numbers have been rounded for readers’ convenience.



          / Slide 8
Key financial trends 2009 – 2010
 Consolidated statements of operations M€

                                                         Q2 09               Q3 09   Q4 09    Q1 10   Q2 10

                               Net Sales                    277               555      581      742   1,069
                           Gross profit                      34            191         220      298     459
                        Gross margin %                   12.5%           34.4%       38.0%    40.3%   43.0%
                              R&D costs                     118               115      115      120     125
                           SG&A costs                         40               37       37       41      42
Income (loss) from operations                             (124)                 39       68     137     292
         Operating income %                             -44.7%               6.9%    11.8%    18.5%   27.4%
             Net income (loss)
                                                          (104)                 20       50     107     239
Net income (loss) as a % of net
                                                        -37.6%               3.6%     8.7%    14.5%   22.4%
                         sales

                              Units sold                      10               24       25       34      43
                  ASP new systems                           31.1              23.4    19.7     25.8    25.6
                Net bookings value                          394               777      956    1,004   1,179



 Numbers have been rounded for readers’ convenience.
 Numbers have been adjusted for consolidation of variable interest entity.

            / Slide 9
Cash flows M€

                                                                                  Q1 10   Q2 10
                                                                  Net income       107     239
                                      Adjustments to reconcile net income to
                                     net cash flows from operating activities;
                                                Impairment and obsolescence         15      22
                                                Depreciation and amortization       35      36
                                                       Deferred income taxes        24       6
                                                        Other non-cash items         3       4


                                               Change in assets and liabilities   (143)   (114)
                    Net cash provided by (used in) operating activities             41     193
                    Net cash provided by (used in) investing activities             (7)    (18)
                    Net cash provided by (used in) financing activities             10     (79)
                                                             Total FX effects        6       6
                              Net increase in cash and cash equivalents             50     102


Numbers have been rounded for readers’ convenience.



           / Slide 10
Balance sheets M€

                                          Assets         Mar 2010       Jun 2010

                     Cash and cash equivalents        1,087    25%   1,189    24%
                       Accounts receivable, net         630    14%     812    17%
                       Finance receivables, net         23      1%      –      0%
                                 Inventories, net     1,156    26%   1,309    27%
                                    Other assets       346      8%    343      7%
                                      Tax assets       273      6%    302      6%
                                    Fixed assets       880     20%    912     19%

                                   Total assets       4,395   100%   4,867   100%

     Liabilities and shareholders’ equity                Mar 2010       Jun 2010

                               Current liabilities    1,613    37%   1,783    36%
                          Non-current liabilities      971     22%   1,005    21%
                           Shareholders’ equity       1,811    41%   2,079    43%

Total liabilities and shareholders’ equity            4,395   100%   4,867   100%




Numbers have been rounded for readers’ convenience.


        / Slide 11
Backlog as of June 27, 2010

                                               New systems                Used systems                Total systems
                                                 Backlog                    Backlog                      Backlog

                         Units                         86                         15                        101

                         Value                    M€ 2,296                     M€ 105                     M€ 2,401

                          ASP                     M€ 26.7                      M€ 7.0                     M€ 23.8




• 77 % of backlog or € 1,859 million system sales carry shipment
  dates in the next 6 months
• Booked 48 new tools at € 1,145 million, 11 used at € 34 million



Note: Due to possible customer changes in delivery schedules and to cancellation of orders, our backlog
at any particular date is not necessarily indicative of actual sales for any succeeding period.

Numbers have been rounded for readers’ convenience.

         / Slide 12
Backlog value M€




                      0
                          500
                                1000
                                           1500
                                                  2000
                                                          2500
                                                                 3000
             Jan 04

             Jul 04




/ Slide 13
             Jan 05

             Jul 05

             Jan 06

             Jul 06

             Jan 07

             Jul 07
                                                                        Backlog value




             Jan 08
                                                                                        Backlog: value and litho units
                                                                        Units




             Jul 08

             Jan 09

             Jul 09

             Jan 10

             Jul 10
                      0
                          50
                                100
                                           150
                                                  200
                                                          250
                                                                 300




                                       Backlog in units
Backlog in value per June 27, 2010
Total value M€ 2,401
                                              Technology
                                                            KrF 16%
    58% NXT
                                                              I-Line 1%
    23% XT
                                                              ArF dry 2%
                                     ArF                                    Region
                                  immersion
 End-use                            81%                                             Japan 8%
                                                                      USA             Singapore 2%
                                                                      24%
                        IDM                                                            Europe 9%
                        28%                                     Taiwan
     DRAM                                                        31%                  China 9%
                          Foundry                                           Korea
      44%                    13%                                             17%
                     NAND
                      15%
                                     For hybrid memory fabs assuming
                                     75% for DRAM, 25% for NAND
      Numbers have been rounded for readers’ convenience.

      / Slide 14
Bookings activity by sector - total value M€ 1,179

  Bookings in value                                 Bookings in units
    Foundry 22%

                               NAND 13%

                                                      Foundry           NAND 12%
           IDM                                          27%
                                 DRAM 20%
            45%
                                                                DRAM
                                                       IDM       20%
                                                       41%

                  For hybrid memory fabs assuming
                  75% for DRAM, 25% for NAND




     / Slide 15
Market




/ Slide 16
More devices, bigger market in mobile

                                                     Computing growth drivers over time, 1960 – 2020E
                       1,000,000

                                                                                                                                       More than
                                   100,000                                                                                             Just phones
 Devices/Users (MM in Log Scale)




                                                                                                                                       • Smartphone
                                                                                                  n
                                                                                              tio                                      • Kindle
                                    10,000
                                                                                         egra                                          • Tablet


                                                                                    g int                                              • MP3

                                                                              sin
                                     1,000                                                                                             • Cell phone / PDA
                                                                                                                      Mobile

                                                                        rea
                                                                                                                     Internet          • Car Electronics
                                      100
                                                                 In   c                                Desktop
                                                                                                       Internet
                                                                                                                       10B+
                                                                                                                      Users
                                                                                                                                         GPS, ABS, A/V
                                                                                                                                       • Mobile Video
                                                                                                      1B+ Units /
                                                                                           PC           Users                          • Home
                                       10                                              100MM+ Units                                      entertainment
                                                                                                                                       • Games
                                                                 Minicomputers
                                         1                        10MM+ Units                                                          • Wireless home
                                                                                                                                         appliances
                                                Mainframes
                                                1MM+ Units
                                        0
                                         1960             1970          1980            1990           2000         2010        2020


Source: Morgan Stanley,
The Mobile Internet Report, Dec 2009
                                             / Slide 17
Market overview

  Semiconductor unit growth back to historical trend, catch up
  capacity investments required in all sectors after a long
  period of slow capacity growth
  Share of new technology nodes in total semiconductor
  market accelerating as shrink continues to enable reduced
  chip cost and increased bit growth
  New technologies nodes require much more immersion
  layers and litho tool capacity than actual installed base
  allows




    / Slide 18
Semiconductor revenue outlook 2010 is +28% and
+10% in 2011
                                            2010 Semiconductor revenue growth forecast over time
                                      35%
                                                                                                                                                                                                                                                                      Future Horizons
   YoY Semiconductor revenue growth




                                                                                                                                                                                                                                                                      SIA
                                      30%
                                                                                                                                                                                                                                                                      Semico

                                      25%                                                                                                                                                                                                                             Dataquest

                                                                                                                                                                                                                                                                      IC Insights
                                      20%
                                                                                                                                                                                                                                                                      WSTS

                                                                                                                                                                                                                                                                      iSuppli
                                      15%
                                                                                                                                                                                                                                                                      VLSI Research
                                      10%                                                                                                                                                                                                                             AVERAGE


                                      5%

                                      0%
                                                                                                                              Oct-09


                                                                                                                                                 Dec-09
                                                                                                                                                          Jan-10




                                                                                                                                                                                                       Jun-10
                                                                                                                                                                                                                Jul-10
                                                                                                                                                                                                                         Aug-10
                                                                                                                                                                                                                                  Sep-10
                                                                                                                                                                                                                                           Oct-10
                                             Jan-09
                                                      Feb-09




                                                                                                                     Sep-09


                                                                                                                                        Nov-09




                                                                                                                                                                   Feb-10


                                                                                                                                                                                     Apr-10
                                                               Mar-09
                                                                        Apr-09
                                                                                 May-09
                                                                                          Jun-09
                                                                                                   Jul-09
                                                                                                            Aug-09




                                                                                                                                                                            Mar-10


                                                                                                                                                                                              May-10




                                                                                                                                                                                                                                                             Dec-10
                                                                                                                                                                                                                                                    Nov-10
                                                                                                                                       Date of Forecast
Sources: See chart (7/10)
Weighted average is based on age of forecast from market institute and respective level of accuracy for the last 3 years.


                                            / Slide 19
Accelerated technology transitions per sector


      DRAM: Expanding 4x nm node production capacity in 2010,
            preparing for 3x nm node in 2011
      NAND: Current advanced volume chip production at 3x nm
            node, ramping 2x nm node in 2011
      Logic:            Available production capacity at 6x and 4x nm node,
                        starting 3x nm node in 2011
      MPU:              Production at 3x node in 2010 and starting 2x nm
                        node production in 2011




Source: ASML (4/10)


           / Slide 20
Increasing number of critical exposures in sub 50 nm
nodes require more immersion tools
                                                  DRAM                                                                 NAND
                      8                                                                             8
                      7                                                                             7




                                                                        Immersion Exposures
Immersion Exposures




                      6                                                                             6
                      5                                                                             5
                      4                                                                             4
                      3                                                                             3
                      2                                                                             2
                      1                                                                             1
                      0                                                                             0
                            2008           2009           2010   2011                                    2008   2009          2010   2011


                                                  LOGIC                                                                MPU
                      8                                                                             14

                      7                                                                             12



                                                                              Immersion Exposures
Immersion Exposures




                      6                                                                             10
                      5
                                                                                                     8
                      4
                                                                                                     6
                      3
                                                                                                     4
                      2
                      1                                                                              2

                      0                                                                              0
                            2008           2009           2010   2011                                    2008   2009          2010   2011


                          Snapshot based on average customer product
                          mix (300mm) and layer stacks
                              / Slide 21
Capacity additions and technology transitions
expected in 2011 to meet forecasted DRAM demand*
                                                 DRAM WW monthly wafer production split by node
                                                               2x nm        6x nm        8x nm – 200 mm
                                    1600                       3x nm        8x nm        9x nm – 200 mm
                                                               4x nm        9x nm        1XX nm – 200 mm
                                                               5x nm                     Max. capacity
                                    1400
Wafer Starts [300 mm equiv. KWSM]




                                    1200


                                    1000


                                     800


                                     600


                                     400


                                     200


                                       0
                                           Q1   Q2   Q3   Q4     Q1    Q2     Q3    Q4     Q1    Q2   Q3   Q4   Q1   Q2   Q3   Q4
                                                 2008                   2009                       2010               2011
* Litho demand consistent with Gartner bit growth demand forecast of 50% in 2010 and 52% in 2011
   Source: ASML Simulation model (6/10)
             / Slide 22
Similar pattern in NAND demand*
                                                         NAND WW monthly wafer starts split by node

                                    1400                 1x nm        5x nm        5x nm – 200 mm
                                                         2x nm        6x nm        6x nm – 200 mm
                                                         3x nm        7x nm        7x nm – 200 mm
                                                         4x nm                     Max. capacity
                                    1200
Wafer Starts [300 mm equiv. KWSM]




                                    1000


                                     800


                                     600


                                     400


                                     200


                                      0
                                            Q1      Q2     Q3    Q4    Q1     Q2    Q3    Q4        Q1   Q2     Q3   Q4   Q1   Q2     Q3   Q4
                                                        2008                   2009                      2010                  2011

                   * Litho demand consistent with Gartner bit growth demand forecast of 70% in 2010 and 76% in 2011
                   Source: ASML Simulation Model (6/10)

                                           / Slide 23
Entire Logic/MPU segment has been reducing capacity
since 2005!
                                              Total (foundry + logic/MPU) capacity: Retirement analysis
                                       2250
 Wafer capacity (300 mm equiv. KWSM)




                                              About 60 KWSM (300 mm equiv.) Logic & MPU capacity
                                       2000   per year retired or transferred to another segment for
                                              ≤200 mm fabs
                                       1750
                                                 300 mm
                                       1500      ≤ 200 mm (including retirement or transfer)
                                                 200 + 300 mm combined (incl. retirement)
                                       1250

                                       1000

                                        750

                                        500

                                        250

                                          0
                                              1989
                                              1990




                                              1995
                                              1996
                                              1997




                                              2002
                                              2003




                                              2009
                                              1987
                                              1988



                                              1991
                                              1992
                                              1993
                                              1994




                                              1998
                                              1999
                                              2000
                                              2001
                                              1986




                                              2008
                                              1982
                                              1983




                                              2004
                                              1977
                                              1978
                                              1979
                                              1980
                                              1981



                                              1984
                                              1985




                                              2005
                                              2006
                                              2007
*includes 100, 125, 150 and 200 mm fabs
Source: Gartner (4/10), SEMI (3/10)
             / Slide 24
Logic builds capacity to meet forecasted demand
                   Logic+DSP+MCU 300mm WW monthly wafer starts split by node

             800
                           2x nm     6x nm
                           3x nm     9x nm
             700
                           4x nm     130 nm
                           5x nm
             600


             500
Wafer KWSM




             400


             300


             200


             100


              0
                     Q1   Q2   Q3   Q4   Q1   Q2   Q3   Q4   Q1   Q2     Q3   Q4   Q1   Q2     Q3   Q4
                           2008                2009               2010                  2011

Estimated unit growth 20% in 2010 and 17% in 2011
Source: ASML Simulation model (6/10)
            / Slide 25
Semiconductor manufacturers need new factories

  Publicly announced new fabs with ramp starting in 2010/2011
     Hybrid memory (DRAM and NAND) - 1 fab
     NAND - 2 fabs
     Foundry/Logic - 5 fabs


  Under discussion
     Hybrid memory - 1 fab
     DRAM - 2 fabs
     MPU - 1 fab
     Foundry - 2 fabs




    / Slide 26
ASML business update




/ Slide 27
TWINSCAN NXT maturing for volume chip
manufacturing

  Volume semiconductor production started on TWINSCAN
  NXT at several customers
  Proven industry leading performance of CD imaging
  uniformity well below 1 nm and overlay of less than 2 nm
  Booked 15 systems in Q2
  Backlog 38 systems end Q2
  Around 500,000 wafers have been exposed on NXT
  machines




    / Slide 28
Holistic litho products

  Rapid customer adoption
     All leading edge scanners sold includes one or more
     holistic litho components
     High demand for field upgrades
  Positive effect on both system and service sales
  Optimizes manufacturing tolerances while shrinking chip
  features and provide faster start production of new chip
  designs




    / Slide 29
EUV - NXE:3100 six machines to ship in next 12 months



   Completing
integration tests




      / Slide 30
Outlook and summary




/ Slide 31
Q3 2010 outlook

 Net sales expected around € 1.1 billion
 Gross margin expected of about 43% in Q3
 R&D is expected at € 137 million net of credits
 SG&A is expected at € 50 million
 Q3 bookings levels anticipated around € 1.3 billion
 ASML 2010 sales expectations revised upward to
 10% - 15% above the peak sales level of € 3.8 billion
 with operating leverage providing record profitability




     / Slide 32
/ Slide 33

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2010 Q2 Forecast

  • 1. ASML 2010 Second Quarter Results Sales set for new high amid increasing semiconductor fab spend July 14, 2010 / Slide 1
  • 2. Safe Harbor "Safe Harbor" Statement under the US Private Securities Litigation Reform Act of 1995: the matters discussed in this document may include forward-looking statements, including statements made about our outlook, realization of backlog, IC unit demand, financial results, average selling price, gross margin and expenses. These forward looking statements are subject to risks and uncertainties including, but not limited to: economic conditions, product demand and semiconductor equipment industry capacity, worldwide demand and manufacturing capacity utilization for semiconductors (the principal product of our customer base), including the impact of general economic conditions on consumer confidence and demand for our customers’ products, competitive products and pricing, the impact of manufacturing efficiencies and capacity constraints, the pace of new product development and customer acceptance of new products, our ability to enforce patents and protect intellectual property rights, the risk of intellectual property litigation, availability of raw materials and critical manufacturing equipment, trade environment, changes in exchange rates and other risks indicated in the risk factors included in ASML’s Annual Report on Form 20-F and other filings with the US Securities and Exchange Commission. / Slide 2
  • 3. Agenda Business summary Market ASML business update Outlook and summary / Slide 3
  • 5. Q2 results - highlights Net sales of € 1,069 million, 43 systems shipped valued at € 923 million, service revenue at € 146 million Gross margin of 43.0% (record) Operating margin of 27.4% (record) Shipped 25 immersion systems Booked 59 systems, valued at € 1,179 million Backlog increased to € 2,401 million (record), 101 systems with ASP of € 26.7 million for new tools, including 58 immersion tools Generated € 193 million cash from operations / Slide 5
  • 6. Total net sales M€ Guidance: 2010 sales to grow 10 - 4500 15% above 4000 historical 3,768 3,582 peak of 3500 € 3.8 billion 955 1,053 2,954 3000 2369 2,529 494 Q4 Net sales 2500 Q3 934 548 697 2000 958 Q2 533 1,596 1500 Q1 930 844 581 1,069 763 942 1000 555 500 949 919 685 629 277 742 183 0 2005 2006 2007 2008 2009 2010 Numbers have been rounded for readers’ convenience. / Slide 6
  • 7. Net system sales breakdown in value: Q2 2010 Technology Sales in Units ArF immersion 25 83% ArF KrF 11% 12 Immersion 2 4 85% ArF dry 3% ArF ArF dry KrF I-Line immersion I-Line 1% Region End-use USA Foundry 16% NAND 25% Korea Europe 10% 33% 20% IDM 12% Japan 8% DRAM 43% Taiwan Singapore 5% 24% Assuming hybrid memory China 4% fabs to produce DRAM Numbers have been rounded for readers’ convenience. / Slide 7
  • 8. Consolidated statements of operations M€ Q1 10 Q2 10 Net sales 742 1,069 Gross profit 298 459 Gross margin % 40.3% 43.0% R&D costs 120 125 SG&A costs 41 42 Income from operations 137 292 Operating income % 18.5% 27.4% Net income 107 239 Net income as a % of net sales 14.5% 22.4% Numbers have been rounded for readers’ convenience. / Slide 8
  • 9. Key financial trends 2009 – 2010 Consolidated statements of operations M€ Q2 09 Q3 09 Q4 09 Q1 10 Q2 10 Net Sales 277 555 581 742 1,069 Gross profit 34 191 220 298 459 Gross margin % 12.5% 34.4% 38.0% 40.3% 43.0% R&D costs 118 115 115 120 125 SG&A costs 40 37 37 41 42 Income (loss) from operations (124) 39 68 137 292 Operating income % -44.7% 6.9% 11.8% 18.5% 27.4% Net income (loss) (104) 20 50 107 239 Net income (loss) as a % of net -37.6% 3.6% 8.7% 14.5% 22.4% sales Units sold 10 24 25 34 43 ASP new systems 31.1 23.4 19.7 25.8 25.6 Net bookings value 394 777 956 1,004 1,179 Numbers have been rounded for readers’ convenience. Numbers have been adjusted for consolidation of variable interest entity. / Slide 9
  • 10. Cash flows M€ Q1 10 Q2 10 Net income 107 239 Adjustments to reconcile net income to net cash flows from operating activities; Impairment and obsolescence 15 22 Depreciation and amortization 35 36 Deferred income taxes 24 6 Other non-cash items 3 4 Change in assets and liabilities (143) (114) Net cash provided by (used in) operating activities 41 193 Net cash provided by (used in) investing activities (7) (18) Net cash provided by (used in) financing activities 10 (79) Total FX effects 6 6 Net increase in cash and cash equivalents 50 102 Numbers have been rounded for readers’ convenience. / Slide 10
  • 11. Balance sheets M€ Assets Mar 2010 Jun 2010 Cash and cash equivalents 1,087 25% 1,189 24% Accounts receivable, net 630 14% 812 17% Finance receivables, net 23 1% – 0% Inventories, net 1,156 26% 1,309 27% Other assets 346 8% 343 7% Tax assets 273 6% 302 6% Fixed assets 880 20% 912 19% Total assets 4,395 100% 4,867 100% Liabilities and shareholders’ equity Mar 2010 Jun 2010 Current liabilities 1,613 37% 1,783 36% Non-current liabilities 971 22% 1,005 21% Shareholders’ equity 1,811 41% 2,079 43% Total liabilities and shareholders’ equity 4,395 100% 4,867 100% Numbers have been rounded for readers’ convenience. / Slide 11
  • 12. Backlog as of June 27, 2010 New systems Used systems Total systems Backlog Backlog Backlog Units 86 15 101 Value M€ 2,296 M€ 105 M€ 2,401 ASP M€ 26.7 M€ 7.0 M€ 23.8 • 77 % of backlog or € 1,859 million system sales carry shipment dates in the next 6 months • Booked 48 new tools at € 1,145 million, 11 used at € 34 million Note: Due to possible customer changes in delivery schedules and to cancellation of orders, our backlog at any particular date is not necessarily indicative of actual sales for any succeeding period. Numbers have been rounded for readers’ convenience. / Slide 12
  • 13. Backlog value M€ 0 500 1000 1500 2000 2500 3000 Jan 04 Jul 04 / Slide 13 Jan 05 Jul 05 Jan 06 Jul 06 Jan 07 Jul 07 Backlog value Jan 08 Backlog: value and litho units Units Jul 08 Jan 09 Jul 09 Jan 10 Jul 10 0 50 100 150 200 250 300 Backlog in units
  • 14. Backlog in value per June 27, 2010 Total value M€ 2,401 Technology KrF 16% 58% NXT I-Line 1% 23% XT ArF dry 2% ArF Region immersion End-use 81% Japan 8% USA Singapore 2% 24% IDM Europe 9% 28% Taiwan DRAM 31% China 9% Foundry Korea 44% 13% 17% NAND 15% For hybrid memory fabs assuming 75% for DRAM, 25% for NAND Numbers have been rounded for readers’ convenience. / Slide 14
  • 15. Bookings activity by sector - total value M€ 1,179 Bookings in value Bookings in units Foundry 22% NAND 13% Foundry NAND 12% IDM 27% DRAM 20% 45% DRAM IDM 20% 41% For hybrid memory fabs assuming 75% for DRAM, 25% for NAND / Slide 15
  • 17. More devices, bigger market in mobile Computing growth drivers over time, 1960 – 2020E 1,000,000 More than 100,000 Just phones Devices/Users (MM in Log Scale) • Smartphone n tio • Kindle 10,000 egra • Tablet g int • MP3 sin 1,000 • Cell phone / PDA Mobile rea Internet • Car Electronics 100 In c Desktop Internet 10B+ Users GPS, ABS, A/V • Mobile Video 1B+ Units / PC Users • Home 10 100MM+ Units entertainment • Games Minicomputers 1 10MM+ Units • Wireless home appliances Mainframes 1MM+ Units 0 1960 1970 1980 1990 2000 2010 2020 Source: Morgan Stanley, The Mobile Internet Report, Dec 2009 / Slide 17
  • 18. Market overview Semiconductor unit growth back to historical trend, catch up capacity investments required in all sectors after a long period of slow capacity growth Share of new technology nodes in total semiconductor market accelerating as shrink continues to enable reduced chip cost and increased bit growth New technologies nodes require much more immersion layers and litho tool capacity than actual installed base allows / Slide 18
  • 19. Semiconductor revenue outlook 2010 is +28% and +10% in 2011 2010 Semiconductor revenue growth forecast over time 35% Future Horizons YoY Semiconductor revenue growth SIA 30% Semico 25% Dataquest IC Insights 20% WSTS iSuppli 15% VLSI Research 10% AVERAGE 5% 0% Oct-09 Dec-09 Jan-10 Jun-10 Jul-10 Aug-10 Sep-10 Oct-10 Jan-09 Feb-09 Sep-09 Nov-09 Feb-10 Apr-10 Mar-09 Apr-09 May-09 Jun-09 Jul-09 Aug-09 Mar-10 May-10 Dec-10 Nov-10 Date of Forecast Sources: See chart (7/10) Weighted average is based on age of forecast from market institute and respective level of accuracy for the last 3 years. / Slide 19
  • 20. Accelerated technology transitions per sector DRAM: Expanding 4x nm node production capacity in 2010, preparing for 3x nm node in 2011 NAND: Current advanced volume chip production at 3x nm node, ramping 2x nm node in 2011 Logic: Available production capacity at 6x and 4x nm node, starting 3x nm node in 2011 MPU: Production at 3x node in 2010 and starting 2x nm node production in 2011 Source: ASML (4/10) / Slide 20
  • 21. Increasing number of critical exposures in sub 50 nm nodes require more immersion tools DRAM NAND 8 8 7 7 Immersion Exposures Immersion Exposures 6 6 5 5 4 4 3 3 2 2 1 1 0 0 2008 2009 2010 2011 2008 2009 2010 2011 LOGIC MPU 8 14 7 12 Immersion Exposures Immersion Exposures 6 10 5 8 4 6 3 4 2 1 2 0 0 2008 2009 2010 2011 2008 2009 2010 2011 Snapshot based on average customer product mix (300mm) and layer stacks / Slide 21
  • 22. Capacity additions and technology transitions expected in 2011 to meet forecasted DRAM demand* DRAM WW monthly wafer production split by node 2x nm 6x nm 8x nm – 200 mm 1600 3x nm 8x nm 9x nm – 200 mm 4x nm 9x nm 1XX nm – 200 mm 5x nm Max. capacity 1400 Wafer Starts [300 mm equiv. KWSM] 1200 1000 800 600 400 200 0 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 2008 2009 2010 2011 * Litho demand consistent with Gartner bit growth demand forecast of 50% in 2010 and 52% in 2011 Source: ASML Simulation model (6/10) / Slide 22
  • 23. Similar pattern in NAND demand* NAND WW monthly wafer starts split by node 1400 1x nm 5x nm 5x nm – 200 mm 2x nm 6x nm 6x nm – 200 mm 3x nm 7x nm 7x nm – 200 mm 4x nm Max. capacity 1200 Wafer Starts [300 mm equiv. KWSM] 1000 800 600 400 200 0 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 2008 2009 2010 2011 * Litho demand consistent with Gartner bit growth demand forecast of 70% in 2010 and 76% in 2011 Source: ASML Simulation Model (6/10) / Slide 23
  • 24. Entire Logic/MPU segment has been reducing capacity since 2005! Total (foundry + logic/MPU) capacity: Retirement analysis 2250 Wafer capacity (300 mm equiv. KWSM) About 60 KWSM (300 mm equiv.) Logic & MPU capacity 2000 per year retired or transferred to another segment for ≤200 mm fabs 1750 300 mm 1500 ≤ 200 mm (including retirement or transfer) 200 + 300 mm combined (incl. retirement) 1250 1000 750 500 250 0 1989 1990 1995 1996 1997 2002 2003 2009 1987 1988 1991 1992 1993 1994 1998 1999 2000 2001 1986 2008 1982 1983 2004 1977 1978 1979 1980 1981 1984 1985 2005 2006 2007 *includes 100, 125, 150 and 200 mm fabs Source: Gartner (4/10), SEMI (3/10) / Slide 24
  • 25. Logic builds capacity to meet forecasted demand Logic+DSP+MCU 300mm WW monthly wafer starts split by node 800 2x nm 6x nm 3x nm 9x nm 700 4x nm 130 nm 5x nm 600 500 Wafer KWSM 400 300 200 100 0 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 Q1 Q2 Q3 Q4 2008 2009 2010 2011 Estimated unit growth 20% in 2010 and 17% in 2011 Source: ASML Simulation model (6/10) / Slide 25
  • 26. Semiconductor manufacturers need new factories Publicly announced new fabs with ramp starting in 2010/2011 Hybrid memory (DRAM and NAND) - 1 fab NAND - 2 fabs Foundry/Logic - 5 fabs Under discussion Hybrid memory - 1 fab DRAM - 2 fabs MPU - 1 fab Foundry - 2 fabs / Slide 26
  • 28. TWINSCAN NXT maturing for volume chip manufacturing Volume semiconductor production started on TWINSCAN NXT at several customers Proven industry leading performance of CD imaging uniformity well below 1 nm and overlay of less than 2 nm Booked 15 systems in Q2 Backlog 38 systems end Q2 Around 500,000 wafers have been exposed on NXT machines / Slide 28
  • 29. Holistic litho products Rapid customer adoption All leading edge scanners sold includes one or more holistic litho components High demand for field upgrades Positive effect on both system and service sales Optimizes manufacturing tolerances while shrinking chip features and provide faster start production of new chip designs / Slide 29
  • 30. EUV - NXE:3100 six machines to ship in next 12 months Completing integration tests / Slide 30
  • 32. Q3 2010 outlook Net sales expected around € 1.1 billion Gross margin expected of about 43% in Q3 R&D is expected at € 137 million net of credits SG&A is expected at € 50 million Q3 bookings levels anticipated around € 1.3 billion ASML 2010 sales expectations revised upward to 10% - 15% above the peak sales level of € 3.8 billion with operating leverage providing record profitability / Slide 32