6. AC table for Site A 0.3 min Sputter Pt 1 Film on Hinge Reference Pt 3 Hinge Pt 2 Film space between Hinge and M3 Pt 4 Film on M3 Reference Pt 5 Me Pt 6 M2 Reference FileName Area C1 N1 O1 Al2 Si2 S1 Ti2 31369.103.spe 1 86.59 2.52 6.39 - 4.50 - - 31369.103.spe 2 95.88 - 4.12 - - - - 31369.103.spe 3 18.58 - 33.64 20.25 22.30 - 5.23 31369.103.spe 4 81.43 - 11.32 - 7.25 - - 31369.103.spe 5 27.75 - 29.95 23.11 12.70 0.57 5.92 31369.103.spe 6 - - 46.77 - 53.23 - -
7. 1 2 Copper Carbon Nickel Oxygen Sulfur Chlorine Nitrogen Oxygen Silicon F S C composite N Ti Si Al O composite Site A
8. 1 2 Copper Carbon Nickel Oxygen Sulfur Chlorine Nitrogen Oxygen Silicon F S C composite N Ti Al O composite Site B Al C composite F S N Si Ti O composite