1. LioniX BV
PO Box 456
7500 AH Enschede
the Netherlands
Phone: +31 (0)53 489 3827
Fax: +31 (0)53 489 3601
Mail: info@lionixbv.com
Website: www.lionixbv.com
Our chips enable your products
Create innovative solutions based on
emerging micro- and nano technologies
Our chips enable your products 1

2. Who we are ?
LioniX is a leading provider in co-development
of products and manufacturing of components
based on cutting-edge micro/nano technology
for its (OEM) customers
Our chips enable your products 2

3. Overview
Founded in 2001
Located at the Business
and Science Park
(Enschede)
> 50% PhD
Our chips enable your products 3

4. Panthera Group
Infrastructure
– LioniX Design to manufacturing
– iX-factory (Small) volume production
– PhoeniX Software Software (simulation and infrastructure)
– OctroliX IP
– SurfiX Surface functionalization
Product Market Combinations
– XiO Photonics Visible light TriPleXTM applications
– Chemtrix Chemical microreactors
– Satrax Phased array antenna systems
– Capilix CE sensor technology
– PLC diagnostics Bio Sensing
– SmartTip Smart Probing
Our chips enable your products

5. Global presence
Established worldwide
customer base
Representatives in UK,
Scandinavia, Israel,
USA, Asia
A1
Our chips enable your products 5

6. Slide 5
A1 specify locations in Asia
Arne Leinse; 28-10-2011

7. What we do?
LioniX provides ‘design to manufacturing’ and
‘horizontal integration’ by partnering with
foundries, suppliers of complementary technologies
and R&D institutes
LioniX specializes in applications of integrated
optics, microfluidics and optofluidics including
surface functionalization
LioniX offers small + medium volume
manufacturing, second sourcing as well as transfer
to medium + high volume manufacturing
LioniX focuses on Life Sciences, Telecom, Datacom,
Industrial Process Control and Space
Our chips enable your products 6

8. Design to manufacturing
Know-how Demonstration Optimization Stabilization Realization Production
phase phase phase phase phase phase
* Idea * Feasibility * Product design * Process flow * Yield analysis * Fabrication
* Market Study * Preliminary * Fabrication * Manufacturable monitoring
* Preliminary design plan design
product specs * Preliminary * Product * Technical
* Proof of process specs specifications
principle * Shortloops * Quality criteria
* Testruns PRODUCT PRODUCT FABRICATION MASS
DEVELOPMENT DEVELOPMENT FABRICATION
RUNS RUNS
concept prototype A ‘0' series
demonstrator prototype B product
Our chips enable your products 7

9. Slide 7
A2 update photos
Arne Leinse; 28-10-2011

10. Foundry services
MEMS foundry services (micro/nano
based films, structures and
components)
Our chips enable your products

11. Manufacturing
Prototyping and small-medium volume
production at:
Professional state-of-the-art micro/nano facilities of
the MESA+ NanoLab
Private facilities for our core technologies
iX-factory GmbH (Dortmund, Germany)
Our chips enable your products 9

12. What we do?
LioniX provides ‘design to manufacturing’ and
‘horizontal integration’ by partnering with
foundries, suppliers of complementary technologies
and R&D institutes
LioniX specializes in applications of integrated
optics, microfluidics and optofluidics including
surface functionalization
LioniX offers small + medium volume
manufacturing, second sourcing as well as transfer
to high volume manufacturing
LioniX focuses on Life Sciences, Telecom, Datacom,
Industrial Process Control and Space
Our chips enable your products 10

13. Core competences
Our chips enable your products

14. Integrated Optics
Si3N4 waveguides between SiO2
Cladding layers.
- Nanometer Thickness accuracy,
- Å Roughness
– Low Pressure Chemical Vapor
Deposition
– Photolithography
– Reactive Ion Etching
Our chips enable your products

15. LPCVD:
Low Pressure
Chemical Vapour Deposition
Silicon: Silane (SiH4)
Silicon Oxide: Silane
+O2 Or TEOS
Si(OC2H5)4
Silicon Nitride: Silane
+ NH3
Our chips enable your products

16. RIE Etching
Our chips enable your products

17. Optical connections
Wet etching with crystalline anisotropy
Our chips enable your products

18. Xio Photonics
Triplex-Waveguide based Beam Combiner
Our chips enable your products

19. Our chips enable your products 17

20. 10 Micron
accuracy
Micro-Fluidics
Sub 10nm
Roughness
Our chips enable your products

21. On-line water analysis by
Capillary Electrophoresis
capacitive conductivity
sensor
Our chips enable your products

22. Micro reactor technology
• Total solutions for the in the
field of micro reactor
technology
• Pharmaceutical and fine
chemical industry
• Systems based on microfluidic
glass chips
Our chips enable your products 20

23. Opto-Fluidics
Light-Fluid interactions
(Sensing / Excitation)
Our chips enable your products

24. Surface Modification
Our chips enable your products

25. Connecting Micro-Fluidics to Micro-
Optics to realize Opto-Fluidics
Bonding of Micro-Optic chip to Micro
Fluidic chip.
Si/Si Glass/Glass or Si/Glass Bonding.
Direct / Anodic / Eutectic
Bonding requires nm roughness.
Our chips enable your products

26. CMP (Chemical Mechanical
Polishing) prior to bonding
10 Nm sized particles and
Fluor polish the surface to
nm roughness
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27. Opto-Fluidic Life Marker Chip
Our chips enable your products

28. Thank you for your attention.
Questions?
Our chips enable your products