1. @ 8 *~4'J!Fn= OP)
@ ~ 00 ~ ttF ~ ti (A) BB59-200419
@Int. Cl. 3 ~JJIJ~2~ JTPiflJl{fi:~ @~Im B~frJ59~(l984)llJJ 13 B
HOI L 21/30 Z 6603-5F
G 03 F 7/20 7124-2H JeB)Jc7)~ 1
ff1H#~ *~tt~
{~ 3 :~D
JII~rpquot;*I~>Nti]Jk:Z1BJ1 **:z
tm.~~~~t±~*UJf~PJTPi
~*f J.H ~58--73817 @Je fi)J 1l n*$i'a
@ill 1m BB58(l983) 4 JJ 28 B JII~rpquot;*~/Nti]Jk:Z1BJ 1 **:z
@Je fi)J 1l 1f*jffY3 1m.~~J::~t±~*UJf~PJTPi
JII~rp¥~/Nti]JkzlllJ 1 J1nifz @l±! • A ~~~t±Jkz
1m.~~~~t±~*UJfJ'tPJTPi JII ~rpquot;* 1~:tUlJ I [1BJ72{fi:i'I!!
@Je B,ij. 1l ~EB7't;:!; @ft JI A #JI±~~.~ ~1~
9'./'9:;r;/TFT~A1~~;/~~Tt~quot;(m~
1. .~ lJI} ~ 45 ~
~7!l7-17quot;quot;.1~!lAiIlA7'-1A~v11D~
:kilii~A1(;~.
~M.~~~tt~,,(~Qo W~. ~~ •• ~~~
2. *1t'f8lJ!<~QI!Il
~~m~~~T!Q~~• • ~~.~.~~m.
(1) 1(; II( l::. *' ~ .quot;. A !I iJt i! lJI} fIl 1Iff M r ;7 A ID P3 W ~Q~.tJID~~iJtljlf~mUE~tt':r. -;x.. Vt*ID~
,~.~-~l::.~9~-§~,~~ • • ~fi~.
1(;tt~.~~~;/~tt~.~A~-;/~.$'Jf:
1(;TQ.~*~l::.TQ:kiliiM.1t • o
•
1D~~~mm*:kilii~~~~ID.Mre,~~~~
~1(;II(.fIl~Mr;7AIDP3.K~&M#~l::.~
Q ~ E ID ~J iii ~ 1i T Q. ~iJquot; ~ :;r A ~ ft ID ~ fig
quot;(:i!1jij~.1Il (In20a.Sn02)~:;r-7-1 ;/~~
ft~~~~l::..~.~ . • ~~,.m~.~.~
~.~*.l::.~Q~~*It'f~J!<lDfil!llml~~. 7'-1A7v1'lDffimtj:~~quot;($(~~o
lD:kiliiM.1(;~lIIo
m~a -SiTFTiIlAT-1 ;:<.7v11[):k~ <!c
OO/-:;rY~!l~~~.:;r;/~!l~~~ID*~
~,,(~~31;/~-71';/~1~0'0~~~<!
~~#~~7~~~.~M?~*.l::.~Q~E
tLquot;(~Qo ~:h.~ID:k! <!tj:.~.1I:0Iig:;l]~l;k;
*It'fftJ!<ID~~ml~~.~:km~.~~lIIo lD~tLQ'~~ihQo
3. ~ ~ ID IUil17l: !l1. Ijij
.1~~XUm2~tj:**ID.~~~ID~~~
(~lJI}IDJi~Q~~7t-It)
l'C 7f- ~te. ~ T ih Q 0 ~ tL ~ ({j ~ ~ j',- I,n quot;( 1 ti Hi. fJ:
*~lJI}tj:. :km5.>filiiillA7'-1 Afv1'Il!i!:I • 2tj:*,~v9;:<'~, 3ti.quot;.;:<.?, 4tift~~~
~~~.~:kiliiM.~ • K~~Qo
•
1.1 ~:h.~IDR~~fl:tj:jj!jr..S i~1D7quot;'-l!:;:<'I
* tt Uf l::. Jf: ID IllH/A iii )
0
( tt ~~~.l'C~te.~~Tt>!? S i !/I.'''-ID:k!
ilIf.F.. 7quot;E:JV77A'./'1) :;r;/TFTihQ~tj:~
<!~tm~ 21 ;/~- 5 1 ;/quot;quot;~~~¢~, m l~,
-Ql-

2. 1lIlllo:l59-200419 (2)
~2~~~~~~&.~a.ft~.~.&~~~ ~ ~ J, j;' -? a ft tr & ~ ~ ~ ...- fJ - =- Y ~ iii 1# &
J.,o L.iI' L.a iii & 7.:£:ft'7 quot;7 A T F TlIiAf -f A
7quot;v 1 r.tilIH&VC~fdlia jJ:7 Afrffffl1quot;quot;J.,~~ ~ & (~~(l)~1If!ii'lJ )
VC ::J,quot;~ aT -f A 7quot; v l' ill!:! f'F iiI fig quot;t' ~ J., ill, m1 ~rVC*~I}El~A1*l'J9a~1If!i~fr~I}El-tJ.,o
~~~~quot;t'r.t51y~~~~~tl~iiI~quot;t'~J.,o . • 3 ~ ti * ~ I}El ~ II ft ~ II' ~ rt 1IIli.~ ~ ~ J., 0 quot;!
~~ m 2~~1J~~ti.fttd:>~ili~G~m~11: 1'!itf'FL.k.ft~.fr5lt~1quot;quot;J.,o quot;!1'11f~~f'Ill' ~
.ft~~~.&ha~~~a~M~~J.,o :7 A 6, ti;fi~'1 filijjjj;f- I} ,,;/,.. L.~ 41 ~ ~ ¥1-~
( ~ ~ ~ §.1'J9 ) 8 Omm, ~jJ3mm, *-.; 2 0 Omm~fIl1f.Hwfrf'FJ,
~*~~ft~.~r.t~*a~~~oo«~~~. ~VC;fi~ F:7 A~~1JlIlVC1.i&~~ (In 2 0 3 ,8n0 2 )
ft fr iiJ ~ vc L. ~ iI'quot;? It ft tr & ~ 1j: ~ It ft fr § I'J9 c 8, fr1000A::I-7of Y~L., ~:7AiiliiYmVC@
1quot;quot;J.,~WM.ft~.fr~~~J.,ccvc~J.,o fi;1i:~mjJ1 tquot;1 3frf'FJ, ~:7A?'j.mvc71ft'
(~IjIj~~~) A .... A ~ 3, iit -.; 2 1 0 rn, r1J 1quot;5 0 mm ~ oL ~ fr
*~~VC.~~r.t,.*1J~~.ft~.cr.t1 m'iii 1 < ~ ! quot;? 11 ~ A ~ ,iilii ~ fr mJ ~ L. ~ ~':7 A Pi
?~<.aJft~c*~~A~~~~.~:7AC vciltEE7k • • ftiJj(500W) 4fr-l<,,~L., ~
- 1* C ~ .!J fiij - @ fii, quot;'J ~ .~. 'quot;' fr ~ t>, vol A ~ 7 A fiIij ~ fr ~ i¥i IJ.l ~ ~ quot;t' 7 fJ fr L., tquot;:7 A 1i: ~ ...'
3(OOfrAft~J.,o - 1 1 VC -l< quot; r L., -.; & VC 1(; fi1i 11:. 11 ...' - 7 fr 1i: 1#
(~I}El~~*) quot;quot;-11 c., 12,12'quot;t'~~L.~ lEl~1i:t#jJ1' I-'
* ~ ~ VC J.: h tf, ~ fl1 • ~. :7 A fr ~ ~ -t J., C c 1 3 clEl~.:£:-,Il- 1 4 ciR~-tJ.,o ai;-~ C~
VCJ.:J~ F:7A~p:jJllclilJ~([)~!~~~*frll 1-quot;7 A ?'j. 1! 8 0 IBID fr ffl ~ ¢ c ~ }132 5 0 mm c a J '
ft 1quot;quot; J., • 1;; ~ *, A 4 ~ -1 oX ~ *- ~ -.; ~ ~& ar ~ 250 X 2001D1D :S/f[cD~~quot;t'~:t1-tf1E&.ftiiJJjg
quot;t'~J.,o 4. ~ jjj ([) 1iti Jli 11: ill. ~
~1G~tRfrfimL.~~ jJ7A~*1, 210x .1~.l~m2@r.t~*m~~~ft~~~~
1 5 0 x O. 2 mm t ~~ ~ -.; ~ ~ vc A .8 .5 fr 2 0 0 0 A OO~, m3~tt*~~~jjj~.ft~.~~OO~quot;t'
1Ji,;'f L. ~ ~ & VC ;f jJ v ol A ~ 2 fr ~ ;fli L., ~':7 A ~ J., 0
fr A fJ - ~ • ~ - ~ VC -l< quot; ~ L., 2 1 mm / mi n ~ ~~i;-~~,
!j!c;quot;t'lElfii.:£: -!J -~A~ -Iquot; Y fr L.~o .ft~t.. 1 ... ;i!~jJ7A~~, 1 quot; quot; A 7 - o l , 2··· V ol
~£~frm~l&~O~, ~YA1&,T~7quot;t' Ar~ 3quot;'71ft,A-quot;A~, 4 .. ·ft'O'j. (j!ljjEE7k~
f.i?~~*, 71ft'A~A~ftIi£2*/1lDl~500 :II) ~ 5 ... At, 6 ... ~f!IJ ;p ~ F :7 A quot; 7 .. , ft I!Jj
~ .
P. rno 1 0 'j{ 4 =f ::I < J jg L. ..., !J - Y iJi ± 1 0 p. rn ll:.~, 8'''~&MBl (In203.8n02),9·quot;A~'1'
quot;t'VolA ~iJlWh~o :RlEl~.:£:-!J-quot;t'A~-Iquot;Y ...,,,~7-1Y~ 1 Oquot;'~~A7-ol, 11'''}-''7
~.fr.~J.,.~c;&vc.~.ft~Wfr.~J.,. A 1i: ~ ..., - , 1 2 • 1 2' ... ft I!Jj 11:. ~ 1i: fit ra A, 1 3
oLIiHIr:~o ~WPi&;flioL~<, *~Ij/j.ft~flfr quot;'I-':7AlEl~1i:~ffljJ11-', I 4· .. @ti;.:£:-fJ- o
ffl~J.,.VCJ.:J~OO~~*~.ft~iiJ~ca?ko
~~~J.:~VC*~~.ft~flfrm~J.,.vcJ.:.!J~
~jij~~~~ liftiJliiJJjg c 1j:.!J, JI:,quot;ur~~ oL 1mJli
vc.~&n, jjijPi.fttr&oL~<~ .>jl-jijilAfof
A7quot;v1~f'F~ftI~VCti.~~~J.,o
.*~ Ij/j r.t ..t lie ~ 1If!i -WU .>jl- iii! f of A 7' v 1 VC I!Il ~ -.;
h1'~ ~.~-quot;'I'ft'-..quot; r, $.-I!Y~-*~~
iiii fA ...-: !J - Y VC oL II: ~ quot;t' ~ ,J., 0
-Q?-

3. Hml 0Z59-200419 (3)
-4
~~~d/3
~~~2
I
_____-/1
I
-93-