here is a presentation on mems, its fabrication process and some of its applications...

1. MEMS
-Micro Electro Mechanical Systems
- A way to miniaturize our life style
BY-
K.ANEESHA RANI
K.SREE NAVYA
Y.ANUSHA
2ND YEAR ECE
DR.L.B.COLLEGE OF ENGINEERING (FOR WOMEN)

2. What is MEMS?
• Mems is a technology of very small devices. It is a combination of
mechanical functions and electrical functions on the same chip
using micro fabrication technology.
• MEMS are made up of components between 1 to 100 micrometers
in size
• MEMS devices generally range in size from 20 micrometers to a
millimeter

3. Fabrication of mems
Deposition Patterning Etching
Physical Chemical Lithography Dry Wet
Photolithography
Electron beam lithography
Ion beam lithography
Ion track technology
X-ray lithography.

4.  Deposition –
Physical deposition :
Physical deposition consists of a process in which a material is removed from a
target, and deposited on a surface
Chemical deposition :
Chemical deposition techniques include chemical vapor deposition, in which a
stream of source gas reacts on the substrate to grow the material desired.
 Patterning –
• Patterning of mems is the transfer of a pattern into a material.
• Lithography is a widely used process in patterning of mems .
• Examples of lithography are– Photolithography, Electron beam lithography, Ion
beam lithography, Ion track technology, X-ray lithography.

5. Etching
Wet Etching : Dry Etching :
• Wet chemical etching • Dry etching can be done in
consists in selective removal three ways and they are –
of material by dipping a a) Reactive ion etching (RIE)
substrate into a solution b) Sputter etching
that dissolves it. c) Vapor phase etching.
• The chemical nature of this
etching process provides a
good selectivity

6. Applications of mems

7. • In medicine
• A MEMS is a device that can be
implanted in the human body.
• MEMS surgical tools provide the
flexibility and accuracy to perform
surgery.
• Biomems
• Bio-mems are used to refer to the science
and technology of operating at the micro
scale for biological and biomedical
applications.

8. • In automotives :
Heavy use of mems is found in air
bag systems, vehicle security
system, inertial brake lights, rollover
detection, automatic door locks etc.
• As gyroscope:
Inexpensive vibrating structure
gyroscopes manufactured with
mems technology have become widely
available. These are
packaged similarly to other integrated
circuits and may provide either
analog or digital outputs.

9. • In microphones:
The mems microphone also called as
microphone Chip is widely used in
the present day communication
world.
• In military :
Micro-electro mechanical system (MEMS)
technology help projectiles to reach their
targets accurately .

10. • In accelerometers:
• MEMS accelerometers are widely used in cars
for airbag deployment and in consumer
electronics applications such as smart
phones, gaming devices for sensing motion
• In sensors:
• A sensor is a device which receives and
responds to a signal when touched.A micro
sensor reaches a significantly higher speed
and sensitivity compared with
microscopic approaches.

11. • Apart from these applications mems are also used in many
fields in the present world
• They are used to detect earth quakes, in gas shut off, in
shock and tilt sensing
• Inkjet printers and micro scanners also involve the use of
mems.
• Mems is used in Optical switching technology in
which, switching technology and alignment for data
communications is done.

12. Advantages and disadvantages
 Minimize energy and  Farm establishment
materials. requires huge
Improved investments.
reproducibility.  Micro-components are
 Improved accuracy and costly compared to
reliability. macro components.
 Increased selectivity  Design includes very
and sensitivity. much complex
procedures

13. Conclusion
• This enabling
technology promises to
create entirely new
categories of products.
• Mems will be the
indispensible factor in
advancing technology
• As with all emerging
technologies had been
predicted to
revolutionize
technology and our lives

15. Queries???