Raman confocal microscope designed for tip enhanced raman.

1. Top view of Raman AFM system design
Optics: Beam expander & mirrors
Microscope side
AFM
Raman
Spectrometer
Illuminator side
Confocal Microscope setup
Laser

2. Illuminator
Laser
Raman
Spectrometer
Optics: Beam expander & mirrors
Confocal Microscope

3. Microscope
platform
s
x
f
M
Illuminator
platform
s
y
x
s
z
x
z
y
y
AFM
s
M
r
s
z
y

4. Illuminator
Laser
Raman
Spectrometer
Confocal Microscope
M2
Optics: Beam expander & mirrors
M1

5. Laser inlet
Signal outlet
Laser light couple (fiber coupler optional)
Camera
Right channel
(arm)
Left channel
(arm)
5 to 100um
apertures
Lens
White light inlet
High NA objective
Confocal microscope
Illuminator
Sample plane

6. Sample
loading area
AFM sample loading
unloading scheme