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Demonstration of sub-surface
   3-D imaging capability
 Applied Research & Photonics, Inc.
    470 Friendship Road, Suite 10
      Harrisburg, PA 17111, USA
           http://arphotonics.net/
          Phone: +1-717-220-1003
         Email: info@arphotonics.net
Demonstration of sub-surface 3-D
        imaging capability
With the recent development of improved 3D
imaging, ARP’s terahertz scanner is now
capable of “seeing” inside of wafers and other
opaque substrates. A scanning image is
generated pinpointing location and size of
particulate, void, and other defects. In
addition, defect size is quantified by to-the-
scale direct measurements. It can also
visualize the defects on the nanometer scale.
Snap shot of patterns on a wafer




   Scanned surface image of a wafer. Total scan length is ~5 µm.
360° inside view of the object




360° view of a wafer. Color contrast represents objects of different size and material.
Scanner details
• The terahertz sub-surface scanner from ARP
  is a user friendly, easy to use machine.
• All operations are automated via included
  software.
• The machine exhibits an unprecedented
  resolution of a few nanometers in 3 axial
  directions.
• Yet scanning is fast
Scanner details (contd.)
• Screen shot of measurement console
  shown in the next slide.
• All parameters are entered by the front-
  end interface.
• Measured data are accessible for further
  manipulations.
Measurement Console




Screen shot of measurement console. All parameters are entered
via the front-end. Data are easily accessible.
Contact information
For more information, please contact:
Anis Rahman, PhD
email: info@arphotonics.net
Phone: 717-623-8201

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3-D imaging by terahertz scanner

  • 1. Demonstration of sub-surface 3-D imaging capability Applied Research & Photonics, Inc. 470 Friendship Road, Suite 10 Harrisburg, PA 17111, USA http://arphotonics.net/ Phone: +1-717-220-1003 Email: info@arphotonics.net
  • 2. Demonstration of sub-surface 3-D imaging capability With the recent development of improved 3D imaging, ARP’s terahertz scanner is now capable of “seeing” inside of wafers and other opaque substrates. A scanning image is generated pinpointing location and size of particulate, void, and other defects. In addition, defect size is quantified by to-the- scale direct measurements. It can also visualize the defects on the nanometer scale.
  • 3. Snap shot of patterns on a wafer Scanned surface image of a wafer. Total scan length is ~5 µm.
  • 4. 360° inside view of the object 360° view of a wafer. Color contrast represents objects of different size and material.
  • 5. Scanner details • The terahertz sub-surface scanner from ARP is a user friendly, easy to use machine. • All operations are automated via included software. • The machine exhibits an unprecedented resolution of a few nanometers in 3 axial directions. • Yet scanning is fast
  • 6. Scanner details (contd.) • Screen shot of measurement console shown in the next slide. • All parameters are entered by the front- end interface. • Measured data are accessible for further manipulations.
  • 7. Measurement Console Screen shot of measurement console. All parameters are entered via the front-end. Data are easily accessible.
  • 8. Contact information For more information, please contact: Anis Rahman, PhD email: info@arphotonics.net Phone: 717-623-8201