2012 10-19 oled-lighting_semi_conf_public

 Confidential and Proprietary JUSUNG Technology is Innovation, Culture is JUSUNG Product.1www.jusung.com
“O”LED Manufacturing
Technology
Kae Huang
SEMI LED Manufacturing Technology
Conference
October 19th
,2012

 Confidential and Proprietary JUSUNG Technology is Innovation, Culture is JUSUNG Product.2
Solar
Why OLED For Display

Performance Comparison of OLED and LCD Displays
OLED Also Allows For Thinner Displays

Cost Estimates for 4” LTPS display
OLED Displays Already Account for 20% in the Smartphone Market

AMOLED Demand vs Supply Forecast
2014 suggest very tight suply driven by an assumed increase of
AMOLED TV shipments.
Source: DisplaySearch July 2012

Typical Structure of an RGB OLED
Bottom Emission Is Most Common

Key Competing Manufacturing Technologies - Display
TFT
LTPS vs. Oxide TFT
Oxide, Lower Organic Deposition Costs and Thin Film Are the Key
Manufacturing Technologies To Focus On
Encapsulation
Metal/Glass Lid, Frit Sealing, Face Seal, Thin Film,…
Organics
Evaporation, RGBW + CF, LITI and Hybrid

Comparison of substrate types
Significant R&D Momentum on Oxide TFT (using IGZO)

SolarWhy OLED For General
Lighting

 Thin Area Light Source
 Glare-free, Directly Viewable
 Harmless to Human Eye
 Flexible/Bendable Lighting
 Environment Friendly
 Color Tunable
 Transparent Lighting
Energy Efficient
• Highly Efficient Light Source
Environment
• No Mercury, Recyclable
• CO2 Emission Reduction
Sensibility
• Natural Illumination by 3 Primary
Color Mixing [Red, Green and Blue]
• Harmless to Human Eye
Advantages of OLED Lighting

Comparing the Differing Light Sources
OLED Lighting Is Still At Its Infancy of The Evolution
Courtesy: Konica Minolta

OLEDs Forecast Used in General Lighting
November 2011
OLED may account for 3% of total General Lighting by 2020

China Government Support
Specific Target of 80lm/W has already been set as part of its
12th 5-Yr Plan

These targets scale to $30/klm in 2015, $17/klm
in 2017 and $10/klm in 2020.
US Government Support
From DOE SSL Roadmap August 2012
The critical factors include:
 Cycle time – target 1 minute;
 Area of substrate that is converted into
product – target 80%;
 Yield of good product – target 80%; and
 Downtime for repairs or maintenance –
target 20%.

Projections For the Costs of OLED Luminaire
OLED Luminaire Will Continue To Lag Behind LEDs in 2020
Source: DOE SSL Aug 2012

OLED Lighting Panel Structure
A Much Simpler Structure Relative to AMOLED
Conventional
Encapsulation
Thin Film
Encapsulation
Polymer Film
Thin Film
Cathode
Organic
Anode
Glass
Glass
Getter
Cathode
Organic
Sealant
Anode
Glass

Total OLED Market Forecast
Source: BCC Research

R2R Technology
Figure 1: Schematic drawing of the
R2R vacuum coater which includes
the winding unit, plasma pre-
treatment with a linear ion source,
organic linear evaporators, a
magnetron and metal evaporators.
Source: IPMS – COMEDD; Courtesy:
EETimes Europe
An Opportunity for Cost Reduction Over Sheet-to-Sheet
Opportunity For:
Higher throughput
Cheaper metal foil
Plastic web as substrates

Type Metal/Glass Lid Type Frit Seal Face Seal
Structure
Concept Organic Sealing Frit Sealing Film Face Sealing
Emission Bottom Emission Top/Bottom Emission Top/Bottom Emission
Size Small Size Panel
(<15 inch)
Middle Size Panel
(~20 inch)
Large Size Panel
(>40 inch)
Advantages Simple Process Simple Process
High Shock Resistance
Stable Gap
Disadvantages Thicker Panel Low Shock Resistance
OLED Encapsulation
Glass substrate
OLED
Encap. Substrate
Frit
Glass substrate
Encap. Substrate
OLED
Film
SiN
Glass substrate
OLED
Encap. Substrate
Getter
Sealant
N2 Filling
N2 Filling
In addition, thin film technology is an emerging encapsulation
manufacturing technology

OLED Luminaires – Key Manufacturing Issues
 Sizing and brightness
 Variability and binning
 Light shaping
 Standardization of luminaire components
 Reliability issues
 Search for new technolgies:
 Material Improvements, Solutions-based Printing Technology, Spin-Coating
Technology
OLED luminaires are still high-end, high-cost, artistic luminaires,
manufacturers need to incorporate OLEDs cost-effectively into
general illumination applications

Solar
Jusung’s OLED Programs

JUSUNG Engineering at a Glance
 Korea’s Largest Manufacturer of Production
Technology Equipment for Semiconductors, Solar,
Lighting, and Flat Panel Displays
 Founded in 1995
 Headquarters: Gyeonggi-Do (Seoul Area), South
Korea
 Listed on KOSDAQ in 1999, Ticker Symbol
036930
 Global Sales and Service Offices in Algeria,
Middle East, North America, South America,
China, Taiwan, Japan, and Europe
 Strong Track Record with Large Customers
– SK Hynix, LG Display, IBM, TSMC, and more
 Profitable and Growing

Standardization
LCD &
Solar Thin Film R&D
BIPV R&D
SEMI & LED R&D
Solar c-Si R&D
OLED R&D
Manufacturing
Manufacturing
6 out of 8 JUSUNG Buildings are R&D Centers
Fully Equipped Facilities and Pilot Lines for Device Integration

JUSUNG Product Portfolio
Production Proven Innovative Complementary Markets
① Semiconductor
② Display ③ Solar
④ LED Lighting⑤ OLED Lighting
Core Technologies Renewable and Energy
Conservation Technologies
Complementary Photo Electricity
Light Emitting Technology

JUSUNG 730*920 OLED Lighting Panel Announcement
The korean semiconductor equipment maker Jusung Engineering released today a
OLED lighting panel.
The OLED Panel has a size of 730× 920 mm which is deposited on glass substrates.
This is a result from the 4th generation of Jusungs OLED production equipment.
Jusung want to ramp up a pilot production line in Kwangiu.
920mm
730 mm
JUSUNG RELEASED A 730x920MM LARGE
OLED LIGHTING PANEL
Source:

Decorative Lighting
General Lighting
Transparent/
Flexible Lighting
◊ OLED lighting Evolves from Decorative Lighting into Flexible lighting
OLED Lighting Product Trends

Encapsulation PECVD System Overview
 Low Temp. PECVD System (<100℃)
Item Description
Glass Size - 2G (370× 470mm2
) ~ 8G (2200× 2500mm2
)
System
Configuration
- 3 Process Chamber
- 1 Transfer Chamber
- 1 Load lock & 1 Unload lock Chamber
- 1 Mask Stocker
Alignment &
Vision system
- Align Stage: Mask & Glass Alignment (~20㎛)
- Vision System: Confirmation of Alignment
Low Temp
High Quality Film
Process
-Low Process Temp
-Low Wet Etch Rate
-Low Stress
-Low WVTR
Production Proven Low Temp. SiNx Deposition & Alignment Technology
PC
PC PC
Mask
Stocker
L/L U/LT/C

JUSUNG IGZO MOCVD Development History
Solar
ZnO MOCVD
LED
GaN MOCVD
Oxide TFT
IGZO MOCVD

Core Technology MOCVD PVD
1. Composition control
Ga vs. In Composition :
50~200% Controllable
Not Possible
2. High Temp Deposition < 400 ℃ <100 ℃
3. In-Vacuum Continuous
Deposition
G.I/IGZO/ESL
In-Vacuum Deposition
Not Possible
Benefits of JUSUNG IGZO MOCVD
A Challenging Process But Has Promising Benefits

■ G.I + IGZO + ESL In-Vacuum Process
 Interface Impurities Control
 Improved TFT Performance
 Minimized Particles
In-Vacuum Continuous Process
In-Vacuum Continuous Process Provides Improved TFT Performance
G.I Active (IGZO) ESL Anneal
JUSUNG IGZO
In-situ
Integration
Depo.
(PECVD)
Depo.
(PECVD)
Depo.
(MOCVD)
Anneal
Without Vacuum Break
MOCVD PECVD Integration System

Summary
 OLED technology used in display has already taken off;
–Continuosly improving display performance on small devices
–Ramp up of large size TV coming soon
–Monitors and laptops years away
 OLED technology used for lighting still evolving
– In the near term, OLED can’t compete with HB-LEDs and fluorescent lights
–OLED Lighting industry will need to meet the expectations of lighting designers,
contractors, regulators as well as end users.
 Frost & Sullivan estimates market to reach $7.39 billion in 2016 at a CAGR of 34
percent. (For lighting, difficult to determine consumers willingness to pay)
Oxide, Organic Deposition Process and Materials, Encapsulation

Solar
THANK YOU!
Kae Huang
kae.huang@jusung.com
+86-21-6465-5851

2012 10-19 oled-lighting_semi_conf_public

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2012 10-19 oled-lighting_semi_conf_public