Wafer Handler Equipment

1. Handlers
Semiconductor Wafer
Handling
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2. Introduction
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3. HCL Technologies

4. Purpose
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5. Components
Front End
 Foup / Carrier / Cassette
 Load Port
 Interface
Back End
 Robots
 Sensors
- Power Cut Sensor
- Slot Count Sensor
- Load Port Sensor
 Pre-Aligner
 Stage
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6. Wafer
HCL TechnologiesWafer

7. Foup / Carrier / Cassette
Carrier
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Carrier

8. Overhead Transport System
Overhead Transport HCL Technologies

9. Robots
Frogleg Robot Leapfrog Robot Quadra Robot
Pre-Aligner Robot
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10. Working
Recipe
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11. HCL Technologies
Working Demo

12. Front End
EFEM
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13. Carrier
Contains Contains
Wafer
Handler’s Input
Overhead
Transport
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14. Back End
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15. HCL Technologies
Backend Demo

16. Calibration & Testing
 Vibration Test
 Up Time of Handler System
 Robot’s Accuracy
 Sensors Test
 Auto Calibration
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17. References
 www.Kensigtonlaboratories.com
 www.SEMI.org
 www.wafercare.com
 Owens Instruments
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18. THANK YOU !!
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