SlideShare a Scribd company logo
1 of 36
Download to read offline
®
Handling and more
Automation Components
for the Semiconductor Industry
2009/2010
About Us
General
2
The product offerings contained in this catalog are
a subset of robotic products offered by the isel group.
Our products are specifically designed and engineered
to address the unique needs and requirements of the
semiconductor, flat panel display, nano-technology,
and related industries.
Should you have a special application or product
requirement not fully addressed by the offerings in this
catalog, please contact us we will be delighted to work
with you to find a solution that meets your needs.
Our company's Mission:
isel Germany AG
isel Germany AG
isel Germany AG
isel Germany AG
was founded in 1972 and is the core
company of the global isel Group.
The company develops, manufactures, markets, sells and ser-
vices systems and components used for automation, automa-
tion control systems, robots and related handling systems.
The company supports the global market needs of the Semi-
conductor Equipment and related industries, its activities are
centered on the company's expertise in automation and
interrelated technologies and include a broad array of
customer applications using the isel product line as the
foundation to address those needs.
is located in Eichenzell (Hesse) and
Dermbach (Thuringia), Germany.
The mission of is to design, engineer and
manufacture, sell and service products that provide our
customers with reliable, high quality technical solutions,
at a favorable price-performance ratio.
The foundation of all isel components and systems is focused
adherence to “design for modularity”, benefiting the customer
in design flexibility, cost, and functional upgradability. This
methodology assures seamless integration of mechanical,
electronic and software functions from initial design, on
throughout all aspects of the total product life cycle.
isel's open interfaces for software and control systems provide
the flexibility that is required to meet the integration needs and
demands of a customers existing applications and ensures
compatibility with implementations provided by other
suppliers.
maintains a permanent demonstration and
application facility at its Eichenzell facility in central Germany
and at a facility in Fremont, California. Ask for an appointment
with one of our applications engineers.
We look forward to your visit and an opportunity to serve your
automation, robotic and handling needs.
Handling and more
Eichenzell facility
Dermbach facility
General
Best Service
3 Se
rvice
Handling and more
3
We're there for you...
...because you'll get it all from one source
Because we control all aspects of our products life cycle, from design, production, sales and service, we ensure you will receive
competent contacts for all questions concerning our products.
We're there for you...
We're there for you...
...with more than 30 years of market presence
iselRobotikSupporting department is the renowned and internationally-active .
Benefit from our market presence of many years in a variety of industry lines.
isel Germany AG
...in the heart of Europe
From our location in Eichenzell (Hessen), in central Germany there is a maximum distace of 400 km to Europe's
semiconductor key locations.
Des
ign
Produ
ction
Sal
es
Handling and more
isel IWH F-1 Wafer Handling Robots
with two-link arm
WaferHandling
4
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
10”, 13”, 17”
10", 14"
450°
0.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA10S10 F-1
isel IWH F-1 Wafer Handling Robots
with two-link arm
WaferHandling
5
Handling and more
Dimensions
IWH TA S F-1__ __
IWH TA S F-110 10
IWH TA S F-113 10
IWH TA S F-117 10
IWH TA S F-110 14
IWH TA S F-113 14
IWH TA S F-117 14
Possible Configurations
IWH BA S F-1__ __
IWH BA S F-110 10
IWH BA S F-113 10
IWH BA S F-117 10
IWH BA S F-110 14
IWH BA S F-113 14
IWH BA S F-117 14
Possible Configurations
92
57
65
77
57
65
513.5(TA)10
588.5(TA)13
690(TA)17431.8(TA)17
330.2(TA)13
254(TA)10
365.8 (S )14
266.7 (S )10
365.8 (S )14
266.7 (S )10
620.8(TA)10
695.8(TA)13
797.3(TA)17
254(TA)10
330.2(TA)13
431.8(TA)17
isel IWH F-1 Wafer Handling Robots
with two-link heavy duty arm
WaferHandling
6
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
10”, 13”, 17”
10", 12", 14", 16", 20"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA10S10HD F-1
isel IWH F-1 Wafer Handling Robots
with two-link heavy duty arm
WaferHandling
7
Handling and more
Dimensions
IWH TA S F-1__ __ HD
IWH TA S HD F-110 10
IWH TA S HD F-110 12
IWH TA S HD F-110 14
IWH TA S HD F-110 16
IWH TA S HD F-110 20
IWH TA S HD F-113 10
IWH TA S HD F-113 12
IWH TA S HD F-113 14
IWH TA S HD F-113 16
IWH TA S HD F-113 20
IWH TA S HD F-117 10
IWH TA S HD F-117 12
IWH TA S HD F-117 14
IWH TA S HD F-117 16
IWH TA S HD F-117 20
Possible Configurations
IWH BA S F-1__ __ HD
IWH BA S HD F-110 10
IWH BA S HD F-110 12
IWH BA S HD F-110 14
IWH BA S HD F-110 16
IWH BA S HD F-110 20
IWH BA S HD F-113 10
IWH BA S HD F-113 12
IWH BA S HD F-113 14
IWH BA S HD F-113 16
IWH BA S HD F-113 20
IWH BA S HD F-117 10
IWH BA S HD F-117 12
IWH BA S HD F-117 14
IWH BA S HD F-117 16
IWH BA S HD F-117 20
Possible Configurations
513.5(TA)10
588.5(TA)13
690(TA)17431.8(TA)17
329.9(TA)13
254(TA)10
266.7 (S )10
304.8 (S )12
365.8 (S )14
426.7 (S )16
508 (S )20
266.7 (S )10
304.8 (S )12
365.8 (S )14
426.7 (S )16
508 (S )20
633.5(TA)10
708.5(TA)13
810(TA)17
254(TA)10
330.2(TA)13
431.5(TA)17
105
Ø 235
Ø 277
Ø 330
75
90
Ø 235
185
225
175
195
75
isel IWH F-1 Wafer Handling Robots
with three-link heavy duty arm
WaferHandling
8
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
10”, 13”, 17”
16", 21", 24"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA10S16 F-1
isel IWH F-1 Wafer Handling Robots
with three-link heavy duty arm
WaferHandling
9
Handling and more
Dimensions
IWH TA S F-1__ __
IWH TA S F-110 16
IWH TA S F-110 21
IWH TA S F-110 24
IWH TA S F-113 16
IWH TA S F-113 21
IWH TA S F-113 24
IWH TA S F-117 16
IWH TA S F-117 21
IWH TA S F-117 24
Possible Configurations
IWH BA S F-2__ __
IWH BA S F-110 16
IWH BA S F-110 21
IWH BA S F-110 24
IWH BA S F-113 16
IWH BA S F-113 21
IWH BA S F-113 24
IWH BA S F-117 16
IWH BA S F-117 21
IWH BA S F-117 24
Possible Configurations
75
185
225
175
195
406.4 (S )16
533.4 (S )21
609.6 (S )24
406.4 (S )16
533.4 (S )21
609.6 (S )24
Ø 235
Ø 277
142
Ø 330
690(TA)17
588.5(TA)13
513.5(TA)10
431.8(TA)17
329.9(TA)13
254(TA)10
127
670.5(TA)10
745.5(TA)13
847(TA)17
254(TA)10
330.2(TA)13
431.8(TA)17
isel IWH F-2 Wafer Handling Robots
with two-link arm and heavy duty body
WaferHandling
10
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13”, 17”, 21”
10", 14"
450°
0.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA13S10 F-2
isel IWH F-2 Wafer Handling Robots
with two-link arm and heavy duty body
WaferHandling
11
Handling and more
Dimensions
IWH TA S F-2__ __
IWH TA S F-213 10
IWH TA S F-217 10
IWH TA S F-221 10
IWH TA S F-213 14
IWH TA S F-217 14
IWH TA S F-221 14
Possible Configurations
IWH BA S F-2__ __
IWH BA S F-213 10
IWH BA S F-217 10
IWH BA S F-221 10
IWH BA S F-213 14
IWH BA S F-217 14
IWH BA S F-221 14
Possible Configurations
87
Ø 330.2
57
65
72
273
255
57
225
265
215
235
65
557(TA)13
659(TA)17
760(TA)21
330.2(TA)13
431.8(TA)17
523.4(TA)21
365.8 (S )14
266.7 (S )10
365.8 (S )14
266.7 (S )10
659.3(TA)13
761.3(TA)17
862.3(TA)21
330.2(TA)13
431.8(TA)17
523.4(TA)21
isel IWH HD F-2 Wafer Handling Robots
with two-link heavy duty body/arm
WaferHandling
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13”, 17”, 21”
10", 12", 14", 16", 20"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA13S10HD F-2
12
isel IWH HD F-2 Wafer Handling Robots
with two-link heavy duty body/arm
WaferHandling
Handling and more
Dimensions
IWH TA S HD F-2__ __
557(TA)13
659(TA)17
100
Ø 330.2
760(TA)21
253
533.1(TA)21
431.8(TA)17
330.2(TA)13
266.7 (S )10
365.8 (S )14
426.7 (S )16
508 (S )20
75
304.8 (S )12
672(BA)13
85
774(BA)17
533.4(BA)21
330.2(BA)13
255
273
875(BA)21
431.8(BA)17
225
265
215
235
266.7 (S )10
304.8 (S )12
365.8 (S )14
426.7 (S )16
508 (S )20
75
IWH TA S HD F-213 10
IWH TA S HD F-213 12
IWH TA S HD F-213 14
IWH TA S HD F-213 16
IWH TA S HD F-213 20
IWH TA S HD F-217 10
IWH TA S HD F-217 12
IWH TA S HD F-217 14
IWH TA S HD F-217 16
IWH TA S HD F-217 20
IWH TA S HD F-221 10
IWH TA S HD F-221 12
IWH TA S HD F-221 14
IWH TA S HD F-221 16
IWH TA S HD F-221 20
Possible Configurations
IWH BA S HD F-213 10
IWH BA S HD F-213 12
IWH BA S HD F-213 14
IWH BA S HD F-213 16
IWH BA S HD F-213 20
IWH BA S HD F-217 10
IWH BA S HD F-217 12
IWH BA S HD F-217 14
IWH BA S HD F-217 16
IWH BA S HD F-217 20
IWH BA S HD F-221 10
IWH BA S HD F-221 12
IWH BA S HD F-221 14
IWH BA S HD F-221 16
IWH BA S HD F-221 20
Possible Configurations
IWH BA S HD F-2__ __
13
isel IWH F-2 Wafer Handling Robots
with three-link heavy duty body/arm
WaferHandling
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum reliability and precision
Top mounted (TA) or bottom mounted (BA) versions
available
Customized designs
Optional internal or external controller
Absolute (digital) or incremental encoder
Seamless integration with prealigner, linear track and other
periphal components
Optional high-end controller for controlling complex
systems
Including Robot Control Center (RCC)
Class 1 clean-room environment compatible
Made in Germany
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,000 mm/s
450 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13”, 17”, 21”
16", 21", 24"
450°
2.75 kg
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Figure:
IWH TA13S16 F-2
14
isel IWH F-2 Wafer Handling Robots
with three-link heavy duty body/arm
WaferHandling
Handling and more
Dimensions
IWH TA S F-2__ __
IWH TA S F-213 16
IWH TA S F-213 21
IWH TA S F-213 24
IWH TA S F-217 16
IWH TA S F-217 21
IWH TA S F-217 24
IWH TA S F-221 16
IWH TA S F-221 21
IWH TA S F-221 24
Possible Configurations
IWH BA S F-2__ __
IWH BA S F-213 16
IWH BA S F-213 21
IWH BA S F-213 24
IWH BA S F-217 16
IWH BA S F-217 21
IWH BA S F-217 24
IWH BA S F-221 16
IWH BA S F-221 21
IWH BA S F-221 24
Possible Configurations
659(TA)17
557(TA)13
Ø 330.2
137533,4(TA)21
431,5(TA)17
330,2(TA)13
760(TA)21
406.4 (S )16
533.4 (S )21
609.6 (S )24
75
709(BA)13
811(BA)17
122
431,8(BA)17
330,2(BA)13
533,4(BA)21912(BA)21
273
255
225
265
215
235
75
406.4 (S )16
533.4 (S )21
609.6 (S )24
15
isel IWH F-3 Wafer Handling Robot with dual arm
WaferHandling
16
Handling and more
Specifications
Repeatability
Working range
Payload
T
R
Z
Z
radial
theta
Maximum speed
Main interface
Power supply
T
R
Z
360°/s
1,100 mm/s
425 mm/s
110 / 230 V AC
±0.02°
±0.03 mm
±0.03 mm
13” (330.2 mm)
14.4" (365.8 mm)
450°
max. 1.25 kg /arm
RS-232 [DB9]
Option:Ethernet [RJ-45]
Peripheral interface RS-485 [RJ-45],
RJ-11
Characteristics
■
■
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Wafer handling of up to 300mm
Maximum reliability and precision
Easy connection of a linear track to the robot
controller
Real time motion control
Very smooth running
Brushless, maintenance free servo motors with
low inertia
Backlash free Harmonic Drive gears
Absolute Encoder
Various communication interfaces
Class 1 clean room compatible
MTBF:>50.000 operating hours
Including Robot Control Center
®
WaferHandling
17
Handling and more
Dimensions
10
708335
559
312
Ø 555
555
Ø 300 Wafer
M84x
182.9
250
225
isel Wafer Handling Vacuum Robot
WaferHandling
18
Handling and more
Specifications
Cleanliness
Weight
T
R
Z
Z
radial
theta
Maximum speed
T
R
Z
360°/s
500 mm/s
100 mm/s
110 V AC
±0.02°
±0.05 mm
±0.05 mm
1.5” (38.4 mm)
14" (355.6 mm)
380°
1.0 to 2.2 kg
<5x10 Torr
-9
Class 1
21.8 kg (48 lbs)
RS-232 [DB9]
Option:Ethernet [RJ-45]
150° C (302° F)
80° C (176° F)
Al 6061, Stainless steel,
Ferrofluid, Viton
Configuration
Top or bottom of chamber base
Modular, interchangeable arms
Main interface
Power supply
Max. temperature
Max. operating temperature
Exposed materials
Mounting style
Repeatability
Working range
Payload
Leak rate
Characteristics
■
■
■
■
■
■
■
■
■
■
■
■
■
Industry standard footprint and mounting
configurations
Wafer handling of up to 300mm
High precision user configurable 14", 16" and
18" arms
Maximum reliability and precision
Ferrofluidic vacuum seal
Vacuum levels at <5x19 Torr
Real time motion control
Very smooth running
Brushless, maintenance free servo motors
with low inertia
Absolute Encoder
Various communication interfaces
Class 1 cleanliness
MTBF:>50.000 operating hours
-9
isel Wafer Handling Vacuum Robot
WaferHandling
19
Handling and more
Dimensions
Ø 11.00
B B
A
FULL Z STROKE
1.56
1.60
Ø 9.30 [236.2]
17.40
3.35
.49E
C
.75
(Hard Stop)
D
1
1
2
2
RECOMMENDED WAFER TRANSFEREE PLANE
RECOMMENDED CHAMBER HOLE Ø 9.5" [241.3]
Arm 7 Arm 8 Arm 9 Arm 9 HD
in [mm] 10-20-0046 10-20-0057 10-20-0045 10-20-0050
A 14.381 [365.28] 15.37 [390.3] 18.5 [471] 18.5 [471]
B 7.48 [190] 7.99 [203] 9.6 [245] 9.6 [245]
C 2.14 [54.35] 2.27 [57.8] 2.14 [54.35] 2.7 [68.5]
D 0.87 [22.05] 1.04 [26.5] 0.868 [22.05] 1.2 [31]
E 1.181 [30] 1.14 [29] 1.18 [30] 1.3 [32.5]
WaferHandling
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Class 1 Cleanliness
Feedback: Absolute Encoder
Repeatability: 0.001"
Maximum vertical stroke: 406 mm [16"]
Maximum Vacuum: 1.0x10 Torr
Motors: AC Servo
Elevator weight: 18.2 kg [
-10
40 lbs]
Elevator payload: 5.5 kg [12 lbs]
Surface: aluminium, stainless steel
Sensors: Cassette present
Z stroke: 304.8 mm [12"]
Handling and more
20
isel Vacuum Elevator
isel Vertical Robot
IVR Series
WaferHandling
Description
The vertical robot series represents a high-quality
compact design. By using robust-industry-proven
components and by reducing the number of inter-
connecting parts we were able to build a very rigid
and dynamic robot system.
trans-
porting . respon-
sive low-inertia
This new handling solution is suitable for
wafers and substrates Extremely
brushless motors, coupled with
directly driven Harmonic Drive transmissions
guarantee precise and interference-proof arm
movements.
The robust-industry-proven external servo controller
with it's 32-bit real-time kernel provides for a
seamless integration of traversing axes and other
peripheries. This controller ensures smooth axis
traversing along multiple path segments.
The controller supports RS-232, RS-485, Teach
Pendant and Ethernet interfaces.
®
Characteristics
■
■
■
■
■
■
■
■
■
■
■
Excellent structural rigidity
Maximum speed >1 m/s
Z axis up to 1,200 mm
Optimal acceleration - user programable
Easy connection of a traversing axis to the robot controller
Real-time movement control
Very smooth operation - vibration free
Brushless, maintenance-free servo motors with low
moment of inertia
Harmonic Drive transmission with zero backlash
Various communication interfaces
MTBF > 50,000 hours
®
Example:
Custom solution with
1,200 mm axis length
and lateral axis module
Handling and more
21
isel Linear Track
ILT Series
LinearTracks
Description
Due to their flexibility, the linear tracks of the ILT
series can easily be integrated into your available
installation. The tracks are controlled in
combination with our IWH series robots.
By this combination of the linear tracks with the
robots, the system is very effective and
provides high throughputs.
Depending on the type of application, the linear
tracks can be mounted underneath the robots or
lateral. The use of brushless servo motors ensures
our linear tracks are operationally dynamic, smooth
and service-free.
isel
Characteristics
■
■
■
■
■
■
■
High speed and dynamics
Overall lengths user definable, according to the application
Configurable lateral or bottom mounting
Excellent structural rigidity
Robust-industry-proven reliability and precision
Simple to connection to the robot controller
Driven by linear motor or spindle isel
isel
Linear Track
with lateral mounted
Wafer Handling
Robot seriesIWH-TA
Handling and more
22
isel Linear Track
ILT Series
LinearTracks
isel
isel
Linear Track
with top-mounted
Wafer Handling
Robot seriesIWH-BA
Handling and more
23
AccessoriesforWaferHandlers
isel End Effectors
IEE Series
2 05 40 x x x x
Option
0000 = Standard
0002 = Flip module
0003 = Vacuum control with display
9xxx = Customized end effector
8 = Scanner Cyberoptics EX-43QS
9 = Scanner Cyberoptics EX-73QS
07 = 2x horse shoe
08 = Pocket end effector
09 = Exclusion zone grip
10 = Exclusion zone vacuum
5 = 2 - 5"
6 = 6 - 8"
7 = 4 - 8"
8 = 12”
9 = 8 - 12”
Wafer mapping
End effektor type
Wafer size
0 = No wafer mapping sensor
2 = Scanner SUNIX M-DW1
4 = Thru beam sensor horseshoe
01 = Paddle
02 = Horse shoe
03 = Edge grip
04 = 2x paddle
05 = Paddle/horse shoe
Automation components
for the semiconductor industry,
product group end effectors
IEE Series 1
x x x x
Handling and more
25
Product Key
Prealigners
LPA Series
Prealigners
Characteristics(Three-axisprealigners)
■
■
■
■
■
■
■
■
■
■
■
Innovative all-in-one design
Alignment cycle time <3.5 Seconds
Repeating accuracy
linear. ±0.025 mm, circular ± 0.05°
Contactless measuring via LED and CCD sensor
Integrated scan electronics
Stand-alone capable
Chuck- or pinload as well as wafer size changing
without mechanical changes
Transparent, semi-transparent, punched and
opaque wafers alignable
SEMI, flat and notch wafer specifications
For wafer sizes from 2" up to 12"
Bottom-entry and side-entry cable configurations
Description
The prealigners are innovative, high precision,
class 1 compatible prealigner solutions with integrated
scan electronics.
LPA series
Characteristics(SingleaxisPrealigners)
■
■
■
■
■
■
■
■
■
Alignment cycle time <2.5 Seconds
Contactless measuring via LED and CCD sensor
Integrated scan electronics
Chuck load
Wafer size changing without mechanical changes
Transparent, semi-transparent, punched and
opaque wafers alignable
SEMI, flat and notch wafer specifications
For wafer sizes from 3" up to 12"
Side-entry and back-entry cable configurations Single axis
prealigner
with back-entry cable
configuration
LPA Series
Three-axis
prealigner
with lateral connectors
and PEEK pin/chuck
LPA Series
Handling and more
26
Prealigners
LPA
Prealigners
LPA Series
Handling and more
27
312 3 V 40 P 1 S 23 S V 500 P N ****
Interface
N
Contact material
P
V
K
S
C
Pin length in inch*10
Pin Type
V
E
C
= Ethernet interface
= Peek
= Viton
= Kalrez
= Stainless Steel
= Custom
= Vacuum
= Edge handling
= Custom
-3
500
Cable entry
S
B
Height in mm
23
CCD Sensitivity
S
H
= Standard
= Side cable entry
= Bottom cable entry
= Standard
= Standard
= High
Wafer sizes
25
Number of axes
1
3
Chuck type
Chuck diameter in mm
23
= 2" to 5"
= Single axis
= Three axes
= 2" to 5"
26
38
58
312
812
6EH
8EH
12EH
V
E
C
23
40
40
40
76
Contact material
P
V
K
A
T
C
Chuck encoder
1
2
= 2" to 6"
= 3" to 8"
= 5" to 8"
= 3" to 12"
= 8" to 12"
= 6" only
= 8" only
= 12" only
= Vacuum
= Edge handling
= Custom
= 2" to 6"
= 3" to 8"
= 5" to 8"
= 3" to 12"
= 8" to 12"
= Peek
= Viton
= Kalrez
= Aluminum
= Teflon
= Custom
= 10K PPR
= 24K PPR
( for edge handling)EH
Standard sizes:
(Standard)
(Standard)
Series Customization code
Not applicable for
single axis models
Chuck Lighthouse Pins
Product Key
Optional
Example:
AccessoriesforWaferHandling
Controllers
InternalController
■
■
■
■
■
■
■
IWH series 1, IWH-HD series 2, IVR series, prealigners
Control of incremental encoders
3+1 axes
4 inputs, 3 outputs
RS232 and Ethernet communication
RCC software
- I/O extension
Optional:
ExternalController
■
■
■
■
■
■
■
■
Vacuum Robots, Dual Arm Robots, IWH Series 4
Compact, pre-integrated networkable & I/O control
6+2 axes
32 digital inputs, 14 digital outputs
Autotuning, autocalibration, DWC, adaptive control
Total Graphics GUI
Semiconductor Toolkit Software
Dimensions: 285 x 219 x 81 mm
Internal
controller
External
controller
RCC software
screenshot
Semiconductor
Toolkit software
screenshot
Handling and more
28
AccessoriesforWaferHandling
Controllers / Wafer Mapping Sensors
Handling and more
Internal Controller
External Controller
■
■
■
■
■
■
■
■
IRC 331
IRC 331 ex
Suitable for IWH Series 1, IWH HD Series 2, IVR Series,
Dual Arm series
Control of incremental and absolute encoders
3 + 1 axes, upgradable
14 inputs, 13 outputs
RS-232 and Ethernet communication interfaces
Robot Control Center (RCC) software
Dimensions: 480 x 180 x 150 mm
Options:
- I/O extensions
- Hand terminal
RCC software
screenshot
Figure:
IRC 331ex
29
Wafer Mapping Sensors
IMS-EX43(73)QS
■
■
■
IMS-MDW1
■
■
■
IMS
Laser class 1 light source
Measuring distance 38 / 56 mm (1,5" / 2,2”)
Sensor flexibly configurable
LED light source
Measuring distance 45 mm (1.75")
PNP / NPN switchable
AccessoriesforWaferHandling
Other Accessories
FlipModule
■
■
■
■
■
■
IFM-300-2
Accurate flipping of wafers with most precise
positioning by means of positive stops
Universal end effector adapter
Mapping sensor
DC Motor with transmission unit
Electrical end-of-travel damping
Continuously variable speeds
HandTerminal
■
■
■
■
■
■
IHT
Optimal support when teaching an wafer handler
Keyboard layout optimized for wafer handlers
RS-485
isel
isel
Terminal function
Teach function
Diagnosis function
Handling and more
30
Custom Solutions - Why isel?
Someimportantreasonstochooseus:
■
■
■
■
■
We develop, design and manufacture almost all necessary
components on our own premises. Thus we achieve
highest planning flexibility and extremely short
implementation phases
We maintain an extensive portion of production in-house
and possess a vast amount of high volumn production
experience
We offer you excellent service and support throughout the
product life cycle, from initial design through final
acceptance and production use
The emulation and integration of third party software is
virtually seamless. Your engineering time and cost
expenditure is therefore minimal
Due to our location in Central Europe and a favorable
infrastructure we are on the spot in a short time
ProjectDevelopment
■
■
■
■
■
■
■
■
In order to ensure optimal results, well-trained and
experienced project engineers oversee the projects at
iselRobotik. The project procedure typically proceeds
as follows:
Define the boundary conditions on-site
Cooperative creation of the customer requirements
specification
Creation of a conceptional with 3D CAD systems
Issue of a project-specific quotation and statement of
work including the product requirements specification
with all project-specific parameters
Release of the product requirements specifications
and the provisional conceptional design
Creation of the detailed conceptional design specification
of the project
Upon your release of the detailed conceptional design
specification we start with the manufacturing of your
customized robotic system
System acceptance is completed upon the successful
product installation and the meeting all of your
specifications
design
CustomSolutions
Handling and more
31
NotesandDrafts
Notes and Drafts
Handling and more
32
Notes and Drafts
NotesandDrafts
Handling and more
33
NotesandDrafts
Notes and Drafts
Handling and more
34
References
References
I O S . I N S T R U M E N T S
HSEB
INNOLAS
Innovative
Lasertechnologie
Subsequently you'll find a selection of companies that
participated in a successful co-operation with us and
that successfully use our products:
Handling and more
35
mechatronic
systemtechnik gmbh
970250 TE005 // 40_2009
i s e l G e r m a n y A G
Ro b o t i c s D e p a r t m e n t
Buergermeister-Ebert-Str. 40
D - 3 6 1 2 4 E i c h e n z e l l
Tel.: +49 (0) 66 59 981 - 0
Fax: - 776
E-Mail: robotik@isel.com
w w w. i s e l r o b o t i k . c o m
+49 (0) 66 59 981
Handling and more

More Related Content

What's hot

74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com
74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com 74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com
74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com OMO
 
SPICE PARK ALL List OCT2015(4,432 Models)
SPICE PARK ALL List OCT2015(4,432 Models) SPICE PARK ALL List OCT2015(4,432 Models)
SPICE PARK ALL List OCT2015(4,432 Models) Tsuyoshi Horigome
 
CSD01060A LTspice Model (Free SPICE Model)
CSD01060A LTspice Model (Free SPICE Model)CSD01060A LTspice Model (Free SPICE Model)
CSD01060A LTspice Model (Free SPICE Model)Tsuyoshi Horigome
 
SPICE PARK ALL DATA of SPICE PARK MAR2015
SPICE PARK ALL DATA of SPICE PARK MAR2015SPICE PARK ALL DATA of SPICE PARK MAR2015
SPICE PARK ALL DATA of SPICE PARK MAR2015Tsuyoshi Horigome
 
Device Modeling of Stepping Motor using SPICE
Device Modeling of Stepping Motor using SPICEDevice Modeling of Stepping Motor using SPICE
Device Modeling of Stepping Motor using SPICETsuyoshi Horigome
 
SPICE PARK JUL2018 (4,850 Models)
SPICE PARK JUL2018 (4,850 Models) SPICE PARK JUL2018 (4,850 Models)
SPICE PARK JUL2018 (4,850 Models) Tsuyoshi Horigome
 
SPICE MODEL of CBS10S40 (Professional Model) in SPICE PARK
SPICE MODEL of CBS10S40 (Professional Model) in SPICE PARKSPICE MODEL of CBS10S40 (Professional Model) in SPICE PARK
SPICE MODEL of CBS10S40 (Professional Model) in SPICE PARKTsuyoshi Horigome
 
SPICE MODEL of SCS220AG (Professional Model) in SPICE PARK
SPICE MODEL of SCS220AG (Professional Model) in SPICE PARKSPICE MODEL of SCS220AG (Professional Model) in SPICE PARK
SPICE MODEL of SCS220AG (Professional Model) in SPICE PARKTsuyoshi Horigome
 
Sainico Warom LED Presentation
Sainico Warom LED PresentationSainico Warom LED Presentation
Sainico Warom LED Presentationsainico
 
All List of SPICE PARK AUG2015 4,412 models
All List of SPICE PARK AUG2015  4,412 modelsAll List of SPICE PARK AUG2015  4,412 models
All List of SPICE PARK AUG2015 4,412 modelsTsuyoshi Horigome
 
Yamaha 60 fed, c60er outboard service repair manual l 305624
Yamaha 60 fed, c60er outboard service repair manual l 305624  Yamaha 60 fed, c60er outboard service repair manual l 305624
Yamaha 60 fed, c60er outboard service repair manual l 305624 fhjsekkemm
 
Spice Park Update of FEB2015
Spice Park Update of FEB2015Spice Park Update of FEB2015
Spice Park Update of FEB2015Tsuyoshi Horigome
 
2017 flezon catalog
2017 flezon catalog2017 flezon catalog
2017 flezon catalogFlezon
 
TLP3120 PSpice Model (Free SPICE Model)
TLP3120 PSpice Model  (Free SPICE Model)TLP3120 PSpice Model  (Free SPICE Model)
TLP3120 PSpice Model (Free SPICE Model)Tsuyoshi Horigome
 
Spicepark FEB2019 (4,963 SPICE Models)
Spicepark FEB2019 (4,963 SPICE Models)Spicepark FEB2019 (4,963 SPICE Models)
Spicepark FEB2019 (4,963 SPICE Models)Tsuyoshi Horigome
 
SPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARK
SPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARKSPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARK
SPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARKTsuyoshi Horigome
 
Spice Park 257 Free Spice Model 15 JUN2015
Spice Park 257 Free Spice Model 15 JUN2015Spice Park 257 Free Spice Model 15 JUN2015
Spice Park 257 Free Spice Model 15 JUN2015Tsuyoshi Horigome
 
Spicepark JAN2018 4,792 pcs.(SPICE Model Library)
Spicepark JAN2018 4,792 pcs.(SPICE Model Library)Spicepark JAN2018 4,792 pcs.(SPICE Model Library)
Spicepark JAN2018 4,792 pcs.(SPICE Model Library)Tsuyoshi Horigome
 

What's hot (20)

74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com
74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com 74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com
74LV74D/AUJ -NXP Semiconductors/Freescale Semiconductor, Inc. - omoelec.com
 
SPICE PARK ALL List OCT2015(4,432 Models)
SPICE PARK ALL List OCT2015(4,432 Models) SPICE PARK ALL List OCT2015(4,432 Models)
SPICE PARK ALL List OCT2015(4,432 Models)
 
CSD01060A LTspice Model (Free SPICE Model)
CSD01060A LTspice Model (Free SPICE Model)CSD01060A LTspice Model (Free SPICE Model)
CSD01060A LTspice Model (Free SPICE Model)
 
SPICE PARK ALL DATA of SPICE PARK MAR2015
SPICE PARK ALL DATA of SPICE PARK MAR2015SPICE PARK ALL DATA of SPICE PARK MAR2015
SPICE PARK ALL DATA of SPICE PARK MAR2015
 
Device Modeling of Stepping Motor using SPICE
Device Modeling of Stepping Motor using SPICEDevice Modeling of Stepping Motor using SPICE
Device Modeling of Stepping Motor using SPICE
 
SPICE PARK JUL2018 (4,850 Models)
SPICE PARK JUL2018 (4,850 Models) SPICE PARK JUL2018 (4,850 Models)
SPICE PARK JUL2018 (4,850 Models)
 
SPICE MODEL of CBS10S40 (Professional Model) in SPICE PARK
SPICE MODEL of CBS10S40 (Professional Model) in SPICE PARKSPICE MODEL of CBS10S40 (Professional Model) in SPICE PARK
SPICE MODEL of CBS10S40 (Professional Model) in SPICE PARK
 
SPICE MODEL of SCS220AG (Professional Model) in SPICE PARK
SPICE MODEL of SCS220AG (Professional Model) in SPICE PARKSPICE MODEL of SCS220AG (Professional Model) in SPICE PARK
SPICE MODEL of SCS220AG (Professional Model) in SPICE PARK
 
Sainico Warom LED Presentation
Sainico Warom LED PresentationSainico Warom LED Presentation
Sainico Warom LED Presentation
 
All List of SPICE PARK AUG2015 4,412 models
All List of SPICE PARK AUG2015  4,412 modelsAll List of SPICE PARK AUG2015  4,412 models
All List of SPICE PARK AUG2015 4,412 models
 
Yamaha 60 fed, c60er outboard service repair manual l 305624
Yamaha 60 fed, c60er outboard service repair manual l 305624  Yamaha 60 fed, c60er outboard service repair manual l 305624
Yamaha 60 fed, c60er outboard service repair manual l 305624
 
Circuit Design using TI
Circuit Design using TICircuit Design using TI
Circuit Design using TI
 
Spice Park Update of FEB2015
Spice Park Update of FEB2015Spice Park Update of FEB2015
Spice Park Update of FEB2015
 
Lc1 d
Lc1 dLc1 d
Lc1 d
 
2017 flezon catalog
2017 flezon catalog2017 flezon catalog
2017 flezon catalog
 
TLP3120 PSpice Model (Free SPICE Model)
TLP3120 PSpice Model  (Free SPICE Model)TLP3120 PSpice Model  (Free SPICE Model)
TLP3120 PSpice Model (Free SPICE Model)
 
Spicepark FEB2019 (4,963 SPICE Models)
Spicepark FEB2019 (4,963 SPICE Models)Spicepark FEB2019 (4,963 SPICE Models)
Spicepark FEB2019 (4,963 SPICE Models)
 
SPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARK
SPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARKSPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARK
SPICE MODEL of SCT2080KE (Professional+BDP Model) in SPICE PARK
 
Spice Park 257 Free Spice Model 15 JUN2015
Spice Park 257 Free Spice Model 15 JUN2015Spice Park 257 Free Spice Model 15 JUN2015
Spice Park 257 Free Spice Model 15 JUN2015
 
Spicepark JAN2018 4,792 pcs.(SPICE Model Library)
Spicepark JAN2018 4,792 pcs.(SPICE Model Library)Spicepark JAN2018 4,792 pcs.(SPICE Model Library)
Spicepark JAN2018 4,792 pcs.(SPICE Model Library)
 

Viewers also liked

Expanding your horizon ics epresentation
Expanding your horizon ics epresentationExpanding your horizon ics epresentation
Expanding your horizon ics epresentationLaban Bagui
 
Remigiusz dudek exploratorytests_testwarez2014
Remigiusz dudek exploratorytests_testwarez2014Remigiusz dudek exploratorytests_testwarez2014
Remigiusz dudek exploratorytests_testwarez2014LuxoftTraining
 
Portland Ten Guerilla Public Relations: Tips for Free & Effective Public Rel...
Portland Ten Guerilla Public Relations:  Tips for Free & Effective Public Rel...Portland Ten Guerilla Public Relations:  Tips for Free & Effective Public Rel...
Portland Ten Guerilla Public Relations: Tips for Free & Effective Public Rel...PRA Public Relations
 
Presentasjon
PresentasjonPresentasjon
PresentasjonLill Dons
 
Route to Digital Distribution - Penta Teknoloji
Route to Digital Distribution - Penta TeknolojiRoute to Digital Distribution - Penta Teknoloji
Route to Digital Distribution - Penta TeknolojiAbdullah Dogan
 
Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...
Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...
Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...NEWSROOM für Unternehmer
 
Scientia Decentralization Of Healthcare Presentation Fall08
Scientia Decentralization Of Healthcare Presentation Fall08Scientia Decentralization Of Healthcare Presentation Fall08
Scientia Decentralization Of Healthcare Presentation Fall08glorikian
 
How Interaction Design Can Help Fix Healthcare
How Interaction Design Can Help Fix HealthcareHow Interaction Design Can Help Fix Healthcare
How Interaction Design Can Help Fix HealthcareDavid Cronin
 
El modelat del relleu: imatges per a 2 ESO
El modelat del relleu: imatges per a 2 ESOEl modelat del relleu: imatges per a 2 ESO
El modelat del relleu: imatges per a 2 ESOesmajolet
 
Mapas de navegación y benchmark Diplomado Arquitectura de Información y UX
Mapas de navegación y benchmark Diplomado Arquitectura de Información y UXMapas de navegación y benchmark Diplomado Arquitectura de Información y UX
Mapas de navegación y benchmark Diplomado Arquitectura de Información y UXSady Ignacio Maureria Bulnes
 
Cómo crear contenido en 5 pasos
Cómo crear contenido en 5 pasosCómo crear contenido en 5 pasos
Cómo crear contenido en 5 pasosBien Pensado
 
La Pesca De La Trucha Con Mosca Libro
La Pesca De La Trucha Con Mosca LibroLa Pesca De La Trucha Con Mosca Libro
La Pesca De La Trucha Con Mosca Libroyoviraca
 
Wordpress (MU) Multisite ventajas y desventajas
Wordpress (MU) Multisite ventajas y desventajasWordpress (MU) Multisite ventajas y desventajas
Wordpress (MU) Multisite ventajas y desventajasDuyal Servicios Web
 
kellogs como mejorar las ventas
 kellogs como mejorar las ventas kellogs como mejorar las ventas
kellogs como mejorar las ventasJonas Rodriguez
 

Viewers also liked (20)

Construccion voc.
Construccion voc.Construccion voc.
Construccion voc.
 
Binder portfolio
Binder portfolioBinder portfolio
Binder portfolio
 
Expanding your horizon ics epresentation
Expanding your horizon ics epresentationExpanding your horizon ics epresentation
Expanding your horizon ics epresentation
 
Remigiusz dudek exploratorytests_testwarez2014
Remigiusz dudek exploratorytests_testwarez2014Remigiusz dudek exploratorytests_testwarez2014
Remigiusz dudek exploratorytests_testwarez2014
 
Portland Ten Guerilla Public Relations: Tips for Free & Effective Public Rel...
Portland Ten Guerilla Public Relations:  Tips for Free & Effective Public Rel...Portland Ten Guerilla Public Relations:  Tips for Free & Effective Public Rel...
Portland Ten Guerilla Public Relations: Tips for Free & Effective Public Rel...
 
Presentasjon
PresentasjonPresentasjon
Presentasjon
 
Route to Digital Distribution - Penta Teknoloji
Route to Digital Distribution - Penta TeknolojiRoute to Digital Distribution - Penta Teknoloji
Route to Digital Distribution - Penta Teknoloji
 
Cuadernos1
Cuadernos1Cuadernos1
Cuadernos1
 
Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...
Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...
Ausblick Aktienmärkte und Wiener Börse 2015: Positive Bewertung mit Aufholpot...
 
Scientia Decentralization Of Healthcare Presentation Fall08
Scientia Decentralization Of Healthcare Presentation Fall08Scientia Decentralization Of Healthcare Presentation Fall08
Scientia Decentralization Of Healthcare Presentation Fall08
 
Cocinas
CocinasCocinas
Cocinas
 
How Interaction Design Can Help Fix Healthcare
How Interaction Design Can Help Fix HealthcareHow Interaction Design Can Help Fix Healthcare
How Interaction Design Can Help Fix Healthcare
 
El modelat del relleu: imatges per a 2 ESO
El modelat del relleu: imatges per a 2 ESOEl modelat del relleu: imatges per a 2 ESO
El modelat del relleu: imatges per a 2 ESO
 
Mapas de navegación y benchmark Diplomado Arquitectura de Información y UX
Mapas de navegación y benchmark Diplomado Arquitectura de Información y UXMapas de navegación y benchmark Diplomado Arquitectura de Información y UX
Mapas de navegación y benchmark Diplomado Arquitectura de Información y UX
 
Cómo crear contenido en 5 pasos
Cómo crear contenido en 5 pasosCómo crear contenido en 5 pasos
Cómo crear contenido en 5 pasos
 
Thailand Marine Destination of Asia
Thailand Marine Destination of AsiaThailand Marine Destination of Asia
Thailand Marine Destination of Asia
 
La Pesca De La Trucha Con Mosca Libro
La Pesca De La Trucha Con Mosca LibroLa Pesca De La Trucha Con Mosca Libro
La Pesca De La Trucha Con Mosca Libro
 
Psicologia laboral
Psicologia laboralPsicologia laboral
Psicologia laboral
 
Wordpress (MU) Multisite ventajas y desventajas
Wordpress (MU) Multisite ventajas y desventajasWordpress (MU) Multisite ventajas y desventajas
Wordpress (MU) Multisite ventajas y desventajas
 
kellogs como mejorar las ventas
 kellogs como mejorar las ventas kellogs como mejorar las ventas
kellogs como mejorar las ventas
 

Similar to Tk Robotik 2009 E Lowres

Siemens catalog tong hop sidac transformer
Siemens catalog tong hop sidac transformerSiemens catalog tong hop sidac transformer
Siemens catalog tong hop sidac transformerDien Ha The
 
Wgcme 0.6 email (2)
Wgcme 0.6 email (2)Wgcme 0.6 email (2)
Wgcme 0.6 email (2)walid najd
 
BAKER SURGE DX.pdf
BAKER SURGE DX.pdfBAKER SURGE DX.pdf
BAKER SURGE DX.pdfunexpo
 
Traxon Cove Light AC HO RGBW Specification
Traxon Cove Light AC HO RGBW SpecificationTraxon Cove Light AC HO RGBW Specification
Traxon Cove Light AC HO RGBW Specificationvalorlighting
 
Manual conversor dc siemens
Manual conversor dc   siemensManual conversor dc   siemens
Manual conversor dc siemensJosh Santos
 
Manual tecnico 2015 rain bird
Manual tecnico 2015 rain birdManual tecnico 2015 rain bird
Manual tecnico 2015 rain birdPaulo Trindade
 
# Portáteis - Lista de Preços
# Portáteis - Lista de Preços# Portáteis - Lista de Preços
# Portáteis - Lista de PreçosScanSource Brasil
 
Crabtree Wiring Accessories oct16
Crabtree Wiring Accessories oct16Crabtree Wiring Accessories oct16
Crabtree Wiring Accessories oct16Darren Garbett
 
Crabtree Decorative EWA Catalogue
Crabtree Decorative EWA Catalogue Crabtree Decorative EWA Catalogue
Crabtree Decorative EWA Catalogue Mark Cheatle
 
Kannad 406 af
Kannad 406 afKannad 406 af
Kannad 406 afgelbyson
 

Similar to Tk Robotik 2009 E Lowres (20)

Brochure bộ điều khiển PLC S7-1500
Brochure bộ điều khiển PLC S7-1500Brochure bộ điều khiển PLC S7-1500
Brochure bộ điều khiển PLC S7-1500
 
Siemens catalog tong hop sidac transformer
Siemens catalog tong hop sidac transformerSiemens catalog tong hop sidac transformer
Siemens catalog tong hop sidac transformer
 
Wgcme 0.5 (5)
Wgcme 0.5 (5)Wgcme 0.5 (5)
Wgcme 0.5 (5)
 
CCTV
CCTVCCTV
CCTV
 
Wgcme 0.6 email (2)
Wgcme 0.6 email (2)Wgcme 0.6 email (2)
Wgcme 0.6 email (2)
 
Bcsrvalv
BcsrvalvBcsrvalv
Bcsrvalv
 
BAKER SURGE DX.pdf
BAKER SURGE DX.pdfBAKER SURGE DX.pdf
BAKER SURGE DX.pdf
 
Traxon Cove Light AC HO RGBW Specification
Traxon Cove Light AC HO RGBW SpecificationTraxon Cove Light AC HO RGBW Specification
Traxon Cove Light AC HO RGBW Specification
 
Manual conversor dc siemens
Manual conversor dc   siemensManual conversor dc   siemens
Manual conversor dc siemens
 
Fadal Siemens Operation Programming Guide
Fadal Siemens Operation Programming GuideFadal Siemens Operation Programming Guide
Fadal Siemens Operation Programming Guide
 
Fadal Siemens Operation Programming Guide.pdf
Fadal Siemens Operation Programming Guide.pdfFadal Siemens Operation Programming Guide.pdf
Fadal Siemens Operation Programming Guide.pdf
 
sap-olap-bi.pptx
sap-olap-bi.pptxsap-olap-bi.pptx
sap-olap-bi.pptx
 
Catálogo Paradox G2K
Catálogo Paradox G2KCatálogo Paradox G2K
Catálogo Paradox G2K
 
Manual tecnico 2015 rain bird
Manual tecnico 2015 rain birdManual tecnico 2015 rain bird
Manual tecnico 2015 rain bird
 
# Portáteis - Lista de Preços
# Portáteis - Lista de Preços# Portáteis - Lista de Preços
# Portáteis - Lista de Preços
 
Crabtree Wiring Accessories oct16
Crabtree Wiring Accessories oct16Crabtree Wiring Accessories oct16
Crabtree Wiring Accessories oct16
 
Crabtree Decorative EWA Catalogue
Crabtree Decorative EWA Catalogue Crabtree Decorative EWA Catalogue
Crabtree Decorative EWA Catalogue
 
Catalogue siemens-3 rf-3rw_lv1 2006
Catalogue siemens-3 rf-3rw_lv1 2006Catalogue siemens-3 rf-3rw_lv1 2006
Catalogue siemens-3 rf-3rw_lv1 2006
 
Cn51 configuração
Cn51 configuraçãoCn51 configuração
Cn51 configuração
 
Kannad 406 af
Kannad 406 afKannad 406 af
Kannad 406 af
 

Recently uploaded

Go for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptx
Go for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptxGo for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptx
Go for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptxRakhi Bazaar
 
Onemonitar Android Spy App Features: Explore Advanced Monitoring Capabilities
Onemonitar Android Spy App Features: Explore Advanced Monitoring CapabilitiesOnemonitar Android Spy App Features: Explore Advanced Monitoring Capabilities
Onemonitar Android Spy App Features: Explore Advanced Monitoring CapabilitiesOne Monitar
 
Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...
Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...
Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...Associazione Digital Days
 
Driving Business Impact for PMs with Jon Harmer
Driving Business Impact for PMs with Jon HarmerDriving Business Impact for PMs with Jon Harmer
Driving Business Impact for PMs with Jon HarmerAggregage
 
digital marketing , introduction of digital marketing
digital marketing , introduction of digital marketingdigital marketing , introduction of digital marketing
digital marketing , introduction of digital marketingrajputmeenakshi733
 
Appkodes Tinder Clone Script with Customisable Solutions.pptx
Appkodes Tinder Clone Script with Customisable Solutions.pptxAppkodes Tinder Clone Script with Customisable Solutions.pptx
Appkodes Tinder Clone Script with Customisable Solutions.pptxappkodes
 
Excvation Safety for safety officers reference
Excvation Safety for safety officers referenceExcvation Safety for safety officers reference
Excvation Safety for safety officers referencessuser2c065e
 
APRIL2024_UKRAINE_xml_0000000000000 .pdf
APRIL2024_UKRAINE_xml_0000000000000 .pdfAPRIL2024_UKRAINE_xml_0000000000000 .pdf
APRIL2024_UKRAINE_xml_0000000000000 .pdfRbc Rbcua
 
trending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdf
trending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdftrending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdf
trending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdfMintel Group
 
1911 Gold Corporate Presentation Apr 2024.pdf
1911 Gold Corporate Presentation Apr 2024.pdf1911 Gold Corporate Presentation Apr 2024.pdf
1911 Gold Corporate Presentation Apr 2024.pdfShaun Heinrichs
 
GUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdf
GUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdfGUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdf
GUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdfDanny Diep To
 
Introducing the Analogic framework for business planning applications
Introducing the Analogic framework for business planning applicationsIntroducing the Analogic framework for business planning applications
Introducing the Analogic framework for business planning applicationsKnowledgeSeed
 
WSMM Technology February.March Newsletter_vF.pdf
WSMM Technology February.March Newsletter_vF.pdfWSMM Technology February.March Newsletter_vF.pdf
WSMM Technology February.March Newsletter_vF.pdfJamesConcepcion7
 
Healthcare Feb. & Mar. Healthcare Newsletter
Healthcare Feb. & Mar. Healthcare NewsletterHealthcare Feb. & Mar. Healthcare Newsletter
Healthcare Feb. & Mar. Healthcare NewsletterJamesConcepcion7
 
Guide Complete Set of Residential Architectural Drawings PDF
Guide Complete Set of Residential Architectural Drawings PDFGuide Complete Set of Residential Architectural Drawings PDF
Guide Complete Set of Residential Architectural Drawings PDFChandresh Chudasama
 
business environment micro environment macro environment.pptx
business environment micro environment macro environment.pptxbusiness environment micro environment macro environment.pptx
business environment micro environment macro environment.pptxShruti Mittal
 
Planetary and Vedic Yagyas Bring Positive Impacts in Life
Planetary and Vedic Yagyas Bring Positive Impacts in LifePlanetary and Vedic Yagyas Bring Positive Impacts in Life
Planetary and Vedic Yagyas Bring Positive Impacts in LifeBhavana Pujan Kendra
 
Darshan Hiranandani [News About Next CEO].pdf
Darshan Hiranandani [News About Next CEO].pdfDarshan Hiranandani [News About Next CEO].pdf
Darshan Hiranandani [News About Next CEO].pdfShashank Mehta
 
Welding Electrode Making Machine By Deccan Dynamics
Welding Electrode Making Machine By Deccan DynamicsWelding Electrode Making Machine By Deccan Dynamics
Welding Electrode Making Machine By Deccan DynamicsIndiaMART InterMESH Limited
 
Send Files | Sendbig.comSend Files | Sendbig.com
Send Files | Sendbig.comSend Files | Sendbig.comSend Files | Sendbig.comSend Files | Sendbig.com
Send Files | Sendbig.comSend Files | Sendbig.comSendBig4
 

Recently uploaded (20)

Go for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptx
Go for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptxGo for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptx
Go for Rakhi Bazaar and Pick the Latest Bhaiya Bhabhi Rakhi.pptx
 
Onemonitar Android Spy App Features: Explore Advanced Monitoring Capabilities
Onemonitar Android Spy App Features: Explore Advanced Monitoring CapabilitiesOnemonitar Android Spy App Features: Explore Advanced Monitoring Capabilities
Onemonitar Android Spy App Features: Explore Advanced Monitoring Capabilities
 
Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...
Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...
Lucia Ferretti, Lead Business Designer; Matteo Meschini, Business Designer @T...
 
Driving Business Impact for PMs with Jon Harmer
Driving Business Impact for PMs with Jon HarmerDriving Business Impact for PMs with Jon Harmer
Driving Business Impact for PMs with Jon Harmer
 
digital marketing , introduction of digital marketing
digital marketing , introduction of digital marketingdigital marketing , introduction of digital marketing
digital marketing , introduction of digital marketing
 
Appkodes Tinder Clone Script with Customisable Solutions.pptx
Appkodes Tinder Clone Script with Customisable Solutions.pptxAppkodes Tinder Clone Script with Customisable Solutions.pptx
Appkodes Tinder Clone Script with Customisable Solutions.pptx
 
Excvation Safety for safety officers reference
Excvation Safety for safety officers referenceExcvation Safety for safety officers reference
Excvation Safety for safety officers reference
 
APRIL2024_UKRAINE_xml_0000000000000 .pdf
APRIL2024_UKRAINE_xml_0000000000000 .pdfAPRIL2024_UKRAINE_xml_0000000000000 .pdf
APRIL2024_UKRAINE_xml_0000000000000 .pdf
 
trending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdf
trending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdftrending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdf
trending-flavors-and-ingredients-in-salty-snacks-us-2024_Redacted-V2.pdf
 
1911 Gold Corporate Presentation Apr 2024.pdf
1911 Gold Corporate Presentation Apr 2024.pdf1911 Gold Corporate Presentation Apr 2024.pdf
1911 Gold Corporate Presentation Apr 2024.pdf
 
GUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdf
GUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdfGUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdf
GUIDELINES ON USEFUL FORMS IN FREIGHT FORWARDING (F) Danny Diep Toh MBA.pdf
 
Introducing the Analogic framework for business planning applications
Introducing the Analogic framework for business planning applicationsIntroducing the Analogic framework for business planning applications
Introducing the Analogic framework for business planning applications
 
WSMM Technology February.March Newsletter_vF.pdf
WSMM Technology February.March Newsletter_vF.pdfWSMM Technology February.March Newsletter_vF.pdf
WSMM Technology February.March Newsletter_vF.pdf
 
Healthcare Feb. & Mar. Healthcare Newsletter
Healthcare Feb. & Mar. Healthcare NewsletterHealthcare Feb. & Mar. Healthcare Newsletter
Healthcare Feb. & Mar. Healthcare Newsletter
 
Guide Complete Set of Residential Architectural Drawings PDF
Guide Complete Set of Residential Architectural Drawings PDFGuide Complete Set of Residential Architectural Drawings PDF
Guide Complete Set of Residential Architectural Drawings PDF
 
business environment micro environment macro environment.pptx
business environment micro environment macro environment.pptxbusiness environment micro environment macro environment.pptx
business environment micro environment macro environment.pptx
 
Planetary and Vedic Yagyas Bring Positive Impacts in Life
Planetary and Vedic Yagyas Bring Positive Impacts in LifePlanetary and Vedic Yagyas Bring Positive Impacts in Life
Planetary and Vedic Yagyas Bring Positive Impacts in Life
 
Darshan Hiranandani [News About Next CEO].pdf
Darshan Hiranandani [News About Next CEO].pdfDarshan Hiranandani [News About Next CEO].pdf
Darshan Hiranandani [News About Next CEO].pdf
 
Welding Electrode Making Machine By Deccan Dynamics
Welding Electrode Making Machine By Deccan DynamicsWelding Electrode Making Machine By Deccan Dynamics
Welding Electrode Making Machine By Deccan Dynamics
 
Send Files | Sendbig.comSend Files | Sendbig.com
Send Files | Sendbig.comSend Files | Sendbig.comSend Files | Sendbig.comSend Files | Sendbig.com
Send Files | Sendbig.comSend Files | Sendbig.com
 

Tk Robotik 2009 E Lowres

  • 1. ® Handling and more Automation Components for the Semiconductor Industry 2009/2010
  • 2. About Us General 2 The product offerings contained in this catalog are a subset of robotic products offered by the isel group. Our products are specifically designed and engineered to address the unique needs and requirements of the semiconductor, flat panel display, nano-technology, and related industries. Should you have a special application or product requirement not fully addressed by the offerings in this catalog, please contact us we will be delighted to work with you to find a solution that meets your needs. Our company's Mission: isel Germany AG isel Germany AG isel Germany AG isel Germany AG was founded in 1972 and is the core company of the global isel Group. The company develops, manufactures, markets, sells and ser- vices systems and components used for automation, automa- tion control systems, robots and related handling systems. The company supports the global market needs of the Semi- conductor Equipment and related industries, its activities are centered on the company's expertise in automation and interrelated technologies and include a broad array of customer applications using the isel product line as the foundation to address those needs. is located in Eichenzell (Hesse) and Dermbach (Thuringia), Germany. The mission of is to design, engineer and manufacture, sell and service products that provide our customers with reliable, high quality technical solutions, at a favorable price-performance ratio. The foundation of all isel components and systems is focused adherence to “design for modularity”, benefiting the customer in design flexibility, cost, and functional upgradability. This methodology assures seamless integration of mechanical, electronic and software functions from initial design, on throughout all aspects of the total product life cycle. isel's open interfaces for software and control systems provide the flexibility that is required to meet the integration needs and demands of a customers existing applications and ensures compatibility with implementations provided by other suppliers. maintains a permanent demonstration and application facility at its Eichenzell facility in central Germany and at a facility in Fremont, California. Ask for an appointment with one of our applications engineers. We look forward to your visit and an opportunity to serve your automation, robotic and handling needs. Handling and more Eichenzell facility Dermbach facility
  • 3. General Best Service 3 Se rvice Handling and more 3 We're there for you... ...because you'll get it all from one source Because we control all aspects of our products life cycle, from design, production, sales and service, we ensure you will receive competent contacts for all questions concerning our products. We're there for you... We're there for you... ...with more than 30 years of market presence iselRobotikSupporting department is the renowned and internationally-active . Benefit from our market presence of many years in a variety of industry lines. isel Germany AG ...in the heart of Europe From our location in Eichenzell (Hessen), in central Germany there is a maximum distace of 400 km to Europe's semiconductor key locations. Des ign Produ ction Sal es Handling and more
  • 4. isel IWH F-1 Wafer Handling Robots with two-link arm WaferHandling 4 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 10”, 13”, 17” 10", 14" 450° 0.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA10S10 F-1
  • 5. isel IWH F-1 Wafer Handling Robots with two-link arm WaferHandling 5 Handling and more Dimensions IWH TA S F-1__ __ IWH TA S F-110 10 IWH TA S F-113 10 IWH TA S F-117 10 IWH TA S F-110 14 IWH TA S F-113 14 IWH TA S F-117 14 Possible Configurations IWH BA S F-1__ __ IWH BA S F-110 10 IWH BA S F-113 10 IWH BA S F-117 10 IWH BA S F-110 14 IWH BA S F-113 14 IWH BA S F-117 14 Possible Configurations 92 57 65 77 57 65 513.5(TA)10 588.5(TA)13 690(TA)17431.8(TA)17 330.2(TA)13 254(TA)10 365.8 (S )14 266.7 (S )10 365.8 (S )14 266.7 (S )10 620.8(TA)10 695.8(TA)13 797.3(TA)17 254(TA)10 330.2(TA)13 431.8(TA)17
  • 6. isel IWH F-1 Wafer Handling Robots with two-link heavy duty arm WaferHandling 6 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 10”, 13”, 17” 10", 12", 14", 16", 20" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA10S10HD F-1
  • 7. isel IWH F-1 Wafer Handling Robots with two-link heavy duty arm WaferHandling 7 Handling and more Dimensions IWH TA S F-1__ __ HD IWH TA S HD F-110 10 IWH TA S HD F-110 12 IWH TA S HD F-110 14 IWH TA S HD F-110 16 IWH TA S HD F-110 20 IWH TA S HD F-113 10 IWH TA S HD F-113 12 IWH TA S HD F-113 14 IWH TA S HD F-113 16 IWH TA S HD F-113 20 IWH TA S HD F-117 10 IWH TA S HD F-117 12 IWH TA S HD F-117 14 IWH TA S HD F-117 16 IWH TA S HD F-117 20 Possible Configurations IWH BA S F-1__ __ HD IWH BA S HD F-110 10 IWH BA S HD F-110 12 IWH BA S HD F-110 14 IWH BA S HD F-110 16 IWH BA S HD F-110 20 IWH BA S HD F-113 10 IWH BA S HD F-113 12 IWH BA S HD F-113 14 IWH BA S HD F-113 16 IWH BA S HD F-113 20 IWH BA S HD F-117 10 IWH BA S HD F-117 12 IWH BA S HD F-117 14 IWH BA S HD F-117 16 IWH BA S HD F-117 20 Possible Configurations 513.5(TA)10 588.5(TA)13 690(TA)17431.8(TA)17 329.9(TA)13 254(TA)10 266.7 (S )10 304.8 (S )12 365.8 (S )14 426.7 (S )16 508 (S )20 266.7 (S )10 304.8 (S )12 365.8 (S )14 426.7 (S )16 508 (S )20 633.5(TA)10 708.5(TA)13 810(TA)17 254(TA)10 330.2(TA)13 431.5(TA)17 105 Ø 235 Ø 277 Ø 330 75 90 Ø 235 185 225 175 195 75
  • 8. isel IWH F-1 Wafer Handling Robots with three-link heavy duty arm WaferHandling 8 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 10”, 13”, 17” 16", 21", 24" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA10S16 F-1
  • 9. isel IWH F-1 Wafer Handling Robots with three-link heavy duty arm WaferHandling 9 Handling and more Dimensions IWH TA S F-1__ __ IWH TA S F-110 16 IWH TA S F-110 21 IWH TA S F-110 24 IWH TA S F-113 16 IWH TA S F-113 21 IWH TA S F-113 24 IWH TA S F-117 16 IWH TA S F-117 21 IWH TA S F-117 24 Possible Configurations IWH BA S F-2__ __ IWH BA S F-110 16 IWH BA S F-110 21 IWH BA S F-110 24 IWH BA S F-113 16 IWH BA S F-113 21 IWH BA S F-113 24 IWH BA S F-117 16 IWH BA S F-117 21 IWH BA S F-117 24 Possible Configurations 75 185 225 175 195 406.4 (S )16 533.4 (S )21 609.6 (S )24 406.4 (S )16 533.4 (S )21 609.6 (S )24 Ø 235 Ø 277 142 Ø 330 690(TA)17 588.5(TA)13 513.5(TA)10 431.8(TA)17 329.9(TA)13 254(TA)10 127 670.5(TA)10 745.5(TA)13 847(TA)17 254(TA)10 330.2(TA)13 431.8(TA)17
  • 10. isel IWH F-2 Wafer Handling Robots with two-link arm and heavy duty body WaferHandling 10 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13”, 17”, 21” 10", 14" 450° 0.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA13S10 F-2
  • 11. isel IWH F-2 Wafer Handling Robots with two-link arm and heavy duty body WaferHandling 11 Handling and more Dimensions IWH TA S F-2__ __ IWH TA S F-213 10 IWH TA S F-217 10 IWH TA S F-221 10 IWH TA S F-213 14 IWH TA S F-217 14 IWH TA S F-221 14 Possible Configurations IWH BA S F-2__ __ IWH BA S F-213 10 IWH BA S F-217 10 IWH BA S F-221 10 IWH BA S F-213 14 IWH BA S F-217 14 IWH BA S F-221 14 Possible Configurations 87 Ø 330.2 57 65 72 273 255 57 225 265 215 235 65 557(TA)13 659(TA)17 760(TA)21 330.2(TA)13 431.8(TA)17 523.4(TA)21 365.8 (S )14 266.7 (S )10 365.8 (S )14 266.7 (S )10 659.3(TA)13 761.3(TA)17 862.3(TA)21 330.2(TA)13 431.8(TA)17 523.4(TA)21
  • 12. isel IWH HD F-2 Wafer Handling Robots with two-link heavy duty body/arm WaferHandling Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13”, 17”, 21” 10", 12", 14", 16", 20" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA13S10HD F-2 12
  • 13. isel IWH HD F-2 Wafer Handling Robots with two-link heavy duty body/arm WaferHandling Handling and more Dimensions IWH TA S HD F-2__ __ 557(TA)13 659(TA)17 100 Ø 330.2 760(TA)21 253 533.1(TA)21 431.8(TA)17 330.2(TA)13 266.7 (S )10 365.8 (S )14 426.7 (S )16 508 (S )20 75 304.8 (S )12 672(BA)13 85 774(BA)17 533.4(BA)21 330.2(BA)13 255 273 875(BA)21 431.8(BA)17 225 265 215 235 266.7 (S )10 304.8 (S )12 365.8 (S )14 426.7 (S )16 508 (S )20 75 IWH TA S HD F-213 10 IWH TA S HD F-213 12 IWH TA S HD F-213 14 IWH TA S HD F-213 16 IWH TA S HD F-213 20 IWH TA S HD F-217 10 IWH TA S HD F-217 12 IWH TA S HD F-217 14 IWH TA S HD F-217 16 IWH TA S HD F-217 20 IWH TA S HD F-221 10 IWH TA S HD F-221 12 IWH TA S HD F-221 14 IWH TA S HD F-221 16 IWH TA S HD F-221 20 Possible Configurations IWH BA S HD F-213 10 IWH BA S HD F-213 12 IWH BA S HD F-213 14 IWH BA S HD F-213 16 IWH BA S HD F-213 20 IWH BA S HD F-217 10 IWH BA S HD F-217 12 IWH BA S HD F-217 14 IWH BA S HD F-217 16 IWH BA S HD F-217 20 IWH BA S HD F-221 10 IWH BA S HD F-221 12 IWH BA S HD F-221 14 IWH BA S HD F-221 16 IWH BA S HD F-221 20 Possible Configurations IWH BA S HD F-2__ __ 13
  • 14. isel IWH F-2 Wafer Handling Robots with three-link heavy duty body/arm WaferHandling Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13”, 17”, 21” 16", 21", 24" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA13S16 F-2 14
  • 15. isel IWH F-2 Wafer Handling Robots with three-link heavy duty body/arm WaferHandling Handling and more Dimensions IWH TA S F-2__ __ IWH TA S F-213 16 IWH TA S F-213 21 IWH TA S F-213 24 IWH TA S F-217 16 IWH TA S F-217 21 IWH TA S F-217 24 IWH TA S F-221 16 IWH TA S F-221 21 IWH TA S F-221 24 Possible Configurations IWH BA S F-2__ __ IWH BA S F-213 16 IWH BA S F-213 21 IWH BA S F-213 24 IWH BA S F-217 16 IWH BA S F-217 21 IWH BA S F-217 24 IWH BA S F-221 16 IWH BA S F-221 21 IWH BA S F-221 24 Possible Configurations 659(TA)17 557(TA)13 Ø 330.2 137533,4(TA)21 431,5(TA)17 330,2(TA)13 760(TA)21 406.4 (S )16 533.4 (S )21 609.6 (S )24 75 709(BA)13 811(BA)17 122 431,8(BA)17 330,2(BA)13 533,4(BA)21912(BA)21 273 255 225 265 215 235 75 406.4 (S )16 533.4 (S )21 609.6 (S )24 15
  • 16. isel IWH F-3 Wafer Handling Robot with dual arm WaferHandling 16 Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,100 mm/s 425 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13” (330.2 mm) 14.4" (365.8 mm) 450° max. 1.25 kg /arm RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Wafer handling of up to 300mm Maximum reliability and precision Easy connection of a linear track to the robot controller Real time motion control Very smooth running Brushless, maintenance free servo motors with low inertia Backlash free Harmonic Drive gears Absolute Encoder Various communication interfaces Class 1 clean room compatible MTBF:>50.000 operating hours Including Robot Control Center ®
  • 18. isel Wafer Handling Vacuum Robot WaferHandling 18 Handling and more Specifications Cleanliness Weight T R Z Z radial theta Maximum speed T R Z 360°/s 500 mm/s 100 mm/s 110 V AC ±0.02° ±0.05 mm ±0.05 mm 1.5” (38.4 mm) 14" (355.6 mm) 380° 1.0 to 2.2 kg <5x10 Torr -9 Class 1 21.8 kg (48 lbs) RS-232 [DB9] Option:Ethernet [RJ-45] 150° C (302° F) 80° C (176° F) Al 6061, Stainless steel, Ferrofluid, Viton Configuration Top or bottom of chamber base Modular, interchangeable arms Main interface Power supply Max. temperature Max. operating temperature Exposed materials Mounting style Repeatability Working range Payload Leak rate Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Industry standard footprint and mounting configurations Wafer handling of up to 300mm High precision user configurable 14", 16" and 18" arms Maximum reliability and precision Ferrofluidic vacuum seal Vacuum levels at <5x19 Torr Real time motion control Very smooth running Brushless, maintenance free servo motors with low inertia Absolute Encoder Various communication interfaces Class 1 cleanliness MTBF:>50.000 operating hours -9
  • 19. isel Wafer Handling Vacuum Robot WaferHandling 19 Handling and more Dimensions Ø 11.00 B B A FULL Z STROKE 1.56 1.60 Ø 9.30 [236.2] 17.40 3.35 .49E C .75 (Hard Stop) D 1 1 2 2 RECOMMENDED WAFER TRANSFEREE PLANE RECOMMENDED CHAMBER HOLE Ø 9.5" [241.3] Arm 7 Arm 8 Arm 9 Arm 9 HD in [mm] 10-20-0046 10-20-0057 10-20-0045 10-20-0050 A 14.381 [365.28] 15.37 [390.3] 18.5 [471] 18.5 [471] B 7.48 [190] 7.99 [203] 9.6 [245] 9.6 [245] C 2.14 [54.35] 2.27 [57.8] 2.14 [54.35] 2.7 [68.5] D 0.87 [22.05] 1.04 [26.5] 0.868 [22.05] 1.2 [31] E 1.181 [30] 1.14 [29] 1.18 [30] 1.3 [32.5]
  • 20. WaferHandling Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Class 1 Cleanliness Feedback: Absolute Encoder Repeatability: 0.001" Maximum vertical stroke: 406 mm [16"] Maximum Vacuum: 1.0x10 Torr Motors: AC Servo Elevator weight: 18.2 kg [ -10 40 lbs] Elevator payload: 5.5 kg [12 lbs] Surface: aluminium, stainless steel Sensors: Cassette present Z stroke: 304.8 mm [12"] Handling and more 20 isel Vacuum Elevator
  • 21. isel Vertical Robot IVR Series WaferHandling Description The vertical robot series represents a high-quality compact design. By using robust-industry-proven components and by reducing the number of inter- connecting parts we were able to build a very rigid and dynamic robot system. trans- porting . respon- sive low-inertia This new handling solution is suitable for wafers and substrates Extremely brushless motors, coupled with directly driven Harmonic Drive transmissions guarantee precise and interference-proof arm movements. The robust-industry-proven external servo controller with it's 32-bit real-time kernel provides for a seamless integration of traversing axes and other peripheries. This controller ensures smooth axis traversing along multiple path segments. The controller supports RS-232, RS-485, Teach Pendant and Ethernet interfaces. ® Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum speed >1 m/s Z axis up to 1,200 mm Optimal acceleration - user programable Easy connection of a traversing axis to the robot controller Real-time movement control Very smooth operation - vibration free Brushless, maintenance-free servo motors with low moment of inertia Harmonic Drive transmission with zero backlash Various communication interfaces MTBF > 50,000 hours ® Example: Custom solution with 1,200 mm axis length and lateral axis module Handling and more 21
  • 22. isel Linear Track ILT Series LinearTracks Description Due to their flexibility, the linear tracks of the ILT series can easily be integrated into your available installation. The tracks are controlled in combination with our IWH series robots. By this combination of the linear tracks with the robots, the system is very effective and provides high throughputs. Depending on the type of application, the linear tracks can be mounted underneath the robots or lateral. The use of brushless servo motors ensures our linear tracks are operationally dynamic, smooth and service-free. isel Characteristics ■ ■ ■ ■ ■ ■ ■ High speed and dynamics Overall lengths user definable, according to the application Configurable lateral or bottom mounting Excellent structural rigidity Robust-industry-proven reliability and precision Simple to connection to the robot controller Driven by linear motor or spindle isel isel Linear Track with lateral mounted Wafer Handling Robot seriesIWH-TA Handling and more 22
  • 23. isel Linear Track ILT Series LinearTracks isel isel Linear Track with top-mounted Wafer Handling Robot seriesIWH-BA Handling and more 23
  • 24.
  • 25. AccessoriesforWaferHandlers isel End Effectors IEE Series 2 05 40 x x x x Option 0000 = Standard 0002 = Flip module 0003 = Vacuum control with display 9xxx = Customized end effector 8 = Scanner Cyberoptics EX-43QS 9 = Scanner Cyberoptics EX-73QS 07 = 2x horse shoe 08 = Pocket end effector 09 = Exclusion zone grip 10 = Exclusion zone vacuum 5 = 2 - 5" 6 = 6 - 8" 7 = 4 - 8" 8 = 12” 9 = 8 - 12” Wafer mapping End effektor type Wafer size 0 = No wafer mapping sensor 2 = Scanner SUNIX M-DW1 4 = Thru beam sensor horseshoe 01 = Paddle 02 = Horse shoe 03 = Edge grip 04 = 2x paddle 05 = Paddle/horse shoe Automation components for the semiconductor industry, product group end effectors IEE Series 1 x x x x Handling and more 25 Product Key
  • 26. Prealigners LPA Series Prealigners Characteristics(Three-axisprealigners) ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Innovative all-in-one design Alignment cycle time <3.5 Seconds Repeating accuracy linear. ±0.025 mm, circular ± 0.05° Contactless measuring via LED and CCD sensor Integrated scan electronics Stand-alone capable Chuck- or pinload as well as wafer size changing without mechanical changes Transparent, semi-transparent, punched and opaque wafers alignable SEMI, flat and notch wafer specifications For wafer sizes from 2" up to 12" Bottom-entry and side-entry cable configurations Description The prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics. LPA series Characteristics(SingleaxisPrealigners) ■ ■ ■ ■ ■ ■ ■ ■ ■ Alignment cycle time <2.5 Seconds Contactless measuring via LED and CCD sensor Integrated scan electronics Chuck load Wafer size changing without mechanical changes Transparent, semi-transparent, punched and opaque wafers alignable SEMI, flat and notch wafer specifications For wafer sizes from 3" up to 12" Side-entry and back-entry cable configurations Single axis prealigner with back-entry cable configuration LPA Series Three-axis prealigner with lateral connectors and PEEK pin/chuck LPA Series Handling and more 26
  • 27. Prealigners LPA Prealigners LPA Series Handling and more 27 312 3 V 40 P 1 S 23 S V 500 P N **** Interface N Contact material P V K S C Pin length in inch*10 Pin Type V E C = Ethernet interface = Peek = Viton = Kalrez = Stainless Steel = Custom = Vacuum = Edge handling = Custom -3 500 Cable entry S B Height in mm 23 CCD Sensitivity S H = Standard = Side cable entry = Bottom cable entry = Standard = Standard = High Wafer sizes 25 Number of axes 1 3 Chuck type Chuck diameter in mm 23 = 2" to 5" = Single axis = Three axes = 2" to 5" 26 38 58 312 812 6EH 8EH 12EH V E C 23 40 40 40 76 Contact material P V K A T C Chuck encoder 1 2 = 2" to 6" = 3" to 8" = 5" to 8" = 3" to 12" = 8" to 12" = 6" only = 8" only = 12" only = Vacuum = Edge handling = Custom = 2" to 6" = 3" to 8" = 5" to 8" = 3" to 12" = 8" to 12" = Peek = Viton = Kalrez = Aluminum = Teflon = Custom = 10K PPR = 24K PPR ( for edge handling)EH Standard sizes: (Standard) (Standard) Series Customization code Not applicable for single axis models Chuck Lighthouse Pins Product Key Optional Example:
  • 28. AccessoriesforWaferHandling Controllers InternalController ■ ■ ■ ■ ■ ■ ■ IWH series 1, IWH-HD series 2, IVR series, prealigners Control of incremental encoders 3+1 axes 4 inputs, 3 outputs RS232 and Ethernet communication RCC software - I/O extension Optional: ExternalController ■ ■ ■ ■ ■ ■ ■ ■ Vacuum Robots, Dual Arm Robots, IWH Series 4 Compact, pre-integrated networkable & I/O control 6+2 axes 32 digital inputs, 14 digital outputs Autotuning, autocalibration, DWC, adaptive control Total Graphics GUI Semiconductor Toolkit Software Dimensions: 285 x 219 x 81 mm Internal controller External controller RCC software screenshot Semiconductor Toolkit software screenshot Handling and more 28
  • 29. AccessoriesforWaferHandling Controllers / Wafer Mapping Sensors Handling and more Internal Controller External Controller ■ ■ ■ ■ ■ ■ ■ ■ IRC 331 IRC 331 ex Suitable for IWH Series 1, IWH HD Series 2, IVR Series, Dual Arm series Control of incremental and absolute encoders 3 + 1 axes, upgradable 14 inputs, 13 outputs RS-232 and Ethernet communication interfaces Robot Control Center (RCC) software Dimensions: 480 x 180 x 150 mm Options: - I/O extensions - Hand terminal RCC software screenshot Figure: IRC 331ex 29 Wafer Mapping Sensors IMS-EX43(73)QS ■ ■ ■ IMS-MDW1 ■ ■ ■ IMS Laser class 1 light source Measuring distance 38 / 56 mm (1,5" / 2,2”) Sensor flexibly configurable LED light source Measuring distance 45 mm (1.75") PNP / NPN switchable
  • 30. AccessoriesforWaferHandling Other Accessories FlipModule ■ ■ ■ ■ ■ ■ IFM-300-2 Accurate flipping of wafers with most precise positioning by means of positive stops Universal end effector adapter Mapping sensor DC Motor with transmission unit Electrical end-of-travel damping Continuously variable speeds HandTerminal ■ ■ ■ ■ ■ ■ IHT Optimal support when teaching an wafer handler Keyboard layout optimized for wafer handlers RS-485 isel isel Terminal function Teach function Diagnosis function Handling and more 30
  • 31. Custom Solutions - Why isel? Someimportantreasonstochooseus: ■ ■ ■ ■ ■ We develop, design and manufacture almost all necessary components on our own premises. Thus we achieve highest planning flexibility and extremely short implementation phases We maintain an extensive portion of production in-house and possess a vast amount of high volumn production experience We offer you excellent service and support throughout the product life cycle, from initial design through final acceptance and production use The emulation and integration of third party software is virtually seamless. Your engineering time and cost expenditure is therefore minimal Due to our location in Central Europe and a favorable infrastructure we are on the spot in a short time ProjectDevelopment ■ ■ ■ ■ ■ ■ ■ ■ In order to ensure optimal results, well-trained and experienced project engineers oversee the projects at iselRobotik. The project procedure typically proceeds as follows: Define the boundary conditions on-site Cooperative creation of the customer requirements specification Creation of a conceptional with 3D CAD systems Issue of a project-specific quotation and statement of work including the product requirements specification with all project-specific parameters Release of the product requirements specifications and the provisional conceptional design Creation of the detailed conceptional design specification of the project Upon your release of the detailed conceptional design specification we start with the manufacturing of your customized robotic system System acceptance is completed upon the successful product installation and the meeting all of your specifications design CustomSolutions Handling and more 31
  • 35. References References I O S . I N S T R U M E N T S HSEB INNOLAS Innovative Lasertechnologie Subsequently you'll find a selection of companies that participated in a successful co-operation with us and that successfully use our products: Handling and more 35 mechatronic systemtechnik gmbh
  • 36. 970250 TE005 // 40_2009 i s e l G e r m a n y A G Ro b o t i c s D e p a r t m e n t Buergermeister-Ebert-Str. 40 D - 3 6 1 2 4 E i c h e n z e l l Tel.: +49 (0) 66 59 981 - 0 Fax: - 776 E-Mail: robotik@isel.com w w w. i s e l r o b o t i k . c o m +49 (0) 66 59 981 Handling and more