APPLICABILITÀ DELLA TECNICA DI SPUTTERING ALLA DEPOSIZIONE DI FILM SOTTILI DI DIBORURO DI MAGNESIO

1. UNIVERSITÀ DEGLI STUDI DI PADOVA
FACOLTÀ DI SCIENZE MM.FF.NN.
Corso di Laurea in Scienza dei Materiali
TESI DI LAUREA
APPLICABILITÀ DELLA TECNICA DI SPUTTERING ALLA
DEPOSIZIONE DI FILM SOTTILI
DI DIBORURO DI MAGNESIO
Relatore: Prof. V. Palmieri
Candidato: Federico Della Ricca
N° matr.: 411569/MT
Anno Accademico 2001/02

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828. nQo­F­#S S!‹R
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829. Flc

830. Z|Yrmd^'c

831. nbn…m§w]'lc

832. Z]k

833. FW'^'#Y]Y[aT”:aTYrqdabW'Wtum/Y[c

834. Z]a…monbc s'abW5moZ]ab§k'cuW'FWŒ–Fw]w]c{'W
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835. FWd'W5m zk™;­@

836. @'œ5mow]a%abn^'Fl'l'ab ^'c

837. n%l'Z]c

838. k

839. c

840. ^'c

841. W;Y[cel'Z]abtum/Y[ ^'c

842. n*sy‰c-.‹Qoy#RhQ

843. H3D(5m vFc

844. W'c

845. Z[m/Y[~vFZ[moW'^'amow]lcpY]Yrm/Y[aT”Fc›w]'nbnbc›w]'cflFw]w]abs'abnbamol'l'nbabkBmo`

846. abFW'aw]a…m k

847. Ft{c›tum/Y[c
Z]a…monbc~lc

848. Z†mol'l'nbabkBmo`

849. abFW'a(w]_”omow|Yrm1w]kBmon…m.tumovFW'cpY[akBmB”:akBmB”:aTYrq1w]'lc

850. Z]k

851. FW'^'#Y]Y[Z]abk

852. a3Dw]a…m
lc

853. Z*mol'l'nbabkBmo`

854. abFW'ac

855. nbcpY]Y[Z]FW'abk'coR
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856. vFvFc

857. Z].n…mw]5m§^'c

858. W'w]aTYrq~k

859. abZ]kBmdQ:Rh•{”FFnTY[cœ'c

860. nbn…mu^'c

861. nbn‹Šmok

862. œ5m=3*c
k

863. Ft{lFw|Y[~^5m^''cec

864. nbc

865. t{c

866. W;Y[amos'sFW'^5moW;Y[ac

867. ^1c

868. k

869. FW'Ft{abk

870. a‹R
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871. Z]k

872. FW'^'#Y]Y[FZ]a#mo^†monTYrmY[c

873. t{lc

874. Z[m/Y['Z[mŸk

875. Z]aTY[abkBm/m*s5mow]cA^'aFw]w]ab^'a^'a;Z[mot{c
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876. Z]k

877. 'Z]ab(7abn^'absFZ]'Z]{^'atumovFW'c

878. w]ab-5m{'W5muw|Y[Z]#Y]Y['Z[m{l'a¿w]c

879. t{l'nbabk

880. c27cek

881. Fw|Y[a^'a–2mos:
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882. abFW'cŸt{abW'FZ]a#FabW'FnTY[Z]c¥l'Z]c

883. w]c

884. W;Yrm†'W5mes5mow]w[m moW'abw]oY[Z]Fl'a…mF'W5mes''FW5mfk

885. FW'^''k

886. abs'abnbaTYrq
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887. `

888. `Bm^'aLk

889. :c

890. Z]c

891. W'`Bmt{c

892. W;Y[Z]c aLtum/Y[c

893. Z]a…monbas5mow[m/Y[aLw]'a
k

894. 'l'Z[m/Y[a5moW'W'¿–FZ|Y[cmoW'abw]oY[Z]Fl'a…mdW'c

895. nbn…mdk

896. FW'^''k

897. abs'abnbaTYrq§cuw]kBmoZ]w]cl'Z]Fl'Z]abcpYrq1k

898. FW'^'#Y]Y[aT”Fc
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899. t{lc

900. Z[m/Y['Z[m¿k

901. Z]aTY[abkBmdk

902. Fw0C*c

903. nbcp”om/Yrm1^'c

904. nˆ^'absFZ]'Z]¿^'aAtumovFW'c

905. w]ab1Y[Z]”Fc

906. Z]c

907. s'sc§'W5m
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908. v;mo`

909. abFW'c¥W'c

910. nbn‹Šmot s'aTY[„^'c

911. nbn…m*Y[c

912. FZ]a…m‰€¥‡¥¼.2€moZ]^'c

913. c

914. W
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915. Z:¼:k'Z]abcEc

916. Z3D^5m/Y[‰k'cŸnbc
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917. nbc

918. t{c

919. W;Yrmonbak

920. FZ]Z]abw]lFW'^'FW'{m~l'a1monTY[c„–Z]c

921. œ'c

922. W'`

923. ce–FW'FW'abk'c25k'cflFw]w]FW'
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924. t{lc

925. Z[m/Y['Z]c^'a*Y[Z[moW'w]ab`

926. abFW'c¿tumovFvFabFZ]aˆabW#–2m/Y]Y[aW'oY[Nk'cŒn…mŒY[c

927. t{lc

928. Z[m/Y['Z[m^'a
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929. abFW'cfl'Z]FlFZ]`

930. abFW5monbc›monbn…meY[c

931. t{lc

932. Z[m/Y['Z[m^'aƒ„c

933. s=1FcoR
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934. FZ]abk

935. ('abn%^'absFZ]'Z]~^'atumovFW'c

936. w]ab~lFW'cf'W¿abW;Y[c

937. Z]c

938. w]w[moW;Y[ceabW;Y[c

939. Z
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940. Z]w]c§c

941. w]w]w]a…mabnˆl'Z]abt{^'a¥'W5mW'”omŒw]c

942. Z]abc§^'aw]'lc

943. Z]k

944. FW'^'#Y]Y[FZ]a k

945. FW
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946. t{lc

947. Z[m/Y['Z[mk

948. Z]aTY[abkBm†l'a1monTYrm†^'aœ'c

949. nbnbaY[Z[mo^'ab`

950. abFW5monba7tum W'c

951. nbnbw|Y[c

952. w]w]~Y[c

953. t{l~l'Z]Fl'Z]abcpYrq
k

954. FW'^'#Y]Y[aT”Fcft{abvFnbabFZ]a7^'c

955. nw]'lc

956. Z]k

957. FW'^'#Y]Y[FZ]amo^1monTYrm zkR
mw|Y[Z]#Y]Y['Z[m§^'c

958. nbn‹Šh}1v;€Q.0š5vF'Z[m1Q:RTS3c

959. w[movFFW5monbc ck

960. Fw|Y[aTY['aTYrmu^5ml'a…moW'aL^'aDm/Y[Ft{a
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961. w]ab~abW;Y[c

962. Z]kBmon…m/Y[a‹R
g

963. xiDZ]Fl'Z]abcpYrqc

964. ^¿mol'l'nbabkBmo'

965. abFW'a^'c

966. n^'absFZ]'Z]^'atumovFW'c

967. w]ab
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968. n^'absFZ]'Z]^'atumovFW'c

969. w]ab.^5m Q!3

970. m Yrmosc

971. nbn…m~Q:RTSfZ]a…mow]w]'t{c‰nbc‰l'Z]abW'k

972. abl5monbal'Z]Fl'Z]abcpYrq^'c

973. n^'absFZ]'Z]^'atumovFW'c

974. w]ab'R
‡ˆFt{c†w]aLl'W'oYrmoZ]c monbk

975. 'W'c†l'Z]Fl'Z]abcpYrq{w]FW'kBmoZ[m/Y]Y[c

976. Z]ab'

977. 'Bm/Y[c†^5mu'WKmot{l'ab{w]lcpY]Y[Z]
^'a#”omonbFZ]aFm›w]c

978. k

979. FW'^5mf^'c

980. n5t{cpY[:^'‰^'a'l'Z]c

981. l5moZ[mo'

982. abFW'c2;^'c

983. nbn…m„l''Z]c

984. '

985. 'Bmfc¥^'c

986. n'vFZ[mo^'f^'a'FZ]^'abW'c
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987. nkBmot{l'abFW'coR
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988. tumŸW'c

989. nbn‹ŠoY]Y[c

990. W'c

991. Z]cAš5nbtw]oY]Y[abnba;^'a:^'absFZ]'Z]*^'a:tumovFW'c

992. w]ab*abW†'W w]abW'vFFnb
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993. W'FZ]t{c§^'ac

994. Z]c

995. W''BmK–Z[mKnbc§Y[c

996. W'w]abFW'a¥^'a”omolFZ]cd^'c

997. n
tumovFW'c

998. w]abŒc1^'c

999. n*sFZ]'R3UXW#–2m/Y]Y[a¥abn¥tumovFW'c

1000. w]abŒ–FW'^'c¿m¢;Qoy

1001. c1sFnbnbcdmSyF—Fy

1002. .2mS
m/Y[t3D(k

1003. FW 'W%Šc

1004. W;Yrmonbl'a…m¿^'a¥m/Y[Ft{ab'

1005. 'Bmo'

1006. abFW'c m/Y98^'a„SB™;—3:,;=,/t{FnLlc

1007. Z]k

1008. aŒm—F­F­ ‡´n…m
w]5mŒY[c

1009. W'w]abFW'c1^'a”omolFZ]cd^'afS­X™Y[FZ]Z.SFRy S­|QiLm=3Dt{c

1010. W;Y[Z]cdabn¥sFZ]monbn…mw|Y[c

1011. w]w[m
Y[c

1012. t{lc

1013. Z[m/Y['Z[m@5m'W5mY[c

1014. W'w]abFW'cf^'a”omolFZ]cf^'a(SFRx S­y;•iLm#R

1015. Q:Ryzc

1016. Z]t{:^'abW5mot{abkBm†^'c

1017. nw]abw|Y[c

1018. tum{}1v/€¢

1019. zc

1020. t{lc

1021. Z[m/Y['Z[mk

1022. Z]aTY[abkBmyF¢ ™;­-

1023. iLmoZ[mot{cpY[Z]a%Z]cpY[abk

1024. Fn…moZ]am‰­#RyF­FxF— W't'k­#R­Fy;•FQ/™
ƒ„c

1025. W'w]aTYrqY[c

1026. FZ]abkBm = 2:55gr=cm3
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1027. W'w]aTYrq~^'c

1028. alFZ|Yrm/Y[FZ]a nS(300K) = 1:7 2:8 1023buche=cm3
cpY]Y[{abw]oY[Fl'abk

1029. T = B + Mg = 0:3 + 0:02
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1030. w]abw|Y[aT”:aTYrq†”:abk

1031. abW'~m Tc (40K) = 0:4 16
cm
ž*mol'lFZ|Y[~Z]c

1032. w]abw|Y[aT”:aTYrq Z]c

1033. w]ab^'5m RRR = (40k)=(300K) = 1 27
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1034. '

1035. '

1036. ce^'ak

1037. :c

1038. Z]c

1039. W''Bm a = 3:7 12nm c = 1:6 3:6nm
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1040. '

1041. 'Bm{^'a%lc

1042. W'cpY[Z[mo'

1043. abFW'c (0) = 85 180nm
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1044. W'c

1045. Z]vFcpY[abk

1046. (0) = 1:8 75meV
zc

1047. t{lc

1048. Z[m/Y['Z[m^'aƒ„c

1049. s=1Fc D = 750 880K
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1050. W'w]aTYrq~^'ak

1051. FZ]Z]c

1052. W;Y[cfk

1053. Z]aTY[abkBm Jc(4:2; 0T) 107A=cm2
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Jc(4:2; 10T) 105A=cm2
Jc(25; 0T) 5 106A=cm2
Jc(25; 2T) 105A=cm2
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1055. abl5monbal'Z]Fl'Z]abcpYrq ^'c

1056. n^'absFZ]'Z]~^'a%tumovFW'c

1057. w]ab.^5m Q!3
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1060. abl5monba7l'Z]Fl'Z]abcpYrq†Y[c

1061. Z]t{:^'abW5mot{abk'cŸ^'a
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1062. w|Y[ac

1063. nbc

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1065. W;Y[a:t{c

1066. W;Y[Z]c›W'c

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1069. abFW'cf^'c

1070. nbn…m†Y[c

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1072. Z[m/Y['Z[m#R
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1073. t{lc

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1076. W'w]abFW'cf^'a%”omolFZ]cfm~¢;Qoy-

1077. yF—#SeiLm
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1078. t{lc

1079. Z[m/Y['Z[m^'ac

1080. sFnbnbab'

1081. abFW'cSyF—Fy@

1082. DW;Yrmonbl'a…m ^'ac

1083. sFnbnbab'

1084. abFW'cSQFg:R™:,;=,/t{Fn
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1085. 'Bmo'

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1087. nbn…mQ:RhQ iDZ]Fl'Z]abcpYrq Y[c

1088. Z]t{:^'abW5mot{abk'c„^'c

1089. nL}¿movFW'c

1090. w]ab
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1092. Z]abt{c

1093. W;Yrmonba›lc

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1095. n
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1096. ttumovFW'c

1097. w]ab§sFZ](ml'Z]c

1098. w]w]abFW'a(^'ac

1099. Z]c

1100. W;Y[a(^5mœ'c

1101. nbn…m§m/Y[t{Fw|–c

1102. Z]abkBmY[#Y]YrmB”:a…mabc
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1103. Fnbn…mosFZ[m/Y[FZ]a y!5moW'W'{#Y[abnbab'

1104. 'Bm/Y[ 'W%Šmol'l'Z]:k

1105. k

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1107. Ft{l'#Yrmo'

1108. abFW5monbc›lc

1109. Z¥Z]abkBmB”omoZ]nb'R
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1110. k

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1114. W'c

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1117. k

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1120. W;Y[aAm/Y]Y[Z[mB”Fc

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1122. nbnba
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1123. nbn…m nbFZ]w|Y[Z]#Y]Y['Z[m~k

1124. Z]abw|YrmonbnbabW5m#R
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1125. n¥w]abw|Y[c

1126. tum}1v/€w]FW'l'Z]c

1127. w]c

1128. W;Y[aŸw]cpY]Y[cd–2mow]adnbcY[Z]c§–2mow]a¥^'c

1129. n¥tumovFW'c

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1131. XFZ|Y[FZ]Ft s'abkBm^'c

1132. n‰sFZ](‰}1v;€Qf}1v;€™‰}1v;€gR¤¼:a
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1133. 'Z[moZ]c.0”Fc

1134. ^'aYrmosc

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1136. nsFZ]'R
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1137. w]l'Z]c

1138. w]w]unbc‰c

1139. W'c

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1141. asFZ]'Z]a%k

1142. Ft{c

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1144. ^¿mol'l'nbabkBmo'

1145. abFW'a^'c

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1147. w]ab
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1148. t{lc

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1150. DW;Yrmonbl'a…m ^'a%–'w]abFW'c•o­:,;=,/t{Fn
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1152. QiLm
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1153. t{lc

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1155. sFnbnbab'

1156. abFW'c™Qo­F­-

1157. DW;Yrmonbl'a…m ^'ac

1158. sFnbnbab'

1159. abFW'c•o­F­:,;=,/t{Fn
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1160. 'Bmo'

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1162. nbn…m~Q:Ry iDZ]Fl'Z]abcpYrq Y[c

1163. Z]t{:^'abW5mot{abk'c„^'c

1164. n€ˆFZ]
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1166. w]ab

1167. Q:Ryzc

1168. Z]t{:^'abW5mot{abkBm†^'c

1169. nw]abw|Y[c

1170. tum{}1v/€SFS
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1172. W'c

1173. Z]vFabc^'a‰abs's'w›^'a(–FZ]tumo'

1174. abFW'c†^'c

1175. nDk

1176. Ft{l/
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1177. W#Yrm1^5mabŒcpY†mon‹Rk

1178. FWabn(l'Z]FvFZ[mot{tumuzB'c

1179. Z]t{/|‡monbk^5monbn…mc

1180. W;Yrmonbl'a…m
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1181. abFW'cew]lc

1182. Z]abt{c

1183. W;Yrmonbc†c ^5monbn…m~Y[c

1184. t{lc

1185. Z[m/Y['Z[mu^'aL^'c

1186. k

1187. Ft{lFw]ab'

1188. abFW'c~ªp«2¦!'o«0'dlc

1189. Z‰abn
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1190. Ft{lFw|Y['R
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1192. Zˆabn7w]abw|Y[c

1193. tum}1v/€muS‰m/Y[t
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1194. Z[mk

1195. FWc

1196. k

1197. k

1198. c

1199. w]w]^'a*tumovFW'c

1200. w]abn…mŒ–2mow]cK}1v;€Qk

1201. :c

1202. w]abw|Y[c¿k

1203. FWabnŸtum
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1204. w]abw]Fnbab^'(*nbabœ'ab^' c”omolFZ]cm w]c

1205. k

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1207. nbnbc¿Y[c

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1212. (7}1v;€Qk

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1215. FW}1v;€ 4R
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1217. n5tumovFW'c

1218. w]ab‰mf—;•o­ ‡c*Q:R¢Fy‰zFZ]Z.2¢;Qoy

1219. @y#R¢ S­QiLm=3D
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1220. ntumovFW'c

1221. w]ab~w]k

1222. Ft{l5moZ]ce^5mon^'a…movFZ[mot{tum†^'aw|Yrm/Y[(7abW'FnTY[Z]c‰n…m
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1223. t{lc

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