MEMS market will double over the next 6 years, pushing manufacturers to consider consumer applications in their strategies MEMS IS STILL ON A DYNAMIC GROWTH PATH, TARGETING US$22.5B IN 2018 In 2012, the IC industry saw a 2% decline, but Yole Développement’s research reveals the MEMS sector managed another 10% growth to become an $11B business. Analysts expect a 12-13% CAGR through 2018 to create a $22.5B MEMS market, growing to 23.5 billion units. We have identifi ed a number of changes as old MEMS products mature and new ones emerge. Cell phone demand drove strong growth for MEMS devices. Inertial sensor maker InvenSense continued to prove the worth of its fabless model with a ~30% increase in sales. Triquint saw 27% growth as its BAW fi lters won more slots in smartphones. Yole Développement’s report shows markets for inkjet heads and DLPs have matured, but we see huge growth on the horizon for combination inertial sensors and for MEMS timing devices. Combination inertial sensors are starting to see high volume adoption in both consumer and automotive markets, and will quickly account for a significant part of inertial sensor sales. Yole Développement’s report identifies new innovative MEMS devices that continue to emerge. We expect to see a number of them start production, though not reach signifi cant volumes for a few years. MEMS autofocus could come to market shortly. Big smartphone players are now looking at adding environmental sensors for heat and humidity, and MEMS devices could win those slots. GROWTH OF CONSUMER APPLICATIONS IS PUSHING NEW STRATEGIES FOR MEMS COMPANIES Consumer is still the leading MEMS application with increasing needs for sensory interface. Yole Développement’s report ranks the top MEMS suppliers. In 2012, for the first time, the top two MEMS suppliers on our annual Top 30 MEMS companies ranking are suppliers of inertial sensors, rather than of inkjet heads or micro-mirror actuators that have long dominated the sector. STMicroelectronics is the first company to grow a $1billion MEMS business, surpassing Texas Instruments. The second sensor supplier, Robert Bosch, has also pushed ahead of Texas Instruments and Hewlett Packard for the first time. The expanding demand for MEMS in both smartphones and automotive applications is creating a rising group of players, that can expect to see solid sales in their future. More information on that report at http://www.i-micronews.com/reports/Status-MEMS-Industry-2013/1/384/

1. © 2013
Copyrights © Yole Développement SARL. All rights reserved.
Status of the MEMS Industry 2013

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Content of the Report
• About the authors … 4
• Glossary … 5
• Companies listed in the report … 6
• Key report features … 7
• What we saw, what we missed in 2012 edition … 8
• Who should be interested … 9
• Methodology & definitions … 10
• Executive Summary … 13
• MEMS Market update 2012-2018 … 48
• MEMS Players ranking … 57
• TOP 30 by Device Type … 68
• Automotive … 87
– MEMS markets in units/$M … 88
– Comments by device … 90
– Inertial … 98
– Pressure … 113
– Microphones … 124
– Infrared sensors … 127
• Consumer … 134
– MEMS markets in units/$M … 135
– Comments by device … 137
– Pressure … 147
– Microphones … 154
– Inertial … 161
– RF MEMS … 166
– Optical MEMS … 172
– IJHeads … 179
• Defense / Aeronautics … 183
– MEMS markets in units/$M … 184
– Comments by device … 186
– Pressure … 192
– Inertial … 197
– Infrared sensors … 207
– RF MEMS … 215
• Medical … 220
– MEMS markets in units/$M … 221
– Comments by device … 223
– Pressure … 233
– Microphones … 240
– Accelerometers … 244
– Gyros … 250
– Microfluidics … 254
– Infrared sensors … 263
– Micro dispensers … 267
– Flow meters … 277
– Emerging MEMS … 287
– Other MEMS … 292
• Industrial / telecom … 302
– MEMS markets in units/$M … 303
– Comments by device … 305
– Pressure … 310
– Inertial MEMS … 312
– Infrared sensors … 313
– Others MEMS for industry … 314
– Optical MEMS for telecommunications … 315

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Content of the Report
• MEMS Finance Analysis … 317
• ASIC MEMS … 331
• MEMS Manufacturing changes … 364
• Conclusions … 385
• Appendices … 387
• Forecast changes 2012/2011 … 388
– IJH … 389
– Pressure … 392
– Microphones … 396
– Consumer inertial … 399
– High performance inertial … 403
– RF MEMS & Oscillators … 407
– IR sensors & microbolometers … 411
– Optical MEMS … 418
– Micro displays … 420
– Auto Focus … 422
– Optical MEMS for fiberoptics … 425
– Pico projection … 428
– Microfluidics … 430
• Yole Développement presentation … 434

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Key Report Features
• The objectives of this report is to provide:
– Understanding of the MEMS markets & players dynamics.
– Market data on MEMS in units & $M for 2012-2018.
– MEMS Applications overview (automobile, consumer, defense &
aeronautics, medical, industry & telecommunications)
– ASIC MEMS analysis
– A&M analysis
– The challenges for MEMS manufacturing

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2004-2012: 8 years of MEMS history!
• Since 2004 (year of our first « Status of the MEMS Industry » report, we anticipate many MEMS events:
– In 2005, consumer (named “IT & Telecoms”) was already about 50% of the MEMS market in value. This has been a
continuous growth since.
– In 2004, already more than 70% of the MEMS market was generated by a few MEMS devices: IJheads, micro-mirrors,
pressure sensors, accelerometers and gyros for auto and medical applications. IJHeads, pressure and inertial still
accounts for a large fraction of the market toady.
– We anticipated new market opportunities, e.g.:
• The use of gyros in smartphones.
• We believed large opportunities was coming for microphones in mobiles.
– Microfluidics / biochips were already developed on glass / polymer substrates.
– We anticipated the difficult technical & market challenges for RF MEMS
– Fabless models was emerging
– The MEMS law (“One MEMS, one process”) was already here!
• What we missed:
– The unsuccessful market entry of some MEMS devices; e.g. micro fuel cells (expected in 2007), micro motors …
– The slower market growth for uncooled IR imagers
– The quick growth of STMicroelectronics in the MEMS business
– The coming of MEMS microphones players in the top 10 of the MEMS ranking
– The unsuccessful growth of the MEMS foundry business (only a few players manage to have a successful business)
– The restriction of the CMOS MEMS technology to a few devices only
– The coming of combos
– The maturity of MEMS processes

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MEMS Market Historical Data
2004-2012 in US$M
2004 2005 2006 2007 2008 2009 2010 2011 2012
$M $5 240 $5 630 $6 350 $7 200 $6 800 $7 538 $8 880 $9 934 $10 930
$0
$2 000
$4 000
$6 000
$8 000
$10 000
$12 000
2004 - 2012 MEMS Markets ($M)
Source Yole Développement

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MEMS markets by application

8. © 2013• 8
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MEMS markets by application

9. © 2013• 9
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First implementations of MEMS pressure
sensors in smartphones & tablets
• Motorola Xoom Tablet
– Bosch Sensortec BMP085
• Galaxy Note Tablet
– STMicroelectronics LPS331AP
• Galaxy Nexus Smartphone
– Bosch Sensortec BMP180
• Galaxy S3/4 Smartphone
– STMicroelectronics LPS331AP
Motorola Xoom Tablet
Source: Motorola
Galaxy Note Tablet
Source: Samsung
Galaxy Nexus
Smartphone
Source: Samsung
BMP085
Source: Bosch Sensortec
LPS331AP
Source: ST Microelectronics
BMP180
Source: Bosch Sensortec
LPS331AP
Source: STMicroelectronics
Galaxy SIII/ IV
Smartphone
Source: Samsung

10. © 2013• 10
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Sampling
/ R&D
High
volume
Small
production
MEMS value proposition in mobile devices
DelfMEMS switch
Freescale pressure sensor
Polight MEMS
autofocus
Sensirion Humidity
Sensor
AudioPixel microspeaker
Sand 9 MEMS
Oscillator
NextInput SoftTouch
interface
TI temperature sensor versus
a competing thermopile
sensor
Wispry antenna tuner on cell
phone board
Thermal imager MuOptics
Mirasol display
STM 9-axis
Knowles microphones
Scanning mirror from
Lemoptix
Improved
visual
experience
Navigation &
environment
sensing
Sound
quality
Better communication
performances
New tactile
interface
Infrared sensing
Increased battery lifetime
Nectar fuel cell

11. © 2013• 11
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Example of MEMS device description:
Inertial combos for consumer
Market description:
• Provides accelerometer and / or gyroscopes and / or magnetometer functionalities
• With software: can provide higher added value functionalities: pointing, activity monitoring, pedestrian
navigation…
Main Device Manufacturers:
ST, Bosch Sensortec, InvenSense, Freescale...
Main trends:
• E-compass volumes increased significantly in 2012 with the involvement of Bosch and ST
• 6-axis IMUs are being accepted by the market since 2012: most growing type of integration
• 9-axis products started to be released in 2012. There are remaining challenges for such multi-sensor
modules but the market takes off this year
• Pressure sensing could be integrated in 10-axis combos but this is not likely for the near term
• Increasing importance of software (can be integrated in the combo or sold for integration in the sensor
hub / application processor)
• More and more suppliers: the competition is increasing
Market data:
2013: $451M; 472 Munits
2018: $1.40B; 3333 Munits
CAGR2013-2018: 30% (in value)
Main System Integrators:
Cellphone / tablet makers (Samsung, Apple…), set top box / remote control OEMs, sports companies…

12. © 2013• 12
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Top-Down Approach: Estimated Sales per
MEMS Product for MEMS Companies
PLAYERS
Sales 2012
($M)
IJH
Pressur
e
µphone
s
Acceler
o
Gyros
Magnet
ometers
Inertial
combos
µbolo
Projecti
on
µfluidics RF
Others
(mass
flow…)
foundry
1 STMICROELECTRONICS $1 000 $32 $22 $279 $382 $83 $0 $203
2 ROBERT BOSCH $842 $268 $17 $299 $136 $0 $99 $21 $2
3 TEXAS INSTRUMENTS $825 $811 $0 $14
4 HEWLETT PACKARD $645 $645 $0
5 KNOWLES ELECTRONICS $440 $440 $0
6 PANASONIC $386 $35 $15 $336 $0
7 DENSO $356 $187 $162 $7 $0
8 CANON $279 $279 $0
9 AVAGO TECHNOLOGIES $276 $276 $0
10 FREESCALE SEMICONDUCTOR $268 $72 $195 $1 $0
11 ANALOG DEVICES $266 $35 $161 $70 $0
12 AKM $249 $243 $6 $0
13 SEIKO EPSON $247 $215 $32 $0
14 INFINEON TECHNOLOGIES $187 $98 $58 $31 $0
15 INVENSENSE $187 $145 $41 $0
16 MURATA $179 $4 $97 $42 $36 $0
17 SENSATA $178 $178 $0
18 HONEYWELL $161 $41 $59 $40 $16 $0 $5
19 GE SENSING $152 $152 $0
20 TRIQUINT $130 $130 $0
21 LEXMARK $93 $93 $0
22 UTC AEROSPACE $91 $32 $46 $0 $14
23 SONY $83 $18 $0 $65
24 FLIR SYSTEMS $81 $81 $0
25 MEASUREMENT SPECIALTIES INC. $81 $81 $0
26 KIONIX $75 $75 $0
27 AAC ACOUSTICS $65 $65 $0
28 OMRON $60 $37 $9 $6 $9
29 ULIS $60 $60 $0
30 MEMSIC $54 $33 $20 $1

13. © 2013• 13
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Example:
MEMS-based Fundraising
2011 & 2012 database
2011 Company Product category
Amount raised (US
$M)
Investment type
June Lilliputian Systems Fuel cell (microfluidics) 21 8th / 7th round (Serie B)
April Qualtre Gyroscopes (inertial) 10 3rd round
April Calient Technologies Optical MEMS for telecom 19.4 13th / r4later
May SiTime Oscillator, Resonator (RF MEMS) 17.8 4th / 3rd round
May PoLight MEMS Auto-Focus (emerging MEMS) 15.4 3rd / 2nd round
June Cavendish Kinetics RF MEMS variable capacitors 10 3rd / later
June Wispry RF MEMS variable capacitors 3.6 10th / bridge
September Discera Oscillator, Resonator (RF MEMS) 2 7th / bridge
September GnuBIO DNA sequencing technology (microfluidics) 5 2nd round
September Alphabet Energy Thermoelectric energy harvesting (emerging MEMS) 12 3rd / 1st round
September Telecardia pH sensor for industrial and medical (muicrofluidics) 1.5 NA (1st ?)
October Sand 9 Oscillator, Resonator (RF MEMS) 5.9 4th round
November Wispry RF MEMS variable capacitors 14.1 11th / 7th round
Not included (not MEMS
centric)
KAIAM Corporation (packaging of optical components for telecom)…
2012 Company Product category
Amount raised (US
$M)
Investment type
January Senova Systems Carbon based solid state pH sensor (microfluidics / medical) 6.7 Series B financing
January Owl biomedical Cell sorting platform based on MEMS (microfluidics / medical) 3 NA (early stage)
February Rheonix Microfluidic platform for the molecular diagnostics(microfluidics / medical) 6 3rd round
April Wasatch Microfluidics
Protein analysis equipment for the drug discovery and research market
(microfluidics / medical)
0.47 3rd round
May Micropelt Thermoelectric generators (emerging MEMS) 6.5 3rd round
May OrthoSensor Orthopedic sensing solutions (microfluidics / medical) 15 Series B
June Sand 9 Silicon MEMS timing devices (RF MEMS) 23 5th round
July Pyreos MEMS -based infrared sensor array (optical MEMS) 9.71 4th round
July Movea Motion sensor software solutions (inertial) 7.4 Series C
September Microgen Piezo MEMS energy harvester (emerging MEMS) 2.6 Serie A
September Sand 9 Silicon MEMS timing devices (RF MEMS) 3 6th round (Serie C)
September Lilliputian Systems MEMS -based solid oxide fuel cell (emerging MEMS) 40 8th round
September CrossFiber MEMS-based photonic switches (optical MEMS) 13.3 Serie D
October Boston Microfluidics
Microfluidic-based device for sample collection and processing
(microfluidics / medical)
0.1 NA (early stage)
October Sensimed
MEMS-based contact lens for glaucoma detection (pressure / emerging
MEMS)
13.2 Serie C

14. © 2013• 14
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ASIC MEMS 2012 Market Value
• The ASIC market is 29% of the MEMS module market (packaged die).
• 43% of the market is in the hands of IDMs with MEMS business (STM, Infineon,
Bosch …) while 57% is outsourced to IC foundries.
57%
43%
Estimated 2012 out-sourced ASIC MEMS %
(TOTAL~$3.5B)
IDM MEMS IC Foundries (TSMC, UMC …)
29%
32%
35%
4%
2012 MEMS Market Value Breakdown (TOTAL~$10B)
ASIC Die Market value MEMS Die Market Value Packaging, Assembly & Test Value Yield losses

15. © 2013• 15
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Example:
ASIC MEMS Market
2012 2013 2014 2015 2016 2017 2018
Others $5 $13 $29 $54 $74 $100 $148
Oscillators $27 $40 $85 $187 $336 $504 $655
RF MEMS $229 $306 $398 $497 $622 $776 $947
Projection systems (small size) $14 $36 $110 $189 $281 $388 $607
Projection systems (large size) $321 $356 $396 $439 $488 $541 $600
Micro displays $1 $1 $2 $14 $42 $74 $110
PIR & Thermopiles $129 $151 $175 $241 $307 $417 $715
Microbolometers $26 $32 $39 $48 $62 $76 $96
Inertial combos $92 $278 $558 $924 $1 285 $1 637 $1 951
Digital Compass $289 $401 $515 $595 $635 $633 $579
Gyroscopes $879 $1 139 $1 332 $1 402 $1 469 $1 551 $1 593
Accelerometers $534 $600 $640 $631 $605 $548 $475
Microphones $154 $196 $229 $267 $316 $356 $409
Pressure Sensors $154 $181 $211 $264 $329 $407 $514
InkJet Heads $419 $405 $391 $379 $367 $356 $342
$0
$2 000
$4 000
$6 000
$8 000
$10 000
$12 000
US$M
ASIC MEMS 2012-2018 Market Value

16. © 2013• 16
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About the Authors of this Report
• Dr Eric Mounier, Senior Analyst
– In 1998, he cofounded Yole Dévelopement. Eric is in charge of market analysis
for MEMS, equipment & material. He is Chief Editor of MEMSTrends &
Micronews magazines. Before joining Yole Développement, Eric worked as a
market analyst at CEA Leti. He has a PhD in microelectronics from the INPG in
Grenoble.
– Contact: mounier@yole.fr
• Laurent Robin, Activity Leader
– He is in charge of the MEMS & Sensors market research at Yole
Développement with a focus on inertial sensors & RF MEMS related
technologies. Laurent holds a Physics Engineering degree from the National
Institute of Applied Sciences in Toulouse, plus a Masters Degree in
Technology & Innovation Management from EM Lyon Business School,
France
– Contact: robin@yole.fr

17. © 2013• 17
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Available MEMS Reports
Trends in MEMS
Manufacturing &
Packaging
MEMS Cosim+
MEMS Manufacturing
Cost Simulation Tool
Ferro-Electric
Thin Films
MEMS
Microphone
Permanent Wafer
Bonding
Thin Wafer
Handling
Infrared Detector
Market, Applications
and Technology
Trends
Technology Trends
for Inertials MEMS
RF Filters, PAs,
Antenna Switches &
Tunability for Cellular
Handsets
Trends in MEMS
Manufacturing &
Packaging
Ferro-Electric
Thin Films
Motion Sensors for
Consumer & Mobile
applications
Uncooled Infrared
Imaging: Commercial &
Military Applications
IMU & Gyro for
Defense, Aerospace
& Industrial
Status of the
CMOS Image
Sensors
3-Axis Consumer
Gyroscopes
New!
Emerging Energy
Harvesting
Devices
New!
MEMS Front-End
Manufacturing
Trends
New!
MEMS Pressure
Sensor
Sensor fusion of
acceleros, gyros &
magnetometers
MEMS for Cell
Phones and
Tablets
New!

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Yole activities in MEMS
Media business
News feed / Magazines /
Webcasts
Reports
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Research
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Market research,
Technology & Strategy
www.yole.fr