Improvement of the Shell Element Implemented in FEASTSMT
EIPBN_Particle Entrapment
1. Local and Global Response of EUV Reticles due to Entrapped Particles during Exposure Chucking Computational Mechanics Center (UW-CMC) University of Wisconsin, Madison, WI Preetish Sinha, Vasu Ramaswamy, Andrew R. Mikkelson and Roxann L. Engelstad
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7. Spherical Particle – Details of the Model * Measured via nanoindentation testing Axisymmetric FE Model F Model Parameters 12.0 12.0 9.0 8.5 Yield Strength Y (GPa) 100 Chuck 100 Particle 250 chrome* Backside Layer 66.3 ULE ® * Substrate Elastic Modulus E (GPa) Material Component 1.0 µm to 10.0 µm Diameter, d p Particle Range Parameter Component Substrate Chuck Particle Chrome Backside Layer d p Axis of symmetry
8. Elastic Response Elastic Plastic Response Chuck / Particle Properties E = 100 GPa Y = 12 GPa Chuck / Particle Properties E = 100 GPa Y = 12 GPa ULE ® E = 66.3 GPa Y = 8.5 GPa Chrome E = 250 GPa Y = 9.0 GPa Spherical Particle - Response Effect of Nonlinear Behavior – 1.0 μm Spherical Particle ULE ® E = 66.3 GPa Y = 8.5 GPa ULE ® E = 66.3 GPa Y = 8.5 GPa
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10. Cylindrical Particle - Analytical Model The total amount a particle is deformed and embedded ( w total ) into the reticle and chuck is given by: w total = w c + w s + w p Since H was the original height of the particle, the effective height of the particle ( h ) is then given by: h = H – ( w c + w s + w p ) w c = max embedded into the chuck w s = max embedded into the reticle substrate w p = max deformation of the particle Substrate Chuck h
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12. Elastic Response Elastic Plastic Response Chuck / Particle Properties E = 100 GPa Y = 12 GPa Chuck / Particle Properties E = 100 GPa Y = 12 GPa chrome E = 250 GPa Y = 9.0 GPa ULE ® E = 66.3 GPa Y = 8.5 GPa ULE ® E = 66.3 GPa Y = 8.5 GPa Cylindrical Particle - Response Effect of Nonlinear Behavior – 1.0 μm Cylindrical Particle
13. Comparison of FE Simulation Results 1.0 μm Cylindrical and Spherical Particles
14. Comparison of FE Simulation Results 5.0 μm Cylindrical and Spherical Particles
15. Comparison of FE Simulation Results 10.0 μm Cylindrical and Spherical Particles
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17. Analytical Global Coupling Model for an Elastic Particle Micro Model Equations: p = uniform clamping pressure E = reticle elastic modulus = reticle Poisson’s ratio t = reticle thickness H = initial particle height h = final particle height = amount of particle / spring deformation F = particle / spring deformation force k = particle / spring stiffness a = gap radius R = cylindrical particle radius E p = particle elastic modulus Macro Model Equations: Rigid Chuck p Cylindrical, Elastic Particle (stiffness k)
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Notas del editor
Thank you ---- for that kind introduction. And I would like to thank Hans and the organizing committee for the opportunity to speak here today. It is indeed an honor. I would like to recognize my co-authors from the UW-CMC --- And acknowledge support from ----
Thank you ---- for that kind introduction. And I would like to thank Hans and the organizing committee for the opportunity to speak here today. It is indeed an honor. I would like to recognize my co-authors from the UW-CMC --- And acknowledge support from ----
Thank you ---- for that kind introduction. And I would like to thank Hans and the organizing committee for the opportunity to speak here today. It is indeed an honor. I would like to recognize my co-authors from the UW-CMC --- And acknowledge support from ----
elastic model – deformation inelastic (plastic) - crushing
Comment: w c + ws + wp are calculated in the following slides
Skip 1 Read #2 Skip 3 First systemic analysis looking at and compare the chucking response of comparable coulomb and jr chucks And finally, we are using the fe models to identify the range of flatness variations that can be accommodated with e chucking.
![Introduction and Problem Description ,[object Object],[object Object],[object Object],Front and Backside Flatness: ~ 30 - 100 nm p-v flatness Low Order Thickness Variation (LOTV): ~ 30 - 100 nm p-v flatness Freestanding Substrate Requirements (within Quality Area) Quality Area: 142 mm x 142 mm](data:image/gif;base64,R0lGODlhAQABAIAAAAAAAP///yH5BAEAAAAALAAAAAABAAEAAAIBRAA7)