5. CLEANROOM BASICS What is a Clean room? A clean environment designed to reduce the contamination of processes and materials. This is accomplished by removing or reducing contamination sources.
55. ① Do not allow dusts to flow into the ducting system 1.airtight ducting system 2.install HEPA filters at all supply side 3.positive pressure beyond HEPA ③ Remove immediately generated particles 1.provide localized exhaust near sources of contaminants 2.make indoor air distribution as laminar as possible ② Minimize dust generation in the room 1.wearing of clean suits 2.workflow/layout to reduce unnecessary movements 3.use of finishing materials that generate few particles 4.No bringing of useless things inside ④ Do not pile-up dusts or scatter these particles 1.eliminate unnecessary horizontal surfaces 2.Use round ends instead of angles 3.do not install unnecessary equipment that vibrates ① Do the cleaning(people and things) at the anteroom before bringing inside the cleanroom 1.installation of air shower at anteroon APPLICATION OF 4 PRINCIPLES
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59. 10~15Pa・ provide sticky mat place mat near entry points to prevent dust under the shoes from entering
70. Daily Cleaning Regular Cleaning ・once a day/after each shift ・wet type cleaning(using water) ・sticky mat changing ・dry type cleaning by vacuum cleaner ・cleaning done during operation ・once per week/per month or semiannually ・done by service cleaners ・cleaning including moving the equipment ・done during shutdown CLEANING THE Cleanroom
73. 4 Principles of Maintaining Cleanliness 1. Prevent entry of dust. Minimize sources that generate dust. Remove the dust generated in the room before they spread. 4. Do not accumulate and scatter the dust.
CleanroomA room in which the air supply, air distribution, filtration of air supply, materials of construction, and operating procedures are regulated to control airborne particle concentrations so that appropriate air cleanliness levels, as defined by FED-STD-209 (see section 2), can be met. clean zoneA defined space in which the concentration of air-borne particles is controlled to a specified airborne particulate cleanliness class, as defined by FED-STD-209.IES INSTITUTE OF ENVIRONMENTAL SCIENCES940 East Northwest HighwayMount Prospect, Illinois 60056Telephone 708.255.1561 Facsimile 708.255・1 699