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APPLICATIONS OF MEMS

            By: mohd azrin bin razali
POLITEKNIK SULTAN HAJI AHMAD SHAH,
                   Pahang, MALAYSIA
 MEMS can be defined as the combination of
 micro sensors and/or micro actuators and
 electronic devices integrated on a single
 chip.

 MEMS have many function that make our life
 easier.
 MEMS    can be divided into two
    >ACTUATOR
     -A type of motor for moving or controlling a
     mechanism or system



    >SENSOR
     -a device that responds to a physical stimulus
     such as heat, light and sound
 Bio-MEMS
 -use in medical and health related
 technologies

 DOC’s  OptiML Autofocus (AF) actuator
 -utilize electrostatic forces to move a lens
   with optimal positioning precision and
   repeatability.
 MEMS disposable sensor
 -used to monitor blood pressure in IV lines of
 patients in intensive care

 MEMS pressure sensors
 -used to measure intrauterine pressure
 during birth
 MEMS   gyroscopes
  -used in modern cars and other applications
 INKJET PRINTERS
  -use piezoelectric or thermal bubble ejection
  to deposit ink on paper
 DISPLAYS
  -DMD chip in a projector based on DLP
  technology
 Biotechnology
 -MEMS and Nanotechnology is enabling new
 discoveries in science and engineering such
 as the Polymerase Chain Reaction (PCR)
 Microsystems for DNA amplification and
 identification

 -Biochips for detection of hazardous
 chemical and biological agents
 Medicine/MEDICAL
 -MEMS pressure sensors are used for eye
 surgery to measure and control the vacuum
 level used to remove fluid from the eye,

 -MEMS pressure sensors are used to measure
 intrauterine pressure during birth.
 Communications
 -RF-MEMS technology, by using this
 technology, performance of communication
 circuits will improve, while the total circuit
 area, power consumption and cost will be
 reduced
 Inertial Sensing
 - specifically accelerometers and gyroscopes


 -MEMS accelerometers have displaced
 conventional accelerometers for crash air-
 bag deployment systems in automobiles
 Thereare numerous possible applications for
 MEMS and Nanotechnology. As a breakthrough
 technology, allowing unparalleled synergy
 between previously unrelated fields such as
 biology and microelectronics, many new
 MEMS and Nanotechnology applications will
 emerge.

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INTRODUCTION - MEMS

  • 1. APPLICATIONS OF MEMS By: mohd azrin bin razali POLITEKNIK SULTAN HAJI AHMAD SHAH, Pahang, MALAYSIA
  • 2.  MEMS can be defined as the combination of micro sensors and/or micro actuators and electronic devices integrated on a single chip.  MEMS have many function that make our life easier.
  • 3.  MEMS can be divided into two  >ACTUATOR -A type of motor for moving or controlling a mechanism or system  >SENSOR -a device that responds to a physical stimulus such as heat, light and sound
  • 4.  Bio-MEMS -use in medical and health related technologies  DOC’s OptiML Autofocus (AF) actuator -utilize electrostatic forces to move a lens with optimal positioning precision and repeatability.
  • 5.  MEMS disposable sensor -used to monitor blood pressure in IV lines of patients in intensive care  MEMS pressure sensors -used to measure intrauterine pressure during birth
  • 6.  MEMS gyroscopes -used in modern cars and other applications  INKJET PRINTERS -use piezoelectric or thermal bubble ejection to deposit ink on paper  DISPLAYS -DMD chip in a projector based on DLP technology
  • 7.  Biotechnology -MEMS and Nanotechnology is enabling new discoveries in science and engineering such as the Polymerase Chain Reaction (PCR) Microsystems for DNA amplification and identification -Biochips for detection of hazardous chemical and biological agents
  • 8.  Medicine/MEDICAL -MEMS pressure sensors are used for eye surgery to measure and control the vacuum level used to remove fluid from the eye, -MEMS pressure sensors are used to measure intrauterine pressure during birth.
  • 9.  Communications -RF-MEMS technology, by using this technology, performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced
  • 10.  Inertial Sensing  - specifically accelerometers and gyroscopes -MEMS accelerometers have displaced conventional accelerometers for crash air- bag deployment systems in automobiles
  • 11.  Thereare numerous possible applications for MEMS and Nanotechnology. As a breakthrough technology, allowing unparalleled synergy between previously unrelated fields such as biology and microelectronics, many new MEMS and Nanotechnology applications will emerge.