1. Scrubber
Research of odor improvement actions in scrubber yard and central scrubber introduction
Abstract
Wet scrubber is nowadays widely used in semiconductor industry for handling acid/ammonia exhaust waste.
This article discusses some operational problems of the system vs. their ameliorative countermeasures. Aside
from the commonly used series abatement design, it can improve odor smell and smoke in scrubber yard,
which has proved to be virtually effective, is herewith introduced.