Beelee Chua MEMS Portfolio

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The document describes Beelee Chua's MEMS (microelectromechanical systems) portfolio from 1998-2006, including surface micromachined circular and folded spring resonators, SCREAM actuators with tunneling tips for coarse and fine displacement, SOI folded spring resonators, backside released SOI capacitive sensing accelerometers and gyroscopes, a packaged accelerometer, micro corona ionizers for particle separation, and a prototype particulate analyzer using a corona ionizer and separator electrodes.

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Surface Micromachined Circular Resonator Circa 1998 Beelee Chua MEMS Portfiolio

Surface Micromachined Folded Springs Resonator with Enhanced Electrostatic Comb Drives (aka W. Tang Resonator) Circa 1998 Beelee Chua MEMS Portfolio

SCREAM Actuator with coarse and fine displacement adjustment equipped with Tunneling Tip Circa 2000 Beelee Chua MEMS Portfolio

Close up of Tunneling Tip Circa 2000 Beelee Chua MEMS Portfolio

SCREAM Actuator with coarse and fine displacement adjustment (alternate design) Circa 2000 Beelee Chua MEMS Portfolio

40um SOI Folded Spring Electrostatic Comb Drive Resonator Circa 1999 Beelee Chua MEMS Portfolio

Backside Released SOI Capacitive Sensing Accelerometer Circa 2000 Beelee Chua MEMS Portfolio

Backside Released SOI Capacitive Sensing Gyroscope Circa 2000 Beelee Chua MEMS Portfolio

Packaged Backside Released SOI Capacitive Sensing Accelerometer Circa 2001 Beelee Chua MEMS Portfolio

Micro corona ionizer in operation Circa 2002 Beelee Chua MEMS Portfolio

Micro corona ionizer and separator electrodes Circa 2003 Beelee Chua MEMS Porfolio Cathode Pin Anode Planes Separator Electrodes 1 mm

Micro corona ionizer and separator electrodes Circa 2003 Beelee Chua MEMS Portfolio Corona Ionizer 1 cm Separator Electrodes Glass Substrate Bond Pads

System Prototype of Micro Airborne Particulate Analyzer using Micro Corona Ionizer and Separator Electrodes Circa 2006 Beelee Chua MEMS Portfolio

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Beelee Chua MEMS Portfolio

1. Beelee Chua MEMS Portfolio

2. Surface Micromachined Circular Resonator Circa 1998 Beelee Chua MEMS Portfiolio

3. Surface Micromachined Folded Springs Resonator with Enhanced Electrostatic Comb Drives (aka W. Tang Resonator) Circa 1998 Beelee Chua MEMS Portfolio

4. SCREAM Actuator with coarse and fine displacement adjustment equipped with Tunneling Tip Circa 2000 Beelee Chua MEMS Portfolio

5. Close up of Tunneling Tip Circa 2000 Beelee Chua MEMS Portfolio

6. SCREAM Actuator with coarse and fine displacement adjustment (alternate design) Circa 2000 Beelee Chua MEMS Portfolio

7. 40um SOI Folded Spring Electrostatic Comb Drive Resonator Circa 1999 Beelee Chua MEMS Portfolio

8. Backside Released SOI Capacitive Sensing Accelerometer Circa 2000 Beelee Chua MEMS Portfolio

9. Backside Released SOI Capacitive Sensing Gyroscope Circa 2000 Beelee Chua MEMS Portfolio

10. Packaged Backside Released SOI Capacitive Sensing Accelerometer Circa 2001 Beelee Chua MEMS Portfolio

11. Micro corona ionizer in operation Circa 2002 Beelee Chua MEMS Portfolio

12. Micro corona ionizer and separator electrodes Circa 2003 Beelee Chua MEMS Porfolio Cathode Pin Anode Planes Separator Electrodes 1 mm

13. Micro corona ionizer and separator electrodes Circa 2003 Beelee Chua MEMS Portfolio Corona Ionizer 1 cm Separator Electrodes Glass Substrate Bond Pads

14. System Prototype of Micro Airborne Particulate Analyzer using Micro Corona Ionizer and Separator Electrodes Circa 2006 Beelee Chua MEMS Portfolio

Beelee Chua MEMS Portfolio

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