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Multilayer nonlinear dielectric devices for
       RF mobile communications



          … improvement of performance of smartphones and mobile
              computers (save power and extend operating time and
                             reduce harmful effect on human body)


                        … cost saving design for automotive radars and
                                               communication systems


            … broad spectrum of tunable RF devices to exchange the
                                        traditional non-tunable ones

           DINItex, Ladshut-Saint-Petersburg, June 2012
Industry pain and our proposition
Industry pain

                                            Cell phone and mobile computers:
Taking the phone in hand, we create                                   Modern cell phone is a very multifunctional
interference to signal transmission                                   device, it is considered to support several
                                                                      frequency bands, providing Bluetooth, Wi-Fi,
                           Antenna is                                 LTE communications. All of those systems
                          mismatched                                  require bandpass filters or filter banks. It is
                          with amplifier.          Battery
                             Amplifier              faster            clear, that the reduction of area occupied by
                        increases signal         discharged           filters provides more free space for new
                              power                                   function.
                                                                                            filters


Antennas actually used in smart mobile devices like cell
phones do not have automatic tuning of its impedance.
Thus, impedance of antenna is being affected by human
body parts like, for instance, hands. Impedance variations
leads to mismatch between antenna and amplifier. Modern
cell phones compensates this effect by providing a
higher power to the amplifier output signal resulting to a
reduction of stand alone time up two times.

                                                       Anti-collision radars and communication systems:

                                               up to now commercial solutions on the market are based only on
                                               mechanical scanning of antenna beam or on an array of non-scan
                                               antennas, which are very cost-intensive and not robust solutions.

13.11.12                                               CONFIDENTIAL                                                3
Solutions: integrated products based on multilayer nonlinear
           dielectric varactor chips

                             Core technology for different RF
     Electronically                   applications
   scanned antenna                                                Adaptive matching
      modules for                                                 circuits for mobile
   automotive radars                                               phones, mobile
  and communication                                                computers and
                                                                        tablets
       systems




                               multilayer nonlinear dielectric-
                                   metal structure (MND)

Advantages of the products:                                          Tunable bulk
ü save power                                                       acoustic wave
ü extend operating time                                           (BAW) filters for
ü cost saving system design                                        mobile devices
ü reduce harmful effect on human body

13.11.12                                 CONFIDENTIAL                                   4
Comparison of technological approaches for varactor chips

Current varactor technologies fall into three major categories:                  Only Nonlinear dielectric-
                                                                                           based
      Ø  semiconductor-based varactor diodes
      Ø  Micro-electromechanical system (MEMS) varactors                                elements
                                                                                      provide the best
      Ø  nonlinear dielectric-based varactors
                                                                                 performance and low cost.

                                   Semiconductor      Micro- electromechanical   Nonlinear dielectric-based
Parameters
                                     varactors                 (MEMS)                    elements
Power Handling                        ~0.01 W                     ~0.1 W                     ~1 W
Tuning Speed                           ~1 ns                      ~ 1 mks                    ~1 ns
Bias Voltage                            ~5V                        ~50V                       ~5V
Quality Factor                         ~100                        ~250                      ~100
Tunability                               ~4                         ~10                        ~3
Life time                             5 years                     < 1 year                  5 years


                                                                                      Advantages:
          Main drawback:                                                       The high power handling
        low power handling                      Main drawbacks:
                                                                             capability in combination with
       capability (high level of           high bias voltage and high
                                                                             the relatively low bias voltage
          intermodulation                        packaging cost
                                                                             provide the best performance
             distortions)
                                                                                      and low cost.

13.11.12                                           CONFIDENTIAL                                                5
State of the art nonlinear dielectric technology and main
                unsolved problems
                                             Ø  For mobile applications it is very important to have a high power
                Planar structure                 handling capability (more than 30dBm) with low control voltage (3V)
                                                 simultaneously.

                                             Ø  At present time there are two different approaches to design of
                                                 nonlinear dielectric film devices - planar structure and parallel-plate
                                                 structure based on only one layer of nonlinear dielectric.
        High control voltages and high
          power handling capability          Ø  Planar structure provides high power handling capability (30dBm) but
                                                 needs for that high control voltages (more than 400V). It requires step
             Parallel-plate structure            up voltage converters that is not acceptable for mobile devices.

                                             Ø  From the other hand, parallel-plate structure is controlled by low
                                                 voltages (5-30V) but has low power handling capability (5-10dBm)
                                                 which is not enough for the operation of RF amplifier in mobile
                                                 device.

       Low control voltages and low          Ø  The devices based on one dielectric layer are being developed by
        power handling capability                Agile RF (USA) and nGimat (USA).

                                             Ø  Only multilayer structures allow to combine both important features in
       Two-layers parallel-plate structure
                                                 one device: to reduce control voltages and to achieve high power
                                                 handling capability.

                                             Ø  At present time only one company (Paratek) produces devices based
                                                 on two layers of nonlinear dielectric. These devices provide power
     Low control voltages and high power         handling capability 30dBm (that is acceptable) and the control voltage
             handling capability                 about 20V and that is still high and still takes the DC-DC converters.


06.04.2012                                             CONFIDENTIAL                                                   6
The technology validation

Ø  Paratek is developing the most likely technology. It discovered a
    different approach to RF tuning using a thin-film material called
    ParaScan™ (nonlinear dielectric). Proprietary to Paratek, ParaScan
    is used to produce the ParaTune™ family of tunable integrated
    circuits (ICs).

Ø  An advantage of Paratek’s products is low-loss tuning over a wide
    range of impedances, ultra-fast response time, and industry-standard
    packaging which allows new generation of wireless products to
    perform better and more efficiently.

Ø  The significant contribution to the development of Paratek’s
    technology was made by a group of Professor Kozyrev, who is
    one of the founders of DINItex. His group is the author of 15
    patents that partly covers IP property in this field and were sold to
    Paratek in 2002-2008. During this period of time prof. Kosyrev’s
    group provided the material researches and prototyping of               Results of Joint research Kozyrev’s Lab
    microwave devices for Paratek.                                                        and Paratek:

Ø  In March of 2012 Paratek Microwave Inc. was acquired by one             ü 2001 R&D 100 Award of 100 best
    main producers of smartphones – RIM (owner of trade mark
                                                                               technical-science works of USA
    BlackBerry that takes only 10% of smartphones market). That
    means that since that time Paratek is developing RF tuning for RIM
    only.                                                                   ü 15 US Patents

Ø  DINItex is the company which researches are open for the rest           ü Over 40 publications in scientific journals
    of the market that still contains 90%.                                     and conferences proceedings
Ø  DINItex’s researchers independently developed additional
    advantages in technology and designed a range of new devices.
                                                                            ü 8 grants of US Department of Energy

06.04.2012                                                    CONFIDENTIAL                                                   7
Knowhow and new approach
Knowhow on the structure level

Ø The reduction of control voltages is possible only due to reduction of                  Me/BSTO/…../Substrate
   film thickness. But it leads to drop in power handling capability. For
   two layer structure with 3V control voltages the power handling
   capability is only 20dBm that is not enough for mobile applications.
Ø To keep 30dBm power handling capability it is possible to increase
   the number of layers with parallel reduction of their thicknesses.
Ø The required number of nonlinear dielectric layers is 8-12.
Ø The required thickness of each layer shell be less than 100nm.
Ø The reduction of nonlinear dielectric film thickness is constrained by
   low-tuning layer on the metal-dielectric interface due to mismatch of
   crystal lattice constants. This problem becomes the most dominant
   with increase of layers number.
Ø Up to now this problem for bottom electrode materials with low losses                           Substrate
   at microwaves (with high conductivity, like Pt or Au) is not solved.


           Our knowhow in thin film deposition technique provides the solution for described problem

Ø  The principal: changing stoichiometry of dielectric at the initial growth stage allows to reduce the mismatch of crystal
    lattice constant.

Ø  The effective changing of stoichiometry by pressure is possible only in unique designed technological vacuum
    chamber (that is completely unique and patented by founders).

Ø  For modeling of spattering and deposition processes the unique math model and computer simulation tool are
    elaborated and licensed by founders.

13.11.12                                                  CONFIDENTIAL                                                    9
Knowhow on chip design level


 Ø  At the chip level the other main problem exists: excitation of acoustic waves leads to dramatical increase
     of microwave losses (reduction of Q-factor).

 Ø  The two layer structure allows the cancellation of transverse acoustic modes (founders are the co-authors
     of patent application, owned to Paratek). However, the excitation of longitudinal acoustic waves is still a
     problem at present time.

 Ø  Besides, the high level of operation microwave power takes an effective heat sink.


 Our knowhow on chip level design
                                                       ~ 1 mm                C, pF
      provides the solution for                                              The image cannot be displayed. Your computer may not have enough memory to open the
                                                                             image, or the image may have been corrupted. Restart your computer, and then open the file
                                                                             again. If the red x still appears, you may have to delete the image and then insert it again.   Capacitance
       mentioned problems:                                                                                                                                                   variation under
                                                                DC in                                                                                                        microwave
                                                                                                                                                                             signal
 Special shape of top electrodes
                                               RF in                RF out
                                      ~ 1 mm




 provides both cancellation of
                                                                                                                                                                             Capacitance
 longitudinal acoustic wave                                                                                                                                                  variation under
                                                                                                                                                                             DC control
 generation and more efficient heat                                                                                                                                          voltage

 dissipation [PCT application is
 preparing]                                                                                                                                                            U, V


13.11.12                                               CONFIDENTIAL                                                                                                                    10
Knowhow on tunable BAW filter design

                                           Ø At present time BAW filters based on traditional RF piezoelectric
                                              materials (AlN, ZnO) are in active development and use. BAW
                                              filters can operate up to around 10GHz and provide the
                                              combination of high quality RF parameters (insertion loss,
                                              reliability, sizes).
  Piezoelectric                            Ø BAW filters made of the above materials can be electronically
                                              tuned to a specified frequency by using a varactor diode or by
                                              utilizing the second-order nonlinearity of the piezomaterial.
                                           Ø However the frequency tuning in such a structures is not more
                                              than 3%.


     Our knowhow of tunable BAW filter design provides the solution of
                          mentioned problem
                                                                                                     Edc
Ø Proposed BAW filter consists of several layers of nonlinear dielectric. The
                                                                                                     Edc
   sign of piezoelectric coefficient of each layer depends on direction of
   control E-field.                                                                                  Edc
Ø The principal: biasing of each nonlinear dielectric layer with EDC of the
   same or opposite direction results in the excitation of the antisymmetrical                       Edc
   or symmetrical acoustic modes respectively.
Ø Frequency tuning up to 100% is possible. The principal of acoustic mode
   switching is completely unique and patented by founders.
Ø For modeling of acoustic wave excitation the unique math model and
   computer simulation tool are elaborated and licensed by founders.

13.11.12                                             CONFIDENTIAL                                            11
New complex approach into technology of distributed nonlinear
              dielectric structures for phased array antennas
                                                                 Ø  More than 20 years of experience in design of
                                 Absence of                          phased array antennas for frequency ranges up to 60
                                   residual                          GHz.
                              polarization due
                                 to oxygen                       Ø  2001 R&D 100 Award for technology of Electronically
                               annealing and                         Scanning Antenna, which have been included in the
                              special regimes                        list of 100 best technical-science works of USA in
                                of electrodes                        2001 year.
                                 deposition



                                                         Distributed                                  Improvement of
    High structural quality                         nonlinear dielectric                                 tanδ due to
    of nonlinear dielectric                                                                            cancellation of
       films due to the                                structures for
                                                                                                      transversal and
     unique math model                               automotive radar                                    longitudinal
       and software of                                  (77GHz) and                                    acoustic wave
        spattering and                                communication                                   generation [PCT
    deposition processes                             (10GHz) phased                                     application is
     [PCT application is                              array antennas                                      preparing]
           preparing]


                                Theoretical and
                                  experimental                                    Licensed technique
                               investigations of                                  and test-fixtures for
                                 pure strontium                                   RF characterization
                              titanate films with                                     of nonlinear
                              relatively low loss                                 dielectric structures
                                   in W-band



13.11.12                                                 CONFIDENTIAL                                                    12
IP list

                                  7 released patents;           4 patent applications

                                    Chip design and                                                      Design
     Chip technology                                                  Product design
                                        testing                                                        simulation


1. Russian patent            3. Russian Patent N2397607,        7. Russian Patent              10. Patent application to be
N2434078. 20.11.2011         17.07.2009                         N2361360, 12.05.2008           applied (PCT)
“Method of complex oxide     “Ferroelectric acoustic            “Tunable pulse former made      “SW simulation Kit for
ferroelectric thin film      resonator and its resonance        on non-linear ferroelectric    simulation of process
deposition based ion-        frequency tuning technique”        transmission lines”            parameters at ion etching
plasma sputtering                                                                              and ion plasma sputtering”
technique”                   4. Russian Patent N2367964,        8. Russian Patent
                             04.04.2008                         N2355080, 24.05.2007
                             “Coaxial resonator for             “Microwave active module”      11. Russian Patent
2. Patent application to
be applied (PCT)             Capacitor Quality factor                                          N2012610179
                             measurements”                      9. Russian Patent              “SW design kit for resonance
 “Method of increasing the                                      N2350008, 04.05.2007
tunability of ultrathin                                                                        electro-acoustical
                             5. Patent application to be        “Method of thermal to          phenomena modelling in
ferroelectric films”                                            electrical energy conversion
                             applied (PCT)                                                     multilayer structures”
                              “Tunable bulk acoustic wave       and a device for it”
                             filter based on nonlinear
                             dielectric films”

                             6. Patent application to be
                             applied (PCT)
                             “Tunable capacitor based on
                             multilayer nonlinear dielectric”


13.11.12                                               CONFIDENTIAL                                                       13
Patent application plan



                       1st year                                           2nd year


  1. PCT application                                   6. PCT application
  “Control loop design for the RF tunable matching     “Tunable RF filter based on integrated LTCC and
  circuit”                                             multilayer nonlinear dielectric technology”
  2. PCT application                                   7. PCT application
  “Phased array antenna for the automotive radar”      “Tunable RF coupler based on integrated LTCC
                                                       and multilayer nonlinear dielectric technology”
  3. PCT application
  “BAW duplexer based on the multilayer nonlinear      8. PCT application
  dielectric structure”                                “Tunable RF generator based on integrated LTCC
                                                       and multilayer nonlinear dielectric technology”
  4. PCT application
  “BAW impedance tuner”                                9. PCT application
                                                       “Tunable power divider based on integrated LTCC
  5. PCT application                                   and multilayer nonlinear dielectric technology”
  “Method of LTCC and multilayer nonlinear
  dielectric technology integration”                   10. PCT application
                                                       “Power amplifier tuner based on integrated LTCC
                                                       and multilayer nonlinear dielectric technology”



13.11.12                                      CONFIDENTIAL                                           14
Products
Broad spectrum of products based on multilayer nonlinear
           dielectric varactor chips

               Core product
                                     Multilayer nonlinear
                                  dielectric-metal structure
                                            (MND)

                                                                           Integrated products


  Electronically scanned
                                  Adaptive matching circuits       Tunable bulk acoustic wave
   antenna modules for
                                  for mobile phones, mobile          (BAW) filters for mobile
     automotive radars              computers and tablets                   devices
and communication systems



                       New class of voltage tunable RF components
             §  Tunable filters                       §  Tunable power dividers
             §  Tunable couplers                      §  Phase shifters
             §  Tunable generators                    §  Power amplifier tuners



13.11.12                                CONFIDENTIAL                                       16
Market call for adaptive matching circuit (product 1)


Ø  The output power and radiation efficiency of a mobile phone with
    a compact narrow-band antenna can be greatly degraded by large
    mismatches resulting from the user's hand position.

Ø  Since multi-mode, multiband phones with densely packed radios
    and future MIMO antennas will only make next generation designs
    even more problematic, antennas need to be less sensitive to
    their environment.

Ø  Adaptive antenna tuners dynamically change antenna impedance
    using a feedback controller so it is always tuned for maximum
    efficiency. In these modules, a detector measures the transmitted
    RF signal and an algorithm derives the mismatch information from
    the phase of the matched input impedance and calculates any
    necessary changes for the adaptive matching circuit.

Ø  Disruption is all well and good when a company is creating a new
    smartphone category, but Apple had a problem on its hands when
    its iPhone's antenna reception experienced disruption in the
    hands of its customers.




                       “Divine Innovation: 10 Technologies Changing
                       the Future of Passive and Control Components”
                       Nov, 2011




13.11.12                                                CONFIDENTIAL    17
LG request for development of adaptive matching circuit (market
           call confirmation)




13.11.12                         CONFIDENTIAL                           18
Adaptive matching circuit. Operational principle


                  Adaptive Matching Circuit

                                                                                             Unknown load
    Matched                                   Impedance transformer                             (antenna)

                      Impedance
                        sensor
From Amplifier


                      Controller
                                                                                       Mismatch




                                                                                                            Output
 Ø  Tuning elements are basic building blocks for
                                                             Input
     adaptive impedance matching circuits

 Ø  Electronically controllable varactors are most
     practical and convenient tuning elements for
     providing tunability in RF/microwave circuits           U control
                                                                         Varactor Impedance transformer


13.11.12                                      CONFIDENTIAL                                                    19
Adaptive matching circuit design for entrance to the market


  3-D schematic of adaptive matching module                          Chip	
  selfcos,	
  Euro	
  cents	
                                                                  6,6	
  
                                                                     	
  	
                                                                                               	
  	
  
                                                                     BOM	
  	
                                                                                            2,8	
  
   Proposed varactor chips (based on multilayer nonlinear
                                                                     processing	
  materials:	
  coa0ng	
  lack,	
  developing	
  chemicals,	
  stripping	
  and	
  
   dielectric structure)                                             cleaning	
  materials	
  
                                                                                                                                                                          1,3	
  

                                                                     substrate	
  sapphire,	
  4	
  inches	
                                                              1,3	
  
                                                                     dielectric	
  targets	
  (Ba,Sr)TiO3	
                                                               0,01	
  
                                                                     Pt	
  target	
  (contact	
  layer)	
                                                                 0,04	
  
                                                                     Gold	
  for	
  upper	
  contact	
                                                                    0,1	
  
                                                                     Oxigen	
  for	
  deposi0on	
  process	
                                                              0,01	
  
                                                                     Argon	
  for	
  deposi0on	
  process	
                                                               0,03	
  
                                                                     	
  	
                                                                                               	
  	
  
                                                                     Labor	
  cost	
                                                                                      3,1	
  
                                                                     Equipment	
  deprecia@on	
  cost	
                                                                   0,7	
  


                                                                   Module	
  for	
  MC	
  selfcost,	
  Euro	
  cents	
                                                 111	
  
                                                                   	
  	
                                                                                              	
  	
  
                                                                   BOM	
                                                                                               94,4	
  
                                                                   chips	
  (4	
  pcs)	
                                                                               26,4	
  
                                                                   diode	
  MW	
                                                                                       8,0	
  
                                                                   coil	
  for	
  MW	
                                                                                 4,0	
  
                                                                   microcontroller	
                                                                                   50,0	
  
           Multilayer substrate with integrated passive            capacitors	
  for	
  uC	
  	
                                                                       2,0	
  
           elements                                                resistors	
                                                                                         4,0	
  
                                                                   	
  	
                                                                                              	
  	
  
                                                                   Labor	
  cost	
                                                                                     16	
  
                                                                   Equipment	
  deprecia@on	
  cost	
                                                                  1,1	
  



13.11.12                                                  CONFIDENTIAL                                                                                                               20
Electronically scanned antenna modules (product 2)


                Two different type of products based on the same technology




                                                         Automotive radar (24GHz/77GHz), used for
                                                         emergency brake assist, collision warning, adaptive
                                                         cruise control, blind spot detection




Satellite broadcasting systems (10.95 - 13.5 GHz)



13.11.12                                            CONFIDENTIAL                                         21
Anti-collision radars

                 Existing radars                                 We suggest radar of the future -
                                                                electronically scan and multi beam




                                                            LETI prototype



77 GHz and 24 GHz Sensors
Applications:
§  Adaptive Cruise Control
§  Emergency Brake Assist                                                   Main advantages:
                                                      §     High speed and wide angle of scan
                                                      §     Reliability due to the lack of mechanical moving parts
At present time there are only the non-scan or the    §     Combining short range and long range radars in one
                                  Camera Sensors             package – reduce size and number of units in the
mechanical scanning systems on the commercial
market which are very cost-intensive and not                 system
                                                      §     Integrated technology of aperture and control circuit
robust solution.
                                                      §     Low cost


13.11.12                                       CONFIDENTIAL                                                      22
Scanned antenna for communication systems

    State of the art - mechanically scanned             LETI prototype of Ka-band phased array
                    antennas                                           antenna




                                                      Consist of 16 coplanar waveguide ND phase
                                                                         shifters




                                                             30GHz thin film ND phase shifter

13.11.12                                      CONFIDENTIAL                                        23
Tunable BAW filters in mobile devices (product 3)

           Traditional mobile phone           Proposed mobile                          Voltage controlled switching and
                   front-end                  phone front-end                          tuning of frequency band (Novel
                           Four filters                                                feature, no analogues)
                                                                       Tunable
                                                                      BAW filter


            Antenna                           Antenna
             Switch                            Switch
            Module
                                              Module                                      4 in 1 - cost saving
                                                                                             system design




                                                                              BAW filters application
                                                         Wi-Fi,
                                                          BT
  Advantages of BAW technology:

                                               GPS                                         Wi-Fi
  ü High power handling capability
  ü High quality factor                       GSM,
  ü Miniaturization                          WCDMA



                                          1          2            3       4        5        6   Freq. GHz

13.11.12                                       CONFIDENTIAL                                                           24
BAW - operational principle

           Well-known tunable capacitive structures on the base of nonlinear dielectric

                 E = EDC + EMW
                                                                                    Induced piezoelectic
Ме                                                                                  behavior is a negative
                             ND                                                     phenomena for MW
                                                                                    tunable devices
            Substrate




                              Suppression of
                             piezoresonances
                             due to use of two-
                               layer ND film
                                 structure




                           [J. Oakes, A. Kozyrev, A. Prudan et al. Patent Application US2008/0232023]

13.11.12                                             CONFIDENTIAL                                            25
Knowhow in tunable acoustic devices based on multilayer
           nonlinear dielectric structure

                                                                    Two-layers structure
                                                          Me

                                                          Me                ND           Edc
                                                                                               UMW
                                                          Me                ND           Edc




                         [A. Kozyrev, A. Prudan et al.
                         Patent RU №2397607]




                                                                         switching	
  
 Application to each layer of EDC of the same or
 opposite direction results in the excitation of the
 antisymmetrical or symmetrical modes respectively.


13.11.12                                             CONFIDENTIAL                                    26
Validation (present time results)
Phase Array Antennas


Ø  The principal product based on one layer structure designed and manufactured by our team is Phase Array
    Antennas.

Ø  Based on our phase array antennas new product like radars with electronically scanning on frequencies up
    to 80 GHz can be designed. The use of phase array antennas will completely eliminate the use of
    expensive mechanical systems in the production of automotive radar

Ø  It can be also used in communication systems for transferring signals in wide range of frequencies on long
    distance, for example transferring video and audio signals. It can be used also for transferring signal on
    moving objects.




13.11.12                                            CONFIDENTIAL                                            28
Transferring video signal on the distance 50 km




13.11.12                             CONFIDENTIAL            29
The progress of our team in Phase Array Antenna design

                               Ø  More than 20 years of experience in design of phased array
                                   antennas for frequency ranges up to 80 GHz.

                               Ø  2001 R&D 100 Award for technology of Electronically
                                   Scanning Antenna, which have been included in the list of 100
                                   best technical-science works of USA in 2001 year.

                               Ø  A set of prototypes and engineering samples is developed




13.11.12                              CONFIDENTIAL                                            30
Structure and device parameters.


The key knowhow in device manufacturing is knowhow on the level of chip and structure growth. It is so due to
the fact that set of structure parameters fully determine the end device parameters. And the quality of the
device is fully determined by quality of film deposition process and chip topology. Below in the table a
correlation between device and structural parameters is presented

                                Structure parameters                                     Device parameters
 Stoichiometry (variation of film composition during the growth process). In the case
 of fixed film stoichiometry the tunability drops under temperature variations in         Ø  Tunability
 operating temperature range. In order to get rid of this effect it is necessary to
 change the stoichiometry of the film as it grows. From the other hand the                Ø  Quality factor
 stoichiometry variation allows dramatically reduce the number of defects on the              (losses)
 interface electrode/nonlinear dielectric due to reduction of the mismatch of crystal
 lattice constant that in turn results in quality improvement.                            Ø  Tuning Speed
 Stoichiometry variation of film composition during the growth process is one
 of our main knowhow.
 Number of nonlinear dielectric layers. Only multilayer structures allow to combine
                                                                                           Power handling
 both important features in one device: to reduce control voltages and to achieve
                                                                                           capability
 high power handling capability.
 The thickness of a layer. The reducing of layers thickness provides the reducing
                                                                                            Bias Voltage
 of control voltages
 Chip topology. The unique chip topology leads to losses reduction and increasing
                                                                                        Quality factor (losses)
 of quality factor (Q). The unique chip topology is our main knowhow also.


 13.11.12                                            CONFIDENTIAL                                               31
Validation of temperature stability


    Stoichiometry of the structure largely determines the dependence of
    capacitance on temperature. Dependence of capacitance on
    temperature is a negative effect because it reduces tunability.

    At present time we have obtained two layers structure with gradient
    stoichiometry that demonstrates high temperature stability of
    capacitance and due to that higher tunability.


                  Temperature dependence of capacitance
   0,5
                                                                                   Experimental two layers structure obtained by
                          One layer                                                                  our team
   0,4
                                                             Two layer

   0,3                                                                         The effective changing of stoichiometry by pressure is
C, pF




                                      E=0 V/mkm
                                                                               possible only in unique designed technological vacuum
   0,2                                                                         chamber (that is completely unique and patented by
                                                                               founders).
   0,1
                                        E=40 V/mkm                             For modeling of spattering and deposition processes
                                                                               the unique math model and computer simulation tool
        0
                                                                               are elaborated and licensed by founders.
            240     260     280   300     320    340   360     380       400
                                          T, K

    13.11.12                                                              CONFIDENTIAL                                           32
Validation of power handling capability


For correct device operation it is necessary that device capacitance varies under bias voltage only and doesn’t
depend on microwave power.

To experimental validation of device linearity, semiconductor and ferroelectric capacitive elements have been
placed in resonance chamber. The peak on the curve of frequency dependence of transmission coefficient
(S21) depends on capacitance value. If the capacitance value doesn’t depend on microwave power the peak on
the curve remain sharp (curve 1). If the capacitance value changes under microwave power the resonance
peak shifts to the higher frequency area (curve 2).

At present time we can demonstrate very good power handling capability value
(independence of capacitance on microwave power) for one layer structure (curve 1).
Resonance curves for different ferroelectric (one
              layer) elements
  S21, dB

     -15                                                        The next step of the project – to obtain the
                               1
     -20                                                        multilayer structure that posses good
                                         2
     -25                                                        power handling capability value that is a
     -30                                                        result of multiplexing of obtained result for
     -35                                                        one-layer structure.
     -40

     -45


            2,4 2,5   2,6   2,7 2,8   2,9 3,0   3,1 f, GHz


13.11.12                                                     CONFIDENTIAL                                    33
Validation of tuning speed


Tuning speed is one of the main parameters that define the behavior of the device such as response sensitivity.
The tuning speed depends on quality of the interface electrode/nonlinear dielectric. The less number of defects
the more fast response. The number of defects in turns could be dramatically reduce by stoichiometry
variation. The quality of interface electrode/nonlinear dielectric can be validated by tuning speed.

At the present time we obtain laboratory prototype of phase shifter that demonstrate perfect phase response
(tuning speed) that is less than 5 nanosec.


                   Control pulse and phase response of the ferroelectric phase shifter


                                         5 ns                                                        0.5 mks
                                                                                             µ
                                                                                           control pulse




                                                                                           phase response




13.11.12                                            CONFIDENTIAL                                              34
Validation of tunability and quality factor


Tunability and quality factor are the main parameters that define the behavior of the device such dynamical
operating range and insertion losses. The higher tunability the wider operating range. The less bias voltage the
better and bias voltage in its turn depends on dielectric film thickness. The thinner film the less bias voltage.

At the present time we obtain laboratory prototype of one layer capacitive elements that demonstrate perfect
quality factor and good tunability. The next step of the project – to obtain the multilayer structure that posses
the same tunabilty but at the lower bias voltage and the same quality factor values that are a result of
multiplexing of obtained results for one-layer structure.



               The dependence of capacitance on bias voltage             The dependence of quality factor on bias voltage
         1,2                                                             150
                                                                                            Quality
          1                                                                                factor at
                                                                         125
         0,8                                                                                1,5 GHz
                                                      One layer
                                                   (experimental)
C/C(0)




         0,6                                                             100
                                                                                                               One layer
         0,4
                                                                                                            (experimental)
                                      Multilayer                          75
         0,2                         (expected)

          0                                                               50
               -15    -10    -5      0        5         10          15         0       5               10      15            20
                                  U, V                                                             U, V
13.11.12                                                       CONFIDENTIAL                                                  35
Test fixture for tunability, quality factor and power handling
             capability validation

Our team have created measuring devices, which allow
measuring main parameters of nonlinear structures with
previously unattainable precision. The test devices are
patented. The measurement technique is licensed.

This accuracy allows to distinguish the subtle changing of
multilayer structure parameters that is necessary for growth
control. The measurement accuracy of quality factor is
demonstrated on the figure below.

    Comparison of measurement accuracy

Q
       f = 3 GHz                           Measurement
                                           Accuracy of Agilent
                                           E4991A Analyzer at
                                           3 GHz



                                           Measurement
                                           Accuracy of Q-test
                                           fixture proposed
                                           at 3 GHz




                                    U, V


13.11.12                                             CONFIDENTIAL             36
Test fixture for switching time characterization


 Our team have created device for switching time
 characterization. The IP rights on this device are                The test fixture features:
 protected.
                                                          Ø  measurements of switching time from
 This device was implemented in two companies –               minutes down to 1ns under pulses with
 Gennum and Paratek.                                          amplitude up to 5kV is available;

                                                          Ø  small error of measurements of
                                                              dynamical (pulse) C-V characteristics.
                                                              Registration of C-variation with 0.1%
                                                              scale;

                                                          Ø  measurements of switching time of
                                                              ferroelectric bulk and film capacitors;

                                                          Ø  measurements of dynamical (pulse) CV
                                                              characteristics
Place of the
varactor                                                  Ø  observation of hysteresis loops from dc
installation under                                            up to 500MHz frequencies
pressing
                                                          Ø  measurements of dynamical polarization
                                                  MW          process in ferroelectrics and linear
                                                  ports
                                                              dielectrics
              Pulse or
              DC ports

 13.11.12                                    CONFIDENTIAL                                               37
Project goals and estimated results
Project resume

              Objectives: DINItex develops and plans to produce revolutionary tunable multi-layer non-linear dielectric chips
              and modules based on them for the wide range of RF applications including smart phones, mobile computers,
              automotive active safety systems
              Products:
              Ø  2013 - Antenna modules for mobile devices
              Ø  2014 - High effective and low-cost automotive anti-collision radars and communication systems
              Ø  2015 - Novel generation of tunable acoustic devices, which shall exchange actual filter banks in smart mobile
                  applications by a single chip
              Ø  2015+ - New class of voltage tunable RF components
                       •  Tunable filters
                       •  Tunable couplers
                       •  Tunable generators
                       •  Tunable power dividers
                       •  Phase shifters
                       •  Power amplifier tuners
              Market:
              Ø  1 B of mobile phones yearly
              Ø  0,5 B mobile computers and tablets yearly,
              Ø  50 M of autos yearly
              Business strategy:
              Ø  To become a global supplier of building blocks for the world's leading mobile phones, computers with a strong IP
                  portfolio
              Ø  To enter the market by proving the unique position of the technology through intensive JDPs with the major players
                  like Nokia, Apple, etc and major suppliers of automotive radar and antennas electronics
              Ø  To provide multiple return to Series A investor(s) by “trade sale” after the product is accepted by the market
              Ø  To provide multiple return to Series B investor(s) by setting up high volume manufacturing company with a significant
                  and stream of revenue and wide customer range, production can be ramped up through partnership and OEM
              Exits opportunities:
                       2014+ : deal with Rusnano or other strategic investor
                       2014+ : trade sale to blue chips in Mobile phones, computer industries and leaders of automotive electronics
                       2016+ : IPO


13.11.12                                            CONFIDENTIAL                                                                  39
Value chain

      Functional
                                     Chip                         SMD                      Module
        layers                                                                                             End device
                                  processing                   assembling                 packaging
      deposition




                                                                                                          Ø  Mobile phones
                                                                                                              and smartphones

                                                          Surface Mounting of          Antenna module     Ø  Notebooks,
  Functional layers           Multilayer structure                                     assembling and
                                                           chips and rest of                                  netbooks, tablets
       growth                     processing                                             packaging
                                                              components

                                                                                                          Ø  Automotive anti-
Vertical integration allows                                                                                   collision radars
      Ø  significantly reduce costs at every level of production                                             and
      Ø  maximize the efficiency of production of the final product                                          communication
      Ø  maximum control over product quality                                                                systems
      Ø  achieve rapid and cyclical introduction of innovative solutions, infrastructure optimization,
          harmonization of business processes, technologies and competences                               Ø  Multimedia
      Ø  most effectively develop and adapt consumer electronic modules                                      devices
The results:
      Ø  reducing costs and selling price                                                                Ø  Microwave and
      Ø  independence from suppliers of intermediate goods                                                   RF high power
                                                                                                              devices

13.11.12                                                    CONFIDENTIAL                                                         40
Smartphones global market (adaptive matching circuit and BAW
                         applications)

                Smartphone global market, M pcs.                                     Ø  The worldwide smartphone market grew 42.6% year over year
                                                                                         in the third quarter of 2011 (3Q11), despite a slowdown within
                                                                        1 710
                                                                                         key mature markets. According to the International Data
                                                             1 439                       Corporation (IDC) vendors shipped 118.1 million units in 3Q11
                                                                                         compared to 82.8 million units in the 3Q10.
                                                     1 189
                                                                                     Ø  The smartphones share at mobile phone market shall grow up
                                         975                                             to 50% in 2017.
                             798                                                     Ø  IDC expects smartphones sales rise to 975 million in 2015
                  654
                                                                                     Ø  IMS Research expects 800 million smartphone to sell or 35% of
       503
                                                                                         the mobile handset market. They predict this figure will rise
                                                                                         to over 1 billion in
                                                                                     Ø  Morgan Stanley Research estimates sales of smartphones will
                                                                                         exceed those of PCs in
      2012       2013       2014         2015        2016    2017       2018
                                                                                     Top Five Mobile Phone Vendors
 Source: Gartner, Inc.
                                    Market shares
                                                                                     Ø  Samsung became the new leader in the worldwide
                                                                                         smartphone market
                                                                                     Ø  Apple, after taking the number one spot last quarter from
                                                                Samsung                  Nokia, slipped to the number two spot worldwide
                                               20%
                                                                Apple                Ø  Nokia maintained its third place position on the strength of
                         30,60%
                                                                                         its Symbian phones.
                                                                Nokia
                                                                                     Ø  HTC moved up one spot and maintained its upward
                                                14,50%          HTC                      momentum during 3Q11.
                                                                RIM                  Ø  RIM (Research In Motion) began shipping its new BB OS 7
                          10%                                                            smartphones to the market during 3Q11, including updated
                                          14,20%                Others
                                10,80%                                                   versions of the BlackBerry Bold, BlackBerry Curve, and the
                                                                                         BlackBerry Torch.
Source: International Data Corporation (IDC)


  13.11.12                                                                      CONFIDENTIAL                                                            41
PC global market (adaptive matching circuit and BAW
                   applications)

                             PC market, M pcs                                   Ø  The latest mobile PC forecast from DisplaySearch’s highlights
                                                                                    the impact of changing regional dynamics and the impact on
1 200                                                                               the notebook and tablet PC businesses.
              Tablet PC
1 000
              Notebooks                                                         Ø  Strong growth in shipments of notebook PCs into emerging
  800                                                                               markets will result in these markets passing mature markets in
                                                                        467         2011.
                                                               420
  600
                                                      360
                                              290                               Ø  At the same time, shipments of tablet PCs into mature markets
  400                                226
                             170                                                    continue to lead emerging markets and are expected to
                    125                                                 498
  200       90                                                 450                  throughout the forecast period.
                                     270      300     350
           190      220      250
     0                                                                          Ø  As a result, mobile PC shipments (including notebook, mini-
          2011     2012     2013     2014     2015    2016    2017     2018
                                                                                    note and tablet PCs) are expected to grow at double-digit rates
 Source: Quarterly Mobile PC Shipment and Forecast Report, NPD Display Search       through 2017, at which time shipments will reach nearly 800
                             PC market shares                                       million units, up from 277 million in 2011 and tablet PC will get
                                                                                    about 45% of sales.

                                                                                Ø  The tablet PC category expanded its role in the mobile PC
                                                             Apple                  market. The Y/Y shipment growth rate for tablets in 2011
                                    21,10%                   HP
                                                                                    reached 256%.
                 33,90%
                                                             Dell               Ø  The main assumptions behind the latest forecast are that as
                                            15%              Acer Group             PC penetration rates rise in emerging markets, first time buyers
                                                                                    are going to look to notebooks for the performance. At the
                                                             Lenovo
                                                                                    same time, the convenience of tablet PCs with their instant-on,
                                   11,60%
                          10,90%                             other                  long battery life and portable form factors will be a welcome
           7,50%
                                                                                    platform for existing PC owners.
Source: Quarterly Mobile PC Shipment and Forecast Report, NPD Display Search


 13.11.12                                                                 CONFIDENTIAL                                                             42
Automotive market (Electronically scanned antenna modules for
                       automotive radars and communication systems)	
  

                           Automotive market, M pcs.                                   Ø  We are focusing on the vehicles equipped with active
                                                                          114              safety features like short-, mid- and long range radars
                                                                105
                                                        96
                                             88                                        Ø  Actually the only high-end automobiles are being equipped
                                       81                                                  with active safety features, but the tendency shows rapid
                             74
                  67                                                                       introduction of the features into low-end cars and is driven
       60                                                                                  by the car safety regulations in EU, US and Japan

                                                                                       Ø  Thus analytics expect significant growth of the radar
                                                                                           segment of automotive market.

                                                                                       Ø  It is predicted that the size of that segment shall be about
                                                                                           50 million pcs in 2018
      2011       2012      2013       2014   2015      2016     2017      2018
 Source: Plunkett Research, Ltd.

                           Automotive market shares            General                                            Autoradar market, M pcs.
                                                               Motors
                                                                14%
                                                                                                                                                     49

                                                                                                                                             40

                                  Others                                                                                            32
                                   34%            Toyota
                                                                                                                            25
                                                   12%
                                                                                                                     19
                                                    Ford
                                                     9%                Honda                            12
                                                                        6%                  7
                Nissan                                        Chrysler
                  7%                                            3%
                         Volkswagen                 Daimler                               2012        2013          2014    2015   2016      2017   2018
                             12%                      3%                        Source: Plunkett Research, Ltd.
Source: Plunkett Research, Ltd.

  13.11.12                                                               CONFIDENTIAL                                                                     43
Business targets and strategy

  Strategy:

  Ø  To become a global supplier of building blocks for the world's leading mobile phones and computers with a strong IP portfolio;
  Ø  To enter the market by proving the unique position of the technology through intensive JDPs with the major players like Nokia,
      Apple, etc and major suppliers of automotive radar and antennas electronics;
  Ø  To provide multiple return to Series A investor(s) by “trade sale” after the product is accepted by the market;
  Ø  To provide multiple return to Series B investor(s) by setting up high volume manufacturing company with a significant and
      stream of revenue and wide customer range, production can be ramped up through partnership and OEM

   Stage I: Prototyping and technology                            Stage II: Mass production 2014-2018 (and further)
   commercialization 2012-2013
                                                                  Ø  To conquer at least 10% market share of HF tunable
   Ø  To continue technology development                             device
   Ø  To protect IP by filing of 10-15 patent applications       Ø  Become cash positive in 2015
   Ø  To create prototypes of three main products                Ø  To reach 500M yearly turnover
   Ø  To sign a contract with one of the leading manufacture     Ø  To provide 45% gross margin
       of mobile phones or mobile computers.                      Ø  To provide 30% EBITDA
                                                                  Ø  To provide IRR 50%




 2012-2013                                          2014               2015                                   2018

   Financing – VCF + Grants                                              Financing – Strategic Investor + Grants

   Investments needed – 5M Euro                                          Investments needed – 74 M Euro

   The company value in 2013 is 40M Euro                                 The company value in 2018 is 1,5B Euro


13.11.12                                                CONFIDENTIAL                                                            44
Exit strategy options

*  Various promising exit options even at early stage

 2012
                    2012-2013
 Funding
                                               2013
                    Equipment set-up
                    Proof of concept/         Market introduction
                    Implement process                                                          IPO
                                              Alliances with leaders       Trade sale
                    Process fine tuning       on the mobile and
                                                                         to blue chip in
                                              automotive devices
                                              market                    Mobile phones
                                                                         and computer
                                              Pilot line                  industries or
                                                                       automotive leader

                                                                                                 Volume
                                               Optional:                                        Ramp-up
                                               Deal with
                                          RUSNANO or other
                                           Strategic Investor
                                                                                Volume
                                                                               Ramp-up




      Prototyping and technology commercialization                           Mass production


13.11.12                                            CONFIDENTIAL                                      45
Project plan and mile stones

                     2012                 2013               2014                 2015                 2016                2017                2018
              I      II   III   IV   I   II   III   IV   I   II    III   IV   I   II   III   IV    I   II   III   IV   I   II   III   IV   I   II   III   IV


              Ramp up of
              R&D
              activity

Equipment is installed
       Ramp up is completed

                          Technological                           Chips mass production in Landshut on rented              Mass production at own
                          parameters optimization                 facilities                                               plant



              IP protection
                                                                                                  SOP at own plant

                  Set up of supply chain


                            Prototype of products                                                                          Mass production at own
                                                             Modules mass production in Russia facilities
                                                                                                                           plant


                                     Customer
                                     presentatio
                                     n of
                                     products
                                                                                                                                               IPO
                                                                              Building up own factory for
           Agreement with potential customer                                  all production steps
                about long term cooperation

            Prototyping and                                                                  Mass production
           commercialization
13.11.12                                                            CONFIDENTIAL                                                                               46
Technology commercialization and Pilot line in Landshut
           2012-2014
                           Machinery and equipment are provided on a leasing basis, thus saving costs and
                           reducing entrepreneurial risk:

                           Ø  customized physical laboratories & clean rooms
                           Ø  reactors
                           Ø  lithography equipment
                           Ø  chip processing equipment
                           Ø  analytical and test equipment


                                  Functional
                                                                 Chip                     Module
                                    layers
                                                              processing                  design
                                  deposition

                           Developing of               Developing of chip        Module design and
                           epitaxial technology        processing technology     prototype assembling



                            §  The whole value chain technology developing

                            §  Integration with the main worldwide known manufactures of end products

                                   Ø  Mobile phones
                                   Ø  Mobile computers
                                   Ø  Automotive applications

                            •  IP protection and holder of IP rights


13.11.12                              CONFIDENTIAL                                                          47
Mass Production


                                                           2014-2016
   Germany (Landshut)                                                            Germany + Russia (St. Petersburg)

       Functional                                                                  SMD                       Module
                                       Chip
         layers                                                                 assembling                  packaging
                                    processing
       deposition
Ø  The production line shall be located in the rented foundry       Ø  Till the ramping up of own factory in 2017 the assembling
    at Landshut till 2016                                                lines shall be located in the rented facilities in Russia
         §  due to the lack of clean room facilities and
             infrastructure for them in Russia                       Ø  Final product shall be produced in Russia with the chips
         §  to optimize cost and supply chain of the chip               supplied out of front-end facility in Landshut
             production
Ø  Pilot line shall continue working rented facilities              Ø  Head quarter of the Company shall be located in Russia
Ø  Sales/purchasing office is partly located in Landshut to
    provide optimal interface to potential customers/ suppliers.     Ø  R&D department is located in the head quarter.
Ø  Total number of reactors is 11
Ø  Total number of lithography lines is 4                           Ø  R&D activities with focus on new product development
                                                                         based on the similar chip technology

                                                        Since 2017 …
     Functional layers                                                                                       Module
                                        Chip processing                SMD assembling
        deposition                                                                                          packaging

                          By 2016 the own factory for whole production chain shall be completed in Russia
                                           Since 2017 all products are made in Russia

13.11.12                                                  CONFIDENTIAL                                                         48
Team

    §  One of the world strongest team in microwave device development originates from St.-Petersburg Electrotechnical
        University, Russia, with the unique synergy of material science specialists and radio engineering experts combined
        since years in one research group.
    §  The team members own more than 30 issued patent and more than 200 publications in the field;
    §  Team core (10 people) is a perfect combination of young talents, experienced mid-age experts and gurus. Average age
        is about 35 years old;
    §  More than 50% of team staff have a PhD grade

                          Prof. Dr. Andrey B. Kozyrev,
                                                                                         Dr. Denis Bychkovsky
                          co-founder, Electronic engineer (1968), Ph.D
                                                                                         co-founder, graduated from Ioffer Institute of
                          (1974), Full professor       (1990) of the
                                                                                         Russian Academy of Science, author of row
                          Department of Electronics and the head of the
                                                                                         scientific publications and patents in the field
                          Microwave Laboratory. Last 25 years his
                                                                                         of solid state physics, highly experienced in
                          general research interests have been in field
                                                                                         project management, proven successful
                          of microwave electronics. He has more than
                                                                                         records of several start-up’s
                          200 publications in scientific journals and
                          more than 30 patents in Russia and abroad.



                         Dr. Anatoly K. Mikhaylov,
                                                                                         Vitaly N. Osadchy, Lead of direction
                         Lead of direction “BAW”.
                                                                                         “matching circuits & radars”.
                         co-founder, Electronic engineer in 2005 and
                                                                                         co-founder, Electronic engineer (1994). Main
                         PhD in 2010. He has 18 publications and 7
                                                                                         focus: constructing and experimental testing
                         Russian patents. He won the first prize for the
                                                                                         of controlling devises and phased array
                         best young scientist’s paper at the 6th
                                                                                         antennas for microwave applications. He has
                         International conference MMA-2010 (Warsaw,
                                                                                         over 60 publications in scientific journals and
                         Poland, 2010). Winner of «President’s of
                                                                                         8 patents. 2001 R&D 100 Award for
                         Russia grant for young doctors of philosophy».
                                                                                         technology of Electronically Scanning
                                                                                         Antenna.


13.11.12                                                    CONFIDENTIAL                                                             49
Background and current status of work

Ø  Ion-plasma deposition technology for thin film Me/
    FE/Me structures with suitable MW parameters is
    elaborated;
Ø  Main associated technological operations (buffer
    layer deposition, lithography, etching etc.) are
    elaborated;
Ø  The set of new technological approaches is
    developed;
Ø  Special MW test-fixtures to provide the control of
    MW elements during and after their producing are
    elaborated, certificated and are in practical use in
    Russia and abroad;
Ø  The theoretical analysis of parameters of new
    devices on the base of multilayer structures is done;
Ø  The set of prototypes of MW devices, which are the
    base to develop the generation of new class of
    devices is elaborated.

  The high qualification level of Lab’s stuff is confirmed by the following data:

  Ø  2001 R&D 100 Award for technology of Electronically Scanning Antenna, which have been included in the list of 100 best
      technical-science works of USA in 2001 year (together with colleagues from NREL (USA) and Paratek Microwave Inc.
      (USA)).
  Ø  In accordance with data of MEMS Investor Journal (May 2008) the laboratory “is one of the four laboratories taking leading
      position in the World in area of tunable microwave ferroelectric devices”.
  Ø  Eight USA governments (DOE) grants and more than 30 foreign contracts, among them National Renewable Energy Lab
      (USA), Gennum (Canada), Paratek Microwave Inc (USA)
  Ø  Microwave Year Prize at 27th European Microwave Conference (Jerusalem, 1997), first prize of MMA-2010 (Microwave
      Materials and Application) for the best work of young scientist (Warsaw, 2010).

13.11.12                                                    CONFIDENTIAL                                                       50
Partners


                  London Imperial College is consistently rated amongst the world's best universities and it is a
                  science-based institution with a reputation for excellence in teaching and research. It has a very
                  strong basement for nonlinear dielectric research.


                  Micronova is Finland's National Research Infrastructure for micro- and nanotechnology, jointly
                  run by VTT Technical Research Centre of Finland and Aalto University. Micronova's expertise
                  covers the entire micro-nano innovation chain, from basic device physics and materials research to
                  the development of new fabrication techniques and device prototypes, and even small scale
                  manufacturing.

                  Forschungszentrum Jülich GmbH (Jülich Research Centre) is a member of the Helmholtz
                  Association of German Research Centers and one of the largest research center in Europe.
                  Research at Jülich is divided into four research areas: health, information, environment, and
                  energy. The key competencies of physics and scientific computing provide the basis for world-
                  class research in these areas


                  Fraunhofer-Gesellschaft, the largest organization for applied research in Europe. More than 80
                  research units, including 60 Fraunhofer Institutes, at different locations in Germany. The majority of
                  more than 20,000 staff are qualified scientists and engineers. €1.8 billion annual research budget
                  totaling.


                   Saint Petersburg Electrotechnical University "LETI" (ETU) is considered as one of the world
                   largest education and research centers in Radio Engineering, Electrical Engineering, Electronics
                   and Computer Science.




13.11.12                                       CONFIDENTIAL                                                            51
List of potential Referents

                               Professor York's research involves applying new materials advances to RF and power electronics. His
                               group is developing high-power/high-efficiency electronics using wide band-gap (GaN) semiconductor
            University of
                               technology, building on extensive expertise at UCSB in this area. He is co-director of the ONR MURI
Professor   California at                                                                                                                     rayork@ece.ucsb.
                               Center MINE (Millimeter-wave Initiative for Nitride Electronics). He is also a pioneer in applying thin-
Bob York    Santa Barbara,
                               film ferroelectric technology for use in frequency-agile RF/wireless systems. He was awarded an IEEE                 edu
            CA, USA
                               MTT-S Outstanding Young Engineer Award in 2004, and received an Office of Naval Research Young
                               Investigator Award in 1996. (Publications: 211; Citations: 2714; G-Index: 44; H-Index: 27)

                               Head of Department of Materials
                               He is a member of the Electrical Engineering RAE panel, sits on the Advisory Board of Cambridge
                               Massachusetts Institute, the Advisory Board, Antenova Ltd, a member of the DTI Working Group for
Professor
            Imperial College   the Quantum Metrology Programme at NPL and he is a consultant on technical programmes for the                  n.alford@imperia
Neil McN.
Alford
            London             Gatsby Charitable Foundation. He is a fellow of the Institute of Physics, the Institute of Materials,                l.ac.uk
                               Minerals and Mining and a fellow of the Institution of Engineering and Technology. He is an associate
                               editor for the Journal of the American Ceramic Society. He has over 200 journal publications and is
                               the author of 21 patents. (G-Index: 23; H-Index: 12)

            Microwave and
                               Since 1998, he has been a Professor with Chalmers University of Technology. Since 1996, he has
            High Speed
                               also worked part time with Ericsson Microwave Systems AB (currently Ericsson AB), Mölndal,
            Electronics
                               Sweden. He has authored or coauthored over 300 papers and conference presentations. He holds
Professor   Research
                               over 30 patents/patent applications. His research interests are physics, design, and experimental              spartak.gevorgian
Spartak     Center, Ericsson
Gevorgian   AB;
                               investigation of microwave devices and components based on ferroelectrics, silicon RF integrated                 @chalmers.se
                               circuits (RFICs) and monolithic microwave integrated circuits (MMICs), microwave photonic devices
            Chalmers
                               (optically controlled components), and modeling of passive coplanar components based on conformal
            University of
                               mapping. (G-Index: 21; H-Index: 12)
            Technology


            Ecole              Tagantsev is a theoretician of a broad domain of expertise from ferroelectricity and phonon physics to
            Polytechnique      electrodynamics of superconductors. He is the author of key results on the theory of microwave
Professor
            Fédérale de        materials, dielectric polarization in crystalline materials, and relaxor ferroelectricity. He is also known    alexander.tagants
Alexander
Tagantsev
            Lausanne           in the field ferroelectric thin films for elucidating works on the polarization switching and degradation in      ev@epfl.ch
            (EPFL),            these systems. He authored or co-authored more than 200 articles (cited some 6000 times) and a
            Switzerland        comprehensive book on ferroic domains. (G-Index: 17; H-Index: 9)



13.11.12                                                            CONFIDENTIAL                                                                            52

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Din itex 10_09_2012

  • 1. Multilayer nonlinear dielectric devices for RF mobile communications … improvement of performance of smartphones and mobile computers (save power and extend operating time and reduce harmful effect on human body) … cost saving design for automotive radars and communication systems … broad spectrum of tunable RF devices to exchange the traditional non-tunable ones DINItex, Ladshut-Saint-Petersburg, June 2012
  • 2. Industry pain and our proposition
  • 3. Industry pain Cell phone and mobile computers: Taking the phone in hand, we create Modern cell phone is a very multifunctional interference to signal transmission device, it is considered to support several frequency bands, providing Bluetooth, Wi-Fi, Antenna is LTE communications. All of those systems mismatched require bandpass filters or filter banks. It is with amplifier. Battery Amplifier faster clear, that the reduction of area occupied by increases signal discharged filters provides more free space for new power function. filters Antennas actually used in smart mobile devices like cell phones do not have automatic tuning of its impedance. Thus, impedance of antenna is being affected by human body parts like, for instance, hands. Impedance variations leads to mismatch between antenna and amplifier. Modern cell phones compensates this effect by providing a higher power to the amplifier output signal resulting to a reduction of stand alone time up two times. Anti-collision radars and communication systems: up to now commercial solutions on the market are based only on mechanical scanning of antenna beam or on an array of non-scan antennas, which are very cost-intensive and not robust solutions. 13.11.12 CONFIDENTIAL 3
  • 4. Solutions: integrated products based on multilayer nonlinear dielectric varactor chips Core technology for different RF Electronically applications scanned antenna Adaptive matching modules for circuits for mobile automotive radars phones, mobile and communication computers and tablets systems multilayer nonlinear dielectric- metal structure (MND) Advantages of the products: Tunable bulk ü save power acoustic wave ü extend operating time (BAW) filters for ü cost saving system design mobile devices ü reduce harmful effect on human body 13.11.12 CONFIDENTIAL 4
  • 5. Comparison of technological approaches for varactor chips Current varactor technologies fall into three major categories: Only Nonlinear dielectric- based Ø  semiconductor-based varactor diodes Ø  Micro-electromechanical system (MEMS) varactors elements provide the best Ø  nonlinear dielectric-based varactors performance and low cost. Semiconductor Micro- electromechanical Nonlinear dielectric-based Parameters varactors (MEMS) elements Power Handling ~0.01 W ~0.1 W ~1 W Tuning Speed ~1 ns ~ 1 mks ~1 ns Bias Voltage ~5V ~50V ~5V Quality Factor ~100 ~250 ~100 Tunability ~4 ~10 ~3 Life time 5 years < 1 year 5 years Advantages: Main drawback: The high power handling low power handling Main drawbacks: capability in combination with capability (high level of high bias voltage and high the relatively low bias voltage intermodulation packaging cost provide the best performance distortions) and low cost. 13.11.12 CONFIDENTIAL 5
  • 6. State of the art nonlinear dielectric technology and main unsolved problems Ø  For mobile applications it is very important to have a high power Planar structure handling capability (more than 30dBm) with low control voltage (3V) simultaneously. Ø  At present time there are two different approaches to design of nonlinear dielectric film devices - planar structure and parallel-plate structure based on only one layer of nonlinear dielectric. High control voltages and high power handling capability Ø  Planar structure provides high power handling capability (30dBm) but needs for that high control voltages (more than 400V). It requires step Parallel-plate structure up voltage converters that is not acceptable for mobile devices. Ø  From the other hand, parallel-plate structure is controlled by low voltages (5-30V) but has low power handling capability (5-10dBm) which is not enough for the operation of RF amplifier in mobile device. Low control voltages and low Ø  The devices based on one dielectric layer are being developed by power handling capability Agile RF (USA) and nGimat (USA). Ø  Only multilayer structures allow to combine both important features in Two-layers parallel-plate structure one device: to reduce control voltages and to achieve high power handling capability. Ø  At present time only one company (Paratek) produces devices based on two layers of nonlinear dielectric. These devices provide power Low control voltages and high power handling capability 30dBm (that is acceptable) and the control voltage handling capability about 20V and that is still high and still takes the DC-DC converters. 06.04.2012 CONFIDENTIAL 6
  • 7. The technology validation Ø  Paratek is developing the most likely technology. It discovered a different approach to RF tuning using a thin-film material called ParaScan™ (nonlinear dielectric). Proprietary to Paratek, ParaScan is used to produce the ParaTune™ family of tunable integrated circuits (ICs). Ø  An advantage of Paratek’s products is low-loss tuning over a wide range of impedances, ultra-fast response time, and industry-standard packaging which allows new generation of wireless products to perform better and more efficiently. Ø  The significant contribution to the development of Paratek’s technology was made by a group of Professor Kozyrev, who is one of the founders of DINItex. His group is the author of 15 patents that partly covers IP property in this field and were sold to Paratek in 2002-2008. During this period of time prof. Kosyrev’s group provided the material researches and prototyping of Results of Joint research Kozyrev’s Lab microwave devices for Paratek. and Paratek: Ø  In March of 2012 Paratek Microwave Inc. was acquired by one ü 2001 R&D 100 Award of 100 best main producers of smartphones – RIM (owner of trade mark technical-science works of USA BlackBerry that takes only 10% of smartphones market). That means that since that time Paratek is developing RF tuning for RIM only. ü 15 US Patents Ø  DINItex is the company which researches are open for the rest ü Over 40 publications in scientific journals of the market that still contains 90%. and conferences proceedings Ø  DINItex’s researchers independently developed additional advantages in technology and designed a range of new devices. ü 8 grants of US Department of Energy 06.04.2012 CONFIDENTIAL 7
  • 8. Knowhow and new approach
  • 9. Knowhow on the structure level Ø The reduction of control voltages is possible only due to reduction of Me/BSTO/…../Substrate film thickness. But it leads to drop in power handling capability. For two layer structure with 3V control voltages the power handling capability is only 20dBm that is not enough for mobile applications. Ø To keep 30dBm power handling capability it is possible to increase the number of layers with parallel reduction of their thicknesses. Ø The required number of nonlinear dielectric layers is 8-12. Ø The required thickness of each layer shell be less than 100nm. Ø The reduction of nonlinear dielectric film thickness is constrained by low-tuning layer on the metal-dielectric interface due to mismatch of crystal lattice constants. This problem becomes the most dominant with increase of layers number. Ø Up to now this problem for bottom electrode materials with low losses Substrate at microwaves (with high conductivity, like Pt or Au) is not solved. Our knowhow in thin film deposition technique provides the solution for described problem Ø  The principal: changing stoichiometry of dielectric at the initial growth stage allows to reduce the mismatch of crystal lattice constant. Ø  The effective changing of stoichiometry by pressure is possible only in unique designed technological vacuum chamber (that is completely unique and patented by founders). Ø  For modeling of spattering and deposition processes the unique math model and computer simulation tool are elaborated and licensed by founders. 13.11.12 CONFIDENTIAL 9
  • 10. Knowhow on chip design level Ø  At the chip level the other main problem exists: excitation of acoustic waves leads to dramatical increase of microwave losses (reduction of Q-factor). Ø  The two layer structure allows the cancellation of transverse acoustic modes (founders are the co-authors of patent application, owned to Paratek). However, the excitation of longitudinal acoustic waves is still a problem at present time. Ø  Besides, the high level of operation microwave power takes an effective heat sink. Our knowhow on chip level design ~ 1 mm C, pF provides the solution for The image cannot be displayed. Your computer may not have enough memory to open the image, or the image may have been corrupted. Restart your computer, and then open the file again. If the red x still appears, you may have to delete the image and then insert it again. Capacitance mentioned problems: variation under DC in microwave signal Special shape of top electrodes RF in RF out ~ 1 mm provides both cancellation of Capacitance longitudinal acoustic wave variation under DC control generation and more efficient heat voltage dissipation [PCT application is preparing] U, V 13.11.12 CONFIDENTIAL 10
  • 11. Knowhow on tunable BAW filter design Ø At present time BAW filters based on traditional RF piezoelectric materials (AlN, ZnO) are in active development and use. BAW filters can operate up to around 10GHz and provide the combination of high quality RF parameters (insertion loss, reliability, sizes). Piezoelectric Ø BAW filters made of the above materials can be electronically tuned to a specified frequency by using a varactor diode or by utilizing the second-order nonlinearity of the piezomaterial. Ø However the frequency tuning in such a structures is not more than 3%. Our knowhow of tunable BAW filter design provides the solution of mentioned problem Edc Ø Proposed BAW filter consists of several layers of nonlinear dielectric. The Edc sign of piezoelectric coefficient of each layer depends on direction of control E-field. Edc Ø The principal: biasing of each nonlinear dielectric layer with EDC of the same or opposite direction results in the excitation of the antisymmetrical Edc or symmetrical acoustic modes respectively. Ø Frequency tuning up to 100% is possible. The principal of acoustic mode switching is completely unique and patented by founders. Ø For modeling of acoustic wave excitation the unique math model and computer simulation tool are elaborated and licensed by founders. 13.11.12 CONFIDENTIAL 11
  • 12. New complex approach into technology of distributed nonlinear dielectric structures for phased array antennas Ø  More than 20 years of experience in design of Absence of phased array antennas for frequency ranges up to 60 residual GHz. polarization due to oxygen Ø  2001 R&D 100 Award for technology of Electronically annealing and Scanning Antenna, which have been included in the special regimes list of 100 best technical-science works of USA in of electrodes 2001 year. deposition Distributed Improvement of High structural quality nonlinear dielectric tanδ due to of nonlinear dielectric cancellation of films due to the structures for transversal and unique math model automotive radar longitudinal and software of (77GHz) and acoustic wave spattering and communication generation [PCT deposition processes (10GHz) phased application is [PCT application is array antennas preparing] preparing] Theoretical and experimental Licensed technique investigations of and test-fixtures for pure strontium RF characterization titanate films with of nonlinear relatively low loss dielectric structures in W-band 13.11.12 CONFIDENTIAL 12
  • 13. IP list 7 released patents; 4 patent applications Chip design and Design Chip technology Product design testing simulation 1. Russian patent 3. Russian Patent N2397607, 7. Russian Patent 10. Patent application to be N2434078. 20.11.2011 17.07.2009 N2361360, 12.05.2008 applied (PCT) “Method of complex oxide “Ferroelectric acoustic “Tunable pulse former made “SW simulation Kit for ferroelectric thin film resonator and its resonance on non-linear ferroelectric simulation of process deposition based ion- frequency tuning technique” transmission lines” parameters at ion etching plasma sputtering and ion plasma sputtering” technique” 4. Russian Patent N2367964, 8. Russian Patent 04.04.2008 N2355080, 24.05.2007 “Coaxial resonator for “Microwave active module” 11. Russian Patent 2. Patent application to be applied (PCT) Capacitor Quality factor N2012610179 measurements” 9. Russian Patent “SW design kit for resonance “Method of increasing the N2350008, 04.05.2007 tunability of ultrathin electro-acoustical 5. Patent application to be “Method of thermal to phenomena modelling in ferroelectric films” electrical energy conversion applied (PCT) multilayer structures” “Tunable bulk acoustic wave and a device for it” filter based on nonlinear dielectric films” 6. Patent application to be applied (PCT) “Tunable capacitor based on multilayer nonlinear dielectric” 13.11.12 CONFIDENTIAL 13
  • 14. Patent application plan 1st year 2nd year 1. PCT application 6. PCT application “Control loop design for the RF tunable matching “Tunable RF filter based on integrated LTCC and circuit” multilayer nonlinear dielectric technology” 2. PCT application 7. PCT application “Phased array antenna for the automotive radar” “Tunable RF coupler based on integrated LTCC and multilayer nonlinear dielectric technology” 3. PCT application “BAW duplexer based on the multilayer nonlinear 8. PCT application dielectric structure” “Tunable RF generator based on integrated LTCC and multilayer nonlinear dielectric technology” 4. PCT application “BAW impedance tuner” 9. PCT application “Tunable power divider based on integrated LTCC 5. PCT application and multilayer nonlinear dielectric technology” “Method of LTCC and multilayer nonlinear dielectric technology integration” 10. PCT application “Power amplifier tuner based on integrated LTCC and multilayer nonlinear dielectric technology” 13.11.12 CONFIDENTIAL 14
  • 16. Broad spectrum of products based on multilayer nonlinear dielectric varactor chips Core product Multilayer nonlinear dielectric-metal structure (MND) Integrated products Electronically scanned Adaptive matching circuits Tunable bulk acoustic wave antenna modules for for mobile phones, mobile (BAW) filters for mobile automotive radars computers and tablets devices and communication systems New class of voltage tunable RF components §  Tunable filters §  Tunable power dividers §  Tunable couplers §  Phase shifters §  Tunable generators §  Power amplifier tuners 13.11.12 CONFIDENTIAL 16
  • 17. Market call for adaptive matching circuit (product 1) Ø  The output power and radiation efficiency of a mobile phone with a compact narrow-band antenna can be greatly degraded by large mismatches resulting from the user's hand position. Ø  Since multi-mode, multiband phones with densely packed radios and future MIMO antennas will only make next generation designs even more problematic, antennas need to be less sensitive to their environment. Ø  Adaptive antenna tuners dynamically change antenna impedance using a feedback controller so it is always tuned for maximum efficiency. In these modules, a detector measures the transmitted RF signal and an algorithm derives the mismatch information from the phase of the matched input impedance and calculates any necessary changes for the adaptive matching circuit. Ø  Disruption is all well and good when a company is creating a new smartphone category, but Apple had a problem on its hands when its iPhone's antenna reception experienced disruption in the hands of its customers. “Divine Innovation: 10 Technologies Changing the Future of Passive and Control Components” Nov, 2011 13.11.12 CONFIDENTIAL 17
  • 18. LG request for development of adaptive matching circuit (market call confirmation) 13.11.12 CONFIDENTIAL 18
  • 19. Adaptive matching circuit. Operational principle Adaptive Matching Circuit Unknown load Matched Impedance transformer (antenna) Impedance sensor From Amplifier Controller Mismatch Output Ø  Tuning elements are basic building blocks for Input adaptive impedance matching circuits Ø  Electronically controllable varactors are most practical and convenient tuning elements for providing tunability in RF/microwave circuits U control Varactor Impedance transformer 13.11.12 CONFIDENTIAL 19
  • 20. Adaptive matching circuit design for entrance to the market 3-D schematic of adaptive matching module Chip  selfcos,  Euro  cents   6,6           BOM     2,8   Proposed varactor chips (based on multilayer nonlinear processing  materials:  coa0ng  lack,  developing  chemicals,  stripping  and   dielectric structure) cleaning  materials   1,3   substrate  sapphire,  4  inches   1,3   dielectric  targets  (Ba,Sr)TiO3   0,01   Pt  target  (contact  layer)   0,04   Gold  for  upper  contact   0,1   Oxigen  for  deposi0on  process   0,01   Argon  for  deposi0on  process   0,03           Labor  cost   3,1   Equipment  deprecia@on  cost   0,7   Module  for  MC  selfcost,  Euro  cents   111           BOM   94,4   chips  (4  pcs)   26,4   diode  MW   8,0   coil  for  MW   4,0   microcontroller   50,0   Multilayer substrate with integrated passive capacitors  for  uC     2,0   elements resistors   4,0           Labor  cost   16   Equipment  deprecia@on  cost   1,1   13.11.12 CONFIDENTIAL 20
  • 21. Electronically scanned antenna modules (product 2) Two different type of products based on the same technology Automotive radar (24GHz/77GHz), used for emergency brake assist, collision warning, adaptive cruise control, blind spot detection Satellite broadcasting systems (10.95 - 13.5 GHz) 13.11.12 CONFIDENTIAL 21
  • 22. Anti-collision radars Existing radars We suggest radar of the future - electronically scan and multi beam LETI prototype 77 GHz and 24 GHz Sensors Applications: §  Adaptive Cruise Control §  Emergency Brake Assist Main advantages: §  High speed and wide angle of scan §  Reliability due to the lack of mechanical moving parts At present time there are only the non-scan or the §  Combining short range and long range radars in one Camera Sensors package – reduce size and number of units in the mechanical scanning systems on the commercial market which are very cost-intensive and not system §  Integrated technology of aperture and control circuit robust solution. §  Low cost 13.11.12 CONFIDENTIAL 22
  • 23. Scanned antenna for communication systems State of the art - mechanically scanned LETI prototype of Ka-band phased array antennas antenna Consist of 16 coplanar waveguide ND phase shifters 30GHz thin film ND phase shifter 13.11.12 CONFIDENTIAL 23
  • 24. Tunable BAW filters in mobile devices (product 3) Traditional mobile phone Proposed mobile Voltage controlled switching and front-end phone front-end tuning of frequency band (Novel Four filters feature, no analogues) Tunable BAW filter Antenna Antenna Switch Switch Module Module 4 in 1 - cost saving system design BAW filters application Wi-Fi, BT Advantages of BAW technology: GPS Wi-Fi ü High power handling capability ü High quality factor GSM, ü Miniaturization WCDMA 1 2 3 4 5 6 Freq. GHz 13.11.12 CONFIDENTIAL 24
  • 25. BAW - operational principle Well-known tunable capacitive structures on the base of nonlinear dielectric E = EDC + EMW Induced piezoelectic Ме behavior is a negative ND phenomena for MW tunable devices Substrate Suppression of piezoresonances due to use of two- layer ND film structure [J. Oakes, A. Kozyrev, A. Prudan et al. Patent Application US2008/0232023] 13.11.12 CONFIDENTIAL 25
  • 26. Knowhow in tunable acoustic devices based on multilayer nonlinear dielectric structure Two-layers structure Me Me ND Edc UMW Me ND Edc [A. Kozyrev, A. Prudan et al. Patent RU №2397607] switching   Application to each layer of EDC of the same or opposite direction results in the excitation of the antisymmetrical or symmetrical modes respectively. 13.11.12 CONFIDENTIAL 26
  • 28. Phase Array Antennas Ø  The principal product based on one layer structure designed and manufactured by our team is Phase Array Antennas. Ø  Based on our phase array antennas new product like radars with electronically scanning on frequencies up to 80 GHz can be designed. The use of phase array antennas will completely eliminate the use of expensive mechanical systems in the production of automotive radar Ø  It can be also used in communication systems for transferring signals in wide range of frequencies on long distance, for example transferring video and audio signals. It can be used also for transferring signal on moving objects. 13.11.12 CONFIDENTIAL 28
  • 29. Transferring video signal on the distance 50 km 13.11.12 CONFIDENTIAL 29
  • 30. The progress of our team in Phase Array Antenna design Ø  More than 20 years of experience in design of phased array antennas for frequency ranges up to 80 GHz. Ø  2001 R&D 100 Award for technology of Electronically Scanning Antenna, which have been included in the list of 100 best technical-science works of USA in 2001 year. Ø  A set of prototypes and engineering samples is developed 13.11.12 CONFIDENTIAL 30
  • 31. Structure and device parameters. The key knowhow in device manufacturing is knowhow on the level of chip and structure growth. It is so due to the fact that set of structure parameters fully determine the end device parameters. And the quality of the device is fully determined by quality of film deposition process and chip topology. Below in the table a correlation between device and structural parameters is presented Structure parameters Device parameters Stoichiometry (variation of film composition during the growth process). In the case of fixed film stoichiometry the tunability drops under temperature variations in Ø  Tunability operating temperature range. In order to get rid of this effect it is necessary to change the stoichiometry of the film as it grows. From the other hand the Ø  Quality factor stoichiometry variation allows dramatically reduce the number of defects on the (losses) interface electrode/nonlinear dielectric due to reduction of the mismatch of crystal lattice constant that in turn results in quality improvement. Ø  Tuning Speed Stoichiometry variation of film composition during the growth process is one of our main knowhow. Number of nonlinear dielectric layers. Only multilayer structures allow to combine Power handling both important features in one device: to reduce control voltages and to achieve capability high power handling capability. The thickness of a layer. The reducing of layers thickness provides the reducing Bias Voltage of control voltages Chip topology. The unique chip topology leads to losses reduction and increasing Quality factor (losses) of quality factor (Q). The unique chip topology is our main knowhow also. 13.11.12 CONFIDENTIAL 31
  • 32. Validation of temperature stability Stoichiometry of the structure largely determines the dependence of capacitance on temperature. Dependence of capacitance on temperature is a negative effect because it reduces tunability. At present time we have obtained two layers structure with gradient stoichiometry that demonstrates high temperature stability of capacitance and due to that higher tunability. Temperature dependence of capacitance 0,5 Experimental two layers structure obtained by One layer our team 0,4 Two layer 0,3 The effective changing of stoichiometry by pressure is C, pF E=0 V/mkm possible only in unique designed technological vacuum 0,2 chamber (that is completely unique and patented by founders). 0,1 E=40 V/mkm For modeling of spattering and deposition processes the unique math model and computer simulation tool 0 are elaborated and licensed by founders. 240 260 280 300 320 340 360 380 400 T, K 13.11.12 CONFIDENTIAL 32
  • 33. Validation of power handling capability For correct device operation it is necessary that device capacitance varies under bias voltage only and doesn’t depend on microwave power. To experimental validation of device linearity, semiconductor and ferroelectric capacitive elements have been placed in resonance chamber. The peak on the curve of frequency dependence of transmission coefficient (S21) depends on capacitance value. If the capacitance value doesn’t depend on microwave power the peak on the curve remain sharp (curve 1). If the capacitance value changes under microwave power the resonance peak shifts to the higher frequency area (curve 2). At present time we can demonstrate very good power handling capability value (independence of capacitance on microwave power) for one layer structure (curve 1). Resonance curves for different ferroelectric (one layer) elements S21, dB -15 The next step of the project – to obtain the 1 -20 multilayer structure that posses good 2 -25 power handling capability value that is a -30 result of multiplexing of obtained result for -35 one-layer structure. -40 -45 2,4 2,5 2,6 2,7 2,8 2,9 3,0 3,1 f, GHz 13.11.12 CONFIDENTIAL 33
  • 34. Validation of tuning speed Tuning speed is one of the main parameters that define the behavior of the device such as response sensitivity. The tuning speed depends on quality of the interface electrode/nonlinear dielectric. The less number of defects the more fast response. The number of defects in turns could be dramatically reduce by stoichiometry variation. The quality of interface electrode/nonlinear dielectric can be validated by tuning speed. At the present time we obtain laboratory prototype of phase shifter that demonstrate perfect phase response (tuning speed) that is less than 5 nanosec. Control pulse and phase response of the ferroelectric phase shifter 5 ns 0.5 mks µ control pulse phase response 13.11.12 CONFIDENTIAL 34
  • 35. Validation of tunability and quality factor Tunability and quality factor are the main parameters that define the behavior of the device such dynamical operating range and insertion losses. The higher tunability the wider operating range. The less bias voltage the better and bias voltage in its turn depends on dielectric film thickness. The thinner film the less bias voltage. At the present time we obtain laboratory prototype of one layer capacitive elements that demonstrate perfect quality factor and good tunability. The next step of the project – to obtain the multilayer structure that posses the same tunabilty but at the lower bias voltage and the same quality factor values that are a result of multiplexing of obtained results for one-layer structure. The dependence of capacitance on bias voltage The dependence of quality factor on bias voltage 1,2 150 Quality 1 factor at 125 0,8 1,5 GHz One layer (experimental) C/C(0) 0,6 100 One layer 0,4 (experimental) Multilayer 75 0,2 (expected) 0 50 -15 -10 -5 0 5 10 15 0 5 10 15 20 U, V U, V 13.11.12 CONFIDENTIAL 35
  • 36. Test fixture for tunability, quality factor and power handling capability validation Our team have created measuring devices, which allow measuring main parameters of nonlinear structures with previously unattainable precision. The test devices are patented. The measurement technique is licensed. This accuracy allows to distinguish the subtle changing of multilayer structure parameters that is necessary for growth control. The measurement accuracy of quality factor is demonstrated on the figure below. Comparison of measurement accuracy Q f = 3 GHz Measurement Accuracy of Agilent E4991A Analyzer at 3 GHz Measurement Accuracy of Q-test fixture proposed at 3 GHz U, V 13.11.12 CONFIDENTIAL 36
  • 37. Test fixture for switching time characterization Our team have created device for switching time characterization. The IP rights on this device are The test fixture features: protected. Ø  measurements of switching time from This device was implemented in two companies – minutes down to 1ns under pulses with Gennum and Paratek. amplitude up to 5kV is available; Ø  small error of measurements of dynamical (pulse) C-V characteristics. Registration of C-variation with 0.1% scale; Ø  measurements of switching time of ferroelectric bulk and film capacitors; Ø  measurements of dynamical (pulse) CV characteristics Place of the varactor Ø  observation of hysteresis loops from dc installation under up to 500MHz frequencies pressing Ø  measurements of dynamical polarization MW process in ferroelectrics and linear ports dielectrics Pulse or DC ports 13.11.12 CONFIDENTIAL 37
  • 38. Project goals and estimated results
  • 39. Project resume Objectives: DINItex develops and plans to produce revolutionary tunable multi-layer non-linear dielectric chips and modules based on them for the wide range of RF applications including smart phones, mobile computers, automotive active safety systems Products: Ø  2013 - Antenna modules for mobile devices Ø  2014 - High effective and low-cost automotive anti-collision radars and communication systems Ø  2015 - Novel generation of tunable acoustic devices, which shall exchange actual filter banks in smart mobile applications by a single chip Ø  2015+ - New class of voltage tunable RF components •  Tunable filters •  Tunable couplers •  Tunable generators •  Tunable power dividers •  Phase shifters •  Power amplifier tuners Market: Ø  1 B of mobile phones yearly Ø  0,5 B mobile computers and tablets yearly, Ø  50 M of autos yearly Business strategy: Ø  To become a global supplier of building blocks for the world's leading mobile phones, computers with a strong IP portfolio Ø  To enter the market by proving the unique position of the technology through intensive JDPs with the major players like Nokia, Apple, etc and major suppliers of automotive radar and antennas electronics Ø  To provide multiple return to Series A investor(s) by “trade sale” after the product is accepted by the market Ø  To provide multiple return to Series B investor(s) by setting up high volume manufacturing company with a significant and stream of revenue and wide customer range, production can be ramped up through partnership and OEM Exits opportunities: 2014+ : deal with Rusnano or other strategic investor 2014+ : trade sale to blue chips in Mobile phones, computer industries and leaders of automotive electronics 2016+ : IPO 13.11.12 CONFIDENTIAL 39
  • 40. Value chain Functional Chip SMD Module layers End device processing assembling packaging deposition Ø  Mobile phones and smartphones Surface Mounting of Antenna module Ø  Notebooks, Functional layers Multilayer structure assembling and chips and rest of netbooks, tablets growth processing packaging components Ø  Automotive anti- Vertical integration allows collision radars Ø  significantly reduce costs at every level of production and Ø  maximize the efficiency of production of the final product communication Ø  maximum control over product quality systems Ø  achieve rapid and cyclical introduction of innovative solutions, infrastructure optimization, harmonization of business processes, technologies and competences Ø  Multimedia Ø  most effectively develop and adapt consumer electronic modules devices The results: Ø  reducing costs and selling price Ø  Microwave and Ø  independence from suppliers of intermediate goods RF high power devices 13.11.12 CONFIDENTIAL 40
  • 41. Smartphones global market (adaptive matching circuit and BAW applications) Smartphone global market, M pcs. Ø  The worldwide smartphone market grew 42.6% year over year in the third quarter of 2011 (3Q11), despite a slowdown within 1 710 key mature markets. According to the International Data 1 439 Corporation (IDC) vendors shipped 118.1 million units in 3Q11 compared to 82.8 million units in the 3Q10. 1 189 Ø  The smartphones share at mobile phone market shall grow up 975 to 50% in 2017. 798 Ø  IDC expects smartphones sales rise to 975 million in 2015 654 Ø  IMS Research expects 800 million smartphone to sell or 35% of 503 the mobile handset market. They predict this figure will rise to over 1 billion in Ø  Morgan Stanley Research estimates sales of smartphones will exceed those of PCs in 2012 2013 2014 2015 2016 2017 2018 Top Five Mobile Phone Vendors Source: Gartner, Inc. Market shares Ø  Samsung became the new leader in the worldwide smartphone market Ø  Apple, after taking the number one spot last quarter from Samsung Nokia, slipped to the number two spot worldwide 20% Apple Ø  Nokia maintained its third place position on the strength of 30,60% its Symbian phones. Nokia Ø  HTC moved up one spot and maintained its upward 14,50% HTC momentum during 3Q11. RIM Ø  RIM (Research In Motion) began shipping its new BB OS 7 10% smartphones to the market during 3Q11, including updated 14,20% Others 10,80% versions of the BlackBerry Bold, BlackBerry Curve, and the BlackBerry Torch. Source: International Data Corporation (IDC) 13.11.12 CONFIDENTIAL 41
  • 42. PC global market (adaptive matching circuit and BAW applications) PC market, M pcs Ø  The latest mobile PC forecast from DisplaySearch’s highlights the impact of changing regional dynamics and the impact on 1 200 the notebook and tablet PC businesses. Tablet PC 1 000 Notebooks Ø  Strong growth in shipments of notebook PCs into emerging 800 markets will result in these markets passing mature markets in 467 2011. 420 600 360 290 Ø  At the same time, shipments of tablet PCs into mature markets 400 226 170 continue to lead emerging markets and are expected to 125 498 200 90 450 throughout the forecast period. 270 300 350 190 220 250 0 Ø  As a result, mobile PC shipments (including notebook, mini- 2011 2012 2013 2014 2015 2016 2017 2018 note and tablet PCs) are expected to grow at double-digit rates Source: Quarterly Mobile PC Shipment and Forecast Report, NPD Display Search through 2017, at which time shipments will reach nearly 800 PC market shares million units, up from 277 million in 2011 and tablet PC will get about 45% of sales. Ø  The tablet PC category expanded its role in the mobile PC Apple market. The Y/Y shipment growth rate for tablets in 2011 21,10% HP reached 256%. 33,90% Dell Ø  The main assumptions behind the latest forecast are that as 15% Acer Group PC penetration rates rise in emerging markets, first time buyers are going to look to notebooks for the performance. At the Lenovo same time, the convenience of tablet PCs with their instant-on, 11,60% 10,90% other long battery life and portable form factors will be a welcome 7,50% platform for existing PC owners. Source: Quarterly Mobile PC Shipment and Forecast Report, NPD Display Search 13.11.12 CONFIDENTIAL 42
  • 43. Automotive market (Electronically scanned antenna modules for automotive radars and communication systems)   Automotive market, M pcs. Ø  We are focusing on the vehicles equipped with active 114 safety features like short-, mid- and long range radars 105 96 88 Ø  Actually the only high-end automobiles are being equipped 81 with active safety features, but the tendency shows rapid 74 67 introduction of the features into low-end cars and is driven 60 by the car safety regulations in EU, US and Japan Ø  Thus analytics expect significant growth of the radar segment of automotive market. Ø  It is predicted that the size of that segment shall be about 50 million pcs in 2018 2011 2012 2013 2014 2015 2016 2017 2018 Source: Plunkett Research, Ltd. Automotive market shares General Autoradar market, M pcs. Motors 14% 49 40 Others 32 34% Toyota 25 12% 19 Ford 9% Honda 12 6% 7 Nissan Chrysler 7% 3% Volkswagen Daimler 2012 2013 2014 2015 2016 2017 2018 12% 3% Source: Plunkett Research, Ltd. Source: Plunkett Research, Ltd. 13.11.12 CONFIDENTIAL 43
  • 44. Business targets and strategy Strategy: Ø  To become a global supplier of building blocks for the world's leading mobile phones and computers with a strong IP portfolio; Ø  To enter the market by proving the unique position of the technology through intensive JDPs with the major players like Nokia, Apple, etc and major suppliers of automotive radar and antennas electronics; Ø  To provide multiple return to Series A investor(s) by “trade sale” after the product is accepted by the market; Ø  To provide multiple return to Series B investor(s) by setting up high volume manufacturing company with a significant and stream of revenue and wide customer range, production can be ramped up through partnership and OEM Stage I: Prototyping and technology Stage II: Mass production 2014-2018 (and further) commercialization 2012-2013 Ø  To conquer at least 10% market share of HF tunable Ø  To continue technology development device Ø  To protect IP by filing of 10-15 patent applications Ø  Become cash positive in 2015 Ø  To create prototypes of three main products Ø  To reach 500M yearly turnover Ø  To sign a contract with one of the leading manufacture Ø  To provide 45% gross margin of mobile phones or mobile computers. Ø  To provide 30% EBITDA Ø  To provide IRR 50% 2012-2013 2014 2015 2018 Financing – VCF + Grants Financing – Strategic Investor + Grants Investments needed – 5M Euro Investments needed – 74 M Euro The company value in 2013 is 40M Euro The company value in 2018 is 1,5B Euro 13.11.12 CONFIDENTIAL 44
  • 45. Exit strategy options *  Various promising exit options even at early stage 2012 2012-2013 Funding 2013 Equipment set-up Proof of concept/ Market introduction Implement process IPO Alliances with leaders Trade sale Process fine tuning on the mobile and to blue chip in automotive devices market Mobile phones and computer Pilot line industries or automotive leader Volume Optional: Ramp-up Deal with RUSNANO or other Strategic Investor Volume Ramp-up Prototyping and technology commercialization Mass production 13.11.12 CONFIDENTIAL 45
  • 46. Project plan and mile stones 2012 2013 2014 2015 2016 2017 2018 I II III IV I II III IV I II III IV I II III IV I II III IV I II III IV I II III IV Ramp up of R&D activity Equipment is installed Ramp up is completed Technological Chips mass production in Landshut on rented Mass production at own parameters optimization facilities plant IP protection SOP at own plant Set up of supply chain Prototype of products Mass production at own Modules mass production in Russia facilities plant Customer presentatio n of products IPO Building up own factory for Agreement with potential customer all production steps about long term cooperation Prototyping and Mass production commercialization 13.11.12 CONFIDENTIAL 46
  • 47. Technology commercialization and Pilot line in Landshut 2012-2014 Machinery and equipment are provided on a leasing basis, thus saving costs and reducing entrepreneurial risk: Ø  customized physical laboratories & clean rooms Ø  reactors Ø  lithography equipment Ø  chip processing equipment Ø  analytical and test equipment Functional Chip Module layers processing design deposition Developing of Developing of chip Module design and epitaxial technology processing technology prototype assembling §  The whole value chain technology developing §  Integration with the main worldwide known manufactures of end products Ø  Mobile phones Ø  Mobile computers Ø  Automotive applications •  IP protection and holder of IP rights 13.11.12 CONFIDENTIAL 47
  • 48. Mass Production 2014-2016 Germany (Landshut) Germany + Russia (St. Petersburg) Functional SMD Module Chip layers assembling packaging processing deposition Ø  The production line shall be located in the rented foundry Ø  Till the ramping up of own factory in 2017 the assembling at Landshut till 2016 lines shall be located in the rented facilities in Russia §  due to the lack of clean room facilities and infrastructure for them in Russia Ø  Final product shall be produced in Russia with the chips §  to optimize cost and supply chain of the chip supplied out of front-end facility in Landshut production Ø  Pilot line shall continue working rented facilities Ø  Head quarter of the Company shall be located in Russia Ø  Sales/purchasing office is partly located in Landshut to provide optimal interface to potential customers/ suppliers. Ø  R&D department is located in the head quarter. Ø  Total number of reactors is 11 Ø  Total number of lithography lines is 4 Ø  R&D activities with focus on new product development based on the similar chip technology Since 2017 … Functional layers Module Chip processing SMD assembling deposition packaging By 2016 the own factory for whole production chain shall be completed in Russia Since 2017 all products are made in Russia 13.11.12 CONFIDENTIAL 48
  • 49. Team §  One of the world strongest team in microwave device development originates from St.-Petersburg Electrotechnical University, Russia, with the unique synergy of material science specialists and radio engineering experts combined since years in one research group. §  The team members own more than 30 issued patent and more than 200 publications in the field; §  Team core (10 people) is a perfect combination of young talents, experienced mid-age experts and gurus. Average age is about 35 years old; §  More than 50% of team staff have a PhD grade Prof. Dr. Andrey B. Kozyrev, Dr. Denis Bychkovsky co-founder, Electronic engineer (1968), Ph.D co-founder, graduated from Ioffer Institute of (1974), Full professor (1990) of the Russian Academy of Science, author of row Department of Electronics and the head of the scientific publications and patents in the field Microwave Laboratory. Last 25 years his of solid state physics, highly experienced in general research interests have been in field project management, proven successful of microwave electronics. He has more than records of several start-up’s 200 publications in scientific journals and more than 30 patents in Russia and abroad. Dr. Anatoly K. Mikhaylov, Vitaly N. Osadchy, Lead of direction Lead of direction “BAW”. “matching circuits & radars”. co-founder, Electronic engineer in 2005 and co-founder, Electronic engineer (1994). Main PhD in 2010. He has 18 publications and 7 focus: constructing and experimental testing Russian patents. He won the first prize for the of controlling devises and phased array best young scientist’s paper at the 6th antennas for microwave applications. He has International conference MMA-2010 (Warsaw, over 60 publications in scientific journals and Poland, 2010). Winner of «President’s of 8 patents. 2001 R&D 100 Award for Russia grant for young doctors of philosophy». technology of Electronically Scanning Antenna. 13.11.12 CONFIDENTIAL 49
  • 50. Background and current status of work Ø  Ion-plasma deposition technology for thin film Me/ FE/Me structures with suitable MW parameters is elaborated; Ø  Main associated technological operations (buffer layer deposition, lithography, etching etc.) are elaborated; Ø  The set of new technological approaches is developed; Ø  Special MW test-fixtures to provide the control of MW elements during and after their producing are elaborated, certificated and are in practical use in Russia and abroad; Ø  The theoretical analysis of parameters of new devices on the base of multilayer structures is done; Ø  The set of prototypes of MW devices, which are the base to develop the generation of new class of devices is elaborated. The high qualification level of Lab’s stuff is confirmed by the following data: Ø  2001 R&D 100 Award for technology of Electronically Scanning Antenna, which have been included in the list of 100 best technical-science works of USA in 2001 year (together with colleagues from NREL (USA) and Paratek Microwave Inc. (USA)). Ø  In accordance with data of MEMS Investor Journal (May 2008) the laboratory “is one of the four laboratories taking leading position in the World in area of tunable microwave ferroelectric devices”. Ø  Eight USA governments (DOE) grants and more than 30 foreign contracts, among them National Renewable Energy Lab (USA), Gennum (Canada), Paratek Microwave Inc (USA) Ø  Microwave Year Prize at 27th European Microwave Conference (Jerusalem, 1997), first prize of MMA-2010 (Microwave Materials and Application) for the best work of young scientist (Warsaw, 2010). 13.11.12 CONFIDENTIAL 50
  • 51. Partners London Imperial College is consistently rated amongst the world's best universities and it is a science-based institution with a reputation for excellence in teaching and research. It has a very strong basement for nonlinear dielectric research. Micronova is Finland's National Research Infrastructure for micro- and nanotechnology, jointly run by VTT Technical Research Centre of Finland and Aalto University. Micronova's expertise covers the entire micro-nano innovation chain, from basic device physics and materials research to the development of new fabrication techniques and device prototypes, and even small scale manufacturing. Forschungszentrum Jülich GmbH (Jülich Research Centre) is a member of the Helmholtz Association of German Research Centers and one of the largest research center in Europe. Research at Jülich is divided into four research areas: health, information, environment, and energy. The key competencies of physics and scientific computing provide the basis for world- class research in these areas Fraunhofer-Gesellschaft, the largest organization for applied research in Europe. More than 80 research units, including 60 Fraunhofer Institutes, at different locations in Germany. The majority of more than 20,000 staff are qualified scientists and engineers. €1.8 billion annual research budget totaling. Saint Petersburg Electrotechnical University "LETI" (ETU) is considered as one of the world largest education and research centers in Radio Engineering, Electrical Engineering, Electronics and Computer Science. 13.11.12 CONFIDENTIAL 51
  • 52. List of potential Referents Professor York's research involves applying new materials advances to RF and power electronics. His group is developing high-power/high-efficiency electronics using wide band-gap (GaN) semiconductor University of technology, building on extensive expertise at UCSB in this area. He is co-director of the ONR MURI Professor California at rayork@ece.ucsb. Center MINE (Millimeter-wave Initiative for Nitride Electronics). He is also a pioneer in applying thin- Bob York Santa Barbara, film ferroelectric technology for use in frequency-agile RF/wireless systems. He was awarded an IEEE edu CA, USA MTT-S Outstanding Young Engineer Award in 2004, and received an Office of Naval Research Young Investigator Award in 1996. (Publications: 211; Citations: 2714; G-Index: 44; H-Index: 27) Head of Department of Materials He is a member of the Electrical Engineering RAE panel, sits on the Advisory Board of Cambridge Massachusetts Institute, the Advisory Board, Antenova Ltd, a member of the DTI Working Group for Professor Imperial College the Quantum Metrology Programme at NPL and he is a consultant on technical programmes for the n.alford@imperia Neil McN. Alford London Gatsby Charitable Foundation. He is a fellow of the Institute of Physics, the Institute of Materials, l.ac.uk Minerals and Mining and a fellow of the Institution of Engineering and Technology. He is an associate editor for the Journal of the American Ceramic Society. He has over 200 journal publications and is the author of 21 patents. (G-Index: 23; H-Index: 12) Microwave and Since 1998, he has been a Professor with Chalmers University of Technology. Since 1996, he has High Speed also worked part time with Ericsson Microwave Systems AB (currently Ericsson AB), Mölndal, Electronics Sweden. He has authored or coauthored over 300 papers and conference presentations. He holds Professor Research over 30 patents/patent applications. His research interests are physics, design, and experimental spartak.gevorgian Spartak Center, Ericsson Gevorgian AB; investigation of microwave devices and components based on ferroelectrics, silicon RF integrated @chalmers.se circuits (RFICs) and monolithic microwave integrated circuits (MMICs), microwave photonic devices Chalmers (optically controlled components), and modeling of passive coplanar components based on conformal University of mapping. (G-Index: 21; H-Index: 12) Technology Ecole Tagantsev is a theoretician of a broad domain of expertise from ferroelectricity and phonon physics to Polytechnique electrodynamics of superconductors. He is the author of key results on the theory of microwave Professor Fédérale de materials, dielectric polarization in crystalline materials, and relaxor ferroelectricity. He is also known alexander.tagants Alexander Tagantsev Lausanne in the field ferroelectric thin films for elucidating works on the polarization switching and degradation in ev@epfl.ch (EPFL), these systems. He authored or co-authored more than 200 articles (cited some 6000 times) and a Switzerland comprehensive book on ferroic domains. (G-Index: 17; H-Index: 9) 13.11.12 CONFIDENTIAL 52