1. Microsystems at Georgia Tech
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microelectronics
Electronic
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Electronics and solid-state
classical physics physics
microsystems

2. So, you wanna study
microsystems…
• Undergraduate coursework opportunities
• Graduate coursework opportunities
• Research opportunities
– UROP/special problems
– MS thesis work
– PhD thesis work

3. Undergraduate Pathway

4. Core Graduate Pathway
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*
*
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* = microsystems core

5. Microelectronics/Microsystems Research Areas
Microsystems and Nanosystems Faculty:
Mark G. Allen, Farrokh Ayazi, Oliver Brand, Albert B. Frazier
Photovoltaics Faculty:
Christiana Honsberg, Bernard Kippelen, Ajeet Rohatgi
Microelectronics Systems Packaging Faculty:
Farrokh Ayazi, Gary S. May, Rao R. Tummala
Manufacturing and Gigascale Integration Faculty:
John D. Cressler, Gary S. May, James D. Meindl
Compound Semiconductors Faculty:
William A. Doolittle, Ian T. Ferguson
Biomedical Microsystems Faculty:
Mark G. Allen, Albert B. Frazier, William D. Hunt

6. Microelectronics Research Center
• 10,000 m2 building
• 2,000 m2 annex
• 700 m2 clean room space
• 18 individual laboratories
• 470 graduate student researchers
• 230 clean room users
• 76 affiliated faculty
Engineering: ECE, MSE, ME, ChE
Sciences: Chemistry, Physics, Mathematics Complete facilities list & info:
www.mirc.gatech.edu
7 Startup Companies utilize facilities under
negotiated arrangements with Georgia Tech
Coming soon: the ‘Nanocenter’

7. What about Microelectronics Research?
Almost 10% of GT research !?

8. Some Current Microsystems Programs
Complementary Metal Oxide Semiconductor Platform (CMOS)
Microelectromechanical Systems
Nanofabrication
Packaging Research Center (resource)
University Center of Excellence in Photovoltaics
Wide Bandgap Materials: Lasers, Lighting, Devices
Chemical Process Research
Computational Electronics
Optoelectronics
Quantum Devices
Computer Aided Manufacturing
Wireless RF Electronics
Ultrafast Fiber Optical Communications

9. Center Research Possibilities
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University Center of
Excellence in Photovoltaics
Packaging
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Center for MEMS and
Microsystem Technologies

10. Polylithic integration of optical
interconnection for
fiber-to-the-chip communication

11. Magnetic Micromachined Materials and Devices
relays
Upper plate
Springs
inductors
Pads
high energy product magnets

12. RF MEMS
LC filters
surface micromachined inductors RF switches

13. High Temperature Wireless Sensors
Pratt and Whitney
Compressor
Combustor
Sensor placed here
DC sputtered 3.8mm 3.8mm
Conductive
Cu electrode
Paste
161µm
Electroplated
Electroplated
Cu electrode
Cu Coil

14. Biomedical Devices
microneedles
flexible microelectrode arrays