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Ultrasonic Anisotropic Conductive Films (ACFs) Bonding
                   of Flexible Substrates on Organic Rigid Boards at Room Temperature

                                  Kiwon Lee, Hyoung Joon Kim, Il Kim, and Kyung Wook Paik
                                         Nano Packaging and Interconnect Lab. (NPIL)
                                        Department of Materials Science and Engineering
                                  Korea Advanced Institute of Science and Technology (KAIST)
                              373-1, Kusong-dong, Yusong-gu, Daejeon, 305-701, Republic of Korea
                                         phone: +82-42-869-3386, fax:+82-42-869-3310
                                                  email: kiwonlee@kaist.ac.kr

                                                                  T/C bonding is often limited by high bonding temperature,
Abstract
                                                                  slow thermal cure, uneven cure degree of adhesive, large
    In this study, a novel Anisotropic Conductive Film (ACF)
                                                                  thermal deformation of the assembly, and high bonding
bonding method for flexible substrate-organic rigid board
                                                                  pressure for large number of I/O interconnections. Therefore,
bonding was investigated using an ultrasonic vibration. And
                                                                  there are constant needs of lower bonding temperature and
the ultrasonic (U/S) ACF bonding was characterized in terms
                                                                  faster cure ACF bonding to replace the conventional T/C
of adhesion strength, electrical continuity in comparison with
                                                                  bonding at 190℃ and 15 seconds.
those of thermo-compression (T/C) bonding.
    An ultrasonic bonder was used to produce ultrasonic               Ultrasonic (U/S) bonding for solder and metal-to-metal
vibration in ACF joints between flexible substrates and           interconnections has been widely investigated and applied in
organic rigid boards. Test boards were 25 um-thick polyimide      flip chip, TAB, or surface mount technologies due to its low
based flexible substrates and 1 mm-thick FR-4 organic rigid       cost, simplicity, and fast assembly time at low temperature
boards. The effect of process conditions, such as U/S powers,     with reduced bonding pressure. However, most of these
bonding pressures, and bonding times on the ACF                   approaches are using lateral direction ultrasonic vibration
temperature were investigated. The in-situ temperature at the     only. Although there have some attempt to use U/S bonding
ACF layer was measured during U/S bonding to determine            as an alternative ACF bonding method, there were no
the relation between the ACF temperature and the bonding          previous reports of successive ACF bonding using U/S
characteristics of ACF joints.                                    bonding except one presentation about the demonstration of
                                                                  U/S ACF flip chip bonding [1].
    The optimized U/S bonding time was obtained within 5
sec at room temperature. The significant meaning of this              In ACFs U/S bonding, ACFs can be rapidly heated by
result is that the ACF bonding process times can be               certain ultrasonic vibration, and it can be described by
remarkably reduced by U/S bonding compared with                   materials’ complex young’s modulus which consists of
                                                                  storage modulus and loss modulus under cyclic stress
conventional 15 sec T/C bonding at 190 ℃. The ACF joints
                                                                  conditions. Storage modulus is related to elastically stored
with the optimized U/S bonding conditions showed similar
                                                                  energy, and loss modulus is related to energy loss which
bonding characteristics as those with T/C bonding in terms of
                                                                  converts to heat. In general, it is well known that visco-elastic
the adhesion strength and the daisy-chain contact resistance.
                                                                  materials such as polymers have large loss modulus.
The Fourier Transformation Infra-Red (FTIR) spectroscopy
                                                                  Therefore, it is expected that highly visco-elastic B-stage
showed that the ACF degree of cure was achieved 90 % at 3
                                                                  ACFs may generate a large amount of heat by an ultrasonic
sec and 95 % at 4 sec. Reliability test results showed that the
                                                                  vibration. By U/S heating in ACFs, rapid ACF curing and
U/S bonded test boards had stable daisy-chain contact
                                                                  bonding can be obtained without additional chip/substrate
resistances in 85 ℃/85 % RH test and 125 ℃ high                   heating.
temperature storage test for 1000 hours and -55 ℃~125 ℃               In this study, a novel Anisotropic Conductive Film (ACF)
thermal cycling test for 1000 cycles.                             bonding method for flexible substrate-organic rigid board
1. Introduction                                                   bonding was investigated using an ultrasonic vibration. And
    Anisotropic Conductive Films (ACFs) are well known            the ultrasonic (U/S) ACF bonding was characterized in terms
adhesive interconnect materials which consists of conducting      of adhesion strength, electrical continuity in comparison with
particles and adhesive polymer resins in a film format. And       those of thermo-compression (T/C) bonding, and its reliability
they have been widely used as interconnect materials in flat      was evaluated.
panel display applications such as Out Lead Bonding (OLB),        2. Experiments
chip-on-glass (COG), and chip-on-film (COF), flex to PCB          2.1 Materials preparation
bonding, and also in flip chip semiconductor packaging
                                                                      Test boards were 25 um-thick polyimide based flexible
applications. ACF interconnects are simple and lead-free
                                                                  substrates and 1mm-thick FR-4 organic rigid boards. Figure 1
processing as well as cost effective packaging method
                                                                  shows the design of test boards which have 300 um pitch Cu
compared with solder interconnects.
                                                                  patterns. The ACF was epoxy based adhesive film with 40 um
    For ACF interconnection, thermo-compression (T/C)             thickness, and they contained Au coated Ni particles with 8
bonding is the most common method, however it is necessary
to reduce the bonding temperature, time and pressure, because

1-4244-0985-3/07/$25.00 ©2007 IEEE                            480    2007 Electronic Components and Technology Conference
um diameter as conductive particles. Table 1 summarizes the          In-situ ACF temperature during U/S bonding was measured
specifications of test boards and the ACF.                          to investigate the effect of U/S bonding conditions such as
                                                                    U/S power and bonding force on ACF temperatures. Figure 3
                                                                    shows the in-situ ACF temperature measurement set-up with
                                                                    40um-thick k-type thermocouples and a thermometer with
                                                                    150ms sampling period.




   Figure 1. The design of (a) organic rigid test board and             Figure 3. A schematic diagram of in-situ ACF temperature
            (b) flexible substrate                                                measurement

      Table 1. The specifications of test boards and the ACF        2.5 Adhesion strength vs. U/S bonding conditions
                                Materials             Thickness         To determine the relation between the ACF temperature
   Flexible substrate         Polyimide film             25um       and adhesion strengths, adhesion strengths of ACF joints after
  Organic rigid board              FR-4                  1mm        U/S bonding were measured using a 90° peel tester as shown
            Base film     Epoxy based adhesive           40um       in figure 4. Peel test was performed with a peel rate of 10
  ACF      Conductive                                     8um       mm/min, and adhesion strengths of ACF joints were
                          Au coated Ni particles                    monitored during peel test using a load cell.
             particle                                  diameter

2.2 Equipment
    Figure 2 shows the ultrasonic horn and test boards in this
experiment. The ultrasonic energy of 160 W ~ 240 W was
applied perpendicularly on the test boards
                                                                                     Flexible substrate


                                                                                      ACF

                                     U/S horn

                                                                              Organic rigid board

                                                                              Figure 4. A schematic diagram of 90° peel test
            Flexible substrate

                                       ACF
                                                                    2.6 Daisy-chain contact resistance vs. U/S bonding time
                                  Organic rigid board                   Daisy-chain contact resistances of test boards were
                                                                    measured after various U/S bonding conditions to examine
 Figure 2. An ultrasonic bonder set-up showing an U/S horn          the electrical continuity of ACF joints. Figure 5 shows the
           and a test sample                                        daisy-chain structure of test boards.

2.3 Decomposition temperature of materials
    During U/S bonding, test boards or the ACF can be
decomposed due to rapid increase of ACF temperature.
Therefore, decomposition temperatures of flexible substrates,
organic rigid boards and the ACF were measured to prevent
decomposition of materials during U/S bonding.                                                                  I
                                                                                                                V


Decomposition temperatures were measured by TGA                     Figure 5. The daisy-chain structure of test boards showing a flexible
(Thermo-Gravimetric Analysis) with 10℃/min heating rate.                     substrate bonded on a organic rigid board using ACFs

2.4 ACF temperature vs. U/S bonding conditions



                                                                  481   2007 Electronic Components and Technology Conference
2.7 Reliability evaluation of U/S bonding
    Reliability tests were performed with the optimized U/S                                                      600
bonding conditions in terms of the adhesion strength and the                                                                                                           160W
daisy-chain contact resistance. Reliability requirements were                                                    500                                                   200W
85 ℃/85 % RH test and 125 ℃ high temperature storage test                                                                                                              240W




                                                                                    ACF temperature ( C)
                                                                                    o
for 1000 hours, and -55 ℃~125 ℃ thermal cycling test for                                                         400

1000 cycles. Using 10 test boards for each test, total daisy-
                                                                                                                 300
chain contact resistances were measured for every 100 hours
and 100 cycles.                                                                                                  200


                                                                                                                 100
3. Results and discussion
3.1 Decomposition temperature of materials                                                                                 U/S on                                   U/S off
                                                                                                                  0
                                                                                                                       0          2        4        6       8        10        12

                                                                                                                                          Bonding time (sec)
                     1.1


                     1.0
                                                                                   Figure 7. ACF temperatures vs. U/S powers at 5.6 MPa bonding
                                                                                             pressure
   Relative weight




                     0.9

                                                                                  Figure 7 shows the ACF temperature during U/S bonding
                     0.8
                                                                               with 160 W, 200 W and 240 W powers at constant 5.6 MPa
                     0.7
                                                                               bonding pressure. As shown in the graph, the ACF
                                                                               temperature increased as the U/S power increased.
                     0.6         Flexible substrates                              The increase of ACF temperature can be explained with
                                 Organic rigid boards                          U/S vibration amplitudes. U/S vibration amplitudes increase
                     0.5
                           0   100    200    300           400   500   600     with larger U/S powers at constant pressures, because the
                                                       o                       work by U/S vibration increases as the U/S power increases.
                                      Temperature ( C)
                                                                               According to the well-known equation 1,


                                                                                                                                           f (∆ε )2E’’
                                                                                                                                      dQ =
                     1.1


                     1.0                                                                                                                       2
                                                                                                               Equation 1. Heat generation by cyclic deformation [2]
   Relative weight




                     0.9


                     0.8                                                       which explains heat generation under cyclic deformation, heat
                                                                               generation (dQ) is proportional to cyclic strain (∆ε).[2] And
                     0.7                                                       cyclic strain increases as U/S vibration amplitude increases.
                                                                               Therefore, the increase of U/S power causes the increase of
                     0.6
                                                                               U/S vibration amplitude, and cyclic strain of the ACFs
                     0.5
                                                                               resulting in more heat generation.
                           0   100    200    300           400   500   600

                                                   o
                                      Temperature ( C)
                                                                                                                  500


Figure 6. TGA results of flexible substrates, organic rigid boards,                                                                                                       4.6MPa
                                                                                                                                                                          6.7MPa
                                                                                        ACF temperature ( C)




                                                                                                                  400
         and ACF
                                                                                                                                                                          8.6MPa
                                                                                     o




    Figure 6 shows TGA results of flexible substrates, organic                                                    300

rigid boards and the ACF. As shown in the graph, the weight
of FR-4 organic rigid boards rapidly decreased at above 300                                                       200

℃. However, flexible substrates and the ACF showed
negligible amount of decomposition up to 300 ℃. Therefore,                                                        100
ACF heating temperature during U/S bonding was maintained
below 300 ℃ to prevent FR-4 decomposition.                                                                                     U/S on                                  U/S off
                                                                                                                       0
                                                                                                                           0          2        4        6       8         10        12

                                                                                                                                               Bonding time (sec)
3.2 ACF temperature vs. U/S bonding conditions
                                                                               Figure 8. ACF temperatures vs. bonding pressures at 180W power


                                                                             482    2007 Electronic Components and Technology Conference
Figure 8 shows the ACF temperature during U/S bonding
at 4.6 MPa, 6.7 MPa and 8.6 MPa bonding pressures at
                                                                                                                   500
constant 180 W power. As shown in the graph, the ACF
temperatures decrease as bonding pressures increase.                                                                            8.6MPa
                                                                                                                                                                        200W




                                                                                           ACF temperature ( C)
                                                                                                                   400
   The decrease of ACF temperatures can be explained with




                                                                                        o
U/S vibration amplitudes. U/S vibration amplitudes decrease                                                                                                             180W
as bonding pressures increase at constant U/S powers.                                                              300
Because the work by U/S vibration is constant at a certain U/S
power, it means that a smaller vibration amplitude can be                                                          200
obtained at larger pressures. Therefore, the increase of U/S
powers causes the decreases of U/S vibration amplitude, and                                                        100
cyclic strain of the ACF resulting in a less amount of heat
generation.
                                                                                                                        0
   As explained above, ACF temperatures were dependent                                                                      0         2        4       6        8       10          12
on both U/S powers and bonding pressures. Therefore, in                                                                                            Time (sec)
order to maintain the ACF temperature below 300 ℃, various
U/S powers were selected at 4.6 MPa, 6.7 MPa and 8.6 MPa                               Figure 9. ACF temperatures during U/S bonding with various
bonding pressures. Figure 9 shows the ACF temperatures                                          bonding conditions
during U/S bonding with various bonding conditions.
                                                                                       At 4.6 MPa and 180 W condition, the ACF temperature
                                                                                   increased up to 300 ℃ . However, test boards were
                                                                                   decomposed at 6.7 MPa and 200 W condition due to over-
                          500
                                                                                   heating above 400℃. At other U/S bonding conditions, ACF
                                    4.6MPa
                                                                     180W          temperatures were maintained about 200 ℃ which was
   ACF temperature ( C)




                          400
                                                                                   relatively lower than that of 4.6 MPa and 180W condition.
                                                                     160W
   o




                          300
                                                                                   3.3 Adhesion strength vs. U/S bonding conditions
                                                                                       Figure 10 shows adhesion strengths of U/S bonded ACF
                          200                                                      joints at various U/S bonding conditions. As shown in the
                                                                                   graph, the maximum adhesion strength was above 600 gf/cm
                          100                                                      at 3 sec bonding time at 4.6 MPa and 180 W condition.
                                                                                   However, at other U/S bonding conditions, adhesion strength
                            0
                                                                                   showed relatively low 400 gf/cm adhesion strengths. The
                                0       2    4        6         8   10      12     adhesion strength behavior is well matched with the previous
                                                   Time (sec)                      ACF temperature behavior at figure 9. The ACF temperature
                                                                                   during U/S bonding at 4.6 MPa and 180 W condition was
                                                                                   about 300 ℃, and those with other U/S bonding conditions
                                                                                   were about 200 ℃. Lower adhesion strengths was mainly be
                                                                                   due to lower degree of cure of ACF at lower temperatures.
                          500
                                    6.7MPa
                                                                     200W
   ACF temperature ( C)




                          400
   o




                                                                     180W
                                                                                                                            4.6MPa, 160W                                     3sec
                                                                                                                  800
                          300
                                                                                                                                                                             5sec
                                                                                                                                                                             7sec
                                                                                        peel strength (gf/cm)




                          200                                                                                     600                                                        9sec


                          100
                                                                                                                  400


                           0
                                0       2    4        6         8   10      12                                    200
                                                 Time (sec)

                                                                                                                   0
                                                                                                                        0         1       2        3       4        5    6          7

                                                                                                                                              Displacement (mm)




                                                                                 483    2007 Electronic Components and Technology Conference
800
                                  4.6MPa, 180W                            3sec                                                           800
                                                                                                                                                           8.6MPa, 200W                              3sec
                                                                          5sec                                                                                                                       5sec
Peel strength (gf/cm)



                                                                          7sec                                                                                                                       7sec




                                                                                                   Peel strength (gf/cm)
                        600                                               9sec                                                           600                                                         9sec


                        400                                                                                                              400



                        200                                                                                                              200



                         0                                                                                                                         0
                              0      1    2       3       4       5       6          7                                                                 0       1           2     3       4     5    6       7

                                           Displacement (mm)                                                                                                               Displacement (mm)

                                                                                               Figure 10. Adhesion strengths of U/S bonded ACF joints at various
                                                                                                          U/S bonding conditions.
                                  6.7MPa, 180W                                3sec
                        800
                                                                              5sec
                                                                                                   Figure 11 shows adhesion strengths of U/S bonded ACF
                                                                                               joints at 4.6 MPa and 180W condition for 2 sec, 3 sec and 4
Peel strength (gf/cm)




                                                                              7sec
                        600                                                   9sec             sec bonding times. As shown in the graph, the adhesion
                                                                                               strength rapidly increased by ACF curing, and reached the
                                                                                               maximum value of 630gf/cm at 3 sec bonding time. And
                        400                                                                    630gf/cm maximum adhesion strength obtained by the
                                                                                               optimized U/S bonding was similar to the typical 620gf/cm of
                        200
                                                                                               T/C bonding with 15 sec bonding time and 190 ℃ bonding
                                                                                               temperature.

                          0
                              0      1    2        3      4       5       6          7

                                              Displacement (mm)

                                                                                                                                                       600
                                                                                                                           Peel strength (gf/cm)




                                  8.6MPa, 180W                                3sec                                                                     400
                        800
                                                                              5sec
                                                                              7sec
Peel strength (gf/cm)




                        600                                                   9sec                                                                     200



                        400
                                                                                                                                                           0
                                                                                                                                                                   2 sec              3 sec         4 sec

                        200                                                                                                                                                    Bonding time (sec)


                                                                                               Figure 11. Adhesion strengths of U/S bonded ACF joints for 2 sec, 3
                          0
                              0       1    2          3       4       5       6          7            sec and 4 sec bonding times at 4.6 MPa and 180 W condition
                                              Displacement (mm)
                                                                                                  As shown in figure 12, the degree of ACF cure measured
                                                                                               by FTIR shows more than 90% after 3 sec at 4.6 MPa and
                                                                                               180W condition.




                                                                                             484   2007 Electronic Components and Technology Conference
125℃ high temperature storage test




                                                                                                                          Total daisy-chain resistance (Ohm)
                                                        100                                                                                                    10



                                                        90                                                                                                     8
   ACF degree of cure (%)




                                                        80
                                                                                                                                                               6

                                                        70
                                                                                                                                                               4

                                                        60

                                                                                                                                                               2
                                                        50

                                                                                                                                                               0
                                                        40                                                                                                           0     200     400     600     800   1000
                                                                    2                  3                 4
                                                                                                                                                                                 Test time (hrs)
                                                                            U/S bonding time (sec)

                                                                                                                       Figure 14. Daisy-chain contact resistance during 125℃ high
Figure 12. ACF degree of cure vs. U/S bonding time at 4.6 MPa and
                                                                                                                                  temperature storage test
           180 W condition

3.4 Daisy-chain contact resistance vs. U/S bonding time                                                                Figure 14 shows daisy-chain contact resistances vs. aging
    Daisy-chain contact resistances of ACF joints were                                                             times during 125℃ high temperature storage test. U/S bonded
measured after U/S bonding at the optimized conditions 4.6                                                         test vehicles showed no significant change of daisy-chain
MPa bonding pressure and 180 W U/S power. As shown in                                                              contact resistance during the 125℃ storage test. Figure 15
figure 13, stable daisy-chain contact resistances were obtained                                                    and figure 16 show daisy-chain contact resistance at 85℃
regardless of bonding times after 3 sec. The average daisy-                                                        /85% RH test conditions and -55℃~125℃ thermal cycling
chain contact resistance was 1.13 Ohm at 3 sec U/S bonding                                                         test conditions. No significant changes of daisy-chain contact
time. And it was similar to 1.08 Ohm which was obtained by                                                         resistance were observed during both tests.
the typical 15 sec T/C bonding at 190℃. These results show
that not only similar adhesion strengths but also similar daisy-
chain contact resistances as the typical T/C bonding were                                                                                                                   85℃/85%RH test
obtained using optimized U/S bonding at room temperature
                                                                                                                         Total daisy-chain resistance (Ohm)




                                                                                                                                                               10

and less than 5 seconds bonding time.
                                                                                                                                                                8



                                                          2.5                                                                                                   6
                   Total daisy-chain resistance (Ohm)




                                                                                           4.6MPa, 180W
                                                                                                                                                                4


                                                          2.0
                                                                                                                                                                2



                                                                                                                                                                0
                                                          1.5                                                                                                        0     200     400     600     800   1000

                                                                                                                                                                                 Test time (hrs)


                                                          1.0                                                          Figure 15. Daisy-chain contact resistance during 85 /85%RH test
                                                                3       4      5      6      7       8       9

                                                                            U/S bonding time (sec)
                                                                                                                      As the result, U/S bonded ACF joints showed similar
Figure 13. Total daisy-chain resistance with various U/S bonding                                                   adhesion strengths and daisy-chain contact resistances, and
          time at 4.6 MPa and 180 W condition                                                                      showed stable daisy-chain contact resistance during 125℃
                                                                                                                   high temperature storage test, 85 °C/85 % RH test and -55°
3.5 Reliability evaluation of U/S bonding                                                                          C~125°C thermal cycling test compared with the typical T/C
    For reliability evaluations of U/S bonded ACF joints,                                                          bonded ACF joints.
three kinds of tests were performed with 10 test boards at
each conditions. U/S bonding was performed for 3 sec
bonding time at room temperature with 4.6MPa bonding
pressure and 180W U/S power.

                                                                                                                 485     2007 Electronic Components and Technology Conference
-55℃/125℃ thermal cycling test
                                                                                                        reduced from typical 15 seconds to less than 5 seconds by
   Total daisy-chain resistance (Ohm)                                                                   using the U/S bonding.
                                        10
                                                                                                           Therefore, conventional T/C ACF bonding processes can
                                                                                                        be replaced by the novel U/S ACF bonding process
                                        8
                                                                                                        demonstrated in this study.
                                        6
                                                                                                        5. References
                                                                                                        1. Kiwon Lee, Hyoung Joon Kim, Myung Jin Yim, and
                                        4
                                                                                                            Kyung Wook Paik, “Curing and Bonding Behaviors of
                                                                                                            Anisotropic Conductive Films (ACFs) by Ultrasonic
                                        2
                                                                                                            Vibration for Flip Chip Interconnection”, 56th Electronic
                                                                                                            Components and Technology Conference, San Diego,
                                        0
                                             0       200       400      600      800      1000
                                                                                                            California, USA, May 30 – June 2, 2006
                                                                                                        2. M. N. Tolunay, P. R. Dawson, and K. K. Wang, “Heating
                                                           Test cycle (cycles)
                                                                                                            and bonding mechanisms in ultrasonic welding of
                                                                                                            thermoplastics”, Polymer engineering and science, Vol.
Figure 16. Daisy-chain contact resistance during -55°C~125°C
                                                                                                            23, No. 13, 1983
           thermal cycling test


4. Conclusion
    In this study, a novel ACF bonding method using
ultrasonic vibration was investigated, and its process
conditions were optimized for flexible substrate-organic rigid
board bonding applications.
    The optimized U/S bonding time was 3 sec at room
temperature at 4.6 MPa bonding pressure and 180 W U/S
power. It was demonstrated that the ACF bonding process can
be significantly enhanced by U/S bonding method compared
with conventional 15 sec T/C bonding at 190 ℃. Using the
optimized U/S bonding conditions, the ACF joints showed
similar bonding characteristics as T/C bonding in terms of the
adhesion strength, the daisy-chain contact resistance, and
stable electrical resistances during 125 ℃ high temperature
storage test, 85 ℃/85 % RH test, and -55 ℃~125 ℃ thermal
cycling test.
    Table 2 summarizes results of the optimized U/S ACF
bonding in comparison with those of typical T/C bonding.

Table 2. The optimized U/S ACF bonding condition and their results
         in comparison with those of typical T/C bonding.

                                                    T/C ACF bonding              U/S ACF bonding

                                                           at 190℃            at room temperature
                                                           for 15 sec               for 3 sec


 Peel strength
                                                     622.47 (±28.59)              633.41 (±52.14)
    (gf/cm)

  Daisy-chain
    contact
                                                       1.08 (±0.02)                    1.13 (±0.04)
  resistance
     (Ohm)

   These results indicate that ACF bonding temperature can
be significantly reduced from the typical 190 ℃ to room
temperature, and bonding time can be also significantly

                                                                                                      486   2007 Electronic Components and Technology Conference

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Ultrasonic Bonding Acf

  • 1. Ultrasonic Anisotropic Conductive Films (ACFs) Bonding of Flexible Substrates on Organic Rigid Boards at Room Temperature Kiwon Lee, Hyoung Joon Kim, Il Kim, and Kyung Wook Paik Nano Packaging and Interconnect Lab. (NPIL) Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST) 373-1, Kusong-dong, Yusong-gu, Daejeon, 305-701, Republic of Korea phone: +82-42-869-3386, fax:+82-42-869-3310 email: kiwonlee@kaist.ac.kr T/C bonding is often limited by high bonding temperature, Abstract slow thermal cure, uneven cure degree of adhesive, large In this study, a novel Anisotropic Conductive Film (ACF) thermal deformation of the assembly, and high bonding bonding method for flexible substrate-organic rigid board pressure for large number of I/O interconnections. Therefore, bonding was investigated using an ultrasonic vibration. And there are constant needs of lower bonding temperature and the ultrasonic (U/S) ACF bonding was characterized in terms faster cure ACF bonding to replace the conventional T/C of adhesion strength, electrical continuity in comparison with bonding at 190℃ and 15 seconds. those of thermo-compression (T/C) bonding. An ultrasonic bonder was used to produce ultrasonic Ultrasonic (U/S) bonding for solder and metal-to-metal vibration in ACF joints between flexible substrates and interconnections has been widely investigated and applied in organic rigid boards. Test boards were 25 um-thick polyimide flip chip, TAB, or surface mount technologies due to its low based flexible substrates and 1 mm-thick FR-4 organic rigid cost, simplicity, and fast assembly time at low temperature boards. The effect of process conditions, such as U/S powers, with reduced bonding pressure. However, most of these bonding pressures, and bonding times on the ACF approaches are using lateral direction ultrasonic vibration temperature were investigated. The in-situ temperature at the only. Although there have some attempt to use U/S bonding ACF layer was measured during U/S bonding to determine as an alternative ACF bonding method, there were no the relation between the ACF temperature and the bonding previous reports of successive ACF bonding using U/S characteristics of ACF joints. bonding except one presentation about the demonstration of U/S ACF flip chip bonding [1]. The optimized U/S bonding time was obtained within 5 sec at room temperature. The significant meaning of this In ACFs U/S bonding, ACFs can be rapidly heated by result is that the ACF bonding process times can be certain ultrasonic vibration, and it can be described by remarkably reduced by U/S bonding compared with materials’ complex young’s modulus which consists of storage modulus and loss modulus under cyclic stress conventional 15 sec T/C bonding at 190 ℃. The ACF joints conditions. Storage modulus is related to elastically stored with the optimized U/S bonding conditions showed similar energy, and loss modulus is related to energy loss which bonding characteristics as those with T/C bonding in terms of converts to heat. In general, it is well known that visco-elastic the adhesion strength and the daisy-chain contact resistance. materials such as polymers have large loss modulus. The Fourier Transformation Infra-Red (FTIR) spectroscopy Therefore, it is expected that highly visco-elastic B-stage showed that the ACF degree of cure was achieved 90 % at 3 ACFs may generate a large amount of heat by an ultrasonic sec and 95 % at 4 sec. Reliability test results showed that the vibration. By U/S heating in ACFs, rapid ACF curing and U/S bonded test boards had stable daisy-chain contact bonding can be obtained without additional chip/substrate resistances in 85 ℃/85 % RH test and 125 ℃ high heating. temperature storage test for 1000 hours and -55 ℃~125 ℃ In this study, a novel Anisotropic Conductive Film (ACF) thermal cycling test for 1000 cycles. bonding method for flexible substrate-organic rigid board 1. Introduction bonding was investigated using an ultrasonic vibration. And Anisotropic Conductive Films (ACFs) are well known the ultrasonic (U/S) ACF bonding was characterized in terms adhesive interconnect materials which consists of conducting of adhesion strength, electrical continuity in comparison with particles and adhesive polymer resins in a film format. And those of thermo-compression (T/C) bonding, and its reliability they have been widely used as interconnect materials in flat was evaluated. panel display applications such as Out Lead Bonding (OLB), 2. Experiments chip-on-glass (COG), and chip-on-film (COF), flex to PCB 2.1 Materials preparation bonding, and also in flip chip semiconductor packaging Test boards were 25 um-thick polyimide based flexible applications. ACF interconnects are simple and lead-free substrates and 1mm-thick FR-4 organic rigid boards. Figure 1 processing as well as cost effective packaging method shows the design of test boards which have 300 um pitch Cu compared with solder interconnects. patterns. The ACF was epoxy based adhesive film with 40 um For ACF interconnection, thermo-compression (T/C) thickness, and they contained Au coated Ni particles with 8 bonding is the most common method, however it is necessary to reduce the bonding temperature, time and pressure, because 1-4244-0985-3/07/$25.00 ©2007 IEEE 480 2007 Electronic Components and Technology Conference
  • 2. um diameter as conductive particles. Table 1 summarizes the In-situ ACF temperature during U/S bonding was measured specifications of test boards and the ACF. to investigate the effect of U/S bonding conditions such as U/S power and bonding force on ACF temperatures. Figure 3 shows the in-situ ACF temperature measurement set-up with 40um-thick k-type thermocouples and a thermometer with 150ms sampling period. Figure 1. The design of (a) organic rigid test board and Figure 3. A schematic diagram of in-situ ACF temperature (b) flexible substrate measurement Table 1. The specifications of test boards and the ACF 2.5 Adhesion strength vs. U/S bonding conditions Materials Thickness To determine the relation between the ACF temperature Flexible substrate Polyimide film 25um and adhesion strengths, adhesion strengths of ACF joints after Organic rigid board FR-4 1mm U/S bonding were measured using a 90° peel tester as shown Base film Epoxy based adhesive 40um in figure 4. Peel test was performed with a peel rate of 10 ACF Conductive 8um mm/min, and adhesion strengths of ACF joints were Au coated Ni particles monitored during peel test using a load cell. particle diameter 2.2 Equipment Figure 2 shows the ultrasonic horn and test boards in this experiment. The ultrasonic energy of 160 W ~ 240 W was applied perpendicularly on the test boards Flexible substrate ACF U/S horn Organic rigid board Figure 4. A schematic diagram of 90° peel test Flexible substrate ACF 2.6 Daisy-chain contact resistance vs. U/S bonding time Organic rigid board Daisy-chain contact resistances of test boards were measured after various U/S bonding conditions to examine Figure 2. An ultrasonic bonder set-up showing an U/S horn the electrical continuity of ACF joints. Figure 5 shows the and a test sample daisy-chain structure of test boards. 2.3 Decomposition temperature of materials During U/S bonding, test boards or the ACF can be decomposed due to rapid increase of ACF temperature. Therefore, decomposition temperatures of flexible substrates, organic rigid boards and the ACF were measured to prevent decomposition of materials during U/S bonding. I V Decomposition temperatures were measured by TGA Figure 5. The daisy-chain structure of test boards showing a flexible (Thermo-Gravimetric Analysis) with 10℃/min heating rate. substrate bonded on a organic rigid board using ACFs 2.4 ACF temperature vs. U/S bonding conditions 481 2007 Electronic Components and Technology Conference
  • 3. 2.7 Reliability evaluation of U/S bonding Reliability tests were performed with the optimized U/S 600 bonding conditions in terms of the adhesion strength and the 160W daisy-chain contact resistance. Reliability requirements were 500 200W 85 ℃/85 % RH test and 125 ℃ high temperature storage test 240W ACF temperature ( C) o for 1000 hours, and -55 ℃~125 ℃ thermal cycling test for 400 1000 cycles. Using 10 test boards for each test, total daisy- 300 chain contact resistances were measured for every 100 hours and 100 cycles. 200 100 3. Results and discussion 3.1 Decomposition temperature of materials U/S on U/S off 0 0 2 4 6 8 10 12 Bonding time (sec) 1.1 1.0 Figure 7. ACF temperatures vs. U/S powers at 5.6 MPa bonding pressure Relative weight 0.9 Figure 7 shows the ACF temperature during U/S bonding 0.8 with 160 W, 200 W and 240 W powers at constant 5.6 MPa 0.7 bonding pressure. As shown in the graph, the ACF temperature increased as the U/S power increased. 0.6 Flexible substrates The increase of ACF temperature can be explained with Organic rigid boards U/S vibration amplitudes. U/S vibration amplitudes increase 0.5 0 100 200 300 400 500 600 with larger U/S powers at constant pressures, because the o work by U/S vibration increases as the U/S power increases. Temperature ( C) According to the well-known equation 1, f (∆ε )2E’’ dQ = 1.1 1.0 2 Equation 1. Heat generation by cyclic deformation [2] Relative weight 0.9 0.8 which explains heat generation under cyclic deformation, heat generation (dQ) is proportional to cyclic strain (∆ε).[2] And 0.7 cyclic strain increases as U/S vibration amplitude increases. Therefore, the increase of U/S power causes the increase of 0.6 U/S vibration amplitude, and cyclic strain of the ACFs 0.5 resulting in more heat generation. 0 100 200 300 400 500 600 o Temperature ( C) 500 Figure 6. TGA results of flexible substrates, organic rigid boards, 4.6MPa 6.7MPa ACF temperature ( C) 400 and ACF 8.6MPa o Figure 6 shows TGA results of flexible substrates, organic 300 rigid boards and the ACF. As shown in the graph, the weight of FR-4 organic rigid boards rapidly decreased at above 300 200 ℃. However, flexible substrates and the ACF showed negligible amount of decomposition up to 300 ℃. Therefore, 100 ACF heating temperature during U/S bonding was maintained below 300 ℃ to prevent FR-4 decomposition. U/S on U/S off 0 0 2 4 6 8 10 12 Bonding time (sec) 3.2 ACF temperature vs. U/S bonding conditions Figure 8. ACF temperatures vs. bonding pressures at 180W power 482 2007 Electronic Components and Technology Conference
  • 4. Figure 8 shows the ACF temperature during U/S bonding at 4.6 MPa, 6.7 MPa and 8.6 MPa bonding pressures at 500 constant 180 W power. As shown in the graph, the ACF temperatures decrease as bonding pressures increase. 8.6MPa 200W ACF temperature ( C) 400 The decrease of ACF temperatures can be explained with o U/S vibration amplitudes. U/S vibration amplitudes decrease 180W as bonding pressures increase at constant U/S powers. 300 Because the work by U/S vibration is constant at a certain U/S power, it means that a smaller vibration amplitude can be 200 obtained at larger pressures. Therefore, the increase of U/S powers causes the decreases of U/S vibration amplitude, and 100 cyclic strain of the ACF resulting in a less amount of heat generation. 0 As explained above, ACF temperatures were dependent 0 2 4 6 8 10 12 on both U/S powers and bonding pressures. Therefore, in Time (sec) order to maintain the ACF temperature below 300 ℃, various U/S powers were selected at 4.6 MPa, 6.7 MPa and 8.6 MPa Figure 9. ACF temperatures during U/S bonding with various bonding pressures. Figure 9 shows the ACF temperatures bonding conditions during U/S bonding with various bonding conditions. At 4.6 MPa and 180 W condition, the ACF temperature increased up to 300 ℃ . However, test boards were decomposed at 6.7 MPa and 200 W condition due to over- 500 heating above 400℃. At other U/S bonding conditions, ACF 4.6MPa 180W temperatures were maintained about 200 ℃ which was ACF temperature ( C) 400 relatively lower than that of 4.6 MPa and 180W condition. 160W o 300 3.3 Adhesion strength vs. U/S bonding conditions Figure 10 shows adhesion strengths of U/S bonded ACF 200 joints at various U/S bonding conditions. As shown in the graph, the maximum adhesion strength was above 600 gf/cm 100 at 3 sec bonding time at 4.6 MPa and 180 W condition. However, at other U/S bonding conditions, adhesion strength 0 showed relatively low 400 gf/cm adhesion strengths. The 0 2 4 6 8 10 12 adhesion strength behavior is well matched with the previous Time (sec) ACF temperature behavior at figure 9. The ACF temperature during U/S bonding at 4.6 MPa and 180 W condition was about 300 ℃, and those with other U/S bonding conditions were about 200 ℃. Lower adhesion strengths was mainly be due to lower degree of cure of ACF at lower temperatures. 500 6.7MPa 200W ACF temperature ( C) 400 o 180W 4.6MPa, 160W 3sec 800 300 5sec 7sec peel strength (gf/cm) 200 600 9sec 100 400 0 0 2 4 6 8 10 12 200 Time (sec) 0 0 1 2 3 4 5 6 7 Displacement (mm) 483 2007 Electronic Components and Technology Conference
  • 5. 800 4.6MPa, 180W 3sec 800 8.6MPa, 200W 3sec 5sec 5sec Peel strength (gf/cm) 7sec 7sec Peel strength (gf/cm) 600 9sec 600 9sec 400 400 200 200 0 0 0 1 2 3 4 5 6 7 0 1 2 3 4 5 6 7 Displacement (mm) Displacement (mm) Figure 10. Adhesion strengths of U/S bonded ACF joints at various U/S bonding conditions. 6.7MPa, 180W 3sec 800 5sec Figure 11 shows adhesion strengths of U/S bonded ACF joints at 4.6 MPa and 180W condition for 2 sec, 3 sec and 4 Peel strength (gf/cm) 7sec 600 9sec sec bonding times. As shown in the graph, the adhesion strength rapidly increased by ACF curing, and reached the maximum value of 630gf/cm at 3 sec bonding time. And 400 630gf/cm maximum adhesion strength obtained by the optimized U/S bonding was similar to the typical 620gf/cm of 200 T/C bonding with 15 sec bonding time and 190 ℃ bonding temperature. 0 0 1 2 3 4 5 6 7 Displacement (mm) 600 Peel strength (gf/cm) 8.6MPa, 180W 3sec 400 800 5sec 7sec Peel strength (gf/cm) 600 9sec 200 400 0 2 sec 3 sec 4 sec 200 Bonding time (sec) Figure 11. Adhesion strengths of U/S bonded ACF joints for 2 sec, 3 0 0 1 2 3 4 5 6 7 sec and 4 sec bonding times at 4.6 MPa and 180 W condition Displacement (mm) As shown in figure 12, the degree of ACF cure measured by FTIR shows more than 90% after 3 sec at 4.6 MPa and 180W condition. 484 2007 Electronic Components and Technology Conference
  • 6. 125℃ high temperature storage test Total daisy-chain resistance (Ohm) 100 10 90 8 ACF degree of cure (%) 80 6 70 4 60 2 50 0 40 0 200 400 600 800 1000 2 3 4 Test time (hrs) U/S bonding time (sec) Figure 14. Daisy-chain contact resistance during 125℃ high Figure 12. ACF degree of cure vs. U/S bonding time at 4.6 MPa and temperature storage test 180 W condition 3.4 Daisy-chain contact resistance vs. U/S bonding time Figure 14 shows daisy-chain contact resistances vs. aging Daisy-chain contact resistances of ACF joints were times during 125℃ high temperature storage test. U/S bonded measured after U/S bonding at the optimized conditions 4.6 test vehicles showed no significant change of daisy-chain MPa bonding pressure and 180 W U/S power. As shown in contact resistance during the 125℃ storage test. Figure 15 figure 13, stable daisy-chain contact resistances were obtained and figure 16 show daisy-chain contact resistance at 85℃ regardless of bonding times after 3 sec. The average daisy- /85% RH test conditions and -55℃~125℃ thermal cycling chain contact resistance was 1.13 Ohm at 3 sec U/S bonding test conditions. No significant changes of daisy-chain contact time. And it was similar to 1.08 Ohm which was obtained by resistance were observed during both tests. the typical 15 sec T/C bonding at 190℃. These results show that not only similar adhesion strengths but also similar daisy- chain contact resistances as the typical T/C bonding were 85℃/85%RH test obtained using optimized U/S bonding at room temperature Total daisy-chain resistance (Ohm) 10 and less than 5 seconds bonding time. 8 2.5 6 Total daisy-chain resistance (Ohm) 4.6MPa, 180W 4 2.0 2 0 1.5 0 200 400 600 800 1000 Test time (hrs) 1.0 Figure 15. Daisy-chain contact resistance during 85 /85%RH test 3 4 5 6 7 8 9 U/S bonding time (sec) As the result, U/S bonded ACF joints showed similar Figure 13. Total daisy-chain resistance with various U/S bonding adhesion strengths and daisy-chain contact resistances, and time at 4.6 MPa and 180 W condition showed stable daisy-chain contact resistance during 125℃ high temperature storage test, 85 °C/85 % RH test and -55° 3.5 Reliability evaluation of U/S bonding C~125°C thermal cycling test compared with the typical T/C For reliability evaluations of U/S bonded ACF joints, bonded ACF joints. three kinds of tests were performed with 10 test boards at each conditions. U/S bonding was performed for 3 sec bonding time at room temperature with 4.6MPa bonding pressure and 180W U/S power. 485 2007 Electronic Components and Technology Conference
  • 7. -55℃/125℃ thermal cycling test reduced from typical 15 seconds to less than 5 seconds by Total daisy-chain resistance (Ohm) using the U/S bonding. 10 Therefore, conventional T/C ACF bonding processes can be replaced by the novel U/S ACF bonding process 8 demonstrated in this study. 6 5. References 1. Kiwon Lee, Hyoung Joon Kim, Myung Jin Yim, and 4 Kyung Wook Paik, “Curing and Bonding Behaviors of Anisotropic Conductive Films (ACFs) by Ultrasonic 2 Vibration for Flip Chip Interconnection”, 56th Electronic Components and Technology Conference, San Diego, 0 0 200 400 600 800 1000 California, USA, May 30 – June 2, 2006 2. M. N. Tolunay, P. R. Dawson, and K. K. Wang, “Heating Test cycle (cycles) and bonding mechanisms in ultrasonic welding of thermoplastics”, Polymer engineering and science, Vol. Figure 16. Daisy-chain contact resistance during -55°C~125°C 23, No. 13, 1983 thermal cycling test 4. Conclusion In this study, a novel ACF bonding method using ultrasonic vibration was investigated, and its process conditions were optimized for flexible substrate-organic rigid board bonding applications. The optimized U/S bonding time was 3 sec at room temperature at 4.6 MPa bonding pressure and 180 W U/S power. It was demonstrated that the ACF bonding process can be significantly enhanced by U/S bonding method compared with conventional 15 sec T/C bonding at 190 ℃. Using the optimized U/S bonding conditions, the ACF joints showed similar bonding characteristics as T/C bonding in terms of the adhesion strength, the daisy-chain contact resistance, and stable electrical resistances during 125 ℃ high temperature storage test, 85 ℃/85 % RH test, and -55 ℃~125 ℃ thermal cycling test. Table 2 summarizes results of the optimized U/S ACF bonding in comparison with those of typical T/C bonding. Table 2. The optimized U/S ACF bonding condition and their results in comparison with those of typical T/C bonding. T/C ACF bonding U/S ACF bonding at 190℃ at room temperature for 15 sec for 3 sec Peel strength 622.47 (±28.59) 633.41 (±52.14) (gf/cm) Daisy-chain contact 1.08 (±0.02) 1.13 (±0.04) resistance (Ohm) These results indicate that ACF bonding temperature can be significantly reduced from the typical 190 ℃ to room temperature, and bonding time can be also significantly 486 2007 Electronic Components and Technology Conference