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Integration without compromise
Cathodoluminescence Imaging
on the SPARC platform
Cathodoluminescence
• Cathodoluminescence (CL) is the
process whereby light is generated
when an electron beam hits a
specimen.
• Cathodoluminescence imaging is an
analytical technique that combines
functional optical information with
the superior spatial resolution of
electron microscopy.
Why Cathodoluminescence is important?
Cathodoluminescence emission is used to study the fundamental
properties of matter:
• Light transport
• Scattering
• Electronic structure of a material (e.g. bandgap, defects)
• Resonant phenomena
 Cathodoluminescence is therefore a valuable source of information
for fundamental research, as well as applied research in industry (e.g.
metrology, failure analysis)
Key advantages of Cathodoluminescence imaging
Using electrons as an optical excitation source
has several advantages:
• Overcoming the diffraction limit: high
excitation resolution (1 – 10 nm precision)
• Measurements are performed with an
electron microscope environment
• Can be used to correlate nanoscale
geometrical features with the optical
response
Application Areas - Geology
CL presents a valuable technique for
fundamental sedimentary, metamorphic,
and igneous rock studies but also for
more applied studies on ores, precious
gems, reservoir rocks, and construction
materials.
Application Areas - Nanophotonics
CL imaging is a powerful method for studying optical phenomena at the nanoscale.
It is applicable to metallic as well as dielectric and semiconductor nanostructures.
These structures find applications in (bio)sensing, fluorescence enhancement, non-linear optics,
low-threshold steam generation, LED’s, solar cells, integrated photonics, lasers and much more.
Application Areas – Materials Science
CL can be used to study ceramics, dielectrics and semiconductors (both in bulk and nanostructur
ed materials) and to determine their light-emitting properties at the nanoscale.
This is useful for many functional materials, including scintillators, phosphors, high-power electr
onics light-emitting-diodes, diode lasers and solar cells.
Cathodoluminescence SEM – The SPARC
The SPARC is a high-performance Cathodoluminescence Scanning Electron Microscope (SEM) that
is produced and designed by Delmic.
The system is ideal for the optimal collection and detection of cathodoluminescence emission,
enabling fast and sensitive material characterization at the nanoscale.
SPARC SPARC Compact
Highlights of the SPARC
• Modular design
• UV/VIS/NIR optics and detectors
• Calibration light source
• Fiber coupling
• Photomultiplier tube for intensity mapping
Spectrograph
Optics
Optical module Grating turret
Integration without compromise
DELMIC B.V.
Address: Kanaalweg 4, 2628 EB,
Delft, The Netherlands
Website: www.delmic.com
Telephone: +31 (0)15 744 01 58
Email: info@delmic.com
Please visit Delmic’s website to learn more
about the unique solution for
cathodoluminescene imaging.

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What is Cathodoluminescence? - DELMIC

  • 2. Cathodoluminescence • Cathodoluminescence (CL) is the process whereby light is generated when an electron beam hits a specimen. • Cathodoluminescence imaging is an analytical technique that combines functional optical information with the superior spatial resolution of electron microscopy.
  • 3. Why Cathodoluminescence is important? Cathodoluminescence emission is used to study the fundamental properties of matter: • Light transport • Scattering • Electronic structure of a material (e.g. bandgap, defects) • Resonant phenomena  Cathodoluminescence is therefore a valuable source of information for fundamental research, as well as applied research in industry (e.g. metrology, failure analysis)
  • 4. Key advantages of Cathodoluminescence imaging Using electrons as an optical excitation source has several advantages: • Overcoming the diffraction limit: high excitation resolution (1 – 10 nm precision) • Measurements are performed with an electron microscope environment • Can be used to correlate nanoscale geometrical features with the optical response
  • 5. Application Areas - Geology CL presents a valuable technique for fundamental sedimentary, metamorphic, and igneous rock studies but also for more applied studies on ores, precious gems, reservoir rocks, and construction materials.
  • 6. Application Areas - Nanophotonics CL imaging is a powerful method for studying optical phenomena at the nanoscale. It is applicable to metallic as well as dielectric and semiconductor nanostructures. These structures find applications in (bio)sensing, fluorescence enhancement, non-linear optics, low-threshold steam generation, LED’s, solar cells, integrated photonics, lasers and much more.
  • 7. Application Areas – Materials Science CL can be used to study ceramics, dielectrics and semiconductors (both in bulk and nanostructur ed materials) and to determine their light-emitting properties at the nanoscale. This is useful for many functional materials, including scintillators, phosphors, high-power electr onics light-emitting-diodes, diode lasers and solar cells.
  • 8. Cathodoluminescence SEM – The SPARC The SPARC is a high-performance Cathodoluminescence Scanning Electron Microscope (SEM) that is produced and designed by Delmic. The system is ideal for the optimal collection and detection of cathodoluminescence emission, enabling fast and sensitive material characterization at the nanoscale. SPARC SPARC Compact
  • 9. Highlights of the SPARC • Modular design • UV/VIS/NIR optics and detectors • Calibration light source • Fiber coupling • Photomultiplier tube for intensity mapping Spectrograph Optics Optical module Grating turret
  • 10. Integration without compromise DELMIC B.V. Address: Kanaalweg 4, 2628 EB, Delft, The Netherlands Website: www.delmic.com Telephone: +31 (0)15 744 01 58 Email: info@delmic.com Please visit Delmic’s website to learn more about the unique solution for cathodoluminescene imaging.