High quality components and sub-assemblies such as: piping, valves, tubing, manifolds, assemblies, and systems are supplied to semiconductor toolmakers and meet the stringent demands of the semiconductor industry. Double packed and produced under cleanroom conditions.
Special features for the semiconductor industry include: minimal dead space in valves and fittings, minimal use of specific lubricants, cleaned and highly polished stainless steel, radial mounting, compression fittings, weld fittings, diaphragm valves, purifiers, mass flow controllers, pressure sensors, specific cleanroom solutions and more!
What Are The Drone Anti-jamming Systems Technology?
Submicron brochure Teesing
1.
2. 2 | TEESING
ABout teesing
technical supplier since 1952
Since 1952 Teesing is `The right connection` as an international supplier of fittings, valves,
tubing, systems and assemblies for industrial applications in four sectors: pneumatics,
hydraulics, instrumentation and transport of media. With offices in the Netherlands (Rijswijk),
U.S.A. (New Jersey), China (Beijing) and Zhubei City (Taiwan) we are globally active in several
specialized niche markets, such as semiconductor, railway, alternative fuels, pharmaceutical
and (Petro)chemical industries.
We supply a complete package of products and services you require for your connection
applications. Through our specialized knowledge of our products and markets we are
capable in responding quickly to all your questions regarding the transport of gases and
liquids to your point of use connection. Thanks to our engineering department we are also
capable of delivering customized products and assemblies that are developed to meet the
specifications of your critical process demands.
• ABout Teesing 2
• WHY TEESING 3
• teesing business units 4
• st introduction 5
• Clean and lean 6
• engineering 7
• Mott 8-9
• saes 10-11
• SETRA 12-13
• SERTO 14-15
• RECTUS 16
• CeLERITY 17
• rotarex 18 -19
• rotarex - gazel 20
• Teesing DEDicated products 21-23
CONTENTS
3. submicron technologies | 3
TEESING
introduction
Why Teesing?
• The International Supplier of high quality connectivity solutions
With offices in Europe, USA and Asia, Teesing can support you all over the world
with a large variety of products.
• Extensive knowledge in application advice
Our experienced sales engineers can advise you on any application.
• Customer focused
We are willing to adapt to customer requirements. We are interested in your specific
application to ensure you acquire the best products and support.
• Flexibility
Teesing has a new warehouse-system to deliver fast and secure. Double packed or
regular.
• Technical supplier for over 60 years
We supply since 1952, Teesing is a solid partner for a large amount of companies
worldwide.
• Innovative engineering department
In close co-operation with the customer and supported by the latest technology, Teesing
can develop the right products and assemblies for your specific requirements.
• In-house Cleanroom in the Netherlands
Teesing has the unique capability to assemble its UHP fittings, hoses, valves, regulators
and tubing in a class 100 cleanroom.
• Global Partnerships
We have exclusive partnerships in Europe, USA and Asia to deliver you the best products
at the right price.
all productssupplied by teesingcan bedouble packedin cleanroom conditionson request
4. 4 | TEESING
TEESING BUSINESS UNITS
introduction
INDUSTrial applications
International supplier of fittings, valves, tubing, systems and
assemblies. Our markets include the (petro)chemical industry,
life science, railways and laboratory applications.
submicron technologies
International supplier of HP/UHP components and assemblies
from source to process. Our markets include the semi-
conductor, mechatronics, photovoltiac and LED industry.
alternative energy
International supplier of components, systems and assemblies
for CNG/H2 projects. Our markets include the automotive and
transport industry and all markets related to alternative energy.
5. submicron technologies | 5
SUBMIcron technologies
introduction
ABOUT TEESing submicron technologies
Teesing supplies components for applications in a wide variety of pro-
ducts, assemblies and systems associated with gases and liquids used
for semiconductor processing. Ranging from cooling systems, bulk
storage gas cabinets, gas monitoring applications, bulk filtration and
purification to point of use gas supply.
Ultra High Purity Components & equipments
High quality components and sub-assemblies such as: piping, valves,
tubing, manifolds, assemblies, and systems are supplied to semicon-
ductor toolmakers and meet the stringent demands of the semiconduc-
tor industry. Double packed and produced under cleanroom conditions.
Special features for the semiconductor industry include: minimal dead
space in valves and fittings, minimal use of specific lubricants, cleaned
and highly polished stainless steel, radial mounting, compression fit-
tings, weld fittings, diaphragm valves, purifiers, mass flow controllers,
pressure sensors, specific cleanroom solutions and more!
“Unique capability to assemble in
class 100 cleanroom”
Leen Nugteren, Business Manager Submicron Technologies:
“As we have a cleanroom on location in the Netherlands, all the products we supply
can be double-packed in clean air, nitrogen or helium. Teesing has the unique
capability to assemble its UHP fittings, hoses, valves, regulators and tubing in a class
100 cleanroom. For small assemblies it is possible to produce class 10.”
6. 6 | TEESING
CLEAN AND LEAN
submicron technologies SERVICES
CLEAN AND LEAN-LIFTS
Teesing has had its own cleanroom for over 10 years, so it can deliver its
products and assemblies clean and double-packed according to client
specific requirements. A number of lean-lifts have been conditioned
and are overpressured; (assembled) products are stored here for our
clients in the semiconductor and mechatronics industries. This system
ensures that cross contamination and movement of particles are kept
to a minimum. The products are stored in a safe and clean manner.
SUPPLY INTEGRITY & EFFICIENCY
Teesing uses an automated system in the product storage process, so
stock level information is updated real-time. Products come to staff
instead of staff having to walk to the items, which makes a considerable
difference in terms of efficiency. Besides the fact that this system saves a
lot of space and time during the logistics process, the risk of making any
incorrect deliveries is significantly reduced.
Teesing cLEANROOM SOLUTIONS
Together with its partners, Teesing can handle anything from a few
samples for prototypes to complete assemblies for volume production.
Cleanliness is tested using UV and Laser technics. Extreme clean dry air
(XCDA) with sub ppb levels of contaminants is used and Teesing has bake-
out capabilities. This ensures minimal particle counts and reduces TOC
levels, in order to deliver sub-systems or components ready for producing
nanotechnologies.
7. submicron technologies | 7
Teesing ENGINEERING
submicron technologies SERVICES
ENGINEERING
In close co-operation with the customer and supported by
the latest technology, Teesing can develop the right products
and assemblies for client specific requirements. Teesing can
also provide additional engineering services like supplying
CAD-files of most of the products.
Consulting
The knowledge of the sales engineers regarding the product
range and the various markets is complemented by the sup-
port of the in-house engineering department. This enables
Teesing to advise its customers in a knowledgeable, compe-
tent manner and to propose appropiate application solutions.
Product Streamlining
Teesing can analyze, optimize and redesign products in
order to guarantee the optimal solution for your application.
If needed the product or assembly can be modified to ensure
the best result.
“We engineer from source to process”
8. 8 | TEESING
MOTT
submicron technologies product range
MOTT
company profile
Mott Corporation (formerly Mott Metallurgical Corporation) was
founded as a Connecticut corporation on July 9, 1959 by Lambert H.
Mott. The company consists of three business segments:
High Purity: Specializing in the rigorous demands of particulate
removal from process gases during semiconductor manufacture.
Process Systems: Combining porous metal filter elements with
hardware, electronics and software to make large-scale, turnkey
systems for large-volume separation of liquids, gases,solids and
slurries.
Specialty Porous: Creating literally any OEM component formed
partially or exclusively of porous metal, in configurations from
simple to complex.
Teesing is the official supplier for all Mott porous metal products in
the Netherlands, Belgium and Luxembourg.
9. submicron technologies | 9
MOTT
submicron technologies product range
mott
filters
GasShield point-of-use filters are available in over 20 standard
designs, constructed of 316L stainless steel, nickel, or Hastelloy
C-22, and rated for flows up to 600 slpm and inlet pressures as
high as 5000 psig. The 100% metal bulk filters are available for
flows up to 25000 slpm and inlet pressures from 400 - 650 psig.
Mott offers a full line of filter and flow restrictor products in de-
signs compatible with the gas system interfaces presently gaining
acceptance in process tools, gas cabinets and valve
manifold box installations. The IGS filters are designed to provide
greater system flexibility coupled with ease of change-out
and reduced maintenance times. Filters are offered in 316L SS,
nickel and Hastelloy C-22 for gas compatibility and range in flow
rates from 10 to 100 liters per minute.
mott
restrictors
Mott also offers High Purity Flow Restrictors, in which porous
metal elements are designed into double-male face seal fittings
to provide consistent, long-lasting, wear- and plug-
resistant flow control – with a minimal footprint to conserve
space.
mott
diffusers
The diffusers of Mott are specially developed for proces chambers
where particle generation is required to be a slow as possible. By
Using the porous metal diffuser a laminiary flow will be main-
tained, which will result in a minimized particle displacement in
the proces chamber.
mott
SPARGERS
To induce CO2 or other gases into a bioreactor it wil increase pro-
ductivity when you use a Mott sparger. Depending on the require-
ments on media grade, face velocity, sparger diameter, liquid and
tanksize we will be able to offer the solution to provide
an optimum environment for biological processes.
10. 10 | TEESING
SAES
submicron technologies product range
SAES
company profile
SAES Pure Gas began production in 1989, with the introduc-
tion of the MonoTorr® gas purifier. As a pioneer in developing
heated getter technology, SAES continues to set the standard
for the market with its superior impurity capacities and longer
purifier lifetimes. In order to meet individual customer requi-
rements and the needs of an increasing technological market,
SAES’s extensive research and development has resulted in
the largest portfolio of gas purifiers available for all gas purifi-
cation needs.
With the introduction of the ambient temperature MicroTorr®
purifier and the MegaTorr® bulk gas purifier, SAES Pure Gas
has models to satisfy a wide range of flow rates and gas
applications.
Teesing is the official supplier for all Saes Pure Gas products
in the Netherlands, Belgium and Luxembourg.
11. submicron technologies | 11
SAES
submicron technologies product range
saes
point of use purifiers
SAES Pure Gas MicroTorr ambient temperature
purifiers are ideal solutions for point-of-use gas
purification.
Gases Purified include: Nitrogen, Rare Gases, Hy-
drogen, Oxygen, CDA, Ammonia, Corrosives, Silane,
Arsine, Phosphine, etc. Flow rates up to 1,000 slpm.
saes
heatED getters
SAES Pure Gas MonoTorr heated getter purifiers are
ideal solutions for point of use purification where CH4
and N2 removal is required.
Gases purified include: Argon, Helium, Nitrogen,
Hydrogen. Flow rates up to 150 slpm.
saes
bulk gas purifiers
SAES Pure Gas offers the MegaTorr, an entire line of
bulk gas purifiers designed for complete facility-level
purification. Gases purified include: Nitrogen, Argon,
Helium, Oxygen, CDA, Hydrogen, Ammonia. Flow
rates up to 20,000 Nm3/hr depending on the gas.
saes
MicroContamination Collection Service
The unique “in-situ” CollectTorr sampling system and
off-line analytical service from SAES Pure Gas have
been developed to provide end-users of leading edge
lithography and inspection/metrology equipment with
a dedicated, simple, and reliable tool for optics
molecular contamination purge gas certification.
Utilizing the solid-state trap-based CollectTorr
Sampling System coupled with state-of-the-art
analytical equipment, parts per trillion (pptV) levels
assessment of molecular acids, bases, refractory and
organic contaminants are successfully achieved..
find the
latest
documentation
on the
download page
on our website
12. 12 | TEESING
SETRA
submicron technologies product range
SETRA
company profile
Setra Systems designs and manufactures a broad line of sensing
products. This includes humidity, current, vacuum, and pressure
sensing instruments, low pressure calibrators, and weighing and
counting scales for a wide variety of applications in the HVAC/R,
Semiconductor, Test & Measurement, Medical, Pharmaceutical,
Barometric, Vacuum, and Industrial markets. Setra has been
designing and manufacturing sensor instruments and products
since 1967, and we are dedicated to lean manufacturing, standard
processes, and continuous improvement.
SETRA
pressure transducers
Setra’s Ultra High Purity Pressure Transducer Models are widely
used in the semiconductor industry and are ideally suited for
high-purity gas delivery systems within semiconductor processes.
Also control applications that require ultra-clean operation, high
throughput performance, and exceptional long-term stability rely
on the pressure transducers from Setra.
Designed with low cavity volume of 0.11 in3, virtually eliminating
particle entrapment, the Ultra High Purity Pressure Transducers
can be easily purged. All wetted parts are 316L VIM/VAR stain-
less steel passivated to 5 Ra (7 Ra. max.) fi nish, which eliminates
surface irregularities and provides the proper surface chemistry for
corrosion resistance, assuring contaminant-free gas distribution.
Versions available in Gauge, Compound and Absolute PSI in Pres-
sure Ranges of -1bar to 200 bar
These Ultra High Purity Pressure Transducers are offered with a 5
VDC,
1 0 V D C o r 4 - 2 0 mA output. A six- foot multiconductor cable or
Bayonet connector is provided for electrical termination.
13. submicron technologies | 13
setra
submicron technologies product range
SETRA
DIGITAL pressure GAUGES
Setra digital pressure gauges offer extremely high accuracy and unmat-
ched stability in a digital output configuration. Environmental monito-
ring and test & measurement systems around the world rely on Setra’s
experience in barometric pressure measurement instrumentation, as well
as high accuracy measurements of higher pressures. Both models utilize
Setra’s unique SETRACERAM ™ sensor, which is combined with advanced
microprocessor based circuitry and sophisticated firmware to provide
system accuracy to better than ± 0.02% full scale.
The LD 330 is a small Local Display designed to be easily installed in-line
between a Setra pressure transducer and the user’s data acquisition
system and power supply. It has a low power consumption 3-1/2 digit ana-
log to digital converter with a Liquid Crystal Display (LCD). The compact
housing allows transducer and power supply connection through a variety
of electrical terminations.
14. 14 | TEESING
SERTO
submicron technologies product range
serto connection system: unique!
teesing facts
Serto connectors mount radially onto the tube, making the connection easy, time
saving and without any damage to the tube itself. It is a leak tight, flat-flace, metal
to metal connection without o-rings or washers.
Apart from easy assembly, the connections are extremely reliable, as some
connectors can take up to 250 bar of internal pressure.
SERTO
company profile
Since the beginning of 1952, Teesing has been the exclusive distri-
butor for Serto products in the Netherlands. Serto is an unparalleled
Swiss brand that uses high performance, patented technology to
supply an extensive range of couplings, valves, tubing and complete
assemblies to fit the industry’s needs.
The semiconductor industry has specific requirements regarding
cleanliness and compact size. Serto uses a cleanroom in order to
comply to the highest standards of cleanliness.
15. submicron technologies | 15
SERTO
submicron technologies product range
serto
connectors
Serto stands for a unique modular system. The union can be fitted or
released radially thus eliminating the need to displace or even bend
tubing runs. When the nut is tightened down, the clamping ring is
deformed and constricts lightly around the tube without producing a
notch. In the area of the constriction and at the “clamping ring/base
part” joint, the deformation forces produce high specific surface-area
pressure contacts which guarantees a firm hold of the tube and tight
metallic sealing.
Serto will make it possible to connect HP tubing to plastic tubing or
hoses, even flexible hoses are connected leak free by using an
internal support sleeve.
The unique clamping connectors from Serto in stainless steel, PVDF
and PA are commonly used worldwide in the semiconductor market.
16. 16 | TEESING
RECTUS
submicron technologies product range
Rectus
company profile
Rectus is one of the largest German brands in the field of quick
connectors. Apart from a wide range of standard couplings,
Rectus also provides tailor-made solutions.
rectus
quick connectors
Rectus has world’s widest range of quick connectors and has
developed specific versions for use in high purity conditions.
Specifically for the semiconductor industry Teesing and Rectus
have developed dedicated quick connectors for use in a
cleanroom environment.
One example is the flat-faced KL series which makes it pos-
sible to connect or disconnect without any droplets. Also the
ergonomic grip allows easy use with cleanroom gloves.
These connectors are also available without locking sleeve, so
multi couplers can be configurated in block/ plate assemblies
allowing fast connection of multiple connectors at once which
avoids switching mistakes.
For use in clean environments it’s extremely important to have
a minimum release of particles. Therefore Teesing developed
together with Rectus a new clean sleeve design with full trace-
ability. By using a special lasermark process, each product can
be marked with a batch number with a minimum chance on
particle release.
RECTUS
CONNECTORSare used by one of theworld’s largestmanufacturersof lithographysystems
17. submicron technologies | 17
Celerity
submicron technologies product range
celerity
company profile
Celerity’s broad selection of pressure transducers, pressure gauges and
related instruments provides best-in-class monitoring of ultra-high-purity
bulk gases, specialty gases and liquefied process gases.
Celerity
Pressure Gauges
Celerity’s stainless steel pressure gauges are designed and developed
for the demanding high-purity applications of the semiconductor industry.
Welded in oxygen-free chambers to meet rigid cleanliness and safety
guidelines, the gauges include pressure switches and transmitters and
come in a variety of pressure ranges and process connections.
18. 18 | TEESING
Rotarex
submicron technologies product range
Rotarex is a well known manufacturer of valves, fittings and
regulators for High Purity (HP) and Ultra High Purity (UHP)
applications. Based in the heart of Europe’s technical crescent,
Luxembourg, Rotarex is one of the best in technical engineering
and precision manufacturing worldwide.
Since 1922, Rotarex assures technical quality, safety and
reliability for gas pressured systems. During the years, many
brands such as Selfa, Gazel and Sagana have become a part of
the Rotarex Group.
19. submicron technologies | 19
Rotarex
submicron technologies product range
Rotarex SELFA
Valves & Regulators
All Selfa products are manufactured to meet the highest
standards and are assembled in a cleanroom. Avoiding
particles starts already with the design which minimizes the
number of parts in gas wetted areas which makes Selfa
valves, fittings and regulators ideal for semiconductor
applications.
Metal diaphragms and bellows technologies assure a perfect
tightness and high life span even when used for highly
corrosive and reactive gases.
Selfa can count on a large range of standard products but
customization is also a possibility.
Selfa range is composed of 3 main product types:
• Valves:
Diaphragm and bellows valves, ranging from small 4mm
passage all the way to large 100mm, manual or pneumatic
actuation, or a combination in V-blocks. Selfa also offers
cryogenic valves for liquefied gases.
• Regulators:
Special design for lowest particle generation.
• Fittings:
Cylinder connectors for all types of gases and for all
connection standards
20. 20 | TEESING
Rotarex gazel
submicron technologies product range
Rotarex GAZEL
Face-seal fittings
Gazel fittings are the UHP fittings (VCR-type) range of the
Rotarex Group. Manufactured to the highest standards.
Gazel fittings are cleaned, mounted and packed in clean-
room conditions according to UHP specifications. Electro
polishing ensures a perfect surface finish.
Gazel has 5 ranges of fittings:
• Metal gasket face seal fittings
• Space saver fittings
• High flow fittings
• Micro fittings
• Weld fittings
Gazel fittings are compatible with the industry leading face
seal fittings. Gazel has a large range of standard fittings but
also custom solutions are possible.
21. teesing DEDICATED products
submicron technologies product range
TEESING product range
introduction
Over the years, Teesing has build on its technical experience
to become an expert in engineering and producing products
and assemblies to suit the requirements of its customers.
As Teesing aims to be a total supplier for the semiconductor
market, various products have been engineered and produced
to compliment the product range.
TEESING
PFA Valves AND Fittings
Teesing PFA flare fittings are well suited for any corrosive or
high/purity application. These durable fittings are manufac-
tured in a class 10.000 cleanroom facility from virgin PFA, the
cleaned and double/packed to ensure ultimate cleanliness
prior to installation.
Teesing PFA diaphragm valve have a low maintenance bonnet
with an economically designed handwheel and an integral
optical position indicator. All medium wetted parts are made
of PFA (body) and PTFE (diaphragm). All Diaphragm valves are
assembled, tested and packaged under class 100 cleanroom
conditions
TEESING
SPECIAL TUBING
Teesing delivers pre-bent PU tubing for ultraclean applica-
tions. The PU tubing has excellent bending properties with
very little deformation even after long-term stress conditions.
This tubing stays flexible also in low temperatures and is
abrasion resistant. Ask for our special Tubing Brochure!
22. 22 | TEESING
teesing DEDICATED products
submicron technologies product range
TEESING
DIAPHRAGM PUMPS
The Teesing micro diaphragm liquid pumps are based on the
principle of the oscillating displacement pump which is
remarkably simple in design. Micro design and maximum
performance resulting from built-in technology are the
outstanding characterics of the products. We also deliver mo-
dified twin headed pumps with special reinforced diaphragms
for higher flow rates, better suction height and increased
lifetime.
TEESING
LIQUID RING PUMPS
Liquid ring vacuum pumps are single-stage displacement
pumps of uncomplicated and robust construction. These
pumps are non-polluting due to nearly isothermal compres-
sion, oil-free (no lubrication in the working chamber) and able
to handle nearly all gases and vapours and small quantities
of entrained liquid. The pumps are easy to maintain and
stand for a reliable operation, low noise and nearly free from
vibration.
find the
complete range
of products on
www.teesing.com
23. submicron technologies | 23
Teesing DEDICATED products
submicron technologies product range
TEESING
BALL VALVES
The wide range of High Purity ball valves offered by Teesing
are available from DN 15 - DN 300. The end connections are
available in butt weld, tubing and triclamp connections. All ex-
tend weld ends are suitable for orbital welding in place (CF3M/
DIN 1.4409). The ball valves can be delivered in a true or full
port edition with a manual or automated actuation.
TEESING
ASSEMbLIES
Teesing offers a high quality components and sub assemblies
such as: piping, valves, regulators, tubing, manifolds, assem-
blies, and systems are supplied to semiconductor toolmakers
and meet the stringent demands of the semiconductor indus-
try. Double packed and produced under cleanroom conditions.
24. TEESING B.V.
Verrijn Stuartlaan 40
2288 EL Rijswijk
The Netherlands
Tel +31 70 413 07 00
Fax +31 70 413 07 30
info@teesing.com
www.teesing.com
CHINA OFFICE
Hong Kong Macau Center
Suite 418
4Th Floor, Office Tower
2 Chao Yang Men Bei Da Jie
100028 Beijing, China
Tel +86 10 659 590 74
Fax +86 10 650 142 48
teesingchina@teesing.com
www.teesing.com.cn
USA OFFICE
10 Millpond Drive Unit 7
Lafayette, NJ 07848
United States of America
Tel +1 973 383 0691
Fax +1 973 383 4672
teesingusa@teesing.com
www.teesing.com
TAIWAN OFFICE
4F.-15, No.36, Taiyuan St.
Zhubei City
Hsinchu County 302
Taiwan
Tel +886 3 560 05 60
Fax +886 3 560 05 60
teesingtaiwan@teesing.com
www.teesing.tw
Aspro TIS (Beijing) Co. Ltd.
Xi Tuo Cun, Ma Chi Kou Zhen
Chang Ping District
Beijing 102206
China
Tel +86 10 807 221 65
info@aspro-tis.com.cn
www.aspro-tis.com.cn
www.teesing.com
Contact our sales engineers to receive detailed product information.
We recommend to visit our website for regularly updated product information.