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SIMS:
Measures the composition of a
sample by sputtering it with a
focused ion beam and analyzing
the secondary ions that are
ejected from the surface.
Offers high sensitivity and is
capable of imaging chemical
distribution at the nanoscale.:
Generally more expensive and
requires samples to be thin
enough for analysis.
Measures the composition of a
sample by introducing it into a
plasma torch and detecting the
ions produced by the sample.

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