1. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
A Wireless Flexible Temperature and Tactile
Sensing Array for Robot Applications
Presenter: Dr. Yao-Joe Yang
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Department of Mechanical Engineering MEMS Laboratory

2. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
The schematic of the proposed artificial skin
• Flexible substrate
• Copper-PI (polyimide) film
skin receptor Pressure
sensor
• The outer side of the skin Tempe rature
• Tactile sensor array sensor
• The inner side of the skin S kin receptors
Flex ible substra te
• Temperature sensor array
Inner Side
• The sensing elements of the skin
• Conductive polymer for tactile
sensing
• Discrete sensor chips for
temperature sensing.
Outer Side
of the skin
Department of Mechanical Engineering MEMS Laboratory

3. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Specifications of the
proposed artificial skin
Artificial Skin Specifications
Force range 50~500g
Temperature range -20~80°C
Sensor density > 4/cm2
Thickness < 3 mm
Flexible substrate PI-film
Department of Mechanical Engineering MEMS Laboratory

4. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
The fabricated artificial skin
Temperature
sensor
10 m m Te m p e r a tu re
1 0 mm s e ns o r
Tem p eratu re Tac tile s ens in g Tactile
s ens in g p ad E lem ent sensor
(a) The outer side of the skin (b) The inner side of the skin
8x8 tactile sensing array 8x8 temperature sensing array
Temperature
sensor
• In (a), the outer side of the artificial skin
• Tactile sensor array Tactile
sensor
• In (b), the inner side of the artificial skin
• Temperature sensor array
(c) The flexibility of the artificial skin
Department of Mechanical Engineering MEMS Laboratory

5. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
40mm 40mm
Temperature Tactilesensing
sensing pad
Department of Mechanical Engineering Temperature
sensor MEMS Laboratory

6. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Temperature sensor
Tactile
sensor
Department of Mechanical Engineering MEMS Laboratory

7. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Department of Mechanical Engineering MEMS Laboratory

8. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
The heaters of different shapes
• The different shapes
of heaters
• (a) Bar shape
• (b) Circular shape
(a) (b)
• (c) Triangular shape
• (d) Square shape
• The heaters
• shaped using 1mm metal
wire (c) (d)
Department of Mechanical Engineering MEMS Laboratory

9. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Measured Temperature Patterns Induced
by the Heaters of Different Shapes
Temperature Colorbar Temperature Colorbar
80℃ 80℃
Heat source
11℃ Heat source 11℃
(a) (c)
Temperature Colorbar Temperature Colorbar
80℃ 80℃ Heat source
Heat source
11℃ 11℃
(b) (d)
Department of Mechanical Engineering MEMS Laboratory

10. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
The Stamps of Different Shapes
• The different shapes
of acrylic stamps
• (a) T shape
• (b) Circular shape
• (c) Bar shape
(a) (b)
• (d) Triangular shape 4mm
• The applied pressure
4mm
• T-shape
1kg weight
• The other shapes
500g weight (c) (d)
Department of Mechanical Engineering MEMS Laboratory

11. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Pressure distributions of
different solid stamps
300 kPa 300 kPa
3 cm
3 cm
2 cm
Applied
pressure
Applied
pressure
0 kPa 0 kPa
(a) (b)
300 kPa 300 kPa
3 cm
Applied
pressure
3 cm
Applied
pressure
0 kPa 0 kPa
(c) (d)
Department of Mechanical Engineering MEMS Laboratory

12. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
The interdigital electrode pairs
and tactile sensing element
• Two different types of
interdigital electrodes for the
tactile sensing elements are
fabricated.
(a)
• In (a), two different pre-defined
inter-digital copper electrodes
Conductive polymer
Conductive polymer
• In (b), the sensing elements
with dispensed conductive
polymer (b)
Department of Mechanical Engineering MEMS Laboratory

13. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Analog Temperature Sensor
Analog Temperature Sensor
Maxim (www.maxim-ic.com)
MAX6607
Sensitivity 10mv / °C
T (°C ) =
(VOUT − 500mV )
Transfer fnc. 10(mV / °C )
Supply voltage 1.8V~3.6V
Temp. range -20~80℃
Package SC70
Size 2.4 x 2.0 x 1.0 (mm)
Department of Mechanical Engineering MEMS Laboratory

14. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
Temperature
Scanning Circuit
Tactile
RS-232 Switch Circuit Scanning Circuit
Department of Mechanical Engineering MEMS Laboratory