MEMS and IC Virtual Prototyping

1. IntelliFAB™
Process Flow
Simulation

2. IntelliFAB
Process traveler development Quick sectioning
Develop and certify processes Interactively explore device cross sections
Process rule checking Mesh generation
Check for process violations Export 3D structures to a variety of mesh
formats
Process visualization
Visualize processes in 3D
Presentation quality graphics
Use process visuals in your technical papers
and presentations

3. Process Traveller
Development

4. Visualize Complex
process flows
Courtesy, Prof Tim Dallas, Texas Tech

5. Visualize Complex
process flows
Courtesy, Prof Tim Dallas, Texas Tech