2. About Us
General
2
The product offerings contained in this catalog are
a subset of robotic products offered by the isel group.
Our products are specifically designed and engineered
to address the unique needs and requirements of the
semiconductor, flat panel display, nano-technology,
and related industries.
Should you have a special application or product
requirement not fully addressed by the offerings in this
catalog, please contact us we will be delighted to work
with you to find a solution that meets your needs.
Our company's Mission:
isel Germany AG
isel Germany AG
isel Germany AG
isel Germany AG
was founded in 1972 and is the core
company of the global isel Group.
The company develops, manufactures, markets, sells and ser-
vices systems and components used for automation, automa-
tion control systems, robots and related handling systems.
The company supports the global market needs of the Semi-
conductor Equipment and related industries, its activities are
centered on the company's expertise in automation and
interrelated technologies and include a broad array of
customer applications using the isel product line as the
foundation to address those needs.
is located in Eichenzell (Hesse) and
Dermbach (Thuringia), Germany.
The mission of is to design, engineer and
manufacture, sell and service products that provide our
customers with reliable, high quality technical solutions,
at a favorable price-performance ratio.
The foundation of all isel components and systems is focused
adherence to “design for modularity”, benefiting the customer
in design flexibility, cost, and functional upgradability. This
methodology assures seamless integration of mechanical,
electronic and software functions from initial design, on
throughout all aspects of the total product life cycle.
isel's open interfaces for software and control systems provide
the flexibility that is required to meet the integration needs and
demands of a customers existing applications and ensures
compatibility with implementations provided by other
suppliers.
maintains a permanent demonstration and
application facility at its Eichenzell facility in central Germany
and at a facility in Fremont, California. Ask for an appointment
with one of our applications engineers.
We look forward to your visit and an opportunity to serve your
automation, robotic and handling needs.
Handling and more
Eichenzell facility
Dermbach facility
3. General
Best Service
3 Se
rvice
Handling and more
3
We're there for you...
...because you'll get it all from one source
Because we control all aspects of our products life cycle, from design, production, sales and service, we ensure you will receive
competent contacts for all questions concerning our products.
We're there for you...
We're there for you...
...with more than 30 years of market presence
iselRobotikSupporting department is the renowned and internationally-active .
Benefit from our market presence of many years in a variety of industry lines.
isel Germany AG
...in the heart of Europe
From our location in Eichenzell (Hessen), in central Germany there is a maximum distace of 400 km to Europe's
semiconductor key locations.
Des
ign
Produ
ction
Sal
es
Handling and more
4. isel IWH F-1 Wafer Handling Robots
with two-link arm
WaferHandling
4
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
10”, 13”, 17”
10", 14"
450°
0.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA10S10 F-1
5. isel IWH F-1 Wafer Handling Robots
with two-link arm
WaferHandling
5
Handling and more
Dimensions
IWH TA S F-1__ __
IWH TA S F-110 10
IWH TA S F-113 10
IWH TA S F-117 10
IWH TA S F-110 14
IWH TA S F-113 14
IWH TA S F-117 14
Possible Configurations
IWH BA S F-1__ __
IWH BA S F-110 10
IWH BA S F-113 10
IWH BA S F-117 10
IWH BA S F-110 14
IWH BA S F-113 14
IWH BA S F-117 14
Possible Configurations
92
57
65
77
57
65
513.5(TA)10
588.5(TA)13
690(TA)17431.8(TA)17
330.2(TA)13
254(TA)10
365.8 (S )14
266.7 (S )10
365.8 (S )14
266.7 (S )10
620.8(TA)10
695.8(TA)13
797.3(TA)17
254(TA)10
330.2(TA)13
431.8(TA)17
6. isel IWH F-1 Wafer Handling Robots
with two-link heavy duty arm
WaferHandling
6
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
10”, 13”, 17”
10", 12", 14", 16", 20"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA10S10HD F-1
7. isel IWH F-1 Wafer Handling Robots
with two-link heavy duty arm
WaferHandling
7
Handling and more
Dimensions
IWH TA S F-1__ __ HD
IWH TA S HD F-110 10
IWH TA S HD F-110 12
IWH TA S HD F-110 14
IWH TA S HD F-110 16
IWH TA S HD F-110 20
IWH TA S HD F-113 10
IWH TA S HD F-113 12
IWH TA S HD F-113 14
IWH TA S HD F-113 16
IWH TA S HD F-113 20
IWH TA S HD F-117 10
IWH TA S HD F-117 12
IWH TA S HD F-117 14
IWH TA S HD F-117 16
IWH TA S HD F-117 20
Possible Configurations
IWH BA S F-1__ __ HD
IWH BA S HD F-110 10
IWH BA S HD F-110 12
IWH BA S HD F-110 14
IWH BA S HD F-110 16
IWH BA S HD F-110 20
IWH BA S HD F-113 10
IWH BA S HD F-113 12
IWH BA S HD F-113 14
IWH BA S HD F-113 16
IWH BA S HD F-113 20
IWH BA S HD F-117 10
IWH BA S HD F-117 12
IWH BA S HD F-117 14
IWH BA S HD F-117 16
IWH BA S HD F-117 20
Possible Configurations
513.5(TA)10
588.5(TA)13
690(TA)17431.8(TA)17
329.9(TA)13
254(TA)10
266.7 (S )10
304.8 (S )12
365.8 (S )14
426.7 (S )16
508 (S )20
266.7 (S )10
304.8 (S )12
365.8 (S )14
426.7 (S )16
508 (S )20
633.5(TA)10
708.5(TA)13
810(TA)17
254(TA)10
330.2(TA)13
431.5(TA)17
105
Ø 235
Ø 277
Ø 330
75
90
Ø 235
185
225
175
195
75
8. isel IWH F-1 Wafer Handling Robots
with three-link heavy duty arm
WaferHandling
8
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
10”, 13”, 17”
16", 21", 24"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA10S16 F-1
9. isel IWH F-1 Wafer Handling Robots
with three-link heavy duty arm
WaferHandling
9
Handling and more
Dimensions
IWH TA S F-1__ __
IWH TA S F-110 16
IWH TA S F-110 21
IWH TA S F-110 24
IWH TA S F-113 16
IWH TA S F-113 21
IWH TA S F-113 24
IWH TA S F-117 16
IWH TA S F-117 21
IWH TA S F-117 24
Possible Configurations
IWH BA S F-2__ __
IWH BA S F-110 16
IWH BA S F-110 21
IWH BA S F-110 24
IWH BA S F-113 16
IWH BA S F-113 21
IWH BA S F-113 24
IWH BA S F-117 16
IWH BA S F-117 21
IWH BA S F-117 24
Possible Configurations
75
185
225
175
195
406.4 (S )16
533.4 (S )21
609.6 (S )24
406.4 (S )16
533.4 (S )21
609.6 (S )24
Ø 235
Ø 277
142
Ø 330
690(TA)17
588.5(TA)13
513.5(TA)10
431.8(TA)17
329.9(TA)13
254(TA)10
127
670.5(TA)10
745.5(TA)13
847(TA)17
254(TA)10
330.2(TA)13
431.8(TA)17
10. isel IWH F-2 Wafer Handling Robots
with two-link arm and heavy duty body
WaferHandling
10
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13”, 17”, 21”
10", 14"
450°
0.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA13S10 F-2
11. isel IWH F-2 Wafer Handling Robots
with two-link arm and heavy duty body
WaferHandling
11
Handling and more
Dimensions
IWH TA S F-2__ __
IWH TA S F-213 10
IWH TA S F-217 10
IWH TA S F-221 10
IWH TA S F-213 14
IWH TA S F-217 14
IWH TA S F-221 14
Possible Configurations
IWH BA S F-2__ __
IWH BA S F-213 10
IWH BA S F-217 10
IWH BA S F-221 10
IWH BA S F-213 14
IWH BA S F-217 14
IWH BA S F-221 14
Possible Configurations
87
Ø 330.2
57
65
72
273
255
57
225
265
215
235
65
557(TA)13
659(TA)17
760(TA)21
330.2(TA)13
431.8(TA)17
523.4(TA)21
365.8 (S )14
266.7 (S )10
365.8 (S )14
266.7 (S )10
659.3(TA)13
761.3(TA)17
862.3(TA)21
330.2(TA)13
431.8(TA)17
523.4(TA)21
12. isel IWH HD F-2 Wafer Handling Robots
with two-link heavy duty body/arm
WaferHandling
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13”, 17”, 21”
10", 12", 14", 16", 20"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA13S10HD F-2
12
13. isel IWH HD F-2 Wafer Handling Robots
with two-link heavy duty body/arm
WaferHandling
Handling and more
Dimensions
IWH TA S HD F-2__ __
557(TA)13
659(TA)17
100
Ø 330.2
760(TA)21
253
533.1(TA)21
431.8(TA)17
330.2(TA)13
266.7 (S )10
365.8 (S )14
426.7 (S )16
508 (S )20
75
304.8 (S )12
672(BA)13
85
774(BA)17
533.4(BA)21
330.2(BA)13
255
273
875(BA)21
431.8(BA)17
225
265
215
235
266.7 (S )10
304.8 (S )12
365.8 (S )14
426.7 (S )16
508 (S )20
75
IWH TA S HD F-213 10
IWH TA S HD F-213 12
IWH TA S HD F-213 14
IWH TA S HD F-213 16
IWH TA S HD F-213 20
IWH TA S HD F-217 10
IWH TA S HD F-217 12
IWH TA S HD F-217 14
IWH TA S HD F-217 16
IWH TA S HD F-217 20
IWH TA S HD F-221 10
IWH TA S HD F-221 12
IWH TA S HD F-221 14
IWH TA S HD F-221 16
IWH TA S HD F-221 20
Possible Configurations
IWH BA S HD F-213 10
IWH BA S HD F-213 12
IWH BA S HD F-213 14
IWH BA S HD F-213 16
IWH BA S HD F-213 20
IWH BA S HD F-217 10
IWH BA S HD F-217 12
IWH BA S HD F-217 14
IWH BA S HD F-217 16
IWH BA S HD F-217 20
IWH BA S HD F-221 10
IWH BA S HD F-221 12
IWH BA S HD F-221 14
IWH BA S HD F-221 16
IWH BA S HD F-221 20
Possible Configurations
IWH BA S HD F-2__ __
13
14. isel IWH F-2 Wafer Handling Robots
with three-link heavy duty body/arm
WaferHandling
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13”, 17”, 21”
16", 21", 24"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA13S16 F-2
14
15. isel IWH F-2 Wafer Handling Robots
with three-link heavy duty body/arm
WaferHandling
Handling and more
Dimensions
IWH TA S F-2__ __
IWH TA S F-213 16
IWH TA S F-213 21
IWH TA S F-213 24
IWH TA S F-217 16
IWH TA S F-217 21
IWH TA S F-217 24
IWH TA S F-221 16
IWH TA S F-221 21
IWH TA S F-221 24
Possible Configurations
IWH BA S F-2__ __
IWH BA S F-213 16
IWH BA S F-213 21
IWH BA S F-213 24
IWH BA S F-217 16
IWH BA S F-217 21
IWH BA S F-217 24
IWH BA S F-221 16
IWH BA S F-221 21
IWH BA S F-221 24
Possible Configurations
659(TA)17
557(TA)13
Ø 330.2
137533,4(TA)21
431,5(TA)17
330,2(TA)13
760(TA)21
406.4 (S )16
533.4 (S )21
609.6 (S )24
75
709(BA)13
811(BA)17
122
431,8(BA)17
330,2(BA)13
533,4(BA)21912(BA)21
273
255
225
265
215
235
75
406.4 (S )16
533.4 (S )21
609.6 (S )24
15
16. isel IWH F-3 Wafer Handling Robot with dual arm
WaferHandling
16
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,100 mm/s
425 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13” (330.2 mm)
14.4" (365.8 mm)
450°
max. 1.25 kg /arm
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Characteristics
■
■
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Wafer handling of up to 300mm
Maximum reliability and precision
Easy connection of a linear track to the robot
controller
Real time motion control
Very smooth running
Brushless, maintenance free servo motors with
low inertia
Backlash free Harmonic Drive gears
Absolute Encoder
Various communication interfaces
Class 1 clean room compatible
MTBF:>50.000 operating hours
Including Robot Control Center
®
18. isel Wafer Handling Vacuum Robot
WaferHandling
18
Handling and more
Specifications
Cleanliness
Weight
T
R
Z
Z
radial
theta
Maximum speed
T
R
Z
360°/s
500 mm/s
100 mm/s
110 V AC
±0.02°
±0.05 mm
±0.05 mm
1.5” (38.4 mm)
14" (355.6 mm)
380°
1.0 to 2.2 kg
<5x10 Torr
-9
Class 1
21.8 kg (48 lbs)
RS-232 [DB9]
Option:Ethernet [RJ-45]
150° C (302° F)
80° C (176° F)
Al 6061, Stainless steel,
Ferrofluid, Viton
Configuration
Top or bottom of chamber base
Modular, interchangeable arms
Main interface
Power supply
Max. temperature
Max. operating temperature
Exposed materials
Mounting style
Repeatability
Working range
Payload
Leak rate
Characteristics
■
■
■
■
■
■
■
■
■
■
■
■
■
Industry standard footprint and mounting
configurations
Wafer handling of up to 300mm
High precision user configurable 14", 16" and
18" arms
Maximum reliability and precision
Ferrofluidic vacuum seal
Vacuum levels at <5x19 Torr
Real time motion control
Very smooth running
Brushless, maintenance free servo motors
with low inertia
Absolute Encoder
Various communication interfaces
Class 1 cleanliness
MTBF:>50.000 operating hours
-9
19. isel Wafer Handling Vacuum Robot
WaferHandling
19
Handling and more
Dimensions
Ø 11.00
B B
A
FULL Z STROKE
1.56
1.60
Ø 9.30 [236.2]
17.40
3.35
.49E
C
.75
(Hard Stop)
D
1
1
2
2
RECOMMENDED WAFER TRANSFEREE PLANE
RECOMMENDED CHAMBER HOLE Ø 9.5" [241.3]
Arm 7 Arm 8 Arm 9 Arm 9 HD
in [mm] 10-20-0046 10-20-0057 10-20-0045 10-20-0050
A 14.381 [365.28] 15.37 [390.3] 18.5 [471] 18.5 [471]
B 7.48 [190] 7.99 [203] 9.6 [245] 9.6 [245]
C 2.14 [54.35] 2.27 [57.8] 2.14 [54.35] 2.7 [68.5]
D 0.87 [22.05] 1.04 [26.5] 0.868 [22.05] 1.2 [31]
E 1.181 [30] 1.14 [29] 1.18 [30] 1.3 [32.5]
20. WaferHandling
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Class 1 Cleanliness
Feedback: Absolute Encoder
Repeatability: 0.001"
Maximum vertical stroke: 406 mm [16"]
Maximum Vacuum: 1.0x10 Torr
Motors: AC Servo
Elevator weight: 18.2 kg [
-10
40 lbs]
Elevator payload: 5.5 kg [12 lbs]
Surface: aluminium, stainless steel
Sensors: Cassette present
Z stroke: 304.8 mm [12"]
Handling and more
20
isel Vacuum Elevator
21. isel Vertical Robot
IVR Series
WaferHandling
Description
The vertical robot series represents a high-quality
compact design. By using robust-industry-proven
components and by reducing the number of inter-
connecting parts we were able to build a very rigid
and dynamic robot system.
trans-
porting . respon-
sive low-inertia
This new handling solution is suitable for
wafers and substrates Extremely
brushless motors, coupled with
directly driven Harmonic Drive transmissions
guarantee precise and interference-proof arm
movements.
The robust-industry-proven external servo controller
with it's 32-bit real-time kernel provides for a
seamless integration of traversing axes and other
peripheries. This controller ensures smooth axis
traversing along multiple path segments.
The controller supports RS-232, RS-485, Teach
Pendant and Ethernet interfaces.
®
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum speed >1 m/s
Z axis up to 1,200 mm
Optimal acceleration - user programable
Easy connection of a traversing axis to the robot controller
Real-time movement control
Very smooth operation - vibration free
Brushless, maintenance-free servo motors with low
moment of inertia
Harmonic Drive transmission with zero backlash
Various communication interfaces
MTBF > 50,000 hours
®
Example:
Custom solution with
1,200 mm axis length
and lateral axis module
Handling and more
21
22. isel Linear Track
ILT Series
LinearTracks
Description
Due to their flexibility, the linear tracks of the ILT
series can easily be integrated into your available
installation. The tracks are controlled in
combination with our IWH series robots.
By this combination of the linear tracks with the
robots, the system is very effective and
provides high throughputs.
Depending on the type of application, the linear
tracks can be mounted underneath the robots or
lateral. The use of brushless servo motors ensures
our linear tracks are operationally dynamic, smooth
and service-free.
isel
Characteristics
■
■
■
■
■
■
■
High speed and dynamics
Overall lengths user definable, according to the application
Configurable lateral or bottom mounting
Excellent structural rigidity
Robust-industry-proven reliability and precision
Simple to connection to the robot controller
Driven by linear motor or spindle isel
isel
Linear Track
with lateral mounted
Wafer Handling
Robot seriesIWH-TA
Handling and more
22
23. isel Linear Track
ILT Series
LinearTracks
isel
isel
Linear Track
with top-mounted
Wafer Handling
Robot seriesIWH-BA
Handling and more
23
24.
25. AccessoriesforWaferHandlers
isel End Effectors
IEE Series
2 05 40 x x x x
Option
0000 = Standard
0002 = Flip module
0003 = Vacuum control with display
9xxx = Customized end effector
8 = Scanner Cyberoptics EX-43QS
9 = Scanner Cyberoptics EX-73QS
07 = 2x horse shoe
08 = Pocket end effector
09 = Exclusion zone grip
10 = Exclusion zone vacuum
5 = 2 - 5"
6 = 6 - 8"
7 = 4 - 8"
8 = 12”
9 = 8 - 12”
Wafer mapping
End effektor type
Wafer size
0 = No wafer mapping sensor
2 = Scanner SUNIX M-DW1
4 = Thru beam sensor horseshoe
01 = Paddle
02 = Horse shoe
03 = Edge grip
04 = 2x paddle
05 = Paddle/horse shoe
Automation components
for the semiconductor industry,
product group end effectors
IEE Series 1
x x x x
Handling and more
25
Product Key
26. Prealigners
LPA Series
Prealigners
Characteristics(Three-axisprealigners)
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Innovative all-in-one design
Alignment cycle time <3.5 Seconds
Repeating accuracy
linear. ±0.025 mm, circular ± 0.05°
Contactless measuring via LED and CCD sensor
Integrated scan electronics
Stand-alone capable
Chuck- or pinload as well as wafer size changing
without mechanical changes
Transparent, semi-transparent, punched and
opaque wafers alignable
SEMI, flat and notch wafer specifications
For wafer sizes from 2" up to 12"
Bottom-entry and side-entry cable configurations
Description
The prealigners are innovative, high precision,
class 1 compatible prealigner solutions with integrated
scan electronics.
LPA series
Characteristics(SingleaxisPrealigners)
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Alignment cycle time <2.5 Seconds
Contactless measuring via LED and CCD sensor
Integrated scan electronics
Chuck load
Wafer size changing without mechanical changes
Transparent, semi-transparent, punched and
opaque wafers alignable
SEMI, flat and notch wafer specifications
For wafer sizes from 3" up to 12"
Side-entry and back-entry cable configurations Single axis
prealigner
with back-entry cable
configuration
LPA Series
Three-axis
prealigner
with lateral connectors
and PEEK pin/chuck
LPA Series
Handling and more
26
27. Prealigners
LPA
Prealigners
LPA Series
Handling and more
27
312 3 V 40 P 1 S 23 S V 500 P N ****
Interface
N
Contact material
P
V
K
S
C
Pin length in inch*10
Pin Type
V
E
C
= Ethernet interface
= Peek
= Viton
= Kalrez
= Stainless Steel
= Custom
= Vacuum
= Edge handling
= Custom
-3
500
Cable entry
S
B
Height in mm
23
CCD Sensitivity
S
H
= Standard
= Side cable entry
= Bottom cable entry
= Standard
= Standard
= High
Wafer sizes
25
Number of axes
1
3
Chuck type
Chuck diameter in mm
23
= 2" to 5"
= Single axis
= Three axes
= 2" to 5"
26
38
58
312
812
6EH
8EH
12EH
V
E
C
23
40
40
40
76
Contact material
P
V
K
A
T
C
Chuck encoder
1
2
= 2" to 6"
= 3" to 8"
= 5" to 8"
= 3" to 12"
= 8" to 12"
= 6" only
= 8" only
= 12" only
= Vacuum
= Edge handling
= Custom
= 2" to 6"
= 3" to 8"
= 5" to 8"
= 3" to 12"
= 8" to 12"
= Peek
= Viton
= Kalrez
= Aluminum
= Teflon
= Custom
= 10K PPR
= 24K PPR
( for edge handling)EH
Standard sizes:
(Standard)
(Standard)
Series Customization code
Not applicable for
single axis models
Chuck Lighthouse Pins
Product Key
Optional
Example:
28. AccessoriesforWaferHandling
Controllers
InternalController
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■
IWH series 1, IWH-HD series 2, IVR series, prealigners
Control of incremental encoders
3+1 axes
4 inputs, 3 outputs
RS232 and Ethernet communication
RCC software
- I/O extension
Optional:
ExternalController
■
■
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■
■
■
■
■
Vacuum Robots, Dual Arm Robots, IWH Series 4
Compact, pre-integrated networkable & I/O control
6+2 axes
32 digital inputs, 14 digital outputs
Autotuning, autocalibration, DWC, adaptive control
Total Graphics GUI
Semiconductor Toolkit Software
Dimensions: 285 x 219 x 81 mm
Internal
controller
External
controller
RCC software
screenshot
Semiconductor
Toolkit software
screenshot
Handling and more
28
29. AccessoriesforWaferHandling
Controllers / Wafer Mapping Sensors
Handling and more
Internal Controller
External Controller
■
■
■
■
■
■
■
■
IRC 331
IRC 331 ex
Suitable for IWH Series 1, IWH HD Series 2, IVR Series,
Dual Arm series
Control of incremental and absolute encoders
3 + 1 axes, upgradable
14 inputs, 13 outputs
RS-232 and Ethernet communication interfaces
Robot Control Center (RCC) software
Dimensions: 480 x 180 x 150 mm
Options:
- I/O extensions
- Hand terminal
RCC software
screenshot
Figure:
IRC 331ex
29
Wafer Mapping Sensors
IMS-EX43(73)QS
■
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IMS-MDW1
■
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■
IMS
Laser class 1 light source
Measuring distance 38 / 56 mm (1,5" / 2,2”)
Sensor flexibly configurable
LED light source
Measuring distance 45 mm (1.75")
PNP / NPN switchable
30. AccessoriesforWaferHandling
Other Accessories
FlipModule
■
■
■
■
■
■
IFM-300-2
Accurate flipping of wafers with most precise
positioning by means of positive stops
Universal end effector adapter
Mapping sensor
DC Motor with transmission unit
Electrical end-of-travel damping
Continuously variable speeds
HandTerminal
■
■
■
■
■
■
IHT
Optimal support when teaching an wafer handler
Keyboard layout optimized for wafer handlers
RS-485
isel
isel
Terminal function
Teach function
Diagnosis function
Handling and more
30
31. Custom Solutions - Why isel?
Someimportantreasonstochooseus:
■
■
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We develop, design and manufacture almost all necessary
components on our own premises. Thus we achieve
highest planning flexibility and extremely short
implementation phases
We maintain an extensive portion of production in-house
and possess a vast amount of high volumn production
experience
We offer you excellent service and support throughout the
product life cycle, from initial design through final
acceptance and production use
The emulation and integration of third party software is
virtually seamless. Your engineering time and cost
expenditure is therefore minimal
Due to our location in Central Europe and a favorable
infrastructure we are on the spot in a short time
ProjectDevelopment
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In order to ensure optimal results, well-trained and
experienced project engineers oversee the projects at
iselRobotik. The project procedure typically proceeds
as follows:
Define the boundary conditions on-site
Cooperative creation of the customer requirements
specification
Creation of a conceptional with 3D CAD systems
Issue of a project-specific quotation and statement of
work including the product requirements specification
with all project-specific parameters
Release of the product requirements specifications
and the provisional conceptional design
Creation of the detailed conceptional design specification
of the project
Upon your release of the detailed conceptional design
specification we start with the manufacturing of your
customized robotic system
System acceptance is completed upon the successful
product installation and the meeting all of your
specifications
design
CustomSolutions
Handling and more
31
35. References
References
I O S . I N S T R U M E N T S
HSEB
INNOLAS
Innovative
Lasertechnologie
Subsequently you'll find a selection of companies that
participated in a successful co-operation with us and
that successfully use our products:
Handling and more
35
mechatronic
systemtechnik gmbh
36. 970250 TE005 // 40_2009
i s e l G e r m a n y A G
Ro b o t i c s D e p a r t m e n t
Buergermeister-Ebert-Str. 40
D - 3 6 1 2 4 E i c h e n z e l l
Tel.: +49 (0) 66 59 981 - 0
Fax: - 776
E-Mail: robotik@isel.com
w w w. i s e l r o b o t i k . c o m
+49 (0) 66 59 981
Handling and more