mems ppt

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[object Object],[object Object],INTRODUCTION

[object Object],[object Object],[object Object],[object Object],DEPOSITION:

[object Object],[object Object],[object Object],[object Object],LITHIOGRAPHY:

ETCHING: ,[object Object],[object Object]

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],MATERIALS FOR MEMS:

[object Object],MICRO MACHINING TECHNOLOGY:

[object Object],[object Object],[object Object],TYPES OF MICROMACHINING:

MEMS ACCELEROMETRER: ,[object Object],[object Object],[object Object],[object Object],[object Object]

[object Object],[object Object],[object Object],[object Object],[object Object],ADVANTAGES:

[object Object],[object Object],[object Object],TECHNICAL LIMITATIONS:

[object Object],[object Object],[object Object],APPLICATIONS:

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mems ppt

1. MEMS TECHNOLOGY BY S.APPA RAO

4. FABRICATION PROCESS:

10.

11.

12. PIEZO-RESISTIVE ACCELEROMETER:

13. LAYOUT OF THE RESISTOR:

14. MASKS that are used 4 ACCELEROMETER:

15. FABRICATION PROCESS:

16. Contd….

17. INTERFACE ELECTRONIC CKT

18. MEMS ACCELEROMETER

19.

20.

21.

22.

23.

24.

mems ppt

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